JPH073288Y2 - 光学式変位検出器 - Google Patents

光学式変位検出器

Info

Publication number
JPH073288Y2
JPH073288Y2 JP9111289U JP9111289U JPH073288Y2 JP H073288 Y2 JPH073288 Y2 JP H073288Y2 JP 9111289 U JP9111289 U JP 9111289U JP 9111289 U JP9111289 U JP 9111289U JP H073288 Y2 JPH073288 Y2 JP H073288Y2
Authority
JP
Japan
Prior art keywords
grating
light
line width
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light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP9111289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0330819U (enrdf_load_stackoverflow
Inventor
宗次 市川
英樹 岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP9111289U priority Critical patent/JPH073288Y2/ja
Publication of JPH0330819U publication Critical patent/JPH0330819U/ja
Application granted granted Critical
Publication of JPH073288Y2 publication Critical patent/JPH073288Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP9111289U 1989-08-02 1989-08-02 光学式変位検出器 Expired - Fee Related JPH073288Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9111289U JPH073288Y2 (ja) 1989-08-02 1989-08-02 光学式変位検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9111289U JPH073288Y2 (ja) 1989-08-02 1989-08-02 光学式変位検出器

Publications (2)

Publication Number Publication Date
JPH0330819U JPH0330819U (enrdf_load_stackoverflow) 1991-03-26
JPH073288Y2 true JPH073288Y2 (ja) 1995-01-30

Family

ID=31640612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9111289U Expired - Fee Related JPH073288Y2 (ja) 1989-08-02 1989-08-02 光学式変位検出器

Country Status (1)

Country Link
JP (1) JPH073288Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5862672B2 (ja) * 2011-08-23 2016-02-16 株式会社ニコン エンコーダ装置、及び装置

Also Published As

Publication number Publication date
JPH0330819U (enrdf_load_stackoverflow) 1991-03-26

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