JPH07315924A - Piezoelectric porcelain composition - Google Patents
Piezoelectric porcelain compositionInfo
- Publication number
- JPH07315924A JPH07315924A JP6108718A JP10871894A JPH07315924A JP H07315924 A JPH07315924 A JP H07315924A JP 6108718 A JP6108718 A JP 6108718A JP 10871894 A JP10871894 A JP 10871894A JP H07315924 A JPH07315924 A JP H07315924A
- Authority
- JP
- Japan
- Prior art keywords
- electromechanical coupling
- piezoelectric ceramic
- mechanical quality
- general formula
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、特にセラミックフィル
タ、セラミック発振子、圧電ブザーなどに使用される圧
電磁器組成物に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric ceramic composition used particularly for ceramic filters, ceramic oscillators, piezoelectric buzzers and the like.
【0002】[0002]
【従来の技術】近年、映像信号や音声信号などの通信情
報量の大容量化にともない、伝搬周波数が広帯域化して
いる。また、機器の小型化にともない、機器を構成する
個々の部品の小型化が要求されている。圧電磁器はこれ
らの機器において、セラミックフィルタ、セラミック発
振子などの素子として組み込まれている。この小型化の
要求を満たすため、電気機械結合係数、比誘電率、機械
的品質係数などが高い圧電磁器組成物が必要とされてい
る。2. Description of the Related Art In recent years, as the amount of communication information such as video signals and audio signals has increased, the propagation frequency has become wider. Further, along with the miniaturization of equipment, miniaturization of individual parts constituting the equipment is required. Piezoelectric ceramics are incorporated in these devices as elements such as ceramic filters and ceramic oscillators. In order to meet the demand for miniaturization, a piezoelectric ceramic composition having a high electromechanical coupling coefficient, relative permittivity, mechanical quality coefficient and the like is required.
【0003】従来より、Pb(Ti,Zr)O3 二成分
系、PbTix Zry (Mg1/3 Nb2/3 )z O3 三成
分系,さらにPbTiA ZrB (Zn1/3 Nb2/3 )C
(Sn1/3 Nb2/3 )D O3 四成分系組成などよりなる
圧電磁器組成物が用途に応じて提案されてきた(例えば
特開昭47−14697号公報)。Conventionally, Pb (Ti, Zr) O 3 binary system, PbTi x Zr y (Mg 1/3 Nb 2/3 ) z O 3 ternary system, and further PbTi A Zr B (Zn 1/3 Nb). 2/3 ) C
A piezoelectric ceramic composition composed of a (Sn 1/3 Nb 2/3 ) D O 3 quaternary composition has been proposed according to the intended use (for example, JP-A-47-14697).
【0004】[0004]
【発明が解決しようとする課題】しかしながら、上記の
従来の圧電磁器組成物は、十分に高い機械的品質係数が
得られなかった。一方、電気機械結合係数については、
高い値を得るためにTi/Zr比をモルフォトロピック
相境界に近づけると、誘電特性、圧電特性の温度依存性
が大きくなり、セラミックフィルタやセラミック発振子
などに用いた場合、機器の温度変化にともない機能低下
を招くという問題点を有していた。However, the above-mentioned conventional piezoelectric ceramic composition could not obtain a sufficiently high mechanical quality factor. On the other hand, regarding the electromechanical coupling coefficient,
When the Ti / Zr ratio is brought close to the morphotropic phase boundary in order to obtain a high value, the temperature dependence of the dielectric properties and piezoelectric properties becomes large, and when it is used for ceramic filters, ceramic oscillators, etc. It has a problem that it causes deterioration in function.
【0005】しかも、従来の圧電磁器組成物は、成型品
の焼結温度が高いため、焼成時にPbOが蒸発し、特性
がばらつくという問題もあった。本発明は、上記従来の
問題を解決するものであり、成型品の焼結温度が低く、
所望の高い電気機械結合係数と機械的品質係数を持った
圧電磁器組成物を提供することを目的とする。Moreover, the conventional piezoelectric ceramic composition has a problem that PbO is vaporized during firing and the characteristics vary because the sintering temperature of the molded product is high. The present invention is to solve the above conventional problems, the sintering temperature of the molded product is low,
It is an object of the present invention to provide a piezoelectric ceramic composition having a desired high electromechanical coupling coefficient and mechanical quality coefficient.
【0006】[0006]
【課題を解決するための手段】この目的を達成するた
め、本願の第1発明は、一般式PbTiA ZrB (Zn
1/3 Nb2/3 )C (Sn1/3 Nb2/3 )D O3 (ただ
し、0.25≦A≦0.625,0.20≦B≦0.6
25,0<C≦0.50,0<D≦0.25,A+B+
C+D=1)で表される基本組成に対し、副成分として
酸化コバルトを全量に対して、Co3 O4 換算で0.0
3〜3重量%添加含有させてなるという構成を備えたも
のである。[Means for Solving the Problems]
Therefore, the first invention of the present application is based on the general formula PbTi.AZrB(Zn
1/3Nb2/3)C(Sn1/3Nb2/3)DO3(However
0.25 ≦ A ≦ 0.625, 0.20 ≦ B ≦ 0.6
25,0 <C ≦ 0.50, 0 <D ≦ 0.25, A + B +
C + D = 1) as a subcomponent to the basic composition
Cobalt oxide to the total amount, Co3OFourConverted to 0.0
It also has a structure in which 3 to 3% by weight is added and contained.
Of.
【0007】次に第2発明は、一般式PbTiA ZrB
(Zn1/3 Nb2/3 )C (Sn1/3Nb2/3 )D O
3 (ただし、0.25≦A≦0.625,0.20≦B
≦0.625,0<C≦0.50,0<D≦0.25,
A+B+C+D=1)で表される基本組成に対し、副成
分として酸化ニッケルを全量に対して、NiO換算で
0.05〜7重量%添加含有させてなるという構成を備
えたものである。The second invention is the general formula PbTi A Zr B
(Zn 1/3 Nb 2/3 ) C (Sn 1/3 Nb 2/3 ) D O
3 (However, 0.25 ≦ A ≦ 0.625, 0.20 ≦ B
≦ 0.625,0 <C ≦ 0.50, 0 <D ≦ 0.25,
A + B + C + D = 1) is added to the basic composition represented by A + B + C + D = 1) in an amount of 0.05 to 7% by weight in terms of NiO with respect to the total amount of nickel oxide.
【0008】次に第3発明は、一般式PbTiA ZrB
(Zn1/3 Nb2/3 )C (Sn1/3Nb2/3 )D O
3 (ただし、0.25≦A≦0.625,0.20≦B
≦0.625,0<C≦0.50,0<D≦0.25,
A+B+C+D=1)で表される基本組成に対し、副成
分として全量に対して、Co3 O4 換算で0.03〜3
重量%の酸化コバルトとNiO換算で0.05〜7重量
%の酸化ニッケルとの二種を同時に添加含有させてなる
という構成を備えたものである。The third invention is the general formula PbTi A Zr B
(Zn 1/3 Nb 2/3 ) C (Sn 1/3 Nb 2/3 ) D O
3 (However, 0.25 ≦ A ≦ 0.625, 0.20 ≦ B
≦ 0.625,0 <C ≦ 0.50, 0 <D ≦ 0.25,
A + B + C + D = 1) with respect to the basic composition expressed as Co 3 O 4 in 0.03 to 3 with respect to the total amount as an auxiliary component.
It has a constitution in which two kinds of cobalt oxide of 0.05% by weight and nickel oxide of 0.05 to 7% by weight in terms of NiO are added and contained at the same time.
【0009】前記第1〜3発明の構成においては、それ
ぞれ必要に応じて、Pb原子の15atm.%以下を、S
r,CaおよびBaから選ばれる少なくとも一種の元素
で置換することができる。In the structures of the above-mentioned first to third inventions, if necessary, 15 atm.
It can be substituted with at least one element selected from r, Ca and Ba.
【0010】[0010]
【作用】前記第1発明の構成によれば、一般式の基本組
成に対し、副成分として酸化コバルトを添加含有させる
ことにより、焼結温度を低下させると共に、機械的品質
係数を向上させ、副成分の添加量を調整することにより
機械的品質係数を調整することができる。According to the structure of the first invention, by adding cobalt oxide as an accessory component to the basic composition of the general formula, the sintering temperature can be lowered and the mechanical quality factor can be improved. The mechanical quality factor can be adjusted by adjusting the addition amount of the component.
【0011】次に前記第2発明の構成によれば、一般式
の基本組成に対し、副成分として酸化ニッケルを添加含
有させることにより、電気機械結合係数を向上させ、副
成分の添加量を調整することにより電気機械結合係数を
調整することができる。Next, according to the structure of the second invention, by adding nickel oxide as an accessory component to the basic composition of the general formula, the electromechanical coupling coefficient is improved and the additive amount of the accessory component is adjusted. By doing so, the electromechanical coupling coefficient can be adjusted.
【0012】次に前記第3発明の構成によれば、一般式
の基本組成に対し、副成分として酸化コバルトと酸化ニ
ッケルとの2種を同時に添加含有させることにより、焼
結温度を低下させると共に、機械的品質係数および電気
機械結合係数を向上させ、2種の副成分の添加量をそれ
ぞれ調整することにより機械的品質係数と電気機械結合
係数との両方を調整することができる。Next, according to the structure of the third invention, the sintering temperature is lowered by simultaneously adding two kinds of cobalt oxide and nickel oxide as auxiliary components to the basic composition of the general formula. It is possible to adjust both the mechanical quality factor and the electromechanical coupling factor by improving the mechanical quality factor and the electromechanical coupling factor and adjusting the amounts of addition of the two subcomponents, respectively.
【0013】前記第1〜3発明の好ましい構成である、
それぞれ必要に応じてPb原子の15atm.%以下をS
r,CaおよびBaから選ばれる少なくとも一種の元素
で置換した組成においても、同様に焼結温度を低下させ
て機械的品質係数を向上及び/または電気機械結合係数
を向上させることができる。It is a preferable structure of the first to third inventions,
If necessary, each of the Pb atoms may contain 15 atm.% Or less of S.
Also in the composition in which at least one element selected from r, Ca and Ba is substituted, the sintering temperature can be similarly lowered to improve the mechanical quality factor and / or the electromechanical coupling factor.
【0014】[0014]
【実施例】以下、本発明の一実施例について説明する。
出発原料には化学的に高純度であるPbO,SrC
O3 ,TiO2 ,ZrO2 ,ZnO,Nb2 O5 ,Sn
O2 ,Co3 O4 ,およびNiOを用いた。原料の純度
補正を行ったのち、(表1)、(表2)、および(表
3)に示した種々の組成になるように秤量した。これら
の粉体を、ポリエチレン製のボールミルに入れ、安定化
ジルコニアボールと純粋を加え、16時間混合した。混
合後、スラリーを乾燥させ、アルミナ製の坩堝にいれ、
850℃で2時間仮焼した。仮焼粉体を、前述したボー
ルミルで16時間粉砕した。粉砕後、スラリーを乾燥さ
せ、原料粉体とした。この原料粉体にバインダとしてポ
リビニルアルコールの5重量%水溶液を7重量%加えて
混合した後、32メッシュのふるいに通して造粒し、7
5MPaで直径13mm、厚み約0.5mmの円板状に
プレス成型した。成型体を600℃で2時間加熱してバ
インダを焼却した後、マグネシア製の磁器容器に入れ、
蓋をし、1100〜1350℃で2時間保持して焼成し
た。焼成体の両面にAu蒸着電極を付与し、100〜1
60℃の絶縁油中で3〜4kV/mmの直流電場を30
分間印加して分極処理を施した。分極処理した試料を通
常の測定方法により、電気機械結合係数および機械的品
質係数を求めた。EXAMPLES An example of the present invention will be described below.
As a starting material, chemically pure PbO and SrC are used.
O 3 , TiO 2 , ZrO 2 , ZnO, Nb 2 O 5 , Sn
O 2 , Co 3 O 4 , and NiO were used. After correcting the purity of the raw materials, the raw materials were weighed so as to have various compositions shown in (Table 1), (Table 2), and (Table 3). These powders were placed in a polyethylene ball mill, stabilized zirconia balls and pure were added and mixed for 16 hours. After mixing, dry the slurry, put in an alumina crucible,
It was calcined at 850 ° C. for 2 hours. The calcined powder was pulverized with the above-mentioned ball mill for 16 hours. After crushing, the slurry was dried to obtain a raw material powder. To this raw material powder, 7% by weight of a 5% by weight aqueous solution of polyvinyl alcohol was added as a binder and mixed, and then the mixture was passed through a 32 mesh sieve and granulated.
It was press-molded into a disc shape having a diameter of 13 mm and a thickness of about 0.5 mm at 5 MPa. After heating the molded body at 600 ° C for 2 hours to incinerate the binder, put it in a magnesia porcelain container,
It was capped and held at 1100 to 1350 ° C. for 2 hours for firing. Apply Au deposition electrodes on both sides of the fired body, and
A DC electric field of 3-4 kV / mm is applied in insulating oil at 60 ° C for 30 minutes.
A polarization treatment was performed by applying for a minute. The electromechanical coupling coefficient and the mechanical quality coefficient of the polarized sample were determined by a usual measuring method.
【0015】実施例による圧電磁気組成物の特性と従来
の圧電磁気組成物の特性を(表1)、(表2)、および
(表3)に示す。The characteristics of the piezoelectric magnetic composition according to the example and the characteristics of the conventional piezoelectric magnetic composition are shown in (Table 1), (Table 2), and (Table 3).
【0016】[0016]
【表1】 [Table 1]
【0017】[0017]
【表2】 [Table 2]
【0018】[0018]
【表3】 [Table 3]
【0019】(表1)から明らかなように、第1発明に
含まれる圧電磁器組成物は比較例に比べ、焼結温度が低
下し、機械的品質係数が高い値を示す。また、(表2)
から明らかなように、第2発明の範囲に含まれる圧電磁
器組成物は比較例に比べ、高い電気機械結合係数を示
す。さらに(表3)から明らかなように、第3発明に含
まれる圧電磁器組成物は比較例に比べ、焼結温度が低下
し、機械的品質係数と電気機械結合係数が高い値を示
す。As is clear from (Table 1), the piezoelectric ceramic composition included in the first invention has a lower sintering temperature and a higher mechanical quality coefficient than the comparative examples. Also (Table 2)
As is clear from the above, the piezoelectric ceramic composition included in the scope of the second invention exhibits a higher electromechanical coupling coefficient than the comparative example. Further, as is clear from (Table 3), the piezoelectric ceramic composition included in the third invention has a lower sintering temperature and higher mechanical quality coefficient and electromechanical coupling coefficient than those of the comparative examples.
【0020】[0020]
【発明の効果】以上のように、本発明の圧電磁器組成物
は、前記一般式の基本組成に対し副成分として、酸化コ
バルトを添加含有させることにより、焼結温度と下げる
と共に、機械的品質係数を高めることができ、その副成
分の添加量を調整することにより機械的品質係数を所望
の値に調整することが可能となる。As described above, the piezoelectric ceramic composition of the present invention contains the cobalt oxide as an auxiliary component in addition to the basic composition of the above general formula, so that the sintering temperature is lowered and the mechanical quality is improved. The coefficient can be increased, and the mechanical quality coefficient can be adjusted to a desired value by adjusting the addition amount of the accessory component.
【0021】また、前記一般式の基本組成に対し副成分
として、酸化ニッケルを添加含有させることにより、電
気機械結合係数を高めることができ、その副成分の添加
量を調整することにより電気機械結合係数を所望の値に
調整することが可能となる。The electromechanical coupling coefficient can be increased by adding nickel oxide as an auxiliary component to the basic composition of the above general formula, and the electromechanical coupling can be achieved by adjusting the addition amount of the auxiliary component. It is possible to adjust the coefficient to a desired value.
【0022】さらに、前記一般式の基本組成に対し副成
分として酸化コバルトと酸化ニッケルの2種を同時に添
加含有させることにより、焼結温度を下げると共に、機
械的品質係数と電気機械結合係数の両方を高めることが
でき、2種の副成分の添加量をそれぞれ調整することに
より機械的品質係数と電気機械結合係数の両方を所望の
値に調整することが可能となる。Furthermore, by simultaneously adding two kinds of cobalt oxide and nickel oxide as subcomponents to the basic composition of the above general formula, the sintering temperature is lowered and both the mechanical quality factor and the electromechanical coupling factor are increased. By adjusting the amounts of the two subcomponents added, it becomes possible to adjust both the mechanical quality factor and the electromechanical coupling factor to desired values.
【0023】電気機械結合係数と機械的品質係数を所望
の値に調整可能であることは、素子の回路設計を容易に
し、圧電素子を使用した部品の小型化に寄与するところ
が大である。さらに、成型品の焼結温度を下げることに
より、PbOの蒸発を抑制することができ、材質の均一
性が著しく増大し、特性のばらつきを抑えることがで
き、量産的規模での焼成を容易にすることができる。The fact that the electromechanical coupling coefficient and the mechanical quality coefficient can be adjusted to desired values facilitates the circuit design of the element and contributes to the miniaturization of parts using the piezoelectric element. Furthermore, by lowering the sintering temperature of the molded product, the evaporation of PbO can be suppressed, the uniformity of the material can be remarkably increased, the variation in the characteristics can be suppressed, and the firing on a mass production scale can be facilitated. can do.
Claims (4)
2/3 )C (Sn1/3 Nb2/3 )D O3 (ただし、0.2
5≦A≦0.625,0.20≦B≦0.625,0<
C≦0.50,0<D≦0.25,A+B+C+D=
1)で表される基本組成に対し、副成分として酸化コバ
ルトを全量に対して、Co3 O4 換算で0.03〜3重
量%添加含有させてなる圧電磁器組成物。1. The general formula PbTi A Zr B (Zn 1/3 Nb
2/3 ) C (Sn 1/3 Nb 2/3 ) D O 3 (however, 0.2
5 ≦ A ≦ 0.625, 0.20 ≦ B ≦ 0.625, 0 <
C ≦ 0.50, 0 <D ≦ 0.25, A + B + C + D =
A piezoelectric ceramic composition containing, as a subcomponent, 0.03 to 3% by weight of Co 3 O 4 added as a subcomponent to the basic composition represented by 1).
2/3 )C (Sn1/3 Nb2/3 )D O3 (ただし、0.2
5≦A≦0.625,0.20≦B≦0.625,0<
C≦0.50,0<D≦0.25,A+B+C+D=
1)で表される基本組成に対し、副成分として酸化ニッ
ケルを全量に対して、NiO換算で0.05〜7重量%
添加含有させてなる圧電磁器組成物。2. The general formula PbTi A Zr B (Zn 1/3 Nb
2/3 ) C (Sn 1/3 Nb 2/3 ) D O 3 (however, 0.2
5 ≦ A ≦ 0.625, 0.20 ≦ B ≦ 0.625, 0 <
C ≦ 0.50, 0 <D ≦ 0.25, A + B + C + D =
0.05 to 7% by weight in terms of NiO, based on the total amount of nickel oxide as a subcomponent with respect to the basic composition represented by 1).
A piezoelectric ceramic composition containing an additive.
2/3 )C (Sn1/3 Nb2/3 )D O3 (ただし、0.2
5≦A≦0.625,0.20≦B≦0.625,0<
C≦0.50,0<D≦0.25,A+B+C+D=
1)で表される基本組成に対し、副成分として全量に対
して、Co3 O4 換算で0.03〜3重量%の酸化コバ
ルトとNiO換算で0.05〜7重量%の酸化ニッケル
との二種を同時に添加含有させてなる圧電磁器組成物。3. The general formula PbTi A Zr B (Zn 1/3 Nb
2/3 ) C (Sn 1/3 Nb 2/3 ) D O 3 (however, 0.2
5 ≦ A ≦ 0.625, 0.20 ≦ B ≦ 0.625, 0 <
C ≦ 0.50, 0 <D ≦ 0.25, A + B + C + D =
With respect to the basic composition represented by 1), 0.03 to 3% by weight of cobalt oxide in terms of Co 3 O 4 and 0.05 to 7% by weight of nickel oxide in terms of NiO are added as auxiliary components. 2. A piezoelectric ceramic composition containing the two types of the above at the same time.
aおよびBaから選ばれる少なくとも一種の元素で置換
した請求項1,2,または3に記載の圧電磁器組成物。4. Sr, C is contained in an amount of 15 atm.% Or less of Pb atom.
The piezoelectric ceramic composition according to claim 1, wherein the piezoelectric ceramic composition is substituted with at least one element selected from a and Ba.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6108718A JPH07315924A (en) | 1994-05-23 | 1994-05-23 | Piezoelectric porcelain composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6108718A JPH07315924A (en) | 1994-05-23 | 1994-05-23 | Piezoelectric porcelain composition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH07315924A true JPH07315924A (en) | 1995-12-05 |
Family
ID=14491816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6108718A Pending JPH07315924A (en) | 1994-05-23 | 1994-05-23 | Piezoelectric porcelain composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07315924A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002053514A1 (en) * | 2000-12-28 | 2002-07-11 | Bosch Automotive Systems Corporation | Ceramic material and piezoelectric element using the same |
WO2002081404A1 (en) * | 2001-03-30 | 2002-10-17 | Tdk Corporation | Piezoelectric porcelain and method for preparation thereof, and piezoelectric element |
JP2004349423A (en) * | 2003-05-21 | 2004-12-09 | Ngk Insulators Ltd | Multilayer piezoelectric/electrostrictive element |
CN114044669A (en) * | 2021-11-13 | 2022-02-15 | 新化嘉恒电子陶瓷有限责任公司 | Electronic ceramic material for sensor and preparation method thereof |
-
1994
- 1994-05-23 JP JP6108718A patent/JPH07315924A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002053514A1 (en) * | 2000-12-28 | 2002-07-11 | Bosch Automotive Systems Corporation | Ceramic material and piezoelectric element using the same |
US7045075B2 (en) | 2000-12-28 | 2006-05-16 | Bosch Automotive Systems Corporation | Ceramic material and piezoelectric element using the same |
WO2002081404A1 (en) * | 2001-03-30 | 2002-10-17 | Tdk Corporation | Piezoelectric porcelain and method for preparation thereof, and piezoelectric element |
US6979410B2 (en) | 2001-03-30 | 2005-12-27 | Tdk Corporation | Piezoelectric ceramic, method of manufacturing the same and piezoelectric device |
JP2004349423A (en) * | 2003-05-21 | 2004-12-09 | Ngk Insulators Ltd | Multilayer piezoelectric/electrostrictive element |
CN114044669A (en) * | 2021-11-13 | 2022-02-15 | 新化嘉恒电子陶瓷有限责任公司 | Electronic ceramic material for sensor and preparation method thereof |
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