JPH073635Y2 - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPH073635Y2
JPH073635Y2 JP320989U JP320989U JPH073635Y2 JP H073635 Y2 JPH073635 Y2 JP H073635Y2 JP 320989 U JP320989 U JP 320989U JP 320989 U JP320989 U JP 320989U JP H073635 Y2 JPH073635 Y2 JP H073635Y2
Authority
JP
Japan
Prior art keywords
reaction
vapor phase
phase growth
wafer
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP320989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0295235U (cg-RX-API-DMAC7.html
Inventor
均 米村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP320989U priority Critical patent/JPH073635Y2/ja
Publication of JPH0295235U publication Critical patent/JPH0295235U/ja
Application granted granted Critical
Publication of JPH073635Y2 publication Critical patent/JPH073635Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP320989U 1989-01-13 1989-01-13 気相成長装置 Expired - Lifetime JPH073635Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP320989U JPH073635Y2 (ja) 1989-01-13 1989-01-13 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP320989U JPH073635Y2 (ja) 1989-01-13 1989-01-13 気相成長装置

Publications (2)

Publication Number Publication Date
JPH0295235U JPH0295235U (cg-RX-API-DMAC7.html) 1990-07-30
JPH073635Y2 true JPH073635Y2 (ja) 1995-01-30

Family

ID=31204639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP320989U Expired - Lifetime JPH073635Y2 (ja) 1989-01-13 1989-01-13 気相成長装置

Country Status (1)

Country Link
JP (1) JPH073635Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0295235U (cg-RX-API-DMAC7.html) 1990-07-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term