JPH0737316Y2 - 基板搬送用ロボットチャックの洗浄装置 - Google Patents
基板搬送用ロボットチャックの洗浄装置Info
- Publication number
- JPH0737316Y2 JPH0737316Y2 JP40631490U JP40631490U JPH0737316Y2 JP H0737316 Y2 JPH0737316 Y2 JP H0737316Y2 JP 40631490 U JP40631490 U JP 40631490U JP 40631490 U JP40631490 U JP 40631490U JP H0737316 Y2 JPH0737316 Y2 JP H0737316Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- robot
- chuck
- robot chuck
- pure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 title claims description 102
- 239000000758 substrate Substances 0.000 title claims description 63
- 239000007788 liquid Substances 0.000 claims description 58
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 42
- 238000005728 strengthening Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 230000002708 enhancing effect Effects 0.000 claims description 2
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 19
- 238000007654 immersion Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 1
- SWXQKHHHCFXQJF-UHFFFAOYSA-N azane;hydrogen peroxide Chemical group [NH4+].[O-]O SWXQKHHHCFXQJF-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40631490U JPH0737316Y2 (ja) | 1990-12-28 | 1990-12-28 | 基板搬送用ロボットチャックの洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40631490U JPH0737316Y2 (ja) | 1990-12-28 | 1990-12-28 | 基板搬送用ロボットチャックの洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0492644U JPH0492644U (enExample) | 1992-08-12 |
| JPH0737316Y2 true JPH0737316Y2 (ja) | 1995-08-23 |
Family
ID=31883591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40631490U Expired - Lifetime JPH0737316Y2 (ja) | 1990-12-28 | 1990-12-28 | 基板搬送用ロボットチャックの洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737316Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6473353B2 (ja) * | 2015-03-10 | 2019-02-20 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置及びそのチャック洗浄方法 |
-
1990
- 1990-12-28 JP JP40631490U patent/JPH0737316Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0492644U (enExample) | 1992-08-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |