JPH0237441U - - Google Patents
Info
- Publication number
- JPH0237441U JPH0237441U JP11675488U JP11675488U JPH0237441U JP H0237441 U JPH0237441 U JP H0237441U JP 11675488 U JP11675488 U JP 11675488U JP 11675488 U JP11675488 U JP 11675488U JP H0237441 U JPH0237441 U JP H0237441U
- Authority
- JP
- Japan
- Prior art keywords
- cooling holes
- ring
- cooling
- waterway
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 9
- 239000000498 cooling water Substances 0.000 claims description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の実施例にかかるイオン源の一
部横断平面図。第２図は同じものの縦断面図。第
３図は冷却穴の流れを示す透視斜視図。第４図は
従来例の構造を示す平面図。第５図は他の例を表
わすための冷却水流れ透視斜視図。
１……イオン源チヤンバ、２……フタ、３……
上板、４……リング、５……栓、６……冷却パイ
プ、７……冷却穴、８……第１リング水路、９…
…第２リング水路、１０……排水口、１１……マ
グネツト、１２……切欠き、１３……取付けボル
ト穴、１４……切込み、１５……冷却パイプ、２
１……内突条、２２……外突条、２３……上端面
、２４……内面、２５……横穴、２６……フラン
ジ。
FIG. 1 is a partially cross-sectional plan view of an ion source according to an embodiment of the present invention. Figure 2 is a longitudinal sectional view of the same thing. FIG. 3 is a transparent perspective view showing the flow of the cooling holes. FIG. 4 is a plan view showing the structure of a conventional example. FIG. 5 is a perspective view showing the flow of cooling water to show another example. 1...Ion source chamber, 2...Lid, 3...
Upper plate, 4...Ring, 5...Plug, 6...Cooling pipe, 7...Cooling hole, 8...First ring waterway, 9...
...Second ring waterway, 10...Drain port, 11...Magnet, 12...Notch, 13...Mounting bolt hole, 14...Notch, 15...Cooling pipe, 2
1... Inner protruding ridge, 22... External protruding ridge, 23... Upper end surface, 24... Inner surface, 25... Lateral hole, 26... Flange.
Claims (1)
くように穿設される複数本の冷却穴７，７，…と
、全ての冷却穴７，７，…の一端に連通するよう
設けられた環状の第１リング水路８と、全ての冷
却穴７，７，…の他端に連通するよう設けられた
環状の第２リング水路９とよりなり、冷却水が第
１リング水路８、冷却穴７，７，…第２リング水
路９の中を通るようにした事を特徴とするイオン
源。 A plurality of cooling holes 7, 7, ... are bored through the wall of the cylindrical ion source chamber 1 in the axial direction, and a plurality of cooling holes 7, 7, ... are provided so as to communicate with one end of all the cooling holes 7, 7, .... Consisting of an annular first ring waterway 8 and an annular second ring waterway 9 provided to communicate with the other ends of all the cooling holes 7, 7,..., the cooling water flows through the first ring waterway 8 and the cooling holes. 7, 7, . . . An ion source characterized by passing through the second ring water channel 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988116754U JPH0735293Y2 (en) | 1988-09-05 | 1988-09-05 | Ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988116754U JPH0735293Y2 (en) | 1988-09-05 | 1988-09-05 | Ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0237441U true JPH0237441U (en) | 1990-03-12 |
| JPH0735293Y2 JPH0735293Y2 (en) | 1995-08-09 |
Family
ID=31359580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988116754U Expired - Fee Related JPH0735293Y2 (en) | 1988-09-05 | 1988-09-05 | Ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735293Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001160368A (en) * | 1999-12-01 | 2001-06-12 | Sumitomo Eaton Noba Kk | Ion source |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6037700A (en) * | 1983-07-04 | 1985-02-27 | セントル・ナシヨナル・ド・ラ・ルシエルシエ・サイエンテイフイク | Anionic ion source |
-
1988
- 1988-09-05 JP JP1988116754U patent/JPH0735293Y2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6037700A (en) * | 1983-07-04 | 1985-02-27 | セントル・ナシヨナル・ド・ラ・ルシエルシエ・サイエンテイフイク | Anionic ion source |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001160368A (en) * | 1999-12-01 | 2001-06-12 | Sumitomo Eaton Noba Kk | Ion source |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0735293Y2 (en) | 1995-08-09 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |