JPH0737309Y2 - 拡散炉 - Google Patents

拡散炉

Info

Publication number
JPH0737309Y2
JPH0737309Y2 JP1985005643U JP564385U JPH0737309Y2 JP H0737309 Y2 JPH0737309 Y2 JP H0737309Y2 JP 1985005643 U JP1985005643 U JP 1985005643U JP 564385 U JP564385 U JP 564385U JP H0737309 Y2 JPH0737309 Y2 JP H0737309Y2
Authority
JP
Japan
Prior art keywords
diffusion
extension
furnace
cooling gas
reaction tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985005643U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61121737U (US20020128544A1-20020912-P00008.png
Inventor
謙二 辻
Original Assignee
ロ−ム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロ−ム株式会社 filed Critical ロ−ム株式会社
Priority to JP1985005643U priority Critical patent/JPH0737309Y2/ja
Publication of JPS61121737U publication Critical patent/JPS61121737U/ja
Application granted granted Critical
Publication of JPH0737309Y2 publication Critical patent/JPH0737309Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985005643U 1985-01-18 1985-01-18 拡散炉 Expired - Lifetime JPH0737309Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985005643U JPH0737309Y2 (ja) 1985-01-18 1985-01-18 拡散炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985005643U JPH0737309Y2 (ja) 1985-01-18 1985-01-18 拡散炉

Publications (2)

Publication Number Publication Date
JPS61121737U JPS61121737U (US20020128544A1-20020912-P00008.png) 1986-07-31
JPH0737309Y2 true JPH0737309Y2 (ja) 1995-08-23

Family

ID=30482335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985005643U Expired - Lifetime JPH0737309Y2 (ja) 1985-01-18 1985-01-18 拡散炉

Country Status (1)

Country Link
JP (1) JPH0737309Y2 (US20020128544A1-20020912-P00008.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH088220B2 (ja) * 1988-09-05 1996-01-29 株式会社日立製作所 半導体ウェハの熱処理装置、及び熱処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106119A (en) * 1980-12-24 1982-07-01 Hitachi Ltd Heating furnace

Also Published As

Publication number Publication date
JPS61121737U (US20020128544A1-20020912-P00008.png) 1986-07-31

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