JPH0735394Y2 - ウエハ位置決め装置 - Google Patents
ウエハ位置決め装置Info
- Publication number
- JPH0735394Y2 JPH0735394Y2 JP1988104253U JP10425388U JPH0735394Y2 JP H0735394 Y2 JPH0735394 Y2 JP H0735394Y2 JP 1988104253 U JP1988104253 U JP 1988104253U JP 10425388 U JP10425388 U JP 10425388U JP H0735394 Y2 JPH0735394 Y2 JP H0735394Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- shaft
- clamper
- outer shaft
- double
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003028 elevating effect Effects 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 126
- 238000005468 ion implantation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 239000003818 cinder Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988104253U JPH0735394Y2 (ja) | 1988-08-05 | 1988-08-05 | ウエハ位置決め装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988104253U JPH0735394Y2 (ja) | 1988-08-05 | 1988-08-05 | ウエハ位置決め装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0226248U JPH0226248U (enExample) | 1990-02-21 |
| JPH0735394Y2 true JPH0735394Y2 (ja) | 1995-08-09 |
Family
ID=31335808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988104253U Expired - Lifetime JPH0735394Y2 (ja) | 1988-08-05 | 1988-08-05 | ウエハ位置決め装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735394Y2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8749053B2 (en) | 2009-06-23 | 2014-06-10 | Intevac, Inc. | Plasma grid implant system for use in solar cell fabrications |
| EP2777069A4 (en) | 2011-11-08 | 2015-01-14 | Intevac Inc | SUBSTRATE PROCESSING SYSTEM AND METHOD |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61279148A (ja) * | 1985-06-04 | 1986-12-09 | Mitsubishi Electric Corp | 半導体ウエ−ハの位置決め装置 |
-
1988
- 1988-08-05 JP JP1988104253U patent/JPH0735394Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0226248U (enExample) | 1990-02-21 |
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