JPH07297603A - Dielectric filter - Google Patents

Dielectric filter

Info

Publication number
JPH07297603A
JPH07297603A JP10632594A JP10632594A JPH07297603A JP H07297603 A JPH07297603 A JP H07297603A JP 10632594 A JP10632594 A JP 10632594A JP 10632594 A JP10632594 A JP 10632594A JP H07297603 A JPH07297603 A JP H07297603A
Authority
JP
Japan
Prior art keywords
conductor
electrode
filter
electrodes
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10632594A
Other languages
Japanese (ja)
Inventor
Hideo Tanaka
秀雄 田中
Kanemi Sasaki
金見 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GOYO DENSHI KOGYO KK
Kokusai Electric Corp
Original Assignee
GOYO DENSHI KOGYO KK
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GOYO DENSHI KOGYO KK, Kokusai Electric Corp filed Critical GOYO DENSHI KOGYO KK
Priority to JP10632594A priority Critical patent/JPH07297603A/en
Publication of JPH07297603A publication Critical patent/JPH07297603A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To provide a compact and high quality dielectric filter which can improve its working environment together with its cost reduction and also has its characteristic that can be automatically controlled by providing the conductor electrodes to form a trimming capacitor on a ceramic substrate which includes a wiring conductor. CONSTITUTION:The conductor electrodes 7 and 8 are placed opposite to each other on both sides of a ceramic substrate 3. Thus both electrodes 7 and 8 hold the substrate 3 between them and form a trimming capacitor. The electrode 8 is connected to an inner conductor 1a of a resonator 1 via a connection lead wire 9, and the electrode 7 is connected to a frame 2 via a wiring conductor. The trimming capacitor consisting of both electrodes 7 and 8 is provided on each resonator 1. In regard of control of the filter characteristic, a slit 7' is added to the electrode 7 by a laser beam with use of an automatic laser trimming machine while the filter's general characteristic is observed. Thus the area of the electrode 7 is reduced and the electrostatic capacity of the electrode 7 is also reduced to its opposite electrode 8.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、通信機器の高周波機能
部品として用いられる誘電体フィルタに関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric filter used as a high frequency functional component for communication equipment.

【0002】[0002]

【従来の技術】複数の誘電体共振器を用いた誘電体フィ
ルタは、無線通信機の高周波段あるいは中間周波段のバ
ンドパスフィルタや、1本のアンテナを送受信共用する
ためのアンテナ共用器あるいは分波器として多数用いら
れている。図4は従来の誘電体フィルタの斜視図(A)
と部分断面図(B)であり、送信側,受信側にそれぞれ
5個の誘電体共振器1が配置されたアンテナ共用器であ
る。図4(A)において、2は複数の共振器1を固定す
る金属製フレームである。4はアンテナ接続端子、5は
送信側端子、6は受信側端子であり、これらは印刷配線
基板30に固定され、共振器側の面に設けられた配線導
体に接続されフィルタ回路が構成されている。35はフ
ィルタ特性調整用のねじであり、その詳細は図4(B)
に示す部分断面図によって次に説明する。
2. Description of the Related Art A dielectric filter using a plurality of dielectric resonators is a bandpass filter in a high frequency stage or an intermediate frequency stage of a wireless communication device, an antenna duplexer or a duplexer for transmitting / receiving one antenna. Many are used as wave instruments. FIG. 4 is a perspective view of a conventional dielectric filter (A).
FIG. 3B is a partial cross-sectional view (B), showing an antenna duplexer in which five dielectric resonators 1 are arranged on each of the transmitting side and the receiving side. In FIG. 4A, 2 is a metal frame for fixing the plurality of resonators 1. Reference numeral 4 is an antenna connection terminal, 5 is a transmission side terminal, and 6 is a reception side terminal, which are fixed to the printed wiring board 30 and are connected to a wiring conductor provided on the resonator side surface to form a filter circuit. There is. Reference numeral 35 is a screw for adjusting the filter characteristic, the details of which are shown in FIG.
Next, description will be made with reference to the partial sectional view shown in FIG.

【0003】角柱状の誘電体共振器1は、その中心軸に
貫通する穴があり、穴の内面に内導体1aが設けられ、
角柱の外面に外導体1bが設けられ、この内導体1aと
外導体1bは他端面に設けられた導体で短絡されてい
る。印刷配線基板30に対面する端面には導体はなく開
放端1cとなっている。フレーム2に並置された誘電体
共振器1の外導体1bはフレーム2に半田付固定されて
いる。31は印刷配線基板30に設けられた配線導体、
32はこの配線導体31と共振器1の内導体1aとの接
続導線、33は配線導体31に連続した導体であり調整
用ねじ35のガイド用のスルーホール導体、34は調整
用ねじ35のガイド用ボビン、10は固定コンデンサで
ある。個々の誘電体共振器1が調整されて図4(A)の
ように組立てられた後、ねじ35を回転させることによ
り誘電体フィルタとしての総合特性が調整される。
A prismatic dielectric resonator 1 has a hole penetrating its center axis, and an inner conductor 1a is provided on the inner surface of the hole.
The outer conductor 1b is provided on the outer surface of the prism, and the inner conductor 1a and the outer conductor 1b are short-circuited by the conductor provided on the other end surface. There is no conductor on the end face facing the printed wiring board 30, and the open end 1c is formed. The outer conductor 1b of the dielectric resonator 1 arranged side by side on the frame 2 is fixed to the frame 2 by soldering. 31 is a wiring conductor provided on the printed wiring board 30;
Reference numeral 32 is a connecting conductor wire between the wiring conductor 31 and the inner conductor 1a of the resonator 1, 33 is a conductor continuous to the wiring conductor 31 and is a through-hole conductor for guiding the adjusting screw 35, and 34 is a guide for the adjusting screw 35. The bobbin 10 is a fixed capacitor. After the individual dielectric resonators 1 are adjusted and assembled as shown in FIG. 4A, the screw 35 is rotated to adjust the overall characteristics of the dielectric filter.

【0004】図2は図4の誘電体フィルタの部分電気的
等価回路図であり、2つの共振器1の近傍を示してい
る。上述の調整用ねじ35による調整は可変容量11の
容量値を変化させることに相当する。
FIG. 2 is a partial electrical equivalent circuit diagram of the dielectric filter of FIG. 4, showing the vicinity of two resonators 1. The adjustment by the adjusting screw 35 described above corresponds to changing the capacitance value of the variable capacitor 11.

【0005】フィルタの総合特性の調整方法には、上記
の調整用ねじ35による方法の他に、調整用ねじ35を
用いないで、高速ダイヤモンドカッターを用いて誘電体
共振器1の開放端1cの角部を削って共振器1の共振周
波数を変える方法や、外導体1bを削って可変容量11
の容量値を変える方法がある。
As a method for adjusting the overall characteristics of the filter, in addition to the method using the adjusting screw 35 described above, a high-speed diamond cutter is used without using the adjusting screw 35 to adjust the open end 1c of the dielectric resonator 1. A method for changing the resonance frequency of the resonator 1 by cutting the corners, or a method for changing the resonance frequency of the resonator 1
There is a method to change the capacitance value of.

【0006】[0006]

【発明が解決しようとする課題】上記従来構造では、フ
ィルタの総合特性を調整する場合に次のような欠点があ
る。 (1)調整用ねじ35による方法は、フィルタ特性を観
測しながら調整できるが、ねじ35とそのガイド部分の
材料費と加工費用がかかる上に、小形化に対する大きな
制約がある。さらに、特性を調整した後に、ねじのゆる
みによって特性が変化する危険がある。 (2)切削による方法は、切削加工中はフィルタ特性を
観測することができず、カットアンドトライになるため
作業者の経験,熟練が必要となり、調整工数の低減が難
しく、作業者も限られる。しかも、切削工具を頻繁に交
換する必要があり作業性が著しく悪く非量産的である。
さらに、切削加工は多くの粉塵が発生飛散して、製品に
付着して品質を低下させるとともに作業環境が汚染され
る。
The above conventional structure has the following drawbacks when adjusting the overall characteristics of the filter. (1) Although the method using the adjusting screw 35 can be adjusted while observing the filter characteristics, the material cost and the processing cost of the screw 35 and its guide portion are required, and there is a large restriction for downsizing. Furthermore, after adjusting the characteristics, there is a risk that the characteristics will change due to loosening of the screws. (2) In the method using cutting, the filter characteristics cannot be observed during cutting and cutting and trying are required, so the experience and skill of the operator are required, and it is difficult to reduce the adjustment man-hours and the number of operators is limited. . Moreover, the cutting tool needs to be replaced frequently, resulting in poor workability and non-mass production.
Further, in the cutting process, a lot of dust is generated and scattered, and adheres to the product to deteriorate the quality and contaminate the working environment.

【0007】本発明の目的は、上記従来の欠点を回避
し、原価低減,小形化,品質向上,作業環境の改善を行
うことができ、しかも自動調整することのできる誘電体
フィルタを提供することにある。
It is an object of the present invention to provide a dielectric filter which can avoid the above-mentioned conventional drawbacks, reduce the cost, reduce the size, improve the quality, improve the working environment, and can automatically adjust. It is in.

【0008】[0008]

【課題を解決するための手段】本発明の誘電体フィルタ
は、中心軸を貫通する穴を有する角柱状の誘電体の一方
の端面を除いて全側面と前記穴の内面と他方の端面とが
導体で覆われ、前記全側面の導体を外導体とし前記穴の
内面の導体を内導体とし前記一方の端面を開放端とする
複数の誘電体共振器と、該複数の誘電体共振器が、前記
開放端を揃えて並置され前記外導体面が半田付け固定さ
れた金属製のフレームと、該フレームと直角に前記開放
端と相対して所定の間隔をおいて該フレームに固定さ
れ、前記開放端側の面に前記複数の誘電体共振器を電気
的に接続してフィルタ回路を構成する配線導体と該配線
導体に接続されたフィルタの入力端子および出力端子と
が設けられたセラミック基板とを備え、前記セラミック
基板に、前記複数の誘電体共振器のそれぞれの開放端に
対応する位置の該セラミック基板を挟んだ両面にトリミ
ング用のコンデンサを形成する導体電極が設けられ、該
導体電極の内側の導体電極はそれぞれ誘電体共振器の前
記内導体と導線で接続され、外側の導体電極は配線導体
によって前記フレームに接続されたことを特徴とするも
のである。
In the dielectric filter of the present invention, all side surfaces except one end surface of the prismatic dielectric having a hole penetrating the central axis, the inner surface of the hole and the other end surface are A plurality of dielectric resonators covered with a conductor, the conductors on all the side surfaces are outer conductors, the conductor on the inner surface of the hole is an inner conductor, and the one end surface is an open end, and the plurality of dielectric resonators, A metal frame having the open ends juxtaposed side by side and fixed to the outer conductor surface by soldering, and fixed to the frame at a predetermined distance from the open end at a right angle to the frame. A ceramic substrate provided with a wiring conductor that electrically connects the plurality of dielectric resonators to each other to form a filter circuit on an end surface and a filter input terminal and an output terminal connected to the wiring conductor. The ceramic substrate, the plurality of Conductor electrodes for forming trimming capacitors are provided on both sides of the ceramic substrate at positions corresponding to the respective open ends of the electric resonators, and the conductor electrodes inside the conductor electrodes are respectively connected to the dielectric resonators. It is characterized in that it is connected to the inner conductor by a conductive wire, and the outer conductor electrode is connected to the frame by a wiring conductor.

【0009】[0009]

【実施例】図1は本発明の実施例を示す構造図であり、
(A)は斜視図、(B)は部分断面図、(C)は部分正
面図である。図において、誘電体共振器1、金属製のフ
レーム2、アンテナ接続端子4、送信側端子5、受信側
端子6、固定コンデンサ10は、図4に示した従来の構
成と同じである。3は本発明の主要部分をなすセラミッ
ク基板である。7及び8はそのセラミック基板3を挟ん
で両面に相対して設けられた導体電極であり、電極7と
8はセラミック基板3を挟んでトリミング用コンデンサ
を形成している。9は電極8と共振器1の内導体1aと
の接続導線である。電極7は配線導体でフレーム2に接
続されている。
1 is a structural diagram showing an embodiment of the present invention,
(A) is a perspective view, (B) is a partial sectional view, and (C) is a partial front view. In the figure, the dielectric resonator 1, the metal frame 2, the antenna connection terminal 4, the transmission side terminal 5, the reception side terminal 6, and the fixed capacitor 10 are the same as those in the conventional configuration shown in FIG. Reference numeral 3 is a ceramic substrate which is a main part of the present invention. Reference numerals 7 and 8 denote conductor electrodes provided on both sides of the ceramic substrate 3 so as to face each other, and the electrodes 7 and 8 form a trimming capacitor with the ceramic substrate 3 interposed therebetween. Reference numeral 9 is a connecting conductor wire between the electrode 8 and the inner conductor 1a of the resonator 1. The electrode 7 is connected to the frame 2 by a wiring conductor.

【0010】電極7と8によるトリミングコンデンサ
は、各共振器1にそれぞれ設けられている。電極7の斜
線部分がトリミングの対象部分であり、レーザ光によっ
て電極部分を切断し電極面積を小さくする。7’はレー
ザ光による切削部分を示すスリットであり、フィルタの
総合特性を観測しながら自動レーザトリミング機によっ
て切削した部分である。従って、フィルタ特性調整後の
複数の電極7のそれぞれのスリット7’の数や長さは、
一定ではなく、特性に応じて異なり、スリット7’のな
いもの、電極7を切断するもの、スリット7’が複数本
あるものなどまちまちである。
A trimming capacitor formed by the electrodes 7 and 8 is provided in each resonator 1. The shaded portion of the electrode 7 is the portion to be trimmed, and the electrode portion is cut by the laser beam to reduce the electrode area. Reference numeral 7'denotes a slit indicating a portion cut by laser light, which is a portion cut by an automatic laser trimming machine while observing the overall characteristics of the filter. Therefore, the number and length of the slits 7 ′ of the plurality of electrodes 7 after the filter characteristic adjustment are
It is not constant and varies depending on the characteristics, and there are various things such as one without slit 7 ', one that cuts electrode 7, and one that has a plurality of slits 7'.

【0011】本発明による誘電体フィルタの電気的等価
回路は、図2に示した部分等価回路で示され、電極7,
8によるトリミング用コンデンサは可変容量11で表さ
れる。レーザ光によって電極7にスリット7’が入れら
れると対向する電極8との静電容量が小さくなる。この
ことから、本発明によるこのトリミング用コンデンサ
は、従来の調整ねじ35によるトリミング構成に相当す
ることが明らかである。従って、フィルタ特性を観測し
ながらレーザ光によって加工することにより静電容量を
変化させて所望の特性を得るダイナミックトリミングを
行うことができる。しかも、ねじのような機械的可動部
分がないため特性は安定して調整され、調整終了後に特
性が変化する恐れはない。
The electrical equivalent circuit of the dielectric filter according to the present invention is shown by the partial equivalent circuit shown in FIG.
The trimming capacitor 8 is represented by a variable capacitor 11. When the slit 7'is formed in the electrode 7 by the laser light, the capacitance with the opposing electrode 8 becomes small. From this, it is clear that the trimming capacitor according to the present invention corresponds to the trimming structure using the conventional adjusting screw 35. Therefore, it is possible to perform dynamic trimming to obtain desired characteristics by changing the electrostatic capacity by processing with laser light while observing the filter characteristics. Moreover, since there is no mechanically movable part such as a screw, the characteristics are adjusted stably, and there is no possibility that the characteristics will change after the adjustment is completed.

【0012】図3は本発明による誘電体フィルタの自動
調整システムの構成例を示すブロック図である。本発明
を実施した誘電体フィルタ20の特性を特性測定装置2
1で逐次測定してコンピュータ22に入力し、コンピュ
ータ22に予め設定した所望の特性値と比較して調整の
必要性を判断し、特性の差が検出されたときその差が0
になるような制御信号をレーザトリミング装置23に与
えて、誘電体フィルタ20のトリミング用コンデンサの
電極7に照射するレーザ光24を制御して切削加工を行
う。レーザ光24は誘電体フィルタ20の特性に影響を
与えないので、加工量に応じた特性調整を行うことがで
きる。加工時に発生する極微量の粉塵は、レーザトリミ
ング装置23に設けられた集塵機で吸収されるので、製
品に付着したり、周囲に飛散することがなく環境を汚染
する恐れはない。
FIG. 3 is a block diagram showing a configuration example of an automatic adjustment system for a dielectric filter according to the present invention. A characteristic measuring device 2 for measuring the characteristics of the dielectric filter 20 embodying the present invention
1 is sequentially measured and input to the computer 22, and the necessity of adjustment is judged by comparing with a desired characteristic value preset in the computer 22, and when a characteristic difference is detected, the difference is 0.
The laser trimming device 23 is supplied with a control signal that causes the laser light 24 to irradiate the electrode 7 of the trimming capacitor of the dielectric filter 20 to control the cutting process. Since the laser light 24 does not affect the characteristics of the dielectric filter 20, the characteristics can be adjusted according to the processing amount. Since a very small amount of dust generated during processing is absorbed by the dust collector provided in the laser trimming device 23, there is no risk of adhering to the product or scattering to the surroundings and polluting the environment.

【0013】以上の実施例は、誘電体共振器1がそれぞ
れ5個からなる送信側フィルタ,受信側フィルタを実装
したアンテナ共用器を構成する誘電体フィルタについて
説明したが、誘電体共振器1が1個または複数個実装さ
れた誘電体フィルタに本発明を適用すれば同様の効果が
得られることは明らかである。
In the above-mentioned embodiments, the dielectric resonator 1 is composed of five filters, each of which has a transmitter filter and a receiver filter. It is obvious that the same effect can be obtained by applying the present invention to one or a plurality of mounted dielectric filters.

【0014】[0014]

【発明の効果】以上詳細に説明したように、本発明を実
施することにより次の効果が得られる。 (1)機械的可動部分がないため、材料費,加工費が低
減し、小形化されるとともに品質が向上する。 (2)レーザ加工のため粉塵が微量でかつ集塵されるの
で、製品に付着されず、環境汚染も防止することができ
る。 (3)自動トリミングすることができるため、調整作業
の熟練者を必要とせず、量産性が向上する。
As described in detail above, the following effects can be obtained by implementing the present invention. (1) Since there are no mechanically movable parts, the material cost and the processing cost are reduced, the size is reduced, and the quality is improved. (2) A small amount of dust is collected due to the laser processing, so that it is not attached to the product and environmental pollution can be prevented. (3) Since automatic trimming can be performed, a skilled worker for adjustment work is not required and mass productivity is improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例を示す構造図である。FIG. 1 is a structural diagram showing an embodiment of the present invention.

【図2】誘電体フィルタの部分電気的等価回路である。FIG. 2 is a partial electrical equivalent circuit of a dielectric filter.

【図3】本発明の応用例を示す自動トリミングシステム
のブロック図である。
FIG. 3 is a block diagram of an automatic trimming system showing an application example of the present invention.

【図4】従来の構造例図である。FIG. 4 is a diagram showing an example of a conventional structure.

【符号の説明】[Explanation of symbols]

1 誘電体共振器 1a 内導体 1b 外導体 1c 開放端 3 セラミック基板 4,5,6 端子 7,8 電極 7’ スリット 8 配線導体 9 接続導線 10 固定コンデンサ 11 可変コンデンサ 20 誘電体フィルタ 21 特性測定装置 22 コンピュータ 23 レーザトリミング装置 24 レーザ光 30 印刷配線基板 31 配線導体 32 接続導線 33 スルーホール 34 ガイドボビン 35 調整用ねじ 1 Dielectric Resonator 1a Inner Conductor 1b Outer Conductor 1c Open End 3 Ceramic Substrate 4, 5, 6 Terminal 7, 8 Electrode 7'Slit 8 Wiring Conductor 9 Connection Conductor 10 Fixed Capacitor 11 Variable Capacitor 20 Dielectric Filter 21 Characteristic Measuring Device 22 Computer 23 Laser Trimming Device 24 Laser Light 30 Printed Wiring Board 31 Wiring Conductor 32 Connection Conductive Wire 33 Through Hole 34 Guide Bobbin 35 Adjustment Screw

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 中心軸を貫通する穴を有する角柱状の誘
電体の一方の端面を除いて全側面と前記穴の内面と他方
の端面とが導体で覆われ、前記全側面の導体を外導体と
し前記穴の内面の導体を内導体とし前記一方の端面を開
放端とする複数の誘電体共振器と、 該複数の誘電体共振器が、前記開放端を揃えて並置され
前記外導体面が半田付け固定された金属製のフレーム
と、 該フレームと直角に前記開放端と相対して所定の間隔を
おいて該フレームに固定され、前記開放端側の面に前記
複数の誘電体共振器を電気的に接続してフィルタ回路を
構成する配線導体と該配線導体に接続されたフィルタの
入力端子および出力端子とが設けられたセラミック基板
とを備え、 前記セラミック基板に、前記複数の誘電体共振器のそれ
ぞれの開放端に対応する位置の該セラミック基板を挟ん
だ両面にトリミング用のコンデンサを形成する導体電極
が設けられ、該導体電極の内側の導体電極はそれぞれ誘
電体共振器の前記内導体と導線で接続され、外側の導体
電極は配線導体によって前記フレームに接続されたこと
を特徴とする誘電体フィルタ。
1. Except for one end surface of a prismatic dielectric having a hole penetrating the central axis, all side surfaces, the inner surface of the hole and the other end surface are covered with a conductor, and the conductor on all the side surfaces is covered by an outer surface. A plurality of dielectric resonators which are conductors and whose inner surface is a conductor and whose one end surface is an open end; and a plurality of these dielectric resonators which are arranged side by side with their open ends aligned. Is fixed to the frame by soldering, and is fixed to the frame at a predetermined distance from the open end at a right angle to the frame, and the plurality of dielectric resonators are provided on the surface on the open end side. And a ceramic substrate provided with a wiring conductor that is electrically connected to form a filter circuit and an input terminal and an output terminal of the filter that are connected to the wiring conductor, and the plurality of dielectrics are provided on the ceramic substrate. Corresponding to each open end of the resonator Conductor electrodes for forming capacitors for trimming are provided on both sides of the ceramic substrate at a position, the conductor electrodes inside the conductor electrodes are connected to the inner conductors of the dielectric resonator by conductors, and the outer conductors A dielectric filter, wherein the electrodes are connected to the frame by wiring conductors.
JP10632594A 1994-04-22 1994-04-22 Dielectric filter Pending JPH07297603A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10632594A JPH07297603A (en) 1994-04-22 1994-04-22 Dielectric filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10632594A JPH07297603A (en) 1994-04-22 1994-04-22 Dielectric filter

Publications (1)

Publication Number Publication Date
JPH07297603A true JPH07297603A (en) 1995-11-10

Family

ID=14430772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10632594A Pending JPH07297603A (en) 1994-04-22 1994-04-22 Dielectric filter

Country Status (1)

Country Link
JP (1) JPH07297603A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020014017A (en) * 2000-08-12 2002-02-25 이창화 Computerized Tuning System and Methodology of Duplex filters for Microwave
KR20020089270A (en) * 2002-11-04 2002-11-29 주식회사 에이엔티 Resonant frequency tuning of fbars by using laser beam

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020014017A (en) * 2000-08-12 2002-02-25 이창화 Computerized Tuning System and Methodology of Duplex filters for Microwave
KR20020089270A (en) * 2002-11-04 2002-11-29 주식회사 에이엔티 Resonant frequency tuning of fbars by using laser beam

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