JPH0734929Y2 - 真空装置用のゲート装置 - Google Patents

真空装置用のゲート装置

Info

Publication number
JPH0734929Y2
JPH0734929Y2 JP12340790U JP12340790U JPH0734929Y2 JP H0734929 Y2 JPH0734929 Y2 JP H0734929Y2 JP 12340790 U JP12340790 U JP 12340790U JP 12340790 U JP12340790 U JP 12340790U JP H0734929 Y2 JPH0734929 Y2 JP H0734929Y2
Authority
JP
Japan
Prior art keywords
valve
gate
gate valve
back plate
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12340790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0481963U (enrdf_load_stackoverflow
Inventor
賢児 前野
庸宏 土師
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shinmaywa Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinmaywa Industries Ltd filed Critical Shinmaywa Industries Ltd
Priority to JP12340790U priority Critical patent/JPH0734929Y2/ja
Publication of JPH0481963U publication Critical patent/JPH0481963U/ja
Application granted granted Critical
Publication of JPH0734929Y2 publication Critical patent/JPH0734929Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12340790U 1990-11-22 1990-11-22 真空装置用のゲート装置 Expired - Lifetime JPH0734929Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12340790U JPH0734929Y2 (ja) 1990-11-22 1990-11-22 真空装置用のゲート装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12340790U JPH0734929Y2 (ja) 1990-11-22 1990-11-22 真空装置用のゲート装置

Publications (2)

Publication Number Publication Date
JPH0481963U JPH0481963U (enrdf_load_stackoverflow) 1992-07-16
JPH0734929Y2 true JPH0734929Y2 (ja) 1995-08-09

Family

ID=31871117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12340790U Expired - Lifetime JPH0734929Y2 (ja) 1990-11-22 1990-11-22 真空装置用のゲート装置

Country Status (1)

Country Link
JP (1) JPH0734929Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0481963U (enrdf_load_stackoverflow) 1992-07-16

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