JPH0733857Y2 - Fan filter unit for clean room etc. - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a fan filter unit for a clean room or the like for filtering air supplied to a clean room, a clean chamber, a clean booth or the like.

[Conventional technology]

Conventional clean room fan filter unit X '
As shown in FIG. 4, an intake port 123 is provided at an upper end opening of a cylindrical wall 121 which is mounted and fixed in a filter box mounting square opening 111 formed in a ceiling wall 110 which constitutes an outer shell of a clean room or the like. A filter 130, which is usually referred to as a HEPA filter, is attached to a lower portion of a filter box 120 formed by forming a top wall 122 having the following, and a fan 140 with a motor 141 is attached to a lower surface of the top wall 122. It will be.

Then, in order to mount the filter 130 on the filter box 120, an inward packing pressing collar 124 is caulked in the middle of the inner surface of the cylindrical wall 121 of the filter box 120.
25, and at the same time, the claw metal fittings 126 facing inward are formed at intervals near the lower end edge of the inner surface of the cylindrical wall 121 in the circumferential direction,
, Are provided on the lower end surface of the filter frame 131 constituting the filter 130 in the circumferential direction, and claw fittings 132, ... Cooperating with the claw fittings 126, ... The filter 127 is inserted into the filter box 120 from below, and the packing 127 is interposed between the upper end surface of the filter frame 131 and the packing holding brim 124, and the claw metal fittings 132 provided on the filter frame 131 are provided on the filter box 120. The claw metal fittings 126, ... And the clasps 133 ,.

[Problems to be solved by the device]

However, in the conventional clean room fan filter unit X ′, as is clear from the above,
To assemble the fan 140 and the filter 130, the filter box 120, the claw metal fittings 126, ..., 132, ..., and the tightening tool 133 are required, which requires time and effort for mounting the filter 130 and caulking 125, resulting in high cost. There was a flaw.

The present invention has been made in view of the above circumstances,
It is an object of the present invention to provide a fan filter unit for a clean room or the like, which has a small number of leak points, high reliability, a small number of parts, a laborious installation process, and a very low cost.

[Means for Solving the Problems]

In order to achieve the above-mentioned object, a fan filter unit for a clean room or the like according to the present invention is provided with a fan mounting plate having an intake port at its top opening, and a fan formed in an outer shell of the clean room or the like. An ultrafine particle filter material layer is formed by using the tubular frame body as a filter frame in the lower portion inside the tubular frame body that is mounted and fixed in the filter unit mounting opening, and the fan built-in portion formed on the upper portion of the layer is formed. A fan for sucking air from the intake port is incorporated.

[Action]

When the fan filter unit according to the present invention is mounted and fixed to the outer casing of a clean room or the like, when the fan is started, air is sent into the tubular frame body through the intake port, and the air is an ultrafine particle filter layer. It is filtered in and sent to a room such as a clean room.

In some fan filter units, an ultrafine particle filter material layer is formed in the lower portion of the tubular frame body using the tubular frame body itself as a filter frame, and a fan is incorporated above the ultrafine particle filter material layer. No need for filter box, packing holding brim that requires caulking, packing joint with the packing holding brim, claw metal fittings, and tightening tool, which are required in the fan filter unit of the above, and it is possible to omit the filter mounting work. .

〔Example〕

 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

In FIGS. 1 and 2, X is a fan filter unit for a clean room or the like according to the present invention, and the fan filter unit X is a cylindrical frame main body 20 that also functions as a filter frame and an ultrafine particle filtering material. The layer 30 and the fan 40 are mainly used.

The tubular frame body 20 that also serves as a filter frame is a fan filter unit mounting square opening formed in the ceiling wall 10 that forms an outer body of a clean room, a clean chamber, a clean booth, or the like.
It is formed by integrally forming flanges 22 and 23, which are outwardly extended to both open edges of an aluminum cylindrical wall 21 which can be attached and fixed to 11, and whose tips are bent in a direction facing each other. Therefore, it can be easily manufactured with an aluminum extruded material having a C-shaped cross section. The frame main body 20 is sized so that the ultrafine particle filtering material layer 30 can be installed inside the frame main body 20 and the fan 40 can be incorporated thereabove.

24 is packed with the collar 22 of the tubular frame body 20.
The fan mounting plate is attached and fixed to the brim 22 with a tightening tool 26 with 25 interposed, and an intake port 27 is formed at the center of the fan mounting plate 24.

Further, the brim 23 is fixed to the ceiling wall 10 with a tightening tool 13 with a packing 12 interposed between the brim 23 and the peripheral portion of the fan filter unit mounting square opening 11.

The ultrafine particle filtration material layer 30 is formed by folding a nonwoven fabric ultrafine particle filtration material made of glass wool into a corrugated shape, and the ultrafine particle filtration material layer 30 is formed into the tubular frame body 20.
A filter is formed by disposing the fan built-in portion 28 above the ultrafine particle filtration material layer 30 in the tubular frame body 20 while the tubular frame body 20 serves as a filter frame. Form.

The fan 40 is incorporated in a fan built-in portion 28 formed in the tubular frame body 20 as described later, and the fan 40 has an intake port 41 aligned with the intake port 27 of the fan mounting plate 24. A motor 44 is provided in a casing 43 having a discharge port 42.
Is provided with an impeller 45 that can be driven by, and the casing 43 is attached to the fan mounting plate 24 with screw screws 46, ... With the intake port 41 being overlapped with the inside of the intake port 27 of the fan mounting plate 24. It is attached and fixed at.

The tubular frame body 20 and the fan mounting plate 24 may be integrally formed instead of mounting and fixing the separate fan mounting plate 24 on one open end of the tubular frame body 20. Of course.

An ultrafine particle filtration material layer 30 is formed in the lower portion of the tubular frame body 20.
The fan 40 in the upper part of the frame main body 20.
As shown in FIG. 2 or FIG. 3, the fan filter unit X for a clean room or the like according to the present invention is constructed by incorporating it.

The fan filter unit X configured as described above is
At the time of its use, as shown in FIG. 1, it is airtightly attached and fixed by a tightening tool 13 and a packing 12 to a ceiling wall 10 constituting an outer shell of a clean room or the like.

Next, in the state shown in FIG. 1, when the motor 44 is activated to drive the impeller 45, air is sent into the tubular frame body 20 via the intake port 27, the intake port 41, and the exhaust port 42. The air is filtered by the ultrafine particle filtering material layer 30 to have a thickness of, for example, 0.3 μm.
99.97% or more of the above dust is removed by filtration and sent to a clean room or other room.

As is clear from comparison between the fan filter unit X according to the present invention shown in FIG. 1 and the conventional fan filter unit X ′ shown in FIG. The filter box 120, the packing holding collar 124, the caulking 125, the packing 127, which were required in the unit X ′,
The claw metal fittings 126, ..., The claw metal fittings 132, ..., and the tightening tools 133, ... are unnecessary, and the time and labor for mounting the filter can be omitted, and the number of locations where caulking is performed is reduced.

As described above, since the number of portions to be caulked is reduced, the number of leak points is reduced and the reliability is improved.
Further, the number of parts is small and the labor for mounting can be omitted, and the cost is reduced.

[Effect of device]

As is clear from the above description, according to the present invention,
It is possible to provide a fan filter unit for clean rooms, etc., which has few leak points, is highly reliable, has a small number of parts, and can be installed without labor, and is inexpensive.

[Brief description of drawings]

1 and 2 of the drawings show an embodiment of the present invention, in which FIG. 1 is a longitudinal sectional view showing a usage state, FIG. 2 is a plan view, and FIG. 3 is a plan view of a modified example. FIG. 4 is a vertical cross-sectional view showing a usage state of a conventional fan filter unit. X: Fan filter unit 10: Ceiling wall 11: Square opening for fan filter unit mounting 12: Packing, 13: Fastener 20: Cylindrical frame body, 21: Cylindrical wall 22,23: Tsuba, 24: Fan mounting plate 25 : Packing, 26: Fastener 27: Intake port, 28: Fan built-in part 30: Ultrafine particle filter layer, 40: Fan 41: Inlet port, 42: Exhaust port 43: Casing, 44: Motor 45: Impeller, 46 : Screw screw

Claims (1)

[Scope of utility model registration request] 1. A tubular frame main body having a fan mounting plate provided with an intake port at the top opening, and being mounted and fixed to a fan filter unit mounting opening formed in an outer shell of a clean room or the like. An ultrafine particle filtering material layer is formed in the lower part of the cylindrical frame main body using the filter frame as a filter frame, and a fan-incorporating part formed in the upper part of the ultrafine-particle filtering material layer incorporates a fan for sucking air from the intake port. A fan filter unit for clean rooms, etc.