JPH073652Y2 - 高繰り返しエキシマレ−ザ装置 - Google Patents

高繰り返しエキシマレ−ザ装置

Info

Publication number
JPH073652Y2
JPH073652Y2 JP7301487U JP7301487U JPH073652Y2 JP H073652 Y2 JPH073652 Y2 JP H073652Y2 JP 7301487 U JP7301487 U JP 7301487U JP 7301487 U JP7301487 U JP 7301487U JP H073652 Y2 JPH073652 Y2 JP H073652Y2
Authority
JP
Japan
Prior art keywords
laser
cylindrical
discharge
excimer laser
laser device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7301487U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63182562U (enrdf_load_stackoverflow
Inventor
紳二 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP7301487U priority Critical patent/JPH073652Y2/ja
Publication of JPS63182562U publication Critical patent/JPS63182562U/ja
Application granted granted Critical
Publication of JPH073652Y2 publication Critical patent/JPH073652Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Lasers (AREA)
JP7301487U 1987-05-18 1987-05-18 高繰り返しエキシマレ−ザ装置 Expired - Lifetime JPH073652Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7301487U JPH073652Y2 (ja) 1987-05-18 1987-05-18 高繰り返しエキシマレ−ザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7301487U JPH073652Y2 (ja) 1987-05-18 1987-05-18 高繰り返しエキシマレ−ザ装置

Publications (2)

Publication Number Publication Date
JPS63182562U JPS63182562U (enrdf_load_stackoverflow) 1988-11-24
JPH073652Y2 true JPH073652Y2 (ja) 1995-01-30

Family

ID=30916973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7301487U Expired - Lifetime JPH073652Y2 (ja) 1987-05-18 1987-05-18 高繰り返しエキシマレ−ザ装置

Country Status (1)

Country Link
JP (1) JPH073652Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63182562U (enrdf_load_stackoverflow) 1988-11-24

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