JPH0735293Y2 - イオン源 - Google Patents

イオン源

Info

Publication number
JPH0735293Y2
JPH0735293Y2 JP1988116754U JP11675488U JPH0735293Y2 JP H0735293 Y2 JPH0735293 Y2 JP H0735293Y2 JP 1988116754 U JP1988116754 U JP 1988116754U JP 11675488 U JP11675488 U JP 11675488U JP H0735293 Y2 JPH0735293 Y2 JP H0735293Y2
Authority
JP
Japan
Prior art keywords
cooling
chamber
ion source
ring
water channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1988116754U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237441U (OSRAM
Inventor
正博 谷井
靖典 安東
英輔 村坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1988116754U priority Critical patent/JPH0735293Y2/ja
Publication of JPH0237441U publication Critical patent/JPH0237441U/ja
Application granted granted Critical
Publication of JPH0735293Y2 publication Critical patent/JPH0735293Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1988116754U 1988-09-05 1988-09-05 イオン源 Expired - Fee Related JPH0735293Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988116754U JPH0735293Y2 (ja) 1988-09-05 1988-09-05 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988116754U JPH0735293Y2 (ja) 1988-09-05 1988-09-05 イオン源

Publications (2)

Publication Number Publication Date
JPH0237441U JPH0237441U (OSRAM) 1990-03-12
JPH0735293Y2 true JPH0735293Y2 (ja) 1995-08-09

Family

ID=31359580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988116754U Expired - Fee Related JPH0735293Y2 (ja) 1988-09-05 1988-09-05 イオン源

Country Status (1)

Country Link
JP (1) JPH0735293Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4667553B2 (ja) * 1999-12-01 2011-04-13 株式会社Sen イオン源

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2548830B1 (fr) * 1983-07-04 1986-02-21 Centre Nat Rech Scient Source d'ions negatifs

Also Published As

Publication number Publication date
JPH0237441U (OSRAM) 1990-03-12

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Legal Events

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