JPH0437076A - Piezoelectric porcelain compound - Google Patents
Piezoelectric porcelain compoundInfo
- Publication number
- JPH0437076A JPH0437076A JP2143362A JP14336290A JPH0437076A JP H0437076 A JPH0437076 A JP H0437076A JP 2143362 A JP2143362 A JP 2143362A JP 14336290 A JP14336290 A JP 14336290A JP H0437076 A JPH0437076 A JP H0437076A
- Authority
- JP
- Japan
- Prior art keywords
- composition
- drift
- piezoelectric ceramic
- resonance frequency
- temperature cycling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052573 porcelain Inorganic materials 0.000 title abstract description 7
- 150000001875 compounds Chemical class 0.000 title abstract 2
- 239000000203 mixture Substances 0.000 claims abstract description 24
- 239000000919 ceramic Substances 0.000 claims abstract description 14
- 230000008878 coupling Effects 0.000 abstract description 9
- 238000010168 coupling process Methods 0.000 abstract description 9
- 238000005859 coupling reaction Methods 0.000 abstract description 9
- 230000001351 cycling effect Effects 0.000 abstract description 6
- 229910052758 niobium Inorganic materials 0.000 abstract description 5
- 229910052787 antimony Inorganic materials 0.000 abstract description 4
- 229910052748 manganese Inorganic materials 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 229910052719 titanium Inorganic materials 0.000 abstract description 2
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
- 239000010955 niobium Substances 0.000 description 6
- 239000000843 powder Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 235000010216 calcium carbonate Nutrition 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- LEDMRZGFZIAGGB-UHFFFAOYSA-L strontium carbonate Chemical compound [Sr+2].[O-]C([O-])=O LEDMRZGFZIAGGB-UHFFFAOYSA-L 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、低損失、高減衰量のラダー型フィルタ等に好
適な圧電磁器組成物に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a piezoelectric ceramic composition suitable for low-loss, high-attenuation ladder-type filters and the like.
(従来技術)
近年、映像信号や音声信号など通信情報量の大容量化や
、自動車電話、移動体通信など通信端末の多様化に伴い
、高感度、低損失、高信鎖性のフィルタが求められ、こ
のようなフィルタに適した圧″tvt器組成物の開発が
望まれている。(Prior art) In recent years, with the increase in the amount of communication information such as video signals and audio signals, and the diversification of communication terminals such as car phones and mobile communications, filters with high sensitivity, low loss, and high reliability are required. It is desired to develop a pressure tvt device composition suitable for such a filter.
従来、この種の圧電磁器組成物として、鉛(Pb)、ジ
ルコニウム(Zr)およびチタン(Ti)の複合酸化物
からなるいわゆるPZT系圧電圧電磁器組成物られてお
り、このPZTに対し添加成分として錫(Sn)および
ニオブ(Nb)の酸化物を添加し機械的品質係数(Qm
)を高め共振周波数の温度特性の変化を小さくした組成
物が特公昭54−34920号公報にて提案されている
。Conventionally, as this type of piezoelectric ceramic composition, a so-called PZT-based piezoelectric ceramic composition consisting of a composite oxide of lead (Pb), zirconium (Zr), and titanium (Ti) has been used. oxides of tin (Sn) and niobium (Nb) are added as mechanical quality factor (Qm).
) has been proposed in Japanese Patent Publication No. 54-34920 (1988), which has a composition that increases the temperature characteristics of the resonance frequency and reduces changes in the temperature characteristics of the resonance frequency.
また、上記PZTに対しアンチモン(sb)及び錫(S
n)の酸化物を添加することにより誘電率(εr)、圧
電定数を改善し、電気機械結合係数(Kp)を高めるこ
とが特公昭54−36756号公報にて提案されている
。In addition, antimony (sb) and tin (S
Japanese Patent Publication No. 54-36756 proposes to improve the dielectric constant (εr) and piezoelectric constant and increase the electromechanical coupling coefficient (Kp) by adding oxide n).
(発明が解決しようとする問題点)
しかしながら、特公昭54−34920号の磁器は機械
的品質係数を高めることについて記載されるものの電気
機械結合係数(Kp)については何ら改善されておらず
、特公昭54−36756号の磁器は電気機械的結合係
数(Kp)の改善については言及されるものの機械的品
質係数(Qm)についてはなんら記載されていない。(Problems to be Solved by the Invention) However, although the porcelain disclosed in Japanese Patent Publication No. 54-34920 describes an increase in the mechanical quality factor, there is no improvement in the electromechanical coupling coefficient (Kp), and there is no particular improvement in the electromechanical coupling coefficient (Kp). Although the porcelain of Publication No. 54-36756 mentions improvement in electromechanical coupling coefficient (Kp), there is no mention of mechanical quality coefficient (Qm).
さらに、上記先行技術の磁器は実用上重要な特性である
温度変化に対する共振周波数の変化が大きいという問題
があった。これにより例えば環境変化の激しい車両搭載
用通信装置などのフィルタとして用いた場合、設定した
送受信周波数が車内の温度変化により変動し安定した送
受信ができなくなるという問題があった。Furthermore, the porcelain of the prior art has a problem in that the resonant frequency changes significantly with respect to temperature changes, which is a practically important characteristic. As a result, when used as a filter for a vehicle-mounted communication device, etc., which undergoes rapid environmental changes, there is a problem in that the set transmission and reception frequency fluctuates due to changes in the temperature inside the vehicle, making stable transmission and reception impossible.
(発明の目的)
本発明の目的は、上記問題点を解決し、高い機械的品質
係数Qmを有するとともに誘電率εrが大きい低損失で
高減衰量を有するラダー型フィルタ等に適した新規な圧
電磁器組成物を提供するにある。(Objective of the Invention) The object of the present invention is to solve the above-mentioned problems and to provide a novel piezoelectric filter suitable for ladder-type filters, etc., which has a high mechanical quality factor Qm, a large dielectric constant εr, low loss, and high attenuation. To provide porcelain compositions.
(問題点を解決するための手段)
本発明者等は、上記の問題点に対し検討を進めた結果、
PZT系圧電圧電磁器組成物してMn、 SbおよびN
bの酸化物を添加することによって、高い電気機械結合
係数を有するとともに温度サイクル前後の共振周波数の
変動(ドリフト)を小さくすることができることを知見
し本発明に至った。(Means for Solving the Problems) As a result of studying the above problems, the inventors have found that:
PZT-based piezoelectric ceramic composition containing Mn, Sb and N
The inventors have discovered that by adding oxide b, it is possible to have a high electromechanical coupling coefficient and to reduce fluctuations (drift) in the resonance frequency before and after temperature cycling, leading to the present invention.
即ち、本発明の圧電磁器組成物は下記式(1)%式%)
式中、X、 y、 Zは ・・・(1
)0.42≦X≦0.45
0.46≦y≦0.49
0.08≦2≦0.100 x + y + z =
1であり、a、b、cは、a=1に対し
0≦b≦0.45
0.33≦C≦0.50
からなるもので、さらに前記組成物中、Pbの3〜lO
原子%をBa、 CaおよびSrから選ばれる少なくと
も1種で置換することを特徴とするものである。That is, the piezoelectric ceramic composition of the present invention has the following formula (1)% formula %) where X, y, and Z are...(1
)0.42≦X≦0.45 0.46≦y≦0.49 0.08≦2≦0.100 x + y + z =
1, and a, b, and c are 0≦b≦0.45 and 0.33≦C≦0.50 for a=1, and furthermore, in the composition, 3 to 1O of Pb
It is characterized in that atomic % is replaced with at least one selected from Ba, Ca and Sr.
本発明の磁器組成物の各金属元素の割合を上記の範囲に
設定したのはy値が0.42より小さいと電気機械結合
係数が小さく 、0.45より大きいと温度サイクル後
の共振周波数の変動(ドリフト)が大きくなり、y値が
0.46より小さいと共振周波数の温度係数が大きくな
り、y値が0.49より大きいと電気機械結合係数が小
さなる。また、Z値が0.08より小さいと焼結性が悪
く、0.10より大きいとキュリー点(Tc)が低くな
る。The reason for setting the ratio of each metal element in the ceramic composition of the present invention within the above range is that if the y value is smaller than 0.42, the electromechanical coupling coefficient will be small, and if the y value is larger than 0.45, the resonant frequency after temperature cycling will be small. If the fluctuation (drift) becomes large and the y value is smaller than 0.46, the temperature coefficient of the resonant frequency becomes large, and if the y value is larger than 0.49, the electromechanical coupling coefficient becomes small. Moreover, if the Z value is smaller than 0.08, the sinterability will be poor, and if the Z value is larger than 0.10, the Curie point (Tc) will be low.
また、Nb、 SbおよびMnの割合においてNbが1
に対し、sbが0.45より大きいと温度サイクル後の
faミドリフト太き(なる。また、Mnが0.33より
小さいと温度サイクル後のfaミドリフト大きくなる。Also, in the ratio of Nb, Sb and Mn, Nb is 1
On the other hand, if sb is larger than 0.45, the fa-mid drift after temperature cycling becomes thicker. Also, if Mn is smaller than 0.33, the fa-mid drift after temperature cycling becomes large.
なお、第3成分であるNb、 Sn、 Mnの全体の価
数を平均4価にするためにはMn量は0.5となること
によりKnの上限を設定した。In addition, in order to make the overall valence of Nb, Sn, and Mn, which are the third components, to be 4 on average, the upper limit of Kn was set by setting the Mn amount to 0.5.
Nb5Sb、 Mnの添加量の最適値は式(1)で、a
=1に対して0.16≦b≦0.40.0.40≦C≦
0.50である。The optimum value of the addition amount of Nb5Sb, Mn is given by formula (1), and a
=1 for 0.16≦b≦0.40.0.40≦C≦
It is 0.50.
また、本発明によれば、上記の圧電磁器組成物に対して
、Ha、 CaおよびSrの酸化物を添加することによ
り何ら悪影響を及ぼすことなく誘電率εrを高めること
ができる。Ba、 CaおよびSrの酸化物はそれ自体
、前述した式(1)で表されるペロブスカイト型結晶構
造においてAサイトを形成する。Further, according to the present invention, by adding oxides of Ha, Ca, and Sr to the piezoelectric ceramic composition described above, the dielectric constant εr can be increased without any adverse effects. The oxides of Ba, Ca, and Sr themselves form A sites in the perovskite crystal structure represented by the above-mentioned formula (1).
本発明によれば、式(1)においてAサイトであるPb
に対し3〜lO原子%、特に3〜5原子%の割合でPb
の一部を置換する。この置換量が3原子%未満では誘電
率の向上効果が期待できず、IO原子%を越えると耐熱
性の劣化という問題が生じる。According to the present invention, Pb which is the A site in formula (1)
Pb at a rate of 3 to 10 atomic %, especially 3 to 5 atomic % to
Replace part of . If the amount of substitution is less than 3 atomic %, no effect of improving the dielectric constant can be expected, and if it exceeds IO atomic %, the problem of deterioration of heat resistance will occur.
本発明において磁器の製造に際しては、周知の方法が採
用でき、具体的には前述した組成を形成するPbo、T
ie、、ZrO,、Nb、0. 、Sb、D、 、Mn
0t等の構成金属元素の各金属酸化物を原料粉末として
それらの割合が前述の範囲になるように秤量混合する。In the present invention, when manufacturing porcelain, a well-known method can be adopted. Specifically, Pbo, T, which forms the above-mentioned composition,
ie,, ZrO,, Nb, 0. ,Sb,D, ,Mn
Metal oxides of constituent metal elements such as 0t are weighed and mixed as raw material powders so that their proportions fall within the above-mentioned range.
この時、用いる原料は酸化物粉末の他に炭酸化物やしゅ
う酸化物等も使用できる。また、調合に当たっては上記
の各酸化物粉末を組合せて仮焼しPbTf03やPbZ
rO3等の複合酸化物粉末を調整し混合することも当然
可能である。At this time, in addition to oxide powder, carbonates, oxoxides, and the like can be used as raw materials. In addition, when preparing PbTf03 and PbZ, the above oxide powders are combined and calcined.
Of course, it is also possible to adjust and mix composite oxide powder such as rO3.
秤量混合した混合粉末はプレス成形、ドクターブレード
法等により所望の形状に生成した後に焼成する。The weighed and mixed powder is formed into a desired shape by press molding, doctor blade method, etc., and then fired.
焼成は、1200〜1340℃の酸化性雰囲気中で2〜
6時間行う。Firing is performed in an oxidizing atmosphere at 1200 to 1340°C for 2 to 30 minutes.
Do it for 6 hours.
得られる焼結体は相対密度95%以上の高密度体である
ことが波形不良を抑制する上で望ましく、例えば通常の
焼成法により得られた焼結体を熱間静水圧焼成法により
1000〜1200″C2500〜2000気圧下の酸
化性雰囲気中で焼成することにより相対密度97%以上
の焼結体を得ることができる。It is desirable that the obtained sintered body be a high-density body with a relative density of 95% or more in order to suppress defective waveforms. A sintered body having a relative density of 97% or more can be obtained by firing in an oxidizing atmosphere at 1200''C2500 to 2000 atmospheres.
以下、本発明を次の例で説明する。The invention will now be explained with the following examples.
(実施例)
出発原料として、純度99.5%以上、平均粒径が1.
0〜3.Ounの市販のPbO、Ti0z、ZrO,、
NbzO5,5btOs 、MnO,、BaCOx 、
CaCO3およびSrCO3の各粉末を用いて第1表に
示す割合で秤量し、ボールミルにて湿式混合後乾燥して
これを1000°Cで仮焼した。(Example) As a starting material, the purity is 99.5% or more and the average particle size is 1.
0-3. Oun's commercially available PbO, TiOz, ZrO,...
NbzO5,5btOs, MnO, BaCOx,
CaCO3 and SrCO3 powders were weighed in the proportions shown in Table 1, wet mixed in a ball mill, dried, and calcined at 1000°C.
得られた仮焼物をボールミルにて24時間湿式粉砕した
後、有機系粘結剤を添加し、しかる後直径17mm、高
さ1 、5m+aの円柱状に加圧成形した。The obtained calcined product was wet-pulverized for 24 hours in a ball mill, an organic binder was added thereto, and then it was press-molded into a cylindrical shape with a diameter of 17 mm and a height of 1.5 m+a.
得られた成形体を酸化性雰囲気にて1260〜1340
°Cで6時間焼成した。The obtained molded body was heated to 1260 to 1340 in an oxidizing atmosphere.
It was baked at °C for 6 hours.
焼結体を直径15mm、高さ1m+++に研磨加工しそ
の両端面に銀ペーストを焼き付けた。出来上がった素子
を80°Cの絶縁油中に浸漬し、両端面に3KV/mm
の直流電圧を印加して分極処理した。The sintered body was polished to a diameter of 15 mm and a height of 1 m +++, and silver paste was baked on both end faces. The completed element was immersed in insulating oil at 80°C, and a voltage of 3KV/mm was applied to both end faces.
Polarization was performed by applying a DC voltage of .
分極後、24時間経過した素子の特性をインピーアナラ
イザーにより電気機械結合係数(Kp)、機械的品質係
数(Qm)、比誘電率(εr)を測定した。After 24 hours of polarization, the characteristics of the device were measured using an impedance analyzer, including electromechanical coupling coefficient (Kp), mechanical quality factor (Qm), and dielectric constant (εr).
結果は第1表に示した。The results are shown in Table 1.
くJシ(下糸 巨)
ある試料はいずれも優れた特性を示し、Kpが45以上
、Qmが1800以上、Srが1000以上、faミド
リフト±0.3以内が達成され、特にPbの一部をBa
、 Ca、Srで置換することによりSrを高めること
ができた。All of the samples showed excellent properties, with Kp of 45 or more, Qm of 1800 or more, Sr of 1000 or more, and fa-mid drift within ±0.3. Ba
, Ca, and Sr were able to increase the Sr content.
これに対して磁器組成物の各添加量が範囲を逸脱する試
料は、いずれも特性上不十分であり、本発明の目的を達
成することができなかった。On the other hand, samples in which the amounts of each of the ceramic compositions added deviated from the ranges had insufficient characteristics, and the object of the present invention could not be achieved.
(発明の効果)
以上詳述した通り、本発明の圧電磁器組成物はPZTに
対しくNb−5b−Kn)系酸化物を添加することによ
り機械的品質係数を大幅に向上でき、さらにPbの一部
をBa、 CaあるいはSrで置換することにより比誘
電率を向上することができる。これによりフィルタ用と
して特に455KHz帯域の低損失型として高選択性を
付与することができる。(Effects of the Invention) As detailed above, the piezoelectric ceramic composition of the present invention can significantly improve the mechanical quality factor by adding Nb-5b-Kn)-based oxide to PZT, and further improve the mechanical quality factor of the piezoelectric ceramic composition of the present invention. By substituting a portion with Ba, Ca, or Sr, the dielectric constant can be improved. As a result, it is possible to provide high selectivity as a low loss type filter especially in the 455 KHz band.
特許出願人(663)京セラ株式会社Patent applicant (663) Kyocera Corporation
Claims (2)
_z}O_3式中、x、y、zは 0.42≦x≦0.45 0.46≦y≦0.49 0.08≦z≦0.100 x+y+z=1であり、a
、b、cは、a=1に対し 0≦b≦0.45 0.33≦c≦0.50 で表される圧電磁器組成物。(1) The following formula Pb{Zr_xTi_y(Nb_aSb_bMn_c)
_z}O_3 In the formula, x, y, z are 0.42≦x≦0.45 0.46≦y≦0.49 0.08≦z≦0.100 x+y+z=1, and a
, b, and c are piezoelectric ceramic compositions where 0≦b≦0.45 and 0.33≦c≦0.50 for a=1.
aおよびSrから選ばれる少なくとも1種で置換した請
求項1記載の圧電磁器組成物。(2) In the composition, 3 to 10 atomic % of Pb is replaced by Ba, C
The piezoelectric ceramic composition according to claim 1, wherein the piezoelectric ceramic composition is substituted with at least one selected from a and Sr.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2143362A JPH0437076A (en) | 1990-05-31 | 1990-05-31 | Piezoelectric porcelain compound |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2143362A JPH0437076A (en) | 1990-05-31 | 1990-05-31 | Piezoelectric porcelain compound |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0437076A true JPH0437076A (en) | 1992-02-07 |
Family
ID=15337023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2143362A Pending JPH0437076A (en) | 1990-05-31 | 1990-05-31 | Piezoelectric porcelain compound |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0437076A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010067818A (en) * | 2001-03-31 | 2001-07-13 | 이상렬 | Micro transformer and calcinating method of the same |
JP2003063865A (en) * | 2001-08-29 | 2003-03-05 | Kyocera Corp | Piezoelectric porcelain composition and piezoelectric resonator, and laminated piezoelectric element |
KR100431404B1 (en) * | 2001-04-06 | 2004-05-22 | 임기조 | Piezoelectric ceramics composition for high power piezoelectric devices, piezoelectric transformer using the same and driving method of piezoelectric transformer |
US7255941B2 (en) | 2002-10-24 | 2007-08-14 | Seiko Epson Corporation | Ferroelectric film, ferroelectric capacitor, ferroelectric memory, piezoelectric element, semiconductor element, method of manufacturing ferroelectric film, and method of manufacturing ferroelectric capacitor |
JP2011085426A (en) * | 2009-10-13 | 2011-04-28 | Ngk Spark Plug Co Ltd | Nonresonant knocking sensor |
-
1990
- 1990-05-31 JP JP2143362A patent/JPH0437076A/en active Pending
Cited By (6)
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KR20010067818A (en) * | 2001-03-31 | 2001-07-13 | 이상렬 | Micro transformer and calcinating method of the same |
KR100431404B1 (en) * | 2001-04-06 | 2004-05-22 | 임기조 | Piezoelectric ceramics composition for high power piezoelectric devices, piezoelectric transformer using the same and driving method of piezoelectric transformer |
JP2003063865A (en) * | 2001-08-29 | 2003-03-05 | Kyocera Corp | Piezoelectric porcelain composition and piezoelectric resonator, and laminated piezoelectric element |
US7255941B2 (en) | 2002-10-24 | 2007-08-14 | Seiko Epson Corporation | Ferroelectric film, ferroelectric capacitor, ferroelectric memory, piezoelectric element, semiconductor element, method of manufacturing ferroelectric film, and method of manufacturing ferroelectric capacitor |
US7371473B2 (en) | 2002-10-24 | 2008-05-13 | Seiko Epson Corporation | Ferroelectric film, ferroelectric capacitor, ferroelectric memory, piezoelectric element, semiconductor element, method of manufacturing ferroelectric film, and method of manufacturing ferroelectric capacitor |
JP2011085426A (en) * | 2009-10-13 | 2011-04-28 | Ngk Spark Plug Co Ltd | Nonresonant knocking sensor |
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