JPH0737316Y2 - 基板搬送用ロボットチャックの洗浄装置 - Google Patents

基板搬送用ロボットチャックの洗浄装置

Info

Publication number
JPH0737316Y2
JPH0737316Y2 JP40631490U JP40631490U JPH0737316Y2 JP H0737316 Y2 JPH0737316 Y2 JP H0737316Y2 JP 40631490 U JP40631490 U JP 40631490U JP 40631490 U JP40631490 U JP 40631490U JP H0737316 Y2 JPH0737316 Y2 JP H0737316Y2
Authority
JP
Japan
Prior art keywords
cleaning
robot
chuck
robot chuck
pure water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP40631490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0492644U (enExample
Inventor
敏朗 廣江
賢司 杉本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd, Dainippon Screen Manufacturing Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP40631490U priority Critical patent/JPH0737316Y2/ja
Publication of JPH0492644U publication Critical patent/JPH0492644U/ja
Application granted granted Critical
Publication of JPH0737316Y2 publication Critical patent/JPH0737316Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP40631490U 1990-12-28 1990-12-28 基板搬送用ロボットチャックの洗浄装置 Expired - Lifetime JPH0737316Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40631490U JPH0737316Y2 (ja) 1990-12-28 1990-12-28 基板搬送用ロボットチャックの洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40631490U JPH0737316Y2 (ja) 1990-12-28 1990-12-28 基板搬送用ロボットチャックの洗浄装置

Publications (2)

Publication Number Publication Date
JPH0492644U JPH0492644U (enExample) 1992-08-12
JPH0737316Y2 true JPH0737316Y2 (ja) 1995-08-23

Family

ID=31883591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40631490U Expired - Lifetime JPH0737316Y2 (ja) 1990-12-28 1990-12-28 基板搬送用ロボットチャックの洗浄装置

Country Status (1)

Country Link
JP (1) JPH0737316Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6473353B2 (ja) * 2015-03-10 2019-02-20 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置及びそのチャック洗浄方法

Also Published As

Publication number Publication date
JPH0492644U (enExample) 1992-08-12

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