JPH0237441U - - Google Patents

Info

Publication number
JPH0237441U
JPH0237441U JP11675488U JP11675488U JPH0237441U JP H0237441 U JPH0237441 U JP H0237441U JP 11675488 U JP11675488 U JP 11675488U JP 11675488 U JP11675488 U JP 11675488U JP H0237441 U JPH0237441 U JP H0237441U
Authority
JP
Japan
Prior art keywords
cooling holes
ring
cooling
waterway
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11675488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0735293Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988116754U priority Critical patent/JPH0735293Y2/ja
Publication of JPH0237441U publication Critical patent/JPH0237441U/ja
Application granted granted Critical
Publication of JPH0735293Y2 publication Critical patent/JPH0735293Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1988116754U 1988-09-05 1988-09-05 イオン源 Expired - Fee Related JPH0735293Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988116754U JPH0735293Y2 (ja) 1988-09-05 1988-09-05 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988116754U JPH0735293Y2 (ja) 1988-09-05 1988-09-05 イオン源

Publications (2)

Publication Number Publication Date
JPH0237441U true JPH0237441U (OSRAM) 1990-03-12
JPH0735293Y2 JPH0735293Y2 (ja) 1995-08-09

Family

ID=31359580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988116754U Expired - Fee Related JPH0735293Y2 (ja) 1988-09-05 1988-09-05 イオン源

Country Status (1)

Country Link
JP (1) JPH0735293Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001160368A (ja) * 1999-12-01 2001-06-12 Sumitomo Eaton Noba Kk イオン源

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037700A (ja) * 1983-07-04 1985-02-27 セントル・ナシヨナル・ド・ラ・ルシエルシエ・サイエンテイフイク 陰イオン源

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037700A (ja) * 1983-07-04 1985-02-27 セントル・ナシヨナル・ド・ラ・ルシエルシエ・サイエンテイフイク 陰イオン源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001160368A (ja) * 1999-12-01 2001-06-12 Sumitomo Eaton Noba Kk イオン源

Also Published As

Publication number Publication date
JPH0735293Y2 (ja) 1995-08-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees