JPH0733857Y2 - クリーンルーム等用ファンフィルタユニット - Google Patents

クリーンルーム等用ファンフィルタユニット

Info

Publication number
JPH0733857Y2
JPH0733857Y2 JP1990040275U JP4027590U JPH0733857Y2 JP H0733857 Y2 JPH0733857 Y2 JP H0733857Y2 JP 1990040275 U JP1990040275 U JP 1990040275U JP 4027590 U JP4027590 U JP 4027590U JP H0733857 Y2 JPH0733857 Y2 JP H0733857Y2
Authority
JP
Japan
Prior art keywords
fan
filter
filter unit
clean room
intake port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990040275U
Other languages
English (en)
Japanese (ja)
Other versions
JPH04916U (enrdf_load_html_response
Inventor
正夫 田中
恭一 秋山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kogyosha Co Ltd
Original Assignee
Asahi Kogyosha Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kogyosha Co Ltd filed Critical Asahi Kogyosha Co Ltd
Priority to JP1990040275U priority Critical patent/JPH0733857Y2/ja
Publication of JPH04916U publication Critical patent/JPH04916U/ja
Application granted granted Critical
Publication of JPH0733857Y2 publication Critical patent/JPH0733857Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1990040275U 1990-04-17 1990-04-17 クリーンルーム等用ファンフィルタユニット Expired - Lifetime JPH0733857Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990040275U JPH0733857Y2 (ja) 1990-04-17 1990-04-17 クリーンルーム等用ファンフィルタユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990040275U JPH0733857Y2 (ja) 1990-04-17 1990-04-17 クリーンルーム等用ファンフィルタユニット

Publications (2)

Publication Number Publication Date
JPH04916U JPH04916U (enrdf_load_html_response) 1992-01-07
JPH0733857Y2 true JPH0733857Y2 (ja) 1995-08-02

Family

ID=31549929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990040275U Expired - Lifetime JPH0733857Y2 (ja) 1990-04-17 1990-04-17 クリーンルーム等用ファンフィルタユニット

Country Status (1)

Country Link
JP (1) JPH0733857Y2 (enrdf_load_html_response)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60132614A (ja) * 1983-12-19 1985-07-15 Nitta Kk 空気清浄装置
JPS62182540A (ja) * 1986-02-04 1987-08-10 Nitta Kk 空気清浄装置

Also Published As

Publication number Publication date
JPH04916U (enrdf_load_html_response) 1992-01-07

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