JPH07283462A - Gas laser - Google Patents
Gas laserInfo
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- JPH07283462A JPH07283462A JP6073696A JP7369694A JPH07283462A JP H07283462 A JPH07283462 A JP H07283462A JP 6073696 A JP6073696 A JP 6073696A JP 7369694 A JP7369694 A JP 7369694A JP H07283462 A JPH07283462 A JP H07283462A
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- Prior art keywords
- gas laser
- discharge
- laser medium
- anode
- electrode
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明はガスレ−ザ媒質を放電
励起してレ−ザ光を発生させるガスレ−ザ装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas laser device which excites a gas laser medium by discharge to generate laser light.
【０００２】[0002]
【従来の技術】ガスレ−ザ装置には高気圧横放電励起形
のＴＥＡＣＯ2 レ−ザやエキシマレ−ザなどがある。こ
のようなガスレ−ザ装置は、ガスレ−ザ媒質としてＣＯ
2 、Ｎ2 、Ｈｅなどの混合ガスあるいはＫｒやＸｅなど
の希ガスとＦ2 やＨＣｌなどのハロゲンの混合ガスにバ
ッファガスとしてＨｅやＮｅを混合した混合ガスが用い
られる。 2. Description of the Related Art Gas laser devices include TEACO 2 lasers and excimer lasers of the high pressure lateral discharge excitation type. Such a gas laser device uses CO as a gas laser medium.
A mixed gas of 2 , 2 , N 2 and He or a mixed gas of He and Ne as a buffer gas is used in a mixed gas of a rare gas such as Kr and Xe and a halogen such as F 2 and HCl.
【０００３】上記ガスレ−ザ媒質は、レ−ザ管内におい
て循環させられるとともに、その循環路にはガスレ−ザ
媒質の流れ方向と直交する方向に主電極を形成する陰極
と陽極とが所定の間隔で離間対向して配置されている。The above-mentioned gas laser medium is circulated in a laser tube, and in the circulation path, a cathode and an anode forming a main electrode in a direction orthogonal to the flow direction of the gas laser medium are separated by a predetermined distance. Are spaced apart and face each other.
【０００４】上記陰極と陽極との間の空間部は、これら
電極間に発生する主放電によって上記ガスレ−ザ媒質を
放電励起する放電空間部に形成されている。ガスレ−ザ
媒質が放電励起されることでレ−ザ光が発生し、そのレ
−ザ光は放電空間部の両端に対向して配置された出力ミ
ラ−と高反射ミラ−とからなる光共振器で増幅されて発
振出力されるようになっている。The space between the cathode and the anode is formed as a discharge space where the main discharge generated between the electrodes excites the gas laser medium. Laser light is generated by the discharge excitation of the gas laser medium, and the laser light is an optical resonance composed of an output mirror and a high-reflection mirror arranged at opposite ends of the discharge space. It is amplified by the instrument and output as oscillation.
【０００５】上記陰極と陽極との間に主放電を点弧する
と、上記放電空間部にはイオン、電子、金属蒸気などの
放電生成物が発生したり、電極表面がスパッタされるこ
とで微粉末状の金属粒子などが発生することが避けられ
ない。When a main discharge is ignited between the cathode and the anode, discharge products such as ions, electrons, and metal vapor are generated in the discharge space, and the electrode surface is sputtered to produce fine powder. It is inevitable that metallic particles will be generated.
【０００６】このように、放電空間部に発生した放電生
成物や金属粒子などの塵埃は主放電空間部で点弧される
グロ−放電をア−ク放電へ変化させるから、主放電を不
安定にしてガスレ−ザ媒質の励起効率、すなわちレ−ザ
光の発振効率を低下させることになる。As described above, since the discharge products and dust such as metal particles generated in the discharge space change the glow discharge ignited in the main discharge space to the arc discharge, the main discharge becomes unstable. Then, the excitation efficiency of the gas laser medium, that is, the oscillation efficiency of the laser light is reduced.
【０００７】放電空間部に発生した塵埃は、ガスレ−ザ
媒質が循環させられることで、ある程度は除去すること
ができる。しかしながら、ガスレ−ザ媒質の粘性によ
り、電極の表面およびその近傍には塵埃が残留し易いか
ら、その残留した塵埃によって主放電が不安定になるの
を避けることができなかった。The dust generated in the discharge space can be removed to some extent by circulating the gas laser medium. However, due to the viscosity of the gas laser medium, dust is likely to remain on the surface of the electrode and in the vicinity thereof, so that it is unavoidable that the main discharge becomes unstable due to the remaining dust.
【０００８】とくに、レ−ザ光の出力を増大させるため
に主放電の繰り返し動作を高めてゆくと、塵埃の残留量
も増大するから、レ−ザ出力が急激に低下するという現
象が見られる。Particularly, when the repeated operation of the main discharge is increased in order to increase the output of laser light, the residual amount of dust also increases, so that the laser output sharply decreases. .
【０００９】[0009]
【発明が解決しようとする課題】このように、従来のガ
スレ−ザ装置は、主放電が点弧されることで発生する塵
埃がガスレ−ザ媒質の流れによって放電空間部から確実
に除去されないので、主放電が不安定となってレ−ザ出
力の低下を招くということがあった。As described above, in the conventional gas laser device, the dust generated by the ignition of the main discharge is not reliably removed from the discharge space by the flow of the gas laser medium. In some cases, the main discharge becomes unstable and the laser output decreases.
【００１０】この発明は上記事情に基づきなされたもの
で、その目的とするところは、放電によって発生する塵
埃を放電空間部から良好に除去し、レ−ザ出力の低下を
防止できるようにしたガスレ−ザ装置を提供することに
ある。The present invention has been made in view of the above circumstances. An object of the present invention is to remove dust generated by electric discharge from the electric discharge space satisfactorily and prevent a decrease in laser output. -To provide the device.
【００１１】[0011]
【課題を解決するための手段】上記課題を解決するため
にこの発明は、ガスレ−ザ媒質を放電励起してレ−ザ光
を発生させるガスレ−ザ装置において、レ−ザ管と、こ
のレ−ザ管内に離間対向して配置されそれらの間が上記
ガスレ−ザ媒質を放電励起する放電空間部に形成された
陰極と陽極とからなる主電極と、上記放電空間部を上記
主電極の主放電に先立って予備電離する予備電離手段
と、上記放電空間部に上記陰極と陽極との離間方向に対
して交差する方向に上記ガスレ−ザ媒質を流通させる第
１の流通手段と、上記陰極と陽極との少なくとも一方の
電極の上記放電空間部側を向いた表面側から裏面側へ上
記ガスレ−ザ媒質を流通させる第２の流通手段とを具備
したことを特徴とする。SUMMARY OF THE INVENTION In order to solve the above problems, the present invention relates to a gas laser apparatus for exciting a gas laser medium by discharge to generate laser light, and a laser tube and the laser tube. A main electrode composed of a cathode and an anode formed in a discharge space portion which discharges and excites the gas laser medium between them in a spaced relation to each other in the tube, and the discharge space portion is the main electrode of the main electrode. Pre-ionization means for pre-ionization prior to discharge; first circulation means for circulating the gas laser medium in the discharge space in a direction intersecting the separation direction between the cathode and the anode; and the cathode. It is characterized by further comprising a second circulation means for circulating the gas laser medium from the front surface side of the at least one of the electrodes facing the discharge space portion side to the back surface side.
【００１２】[0012]
【作用】上記構成によれば、第２の流通手段により、電
極の表面側のガスレ−ザ媒質が裏面側へ流通するから、
電極の表面においてガスレ−ザ媒質が流れ易くなり、そ
の表面に主放電によって発生した塵埃が滞留しずらくな
る。According to the above construction, since the gas laser medium on the front surface side of the electrode flows to the back surface side by the second circulating means,
The gas laser medium easily flows on the surface of the electrode, and the dust generated by the main discharge is less likely to stay on the surface.
【００１３】[0013]
【実施例】以下、この発明の一実施例を図面を参照して
説明する。図１に示すガスレ−ザ装置は、Ｘｅ、ＨＣ
ｌ、ＮｅまたはＨｅからなるエキシマレ−ザ用のガスレ
−ザ媒質が充填されたレ−ザ管１を備えている。このレ
−ザ管１は断面円形状の気密構造をなしていて、その内
部には主電極を形成する陰極２と陽極３とが上下方向に
所定間隔で離間対向して配設されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. The gas laser device shown in FIG.
A laser tube 1 filled with a gas laser medium for an excimer laser consisting of 1, Ne or He is provided. The laser tube 1 has an airtight structure with a circular cross section, inside of which a cathode 2 and an anode 3 which form a main electrode are arranged facing each other at a predetermined interval in the vertical direction.
【００１４】これらの電極２、３は上記レ−ザ管１の軸
線方向に沿って長尺に形成されていて、陰極２は上部取
付板４の下面に取着され、陽極３は下部取付板５の上面
に取り付けられている。These electrodes 2 and 3 are formed long along the axial direction of the laser tube 1, the cathode 2 is attached to the lower surface of the upper attachment plate 4, and the anode 3 is attached to the lower attachment plate. 5 is attached to the upper surface.
【００１５】上記陰極２は上部取付板４を介して直流高
圧電源６のマイナス側に接続され、上記陽極３は同じく
下部取付板５を介してプラス側に接続されている。さら
に、上記上部取付板４の上記陰極２の幅方向両側には波
形成形のためのピ−キングコンデンサ７を介して上部ピ
ン電極８が垂設され、下部取付板５には上端を上記上部
ピン電極８の下端と所定のギャップを介して対向させた
下部ピン電極９が立設されている。The cathode 2 is connected to the negative side of the DC high voltage power source 6 via the upper mounting plate 4, and the anode 3 is also connected to the positive side via the lower mounting plate 5. Further, upper pin electrodes 8 are vertically provided on both sides of the upper mounting plate 4 in the width direction of the cathode 2 through a peaking capacitor 7 for corrugation, and an upper end of the lower mounting plate 5 is the upper pin. A lower pin electrode 9 is provided upright so as to face the lower end of the electrode 8 with a predetermined gap.
【００１６】上記直流高圧電源６を作動させると、上部
ピン電極８と下部ピン電極９との間にスパ−ク放電が点
弧されて紫外線が発生する。その紫外線によって陰極２
と陽極３との間の空間部、つまり放電空間部１１が電離
される。放電空間部１１の電離が十分に進むと、陰極２
と陽極３との間に主放電が点弧されてガスレ−ザ媒質が
励起され、レ−ザ光が発生するようになっている。When the DC high-voltage power supply 6 is operated, spark discharge is ignited between the upper pin electrode 8 and the lower pin electrode 9 to generate ultraviolet rays. Cathode 2 by the ultraviolet rays
The space between the anode 3 and the anode 3, that is, the discharge space 11 is ionized. When the ionization of the discharge space 11 progresses sufficiently, the cathode 2
The main discharge is ignited between the anode 3 and the anode 3 to excite the gas laser medium and generate laser light.
【００１７】上記レ−ザ管１内には、ガスレ−ザ媒質を
図中矢印Ａ方向に循環させる第１の流通手段としての送
風機１２、ガスレ−ザ媒質を冷却する熱交換器１３およ
び上記送風機１２の下流側にガスレ−ザ媒質中に含まれ
た塵埃を除去するフィルタ１４とが配設されている。In the laser tube 1, a blower 12 as a first circulating means for circulating the gas laser medium in the direction of arrow A in the figure, a heat exchanger 13 for cooling the gas laser medium, and the blower described above. A filter 14 for removing dust contained in the gas laser medium is disposed on the downstream side of 12.
【００１８】上記陽極３は図２に示すように下面側が開
放した中空状に形成されていて、その内部空間２１には
第２の流通手段としてたとえばファンなどの吸引機２２
が収容されているとともに、上記陽極３の上部壁にはそ
の内部空間２１と上面側とを連通する流通孔２３が穿設
されている。さらに上記下部取付板５には上記陽極３の
内部空間２１と対応する部分に連通孔２４が形成されて
いる。As shown in FIG. 2, the anode 3 is formed in a hollow shape whose lower surface side is open, and the inner space 21 thereof has a suction means 22 such as a fan as a second circulation means.
And a through hole 23 that communicates the internal space 21 with the upper surface side of the anode 3 is formed in the upper wall of the anode 3. Further, a communication hole 24 is formed in the lower mounting plate 5 at a portion corresponding to the internal space 21 of the anode 3.
【００１９】したがって、上記吸引機２２が作動する
と、図１と図２に矢印Ｂで示す方向にガスレ−ザ媒質が
流通するようになっている。つまり、吸引機２２は陽極
３の表面側のガスレ−ザ媒質をその流通孔２３から内部
空間２１へ吸引し、下部取付板５の連通孔２４から流出
させるようになっている。上記内部空間２１には、内部
空間２１に吸引されたガスレ−ザ媒質を連通孔２４へ円
滑に導くガイド板２５が設けられている。Therefore, when the suction device 22 is operated, the gas laser medium flows in the direction indicated by the arrow B in FIGS. 1 and 2. That is, the suction device 22 sucks the gas laser medium on the front surface side of the anode 3 into the internal space 21 from the flow hole 23, and causes the gas laser medium to flow out from the communication hole 24 of the lower mounting plate 5. The internal space 21 is provided with a guide plate 25 that smoothly guides the gas laser medium sucked into the internal space 21 to the communication hole 24.
【００２０】なお、上記フィルタ１４は上記吸引機２２
によって発生するガスレ−ザ媒質の流れ方向の下流側に
位置している。上記構成のガスレ−ザ装置において、ま
ず送風機１２と吸引機２２を作動させる。それによっ
て、レ−ザ管１内のガスレ−ザ媒質は図１に矢印Ａと矢
印Ｂで示すように流通する。The filter 14 is the suction device 22.
It is located on the downstream side in the flow direction of the gas laser medium generated by. In the gas laser device having the above structure, first, the blower 12 and the suction device 22 are operated. As a result, the gas laser medium in the laser tube 1 flows as indicated by arrows A and B in FIG.
【００２１】ついで、直流高圧電源６を作動させると、
上部ピン電極８と下部ピン電極９との間にスパ−ク放電
が点弧されて紫外線が発生し、その紫外線によって放電
空間部１１が電離される。Then, when the DC high voltage power source 6 is operated,
Spark discharge is ignited between the upper pin electrode 8 and the lower pin electrode 9 to generate ultraviolet rays, and the ultraviolet rays ionize the discharge space 11.
【００２２】上記放電空間部１１の電離が進行すると、
陰極２と陽極３との間に主放電が点弧される。それによ
って、放電空間部１１でガスレ−ザ媒質が励起されてレ
−ザ光が発生する。As the ionization of the discharge space 11 progresses,
A main discharge is ignited between the cathode 2 and the anode 3. As a result, the gas laser medium is excited in the discharge space 11 to generate laser light.
【００２３】放電空間部１１に主放電が点弧されること
で、イオン、電子、金属蒸気、さらにはスパッタによる
金属粒子などの塵埃が発生する。送風機１２によってガ
スレ−ザ媒質が矢印Ａ方向に流通されることで、放電空
間部１１に発生した塵埃の一部がガスレ−ザ媒質ととも
に流出し、フィルタ１４に捕集される。When the main discharge is ignited in the discharge space 11, ions, electrons, metal vapor, and dust such as metal particles due to sputtering are generated. When the gas laser medium is circulated in the direction of arrow A by the blower 12, part of the dust generated in the discharge space 11 flows out together with the gas laser medium and is collected by the filter 14.
【００２４】電極２、３の表面ではガスレ−ザ媒質がそ
の粘性によって塵埃とともに滞留し易いから、送風機１
２によるガスレ−ザ媒質の流れだけでは除去することが
できない。しかしながら、陽極３の表面のガスレ−ザ媒
質は、吸引機２２の吸引力によって図２に矢印で示すよ
うに流通孔２３から陽極３の内部空間２１に吸引され、
連通孔２４から流出する。つまり、陽極３の表面に滞留
するガスレ−ザ媒質はその表面側から裏面側へ流れ、そ
の流れ方向に配置されたフィルタ１４を通過して除塵さ
れ、放電空間部１１へ戻る。On the surfaces of the electrodes 2 and 3, the gas laser medium easily stays together with dust due to its viscosity.
It cannot be removed only by the flow of the gas laser medium according to 2. However, the gas laser medium on the surface of the anode 3 is sucked into the internal space 21 of the anode 3 from the flow hole 23 by the suction force of the suction device 22, as shown by the arrow in FIG.
It flows out from the communication hole 24. That is, the gas laser medium staying on the surface of the anode 3 flows from the front surface side to the back surface side, passes through the filter 14 arranged in the flow direction to remove dust, and returns to the discharge space 11.
【００２５】そのため、陽極３の表面およびその近傍に
塵埃を含んだガスレ−ザ媒質がその粘性によって滞留す
るのを防ぐことができるから、レ−ザ出力を向上させる
ために放電励起の繰り返し速度を速くしても、主放電が
不安定になって出力低下を招くのを防止できる。Therefore, it is possible to prevent the gas laser medium containing dust from staying on the surface of the anode 3 and in the vicinity thereof due to its viscosity, so that the repetition rate of discharge excitation is increased in order to improve the laser output. Even if the speed is increased, it is possible to prevent the main discharge from becoming unstable and the output from being reduced.
【００２６】陰極２と陽極３との間に主放電が点弧され
る際、電子は陰極２側から陽極３側へ向かうから、陽極
３の表面およびその近傍に塵埃が多く発生し易い。その
ため、陽極３側に第２の流通手段としての吸引機２２を
設けるだけで、主放電の安定性をかなり高めることがで
きるが、陽極３側と同じ構成の第２の流通手段を陰極２
側に設けるようにしてもよい。When the main discharge is ignited between the cathode 2 and the anode 3, since electrons travel from the cathode 2 side to the anode 3 side, much dust is likely to be generated on the surface of the anode 3 and in the vicinity thereof. Therefore, the stability of the main discharge can be considerably improved only by providing the suction device 22 as the second circulating means on the anode 3 side, but the second circulating means having the same configuration as the anode 3 side is provided on the cathode 2 side.
It may be provided on the side.
【００２７】一方、上記吸引機２２のファンの回転方向
を逆方向にし、ガスレ−ザ媒質を陽極３の裏面側から表
面側へ流出させるようにしてもよい。それによって、図
１に矢印Ａで示すように循環するガスレ−ザ媒質の一部
が流通孔２３から陽極３の表面側に流出するから、その
ガスレ−ザ媒質によって、陽極３の表面およびその近傍
にガスレ−ザ媒質が滞留しずらくなる。したがって、放
電空間部１１に塵埃が溜まりずらくなるから、主放電の
繰り返し動作を安定した状態で高速化することができ
る。On the other hand, the rotation direction of the fan of the suction device 22 may be reversed so that the gas laser medium may flow from the back surface side to the front surface side of the anode 3. As a result, a part of the circulating gas laser medium flows out from the through hole 23 to the surface side of the anode 3 as indicated by an arrow A in FIG. 1, so that the surface of the anode 3 and its vicinity are dependent on the gas laser medium. It becomes difficult for the gas laser medium to stay. Therefore, since it becomes difficult for dust to collect in the discharge space 11, the repeated operation of the main discharge can be speeded up in a stable state.
【００２８】上記吸引機２２のブレ−ドに、図示しない
が磁石を取り付けておけば、ガスレ−ザ媒質中に含まれ
る塵埃のうち、鉄やニッケルなどの磁性金属を吸引除去
することができる。If a magnet (not shown) is attached to the blade of the suction device 22, magnetic metals such as iron and nickel can be sucked and removed from the dust contained in the gas laser medium.
【００２９】なお、この発明は上記一実施例に限定され
ず、種々変形可能である。たとえば陽極３は金属メッシ
ュやパンチングメタルなどの材料を所定の形状に成形し
たものであってもよい。The present invention is not limited to the above-mentioned embodiment, but can be variously modified. For example, the anode 3 may be formed by molding a material such as a metal mesh or punching metal into a predetermined shape.
【００３０】また、陽極３は、図３に示すように下部取
付板５の上面に一対の側板３１を立設し、これら側板３
１の上端に流通孔２３を有する金属メッシュやパンチグ
メタル、この実施例ではパンチグメタル３２を交換可能
に設けることで、形成してもよい。Further, as shown in FIG. 3, the anode 3 has a pair of side plates 31 provided upright on the upper surface of the lower mounting plate 5, and these side plates 3 are provided.
It may be formed by providing a metal mesh having a through hole 23 at the upper end of 1 and a punching metal, in this embodiment, a punching metal 32, which is replaceable.
【００３１】このような構成によれば、主放電の点弧が
繰り返されることで、パンチングメタル３２が摩耗する
が、そのような場合にはパンチングメタル３２だけを交
換することができるばかりか、内部に設けられた吸引機
２２の保守点検も容易に行うことが可能である。なお、
図３に示す実施例において、図１と図２に示す一実施例
と同一部分には同一記号を付して説明は省略する。According to such a configuration, the punching metal 32 is worn due to repeated ignition of the main discharge. In such a case, not only the punching metal 32 can be replaced, but also the internal portion of the punching metal 32 can be replaced. It is also possible to easily perform maintenance and inspection of the suction device 22 provided in the. In addition,
In the embodiment shown in FIG. 3, the same parts as those in the embodiment shown in FIGS. 1 and 2 are designated by the same reference numerals and the description thereof will be omitted.
【００３２】[0032]
【発明の効果】以上述べたようにこの発明は、放電空間
部に、陰極と陽極との離間方向に対して交差する方向に
上記ガスレ−ザ媒質を流通させるだけでなく、上記陰極
と陽極との少なくとも一方の電極の上記放電空間部側を
向いた表面側と裏面側との間で上記ガスレ−ザ媒質を流
通させるようにした。As described above, the present invention not only allows the gas laser medium to flow in the discharge space in a direction intersecting the direction in which the cathode and the anode are separated from each other, The gas laser medium is circulated between at least one of the electrodes facing the discharge space and between the front surface and the back surface.
【００３３】そのため、上記ガスレ−ザ媒質の流通によ
って、上記電極の表面あるいはその近傍において、塵埃
を含んだガスレ−ザ媒質が滞留するのを阻止できるか
ら、高繰り返し動作においても主放電を安定化すること
ができる。Therefore, it is possible to prevent the gas laser medium containing dust from staying on the surface of the electrode or in the vicinity thereof due to the circulation of the gas laser medium, so that the main discharge is stabilized even in the high repetition operation. can do.
【図１】この発明の一実施例の全体構成を示す断面図。FIG. 1 is a sectional view showing the overall configuration of an embodiment of the present invention.
【図２】同じく陽極の断面図。FIG. 2 is a sectional view of the anode.
【図３】陽極の変形例を示す断面図。FIG. 3 is a cross-sectional view showing a modified example of the anode.
１…レ−ザ管、２…陰極、３…陽極、８、９…ピン電極
（予備電離手段）、１１…放電空間部、１２…送風機
（第１の流通手段）、２２…吸引機（第２の流通手
段）。DESCRIPTION OF SYMBOLS 1 ... Laser tube, 2 ... Cathode, 3 ... Anode, 8, 9 ... Pin electrode (pre-ionization means), 11 ... Discharge space part, 12 ... Blower (first distribution means), 22 ... Suction machine (first) 2 means of distribution).
フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｓ 3/134 Ｈ０１Ｓ 3/097 Ｅ Continuation of front page (51) Int.Cl. 6 Identification code Office reference number FI Technical display location H01S 3/134 H01S 3/097 E
Claims (5)
を発生させるガスレ−ザ装置において、 レ−ザ管と、このレ−ザ管内に離間対向して配置されそ
れらの間が上記ガスレ−ザ媒質を放電励起する放電空間
部に形成された陰極と陽極とからなる主電極と、上記放
電空間部を上記主電極の主放電に先立って予備電離する
予備電離手段と、上記放電空間部に上記陰極と陽極との
離間方向に対して交差する方向に上記ガスレ−ザ媒質を
流通させる第１の流通手段と、上記陰極と陽極との少な
くとも一方の電極の上記放電空間部側を向いた表面側と
裏面側との間で上記ガスレ−ザ媒質を流通させる第２の
流通手段とを具備したことを特徴とするガスレ−ザ装
置。1. A gas laser apparatus for exciting a gas laser medium by discharge to generate laser light, wherein a laser tube and a laser tube are disposed in the laser tube so as to face each other with a space therebetween. A main electrode composed of a cathode and an anode formed in a discharge space part for discharge-exciting a gas laser medium, a preionization means for preionizing the discharge space part prior to main discharge of the main electrode, and the discharge space. A first circulation means for circulating the gas laser medium in a direction intersecting the direction of separation between the cathode and the anode, and facing the discharge space portion side of at least one of the cathode and the anode. A gas laser device comprising: a second circulation means for circulating the gas laser medium between the front surface side and the back surface side.
方の電極の表面側のガスレ−ザ媒質を裏面側へ吸引する
構成であることを特徴とする請求項１記載のガスレ−ザ
装置。2. The gas laser according to claim 1, wherein the second circulation means is configured to suck the gas laser medium on the front surface side of one of the main electrodes toward the back surface side. apparatus.
方の電極を中空状に形成し、その内部空間と上記電極の
表面とを連通する流通孔を穿設するとともに、上記内部
空間に上記流通孔から上記電極の表面側のガスレ−ザ媒
質を吸引する吸引機を配置してなることを特徴とする請
求項１記載のガスレ−ザ装置。3. The second circulation means forms one electrode of the main electrode in a hollow shape, forms a communication hole that communicates the internal space with the surface of the electrode, and forms the internal space. The gas laser device according to claim 1, further comprising a suction device for sucking the gas laser medium on the surface side of the electrode from the flow hole.
質の流れ方向下流側には、そのガスレ−ザ媒質に含まれ
る塵埃を除去するフィルタが配置されていることを特徴
とする請求項１乃至請求項３のいずれかに記載のガスレ
−ザ装置。4. A filter for removing dust contained in the gas laser medium is disposed on the downstream side in the flow direction of the gas laser medium by the second circulation means. A gas laser device according to claim 3.
側から表面側へガスレ−ザ媒質を流出させる構成である
ことを特徴とする請求項１記載のガスレザ−装置。5. The gas laser device according to claim 1, wherein the second circulation means is configured to flow the gas laser medium from the back surface side to the front surface side of the electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6073696A JPH07283462A (en) | 1994-04-13 | 1994-04-13 | Gas laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6073696A JPH07283462A (en) | 1994-04-13 | 1994-04-13 | Gas laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07283462A true JPH07283462A (en) | 1995-10-27 |
Family
ID=13525645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6073696A Pending JPH07283462A (en) | 1994-04-13 | 1994-04-13 | Gas laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07283462A (en) |
-
1994
- 1994-04-13 JP JP6073696A patent/JPH07283462A/en active Pending
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