JPH06275897A - Discharge excited gas laser device - Google Patents

Abstract

PURPOSE:To provide a discharge excited gas laser device wherein the constitution of a discharge part is simple, a main discharge is generated stably and the laser can be oscillated with good efficiency. CONSTITUTION:A dielectric 3 is arranged along the side of a second main electrode 6, a first preliminary ionization electrode 1 is installed along the surface of the dielectric 3, a second preliminary ionization electrode 2 is installed at the outer side with reference to the main electrode than the first preliminary ionization electrode 1 along the surface of the dielectric 3 in the same manner, a voltage is applied across the first preliminary ionization electrode 1 and the second preliminary ionization electrode 2, a creeping discharge 4 is generated on the surface of the dielectric, and a preliminary ionization in a main discharge space is performed by ultraviolet rays generated from there. Consequently, a preliminary ionization source 8 does not disturb a gas flow, and 3 discharge part can be constituted simply. In addition, since impurities produced by a main discharge can be removed sufficiently, the main discharge can be generated stably and uniformly even in a highly repeated operation.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge excitation gas laser device, and more particularly to a preionization source thereof.

[0002]

2. Description of the Related Art In order to efficiently excite a laser by discharge, it is essential to generate a spatially uniform main discharge. When the operating pressure of the laser gas that is the medium is relatively high, as in the case of the TEA-CO ₂ laser and the excimer laser, the discharge tends to be focused, and simply applying a voltage between the main electrodes makes the arc-shaped spatially non-uniform. It becomes a discharge. For this reason, usually, pre-ionization is performed before the main discharge is started to generate electrons as seeds of discharge in the main discharge space.

FIG. 14 shows, for example, Japanese Patent Laid-Open No. 61-13517.
It is a perspective view which shows the preionization source of the conventional discharge excitation gas laser device shown by the 6th publication. In FIG. 14, the conventional preionization source includes a first preionization electrode 1, a second preionization electrode 2, and a dielectric 3 sandwiched between the first and second preionization electrodes 1 and 2. Prepare Reference numeral 4 is a creeping discharge generated on the surface of the dielectric 3.

Next, the operation will be described. When a high voltage is applied between the first preionization electrode 1 and the second preionization electrode 2, a strong electric field is generated in the vicinity of the dielectric surface near the first and second preionization electrodes 1 and 2, and a positive electric field is generated. Positive corona streamers are generated from the electrodes, and negative corona streamers are generated from the negative electrodes, and they propagate on the surface of the dielectric material so as to face each other. Due to the contact between the positive corona streamer and the negative corona streamer, the first preionization electrode 1 and the second preionization electrode 2 are short-circuited, and a current flows along the surface of the dielectric. Usually, the discharge generated on the surface of the dielectric in the above process is called creeping discharge, and the preionization source shown in this figure uses the ultraviolet light generated from the creeping discharge to discharge the laser gas in the main discharge space. It is one that photoionizes. It is known that the creeping discharge can obtain a stable discharge because the short-circuit voltage between the electrodes is lower than that of the arc discharge that does not use a dielectric, and is suitable as a preionization source.

FIG. 15 is the same as FIG. 14 in Japanese Patent Laid-Open No. 61-1.
It is a perspective view which shows the structure of the discharge part of the conventional discharge excitation gas laser device shown by 35176 publication. In the figure, FIG.
The same reference numerals denote the same or corresponding parts. In FIG. 15, the discharge part includes a first main electrode 5 and a second main electrode 6. Reference numeral 7 is a main discharge space.
Further, the discharge part is surrounded by a dotted line, and a plurality of auxiliary ionization sources 8 having the same configuration as that shown in FIG. And a peaking capacitor 9 connected in series. Reference numeral 10 is an arrow indicating the direction of the gas flow circulated to replace the laser gas in the main discharge space 7.

Next, the operation will be described. When a high voltage pulse is applied between the first and second main electrodes 5 and 6, the creeping discharge start voltage between the first and second preionization electrodes 1 and 2 is higher than the discharge start voltage between the main electrodes. Is sufficiently low, a creeping discharge is first generated in the preliminary ionization source 8. Due to the creeping discharge, the first and second preionization electrodes 1 and 2 in the preionization source 8 are electrically connected and a current flows into the peaking capacitor 9. Also, the main discharge space 7 is preionized by the ultraviolet light generated from the creeping discharge.

Due to the charging of the peaking capacitor 9, the voltage applied between the first and second main electrodes 5, 6 increases rapidly, and this voltage is applied between the first and second main electrodes 5, 6. When the discharge start voltage is exceeded, a glow-like discharge is formed in the main discharge space 7 using the pre-ionized electrons as seeds (main discharge). When the main discharge starts, the energy stored in the peaking capacitor 9 is instantaneously put into the main discharge, and the laser gas is excited. In this figure, the longitudinal direction of the main electrode coincides with the optical axis direction, and a laser beam is extracted by installing a partial transmission mirror and a total reflection mirror in front of and behind the main electrode to form a resonator.

Considering the industrial application of the discharge excitation gas laser device, it is necessary to perform repeated operation of continuously performing main discharge at a rate of several tens to several hundreds of times per second. The main discharge excites the laser gas and simultaneously produces a large amount of impurities such as charged particles and metal powder in the main discharge space. Impurities in the main discharge space hinder the formation of a spatially uniform discharge, so that the laser gas in the discharge space must be replaced for each main discharge when performing repeated operations. For this reason, a line flow fan or a blower is used to constantly circulate the laser gas to replace the gas in the main discharge space 7. Efficient main discharge space 7
In order to replace the laser gas therein, the gas is normally circulated in the direction indicated by the arrow 10, that is, from the side of the main discharge space 7 in a direction orthogonal to the longitudinal direction of the main discharge space 7.

By the way, in the structure of the discharge part shown in FIG. 15, the preliminary ionization source 8 is installed on the side of the main discharge space 7. In order to form a uniform main discharge, preionization must be performed uniformly over the entire main discharge space, while in order to perform repeated operation, the laser gas in the entire main discharge space must be replaced for each main discharge. A gas having a flow velocity sufficient to operate the gas must flow into the main discharge space 7.

In order to install the preionization source 8 on the side of the main discharge space 7 and to satisfy the above-mentioned two conditions, a large number of dielectrics 3 are used as shown in FIG. The preliminary ionization sources 8 must be dispersed and evenly arranged in the direction, which not only complicates the structure of the discharge part, but also makes adjustment difficult.

Further, since the preionization source 8 is installed at a position opposed to the gas flow, it becomes a resistance against the gas flow and causes a pressure loss, which reduces the blowing efficiency of the gas circulator such as a line flow fan or blower. Further, since the preliminary ionization source 8 becomes an obstacle to the gas flow, the gas flow is disturbed on the downstream side of the preliminary ionization source 8 to generate a vortex and the impurities generated in the main discharge space 7 can be sufficiently removed. Can not. Especially several tens per second
During high-repetition operation in which the main discharge is performed 0 times or more, the flow velocity of the gas to be circulated must be high, and this tendency becomes remarkable, and the main discharge becomes unstable, which causes a decrease in efficiency with respect to the laser output. Was there.

FIG. 16 shows a document (R. Marchetti, E. Penc.
o and G. Salvetti, “A new typecorona-disharge ph
otoionization source for gas lasers ", J. Appl. Phy
s.56 (11), 1 December 1984, pages 3163 to 3166), which is a schematic diagram showing a discharge part of a conventional discharge excitation gas laser device. In the figure, the same reference numerals as those in FIGS. 14 and 15 represent the same or corresponding portions.

In FIG. 16, reference numeral 11 is a corona discharge used as a preionization light source. As described above, if the preionization source is located on the side of the main discharge space, it will not only be difficult to adjust it easily, but it will also hinder the gas flow and cause a reduction in efficiency with respect to the laser output. Is. In the conventional example shown in this figure, since the preliminary ionization source is provided on the side of the second main electrode 6, the preliminary ionization source does not obstruct the gas flow. Further, a tubular insulating material having the same length as the main electrode is used for the dielectric 3, and the rod-shaped second preionization electrode 2 is installed inside the tubular dielectric 3. Further, since the second main electrode 6 also serves as the first preionization electrode, the structure is very simple.

The conventional example shown in FIG. 14 and the conventional example shown in FIG. 14 both pre-ionize the laser gas in the main discharge space by the ultraviolet light generated from the discharge, but the form of the pre-ionization discharge which is the ultraviolet light source is different. ing. In the conventional example shown in FIG. 14, a voltage is applied between the first preionization electrode 1 and the second preionization electrode 2, and the two electrodes are short-circuited due to the progress of the corona streamer, which occurs on the surface of the dielectric 3. The ultraviolet light generated from the creeping discharge 4 was used for preionization. Similarly, in the case of the present conventional example shown in FIG. 16, a voltage is applied between the second main electrode 6 also serving as the first preionization electrode and the second preionization electrode 2, but The main electrode 6 and the second preionization electrode 2 are not short-circuited, and the propagation is started by the strong electric field generated at the contact portion between the second main electrode 6 and the dielectric 3 to cover the entire outer surface of the dielectric 3. Generated corona discharge 11
Only uses it as an ultraviolet light source. As shown in FIG. 16, when the corona discharge 11 is used as an ultraviolet light source, not only can the structure of the preionization source itself be very simple, but also the corona discharge 11 is generated on the entire surface of the dielectric 3. A uniform preionization electron density distribution can be obtained in the main discharge space.

When the creeping discharge 4 is used as an ultraviolet light source as in the conventional example shown in FIG. 14, the intensity of ultraviolet light is increased by increasing the amount of current flowing through the creeping discharge to obtain a high preionization electron density. You can However, when the corona discharge 11 is used as an ultraviolet light source as in the conventional example shown in FIG. 16, the second main electrode 6 also serving as the first preionization electrode is used.
Since the voltage that can be applied between the second preionization electrode 2 and the second preionization electrode 2 is limited by the dielectric strength voltage of the dielectric material,
There is an upper limit to the energy that can be input into the corona discharge 11, the preliminary ionization electron density obtained is lower than that in the creeping discharge 4, and the laser efficiency also decreases.

FIG. 17 is a schematic diagram showing the discharge part of the conventional discharge excitation gas laser device disclosed in Japanese Patent Laid-Open No. 3-9582. In the figure, the same reference numerals as those in FIGS. 14 and 15 indicate the same or corresponding portions.

In FIG. 17, reference numeral 12 is a shield electrode provided on the outer surface of the dielectric 3 outside the first preionization electrode 1 with respect to the main electrode. In this conventional example as well, as in the conventional example shown in FIG. 16, both side portions of the second main electrode 6 are used as the first preionization electrode 1, and the second main electrode 6 and the first preionization electrode 1 are integrated. The configuration is such that The configurations of the second preionization electrode 2 and the dielectric 3 are the same as those shown in FIG. In this conventional example, the dielectric 3
The shield electrode 12 as well as the first preionization electrode 1 is provided on the outer surface of the.

First preionization electrode 1 and shield electrode 12
Are kept at the same potential and a high voltage is applied between the second preionization electrode 2 and the second preionization electrode 2 to generate corona discharge 11 on the outer surface of the dielectric 3, and the main discharge space is generated by the ultraviolet light generated from the corona discharge 11. Pre-ionization of. As shown in the conventional example, when the shield electrode 12 is provided, a strong electric field is generated even at the end of the shield electrode 12 to start the progress of the corona discharge 11. Therefore, as in the conventional example shown in FIG. The number of preliminary ionization electrons can be increased as compared with the case where the generation start point of the discharge 11 is only in the contact portion between the second main electrode 6 and the dielectric 3. However, as in the conventional example shown in FIG. 16, the voltage that can be applied between the first preionization electrode 1 and the second preionization electrode 2 is limited by the dielectric strength of the dielectric, so The number of preionized electrons obtained is smaller than that of the discharge 4.

[0019]

In the discharge part of the conventional discharge excitation gas laser device, when the creeping discharge 4 is used as an ultraviolet light source, the preionization sources 8 must be dispersed in a large number and arranged evenly. However, there is a problem in that the structure of the discharge part becomes complicated and the assembly and adjustment are not easy.
Further, since the preliminary ionization source 8 is installed at a position facing the gas flow, the preliminary ionization source 8 becomes a resistance to the gas flow,
Not only is the ventilation efficiency of the gas circulator reduced, but it is difficult to sufficiently remove the impurities generated in the main discharge space 7 by disturbing the gas flow on the downstream side of the preliminary ionization source 8 and reducing the efficiency of the laser output. There was a problem that it caused.

If the corona discharge 11 is used as an ultraviolet light source, the structure of the preionization source can be simplified and the main discharge space can be preionized without affecting the gas flow. There is a problem that the number of pre-ionized electrons is small and the efficiency of the laser is reduced.

The present invention has been made in order to solve the above-mentioned problems, and has a simple structure of the discharge part, and can perform preionization in the main discharge space without disturbing the gas flow. It is an object of the present invention to obtain a discharge-excited gas laser device capable of obtaining a laser output with high efficiency because a stable main discharge can be formed.

[0022]

A discharge excitation gas laser device according to claim 1 of the present invention comprises the following means. [1] First and second main electrodes provided to face each other to cause a main discharge in the laser gas. [2] An excitation circuit connected to the first and second main electrodes. [3] A dielectric is arranged along the side of at least one of the first and second main electrodes, and a first preionization electrode is provided along the surface of the dielectric, and A second preionization electrode is provided outside the first preionization electrode along the surface of the dielectric and outside the main electrode, and a voltage is applied between the first preionization electrode and the second preionization electrode. A preionization source that generates a creeping discharge on the surface of the dielectric material by applying a voltage.

A discharge excitation gas laser device according to a second aspect of the present invention is provided with the following means. [1] First and second main electrodes provided to face each other to cause a main discharge in the laser gas. [2] An excitation circuit connected to the first and second main electrodes. [3] A dielectric is disposed along the side of at least one of the first and second main electrodes, and a first preionization electrode is provided along the surface of the dielectric. A second preionization electrode is provided along the body surface outside the main electrode with respect to the first preionization electrode, and the first preionization electrode is provided.
And at least one of the second preionization electrodes is provided with a plurality of projections for starting a creeping discharge, and a voltage is applied between the first preionization electrode and the second preionization electrode to generate the creeping discharge. A preionization source that produces a creeping discharge on the surface of a dielectric.

A discharge excitation gas laser device according to a third aspect of the present invention comprises the following means. [1] First and second main electrodes provided to face each other to cause a main discharge in the laser gas. [2] An excitation circuit connected to the first and second main electrodes. [3] A dielectric is arranged along the side of at least one of the first and second main electrodes, and the one main electrode on which the dielectric is arranged is used as a first preionization electrode. A second auxiliary ionization electrode is also provided outside the main electrode along the surface of the dielectric, and a voltage is applied between the first auxiliary ionization electrode and the second auxiliary ionization electrode. A preionization source for generating a creeping discharge on the surface of the dielectric.

The discharge-excited gas laser device according to claim 4 of the present invention comprises the following means. [1] First and second main electrodes provided to face each other to cause a main discharge in the laser gas. [2] An excitation circuit connected to the first and second main electrodes. [3] A dielectric is disposed along the side of at least one of the first and second main electrodes, and a first preionization electrode is provided along the surface of the dielectric. A second preionization electrode is provided outside the main electrode along the body surface outside the first preionization electrode, and the first preionization electrode and the second preionization electrode are provided on the dielectric surface. A pre-ionization source, wherein a groove connecting the electrodes is provided, and a voltage is applied between the first pre-ionization electrode and the second pre-ionization electrode to generate a creeping discharge in the groove on the dielectric surface.

A discharge excitation gas laser device according to a fifth aspect of the present invention comprises the following means. [1] First and second main electrodes provided to face each other to cause a main discharge in the laser gas. [2] An excitation circuit connected to the first and second main electrodes. [3] A dielectric is disposed along the side of at least one of the first and second main electrodes, and a first preionization electrode is provided along the surface of the dielectric. A second preionization electrode is provided outside the main electrode along the body surface outside the first preionization electrode, and the first preionization electrode and the second preionization electrode are provided on the dielectric surface. A groove is provided obliquely with respect to the direction connecting the electrode with the shortest distance, and a voltage is applied between the first preionization electrode and the second preionization electrode to generate a creeping discharge in the groove on the dielectric surface. Pre-ionization source to generate.

The discharge-excited gas laser device according to claim 6 of the present invention comprises the following means. [1] First and second main electrodes provided to face each other to cause a main discharge in the laser gas. [2] An excitation circuit connected to the first and second main electrodes. [3] A dielectric is disposed along the side of at least one of the first and second main electrodes, and a first preionization electrode is provided along the surface of the dielectric. A second preionization electrode is provided outside the main electrode along the body surface outside the first preionization electrode, and the first preionization electrode and the second preionization electrode are provided on the dielectric surface. A pre-ionization source which is provided with a zigzag-shaped groove connecting the electrodes and which applies a voltage between the first pre-ionization electrode and the second pre-ionization electrode to generate a creeping discharge in the groove on the surface of the dielectric.

A discharge excitation gas laser device according to a seventh aspect of the present invention is provided with the following means. [1] First and second main electrodes provided to face each other to cause a main discharge in the laser gas. [2] An excitation circuit connected to the first and second main electrodes. [3] A dielectric is disposed along the side of at least one of the first and second main electrodes, and a first preionization electrode is provided along the surface of the dielectric. A second preionization electrode is provided outside the main electrode along the body surface outside the first preionization electrode, and the first preionization electrode and the second preionization electrode are provided on the dielectric surface. A preionization source which is provided with a meandering groove connecting the electrodes and which applies a voltage between the first preionization electrode and the second preionization electrode to generate a creeping discharge in the groove on the surface of the dielectric.

[0029]

In the discharge-excited gas laser device according to claim 1 of the present invention, not only the structure of the discharge part can be simplified, but also the preionization source does not affect the gas flow. The blast efficiency of the circulator can be improved, impurities in the main discharge space can be sufficiently removed, and stable main discharge is formed even during high repetition operation in which main discharge is performed several hundred times or more per second. can do.

In the discharge-excited gas laser device according to the second aspect of the present invention, at least one of the first preionization electrode and the second preionization electrode is provided with a protrusion serving as a starting point of the creeping discharge. Therefore, the creeping discharge can always be started from a fixed position, and the variation in the creeping discharge state between shots can be reduced, so that a similar spatial distribution of preionization electrons can always be obtained. A stable laser output can be obtained by the formed main discharge.

Further, in the discharge-excited gas laser device according to claim 3 of the present invention, since the main electrode also serves as the first preliminary ionization electrode, the structure of the discharge part can be further simplified. Since the preionization source itself approaches the main discharge space, a high preionization electron density can be obtained in the main discharge space, more stable main discharge can be formed, and the laser can be excited efficiently.

Further, in the discharge-excited gas laser device according to the fourth aspect of the present invention, since the groove is formed on the dielectric surface in the direction connecting the first preionization electrode to the second preionization electrode, the inner surface of the groove is extended. Creeping discharge occurs, the current density flowing through the creeping discharge can be increased, and the intensity of the ultraviolet light generated from the creeping discharge can be increased.A higher preionization electron density can be obtained in the main discharge space, and a stable main ionization can be obtained. A discharge can be formed and a laser can be efficiently excited.

In the discharge-excited gas laser device according to claim 5 of the present invention, the direction of the groove formed on the surface of the dielectric is such that the first preionization electrode and the second preionization electrode are connected in the shortest distance. Since it is diagonal, the surface area of the creeping discharge, which is an ultraviolet light source, can be increased without lowering the current density flowing in the creeping discharge, resulting in a higher preionization electron density and a more stable main discharge. In addition, highly efficient laser oscillation can be obtained.

In the discharge-excited gas laser device according to the sixth aspect of the present invention, since the shape of the groove formed on the surface of the dielectric is zigzag, the ultraviolet light source is similarly reduced without lowering the current density flowing during the creeping discharge. Since the surface area of the surface discharge can be increased, a high preliminary ionization electron density can be obtained, a more stable main discharge can be formed, and highly efficient laser oscillation can be obtained.

Further, in the discharge-excited gas laser device according to the seventh aspect of the present invention, the groove formed on the surface of the dielectric has a meandering shape. Since the surface area of the surface discharge that is the light source can be increased, a high preliminary ionization electron density can be obtained, a stable main discharge can be formed, and highly efficient laser oscillation can be obtained.

[0036]

EXAMPLES Example 1. The configuration of the first embodiment of the present invention will be described with reference to FIGS. 1 and 2. 1 is a perspective view showing the configuration of a discharge part of a discharge excitation gas laser device according to a first embodiment of the present invention. In the figure, FIG. 14 and FIG.
The same reference numerals denote the same or corresponding parts. In FIG. 1, reference numeral 13 is a partial reflection mirror forming one side of the optical resonator, and reference numeral 14 is a total reflection mirror forming the other side of the optical resonator. In the discharge part shown in the first embodiment, the preliminary ionization source 8
3 are arranged along each side of the second main electrode 6.

The preionization source 8 shown in the first embodiment uses the derivative 3 having a rectangular prism shape. First and second
Each of the preionization electrodes 1 and 2 is made of an L-shaped metal plate and has a structure in which the dielectric 3 is sandwiched between the two preionization electrodes 1 and 2. When a voltage is applied between the first preliminary ionization electrode 1 and the second preliminary ionization electrode 2, the first preliminary ionization electrode 1 and the second preliminary ionization electrode 2 will face each other on the surface of the dielectric 3 where the first preliminary ionization electrode 1 and the second preliminary ionization electrode 2 face each other. Ionization electrode 1 and second preionization electrode 2
The corona streamer progresses from the end portions of the electrodes toward the electrodes facing each other. When the corona streamer generated from the second preionization electrode 2 reaches the first preionization electrode 1 or comes into contact with the corona streamer developing from the first preionization electrode 1, the first and second preionization electrodes The ionization electrodes 1 and 2 are short-circuited, and the creeping discharge 4 starts. Preliminary ionization of the main discharge space is performed by the ultraviolet light generated from this creeping discharge 4.

FIG. 2 is a diagram showing a circuit configuration of the discharge excitation gas laser device according to the first embodiment of the present invention. In FIG. 2, the discharge excitation gas laser device according to the first embodiment includes an excitation circuit 15 connected between the first and second main electrodes 5 and 6, and a first and second preliminary ionization electrode 1. 2, a preionization circuit 16 connected between the two, and a delay signal generator 17 for controlling the operation timing of the excitation circuit 15 and the preionization circuit 16.

Next, the operation will be described. The delay signal generator 17 generates an excitation circuit drive signal and a preliminary ionization circuit drive signal based on a reference signal from the outside or the delay signal generator 17 itself. The excitation circuit 15 and the preliminary ionization circuit 16 start operating immediately upon receiving the excitation circuit drive signal and the preliminary ionization circuit drive signal, respectively. The second main electrode 6 and the first preionization electrode 1 are both at ground potential, and the excitation circuit 15 causes the first main electrode 5 to
The second preionization electrode 2 is connected to the second preionization electrode 2 by the preionization circuit 16.
A voltage is applied to each. The delay signal generator 17 can generate the excitation circuit drive signal and the preionization circuit drive signal at an arbitrary delay time. Excitation circuit 15
By setting the operation timings of the pre-ionization circuit 16 and the pre-ionization circuit to appropriate values, a glow-shaped main discharge is formed between the main electrodes using the electrons generated by the pre-ionization as seeds, and the laser gas in the main discharge space is excited. To be done. In FIG. 2, the direction perpendicular to the paper surface is the optical axis direction, and laser light is extracted by installing an optical resonator consisting of a total reflection mirror and a partial transmission mirror in front of and behind the main electrode.

As shown in FIG. 1, if the preionization source 8 is installed on the side of the main electrode, the preionization source 8 can efficiently replace the gas in the main discharge space without disturbing the gas flow. Therefore, stable main discharge can always be formed and highly efficient laser oscillation can be obtained even during repeated operation in which main discharge is continuously performed at a rate of several tens to several hundreds of times per second. Further, for the same reason, it is not necessary to disperse the preionization sources 8 in a large number, so that the number of the preionization sources 8 themselves can be reduced by generating the creeping discharges 4 at a plurality of locations on the surface of one dielectric 3. Therefore, the structure of the discharge part is simplified, and the discharge part can be easily assembled and adjusted.

Example 2. The second embodiment of the present invention will be described with reference to FIG. FIG. 3 is a perspective view showing a preionization source of a discharge excitation gas laser device according to a second embodiment of the present invention. In FIG. 2, reference numeral 18 is a plurality of triangular protrusions provided on the second preionization electrode 2 to serve as the starting point of the creeping discharge 4. The installation position of the preionization source 8 is the same as that of the first embodiment shown in FIG.

When a voltage is applied between the first preionization electrode 1 and the second preionization electrode 2, an electric field is concentrated at the tip of the triangular protrusion 18, and this portion is used as a starting point on the surface of the dielectric 3. A corona streamer progresses along the first preionization electrode 1. When the corona streamer propagating from the second preionization electrode 2 reaches the first preionization electrode 1 or comes into contact with the corona streamer propagating from the first preionization electrode 1, the first and second preparatory electrodes The ionization electrodes 1 and 2 are short-circuited, and the creeping discharge 4 starts.

As described above, if the projections 18 for promoting electric field concentration are provided at positions where the first preionization electrode 1 and the second preionization electrode 2 face each other, the projections 18 are always provided. Since the creeping discharge 4 can be started from a fixed position, the variation in the state of the creeping discharge 4 between shots can be reduced, and the variation in the spatial distribution of the preliminary ionization electrons generated by the creeping discharge 4 can also be reduced. Get smaller. Therefore, the same main discharge can always be formed, and a stable laser output can be obtained.

Example 3. A third embodiment of the present invention will be described with reference to FIG. FIG. 4 is a perspective view showing a preionization source of a discharge excitation gas laser device according to a third embodiment of the present invention. The installation position of the preliminary ionization source 8 is the same as that of the first embodiment shown in FIG.

In the second embodiment described above, only one of the preionization electrodes was provided with the projection 18 as the starting point of the creeping discharge 4. However, in the third embodiment, as shown in FIG. , A plurality of triangular protrusions 18 are provided on the upper surface of the dielectric 3 at positions substantially facing both the first preionization electrode 1 and the second preionization electrode 2.

When a voltage is applied between the first preionization electrode 1 and the second preionization electrode 2, the first preionization electrode 1,
In both the second preionization electrode 2 and the electric field concentrate on the tip of the triangular protrusion 18, the corona streamer advances from this point. The creeping discharge 4 is started between the protrusions 18 due to the contact between corona streamers generated from the protrusions 18 facing each other, and preliminary ionization of the main discharge space is performed.

If both of the preionization electrodes are provided with the protrusions 18 which are the starting points of the creeping discharge 4, it is possible to keep the positions of both ends of the creeping discharge 4 constant at all times. It is possible to reduce the variation of the state,
Not only can the output be stabilized, but the expansion of the discharge path of the creeping discharge 4 can be prevented, so that the current density in the creeping discharge 4 can be increased and the intensity of the ultraviolet light from the creeping discharge 4 can be increased. As a result, the number of pre-ionized electrons generated increases, more stable main discharge is obtained, and the laser can be excited efficiently.

Example 4. A fourth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a perspective view showing a preionization source of a discharge excitation gas laser device according to a fourth embodiment of the present invention. Example 1, Example 2 and Example 3 described above
The preionization source 8 shown in 1 has a configuration in which one dielectric material 3 is provided with one first preionization electrode 1 and one second preionization electrode 2, respectively. The preionization source 8 of the fourth embodiment shown in FIG. 5 is provided with a plurality of second preionization electrodes 2 for one dielectric 3. In FIG. 5, reference numeral 19 is a diversion coil, and reference numeral 20 is a power supply terminal for applying a voltage to the second preionization electrode 2. The installation position of the preliminary ionization source 8 in the discharge part is the same as that of the first embodiment shown in FIG.

As described in the third embodiment, when the creeping discharge 4 is generated at a plurality of locations of the pair of preionization electrodes, the shape of the protrusions provided on the preionization electrodes and the surface condition of the dielectric material are not uniform. If it is not sufficient, the creeping discharge 4 will not start all at once from each projection but will start at the most likely location. When the creeping discharge 4 starts at a part of the electrode, the potential of the entire preionization electrode decreases, which hinders the progress of the creeping discharge 4 at other portions. For this reason, the current flowing through the creeping discharge 4 at each location varies, and the intensity of the ultraviolet light generated from the current also loses uniformity. As a result, it becomes difficult to form a spatially uniform main discharge.

In the structure of the preionization source 8 shown in FIG. 5, a creeping discharge 4 is generated by applying a voltage between the power supply terminal 20 and the first preionization electrode 1. Since the shunt coil 19 is connected to each of the second preionization electrodes 2 and the power supply terminal 20, the creeping discharge 4 is generated only from a part of the plurality of second preionization electrodes 2. Even after the start, the potential of the other second preionization electrode 2 is maintained by the self-inductance of the diversion coil 19. Therefore, the second preionization electrode 2 and the first preionization electrode 1 are not affected by the arrangement of the plurality of second preionization electrodes 2 and the variation in the dielectric surface state.
A uniform creeping discharge 4 is obtained between them, a uniform main discharge is formed, and highly efficient laser oscillation is obtained.

Example 5. A fifth embodiment of the present invention will be described with reference to FIG. FIG. 6 is a diagram showing a discharge part of a discharge excitation gas laser device according to a fifth embodiment of the present invention. In Example 5 shown in FIG. 6, the second main electrode 6 also serves as the first preionization electrode. In FIG. 6, the direction perpendicular to the plane of the drawing is the optical axis, and laser light is extracted by installing an optical resonator consisting of a total reflection mirror and a partial transmission mirror before and after the main electrode.

In the fifth embodiment, a voltage is applied between the second preionization electrode 2 and the second main electrode 6 to generate a creeping discharge 4, thereby preliminarily ionizing the main discharge space. First,
If the second main electrodes 5 and 6 also serve as the first preionization electrode 1, the number of constituent parts of the discharge part can be reduced, so that the structure of the discharge part can be simplified and the assembly and adjustment can be further facilitated. In addition to being easy to perform, the creeping discharge 4, which is the source of ultraviolet light, approaches the main discharge space, so that a higher preionization electron density is obtained in the main discharge space, and a more uniform and stable main discharge is formed. However, the laser excitation efficiency can be increased.

Example 6. A sixth embodiment of the present invention will be described with reference to FIG. FIG. 7 is a diagram showing a discharge part of a discharge excitation gas laser device according to a sixth embodiment of the present invention. In each of the above-described embodiments, the configuration of the discharge unit in which a plurality of preionization sources 8 are installed along the side of the first or second main electrode 5, 6 or the preionization source 8 is shown. Came. In Example 6 shown in FIG. 7, an integral material that surrounds the periphery of the second main electrode 6 is used for the dielectric 3 in the preionization source. A first preionization electrode 1 and a second preionization electrode 2 are installed.

According to the structure of the sixth embodiment, the number of constituent parts of the discharge part can be further reduced, so that the assembling and adjustment can be performed more easily. Although FIG. 7 shows an example in which an integral dielectric body surrounding the second main electrode 6 is used, the same effect can be obtained even if the first main electrode 5 is surrounded by the dielectric body 3. To be Also, on the left and right of the first or second main electrode 5, 6,
Each of the dielectrics 3 having the length of the main electrode may be used one by one. Further, in the above-described dielectric structure, if the first or second main electrode 5 or 6 also serves as the first preionization electrode 1, the number of constituent parts of the discharge part can be further reduced, and the structure can be simplified. Not only can the assembly and adjustment be performed, but also the creeping discharge 4 can be brought closer to the main discharge space, so that a higher preliminary ionization electron density can be obtained,
A stable main discharge can be formed.

Example 7. A seventh embodiment of the present invention will be described with reference to FIG. FIG. 8 is a diagram showing a discharge part of a discharge excitation gas laser device according to a seventh embodiment of the present invention. In each of the above embodiments, the case where the preionization source 8 is installed along the side of one of the first and second main electrodes 5 and 6 has been described. In Example 7 shown in FIG. 8, a preliminary ionization source 8 is installed along the lateral sides of both the first and second main electrodes 5 and 6. In FIG.
Reference numeral 21 is a preionization capacitor.

Next, the operation will be described. A first main electrode 5 and a first preionization electrode 1a in a preionization source (upper preionization source) installed along the side of the first main electrode 5;
Also, the second main electrode 6 and the first preionization electrode 1b in the preionization source (lower preionization source) installed along the side of the second main electrode 6 have the same potential, and The second main electrode 6 is grounded.

When a high voltage is applied between the first main electrode 5 and the second main electrode 6 by the excitation circuit 15, if the preionization capacitor 21 is not in the charged state, the first preelectrode in the upper preionization source Pre-ionization electrode 1a and second pre-ionization electrode 2a
And the first preionization electrode 1b in the lower preionization source
The voltage between the main electrodes is divided and applied between the second preionization electrode 2b and the second preionization electrode 2b. Since the creeping discharge starting voltage between the preliminary ionizing electrodes is sufficiently lower than the discharge starting voltage between the main electrodes,
First, the creeping discharge 4 starts at the upper preionization source and the lower preionization source. When the creeping discharge 4 starts, between the first preionization electrode 1a and the second preionization electrode 2a in the upper preionization source, and between the first preionization electrode 1b and the second preionization electrode 2b in the lower preionization source. Is short-circuited, but the charge flowing through the creeping discharge 4 is transferred to the preionization capacitor 2
By storing at 1, the voltage applied between the first main electrode 5 and the second main electrode 6 is maintained. When the voltage applied between the main electrodes reaches the discharge start voltage between the main electrodes 5 and 6, the main discharge starts based on the electrons generated in the main discharge space by the creeping discharge 4 in the preionization source, The laser gas is excited. In addition, the electric charges stored in the preionization capacitor 21 are discharged to the discharge field when the main discharge starts. In FIG. 8, the direction perpendicular to the paper surface is the optical axis,
Laser light is extracted by installing an optical resonator consisting of a total reflection mirror and a partial transmission mirror before and after the main electrode.

As described above, the first and second main electrodes 5,
6 If pre-ionization sources are installed along both sides, a higher pre-ionization electron density can be obtained in the main discharge space, so that a more stable and uniform main discharge can be formed and a highly efficient laser can be formed. Oscillation is obtained. Further, the first main electrode 5 is the first preionization electrode 1a of the upper preionization source, and the second main electrode 6 is the first preionization electrode 1 of the lower preionization source.
It may be configured to also serve as b.

Example 8. Embodiment 8 of the present invention will be described with reference to FIG. FIG. 9 is a perspective view showing a preionization source according to Embodiment 8 of the present invention. In the drawing, reference numeral 22 is a creeping discharge groove formed in a direction connecting each of the plurality of second preliminary ionization electrodes 2 and the first preliminary ionization electrode 1.
The preionization source of the eighth embodiment is also installed along the side of the main electrode in the discharge part in the same longitudinal direction as in the above-described respective embodiments.

In the preionization source 8 shown in the above-mentioned Example 7, the preionization electrode was installed on the flat surface of the dielectric 3. In the eighth embodiment, the width of the dielectric 3 is sufficiently large in the direction connecting the plurality of second preionization electrodes 2 and the first preionization electrode 1 on the surface of the dielectric that causes the creeping discharge 4. A narrow narrow groove (creeping groove 22) is provided. First
A metal plate is used for the preionization electrode 1 and is fixed to the side surface of the dielectric 3. Further, the plurality of second preionization electrodes 2 are fixed to the side surface of the dielectric 3 facing the first preionization electrode 1 so that the tips bent in a hook shape are in contact with the bottom surface of the creeping discharge groove 22. There is.

With the configuration of the preionization source 8 as described above, when a voltage is applied between the first preionization electrode 1 and the second preionization electrode 2, the creeping discharge occurs only inside the creeping discharge groove 22. 4 occurs. By providing the creeping discharge groove 22 in this way, the path of the creeping discharge 4 can be arbitrarily designated and the spread of the discharge path can be prevented, so that a high current density can be obtained during the creeping discharge, and the ultraviolet rays generated from it can be obtained. The light intensity also increases. As a result, more preionization electron density can be obtained in the main discharge space, a stable main discharge can be formed, and the laser can be excited efficiently. In addition, as shown in Example 5, the first,
In addition, the second main electrodes 5 and 6 may also serve as the first preliminary ionization electrode.

Example 9. The ninth embodiment of the present invention will be described with reference to FIG. FIG. 10 is a perspective view showing a preionization source of Example 9 of the present invention. Although the pre-ionization source 8 in which the plurality of pre-ionization grooves 22 corresponding to the plurality of second pre-ionization electrodes 2 are provided in the dielectric 3 has been described in the above-described Example 8, one pre-ionization source 8 is provided as shown in FIG. Even if a plurality of creeping discharge grooves 22 are formed on the surface of the dielectric 3 corresponding to the protrusions 18 provided on the second preionization electrode 2 for designating the origins of the creeping discharges, the same results as in Example 8 are obtained. Similar effects are obtained. In addition, as shown in Example 5, the first and second
The main electrodes 5 and 6 may also serve as the first preionization electrode.

Example 10. The tenth embodiment of the present invention will be described with reference to FIG. FIG. 11 is a perspective view showing a preliminary ionization source according to the tenth embodiment of the present invention. The creeping discharge groove 22 provided in the dielectric 3 shown in the above-described Example 9 is provided with the first preionization electrode 1 and the second preionization electrode 2.
Were formed in the direction connecting the shortest distance. This Example 1
The creeping discharge groove 22 of the preionization source at 0 is formed obliquely to the direction connecting the first preionization electrode 1 and the second preionization electrode 2 with the shortest distance. If the groove 22 for creeping discharge is provided obliquely to the direction connecting the first preionization electrode 1 and the second preionization electrode 2 with the shortest distance in this way, the current density flowing during the creeping discharge is lowered. However, since the surface area of the surface discharge 4 which is an ultraviolet light source is increased, the amount of ultraviolet light generated from the surface discharge 4 is increased and a high preionization electron density is obtained. Further, the spatial uniformity of the distribution of the pre-ionization electrons is also increased, so that a more stable main discharge can be formed and highly efficient laser oscillation can be obtained.

In the tenth embodiment, the example in which the second preionization electrode 2 divided into a plurality of parts is used is shown. However, the second preionization electrode 2 having a plurality of projections for starting the creeping discharge 4 is used. The same effect can be obtained even if the groove 22 for creeping discharge is provided for each protrusion. In addition, as shown in Example 5, the first and second main electrodes 5, 6
May also serve as the first preionization electrode.

Example 11. An eleventh embodiment of the present invention will be described with reference to FIG. FIG. 12 is a perspective view showing a preionization source of Embodiment 11 of the present invention. The creeping discharge grooves 22 shown in the above-described Example 10 all had a linear shape. The creeping discharge groove 22 of the preionization source 8 of Example 11 has a zigzag shape. Even when the creeping discharge groove 22 is formed in a zigzag shape as described above, the discharge distance can be extended without decreasing the current density flowing in the creeping discharge, and the surface area of the creeping discharge, which is a light emitter, can be increased. Since the density is obtained and the spatial uniformity of the preionization electron distribution is also increased, a more stable main discharge can be formed, and highly efficient laser oscillation can be obtained.

In the eleventh embodiment, the example in which the second preionization electrode 2 divided into a plurality of parts is used is shown. However, the second preionization electrode 2 having a plurality of projections for starting the creeping discharge 4 is used. The same effect can be obtained even if the groove 22 for creeping discharge is provided for each protrusion. Further, as shown in the fifth embodiment, the first and second main electrodes 5 and 6 may also serve as the first preliminary ionization electrode.

Example 12 The twelfth embodiment of the present invention will be described with reference to FIG. FIG. 13 is a perspective view showing a preionization source of Example 12 of the invention. In Example 11 described above, the creeping discharge groove 2 having a zigzag shape is used.
The preliminary ionization source 8 using 2 is shown. This Example 1
The creeping discharge groove 22 of the preionization source 8 in No. 2 has a meandering shape. Even when the creeping discharge groove 22 has a meandering shape as described above, the discharge distance can be extended without decreasing the density of the current flowing in the creeping discharge 4, and the surface area of the creeping discharge 4, which is a light emitter, can be increased. The ionization electron density is obtained, and the spatial uniformity of the preliminary ionization electron distribution is also increased, so that a more stable main discharge can be formed and highly efficient laser oscillation can be obtained.

In the twelfth embodiment, an example in which the second preionization electrode 2 divided into a plurality of parts is used is shown. However, the second preionization electrode having a plurality of projections for starting the creeping discharge 4 is used. However, the same effect can be obtained even if the creeping discharge groove 22 is provided for each protrusion. Further, as shown in the fifth embodiment, the first and second main electrodes 5 and 6 may also serve as the first preliminary ionization electrode.

[0069]

As described above, the discharge-excited gas laser device according to the first aspect of the present invention includes the first and second main electrodes provided to face each other in order to cause the main discharge in the laser gas. An excitation circuit connected to the first and second main electrodes and a dielectric material is disposed along a side of at least one of the first and second main electrodes, A first preionization electrode is provided along the surface of the body, and a second preionization electrode is provided along the surface of the dielectric outside the main electrode with respect to the first preionization electrode; And a second preionization electrode for generating a creeping discharge on the dielectric surface by applying a voltage between the second preionization electrode and the second preionization electrode. In addition, it is not necessary to use many preionization sources, and the structure of the discharge part is There is an effect that it is possible to simplify the. Further, since impurities in the main discharge space can be sufficiently removed without lowering the ventilation efficiency of the gas circulation machine, it is stable even during high repetition operation in which main discharge is performed several hundred times or more per second. This has the effect of forming a main discharge.

As described above, the discharge-excited gas laser device according to claim 2 of the present invention includes the first and second main electrodes, which are opposed to each other to cause the main discharge in the laser gas, and the first and second main electrodes. An excitation circuit connected to the first and second main electrodes, and a dielectric disposed alongside the main electrode of at least one of the first and second main electrodes, and the dielectric surface. A first preionization electrode is provided along the first preionization electrode, and a second preionization electrode is provided outside the first preionization electrode along the dielectric surface outside the main electrode.
Further, a plurality of projections for starting the creeping discharge are provided on at least one of the first and second preionization electrodes, and a voltage is applied between the first preionization electrode and the second preionization electrode. Since a preionization source that applies a voltage to generate a creeping discharge on the surface of the dielectric is provided, the creeping discharge can always be started from a fixed position, and the variation in the creeping discharge state between shots can be reduced. And the stable laser output can be obtained.

As described above, the discharge-excited gas laser device according to claim 3 of the present invention includes the first and second main electrodes, which are opposed to each other to cause a main discharge in the laser gas, and the first and second main electrodes. An excitation circuit connected to the first and second main electrodes, and a dielectric is arranged along the side of at least one of the first and second main electrodes, and the dielectric is One of the arranged main electrodes also serves as a first preionization electrode, and a second preionization electrode is provided along the surface of the dielectric and outside the main electrode.
And a preionization source for generating a creeping discharge on the surface of the dielectric by applying a voltage between the second preionization electrode and the second preionization electrode, further simplifying the structure of the discharge part. In addition, the preionization source itself approaches the main discharge space, a high preionization electron density is obtained in the main discharge space, a more stable main discharge can be formed, and the laser can be excited efficiently. Produce an effect.

As described above, the discharge-excited gas laser device according to claim 4 of the present invention includes the first and second main electrodes, which are opposed to each other to cause a main discharge in the laser gas, and the first and second main electrodes. An excitation circuit connected to the first and second main electrodes, and a dielectric disposed alongside the main electrode of at least one of the first and second main electrodes, and the dielectric surface. A first preionization electrode is provided along the first preionization electrode, and a second preionization electrode is provided outside the first preionization electrode along the dielectric surface outside the main electrode.
Further, a groove connecting the first preionization electrode and the second preionization electrode is provided on the dielectric surface, and a voltage is applied between the first preionization electrode and the second preionization electrode. Since a pre-ionization source for generating a creeping discharge in the groove on the dielectric surface is provided, the creeping discharge occurs only inside the groove, and not only the creeping discharge path can be specified but also the current flowing through the creeping discharge. The density can be increased to increase the intensity of ultraviolet light generated from the creeping discharge, a high preliminary ionization electron density can be obtained in the main discharge space, and a more stable main discharge can be formed.

As described above, the discharge-excited gas laser device according to claim 5 of the present invention includes the first and second main electrodes, which are opposed to each other to cause a main discharge in the laser gas, and the first and second main electrodes. An excitation circuit connected to the first and second main electrodes, and a dielectric disposed alongside the main electrode of at least one of the first and second main electrodes, and the dielectric surface. A first preionization electrode is provided along the first preionization electrode, and a second preionization electrode is provided outside the first preionization electrode along the dielectric surface outside the main electrode.
Further, a groove is provided on the surface of the dielectric material obliquely with respect to a direction connecting the first preliminary ionization electrode and the second preliminary ionization electrode at the shortest distance, and the first preliminary ionization electrode and the second preliminary ionization electrode are provided. Since a preionization source for generating a creeping discharge in the groove on the dielectric surface by applying a voltage between the ionizing electrodes is provided, the surface density of the creeping discharge, which is an ultraviolet light source, does not decrease the current density flowing during the creeping discharge. Is increased, a higher preliminary ionization electron density is obtained, a more stable main discharge is formed, and highly efficient laser oscillation is obtained.

As described above, the discharge-excited gas laser device according to claim 6 of the present invention includes the first and second main electrodes, which are opposed to each other to cause a main discharge in the laser gas, and the first and second main electrodes. An excitation circuit connected to the first and second main electrodes, and a dielectric disposed alongside the main electrode of at least one of the first and second main electrodes, and the dielectric surface. A first preionization electrode is provided along the first preionization electrode, and a second preionization electrode is provided outside the first preionization electrode along the dielectric surface outside the main electrode.
Further, a zigzag-shaped groove connecting the first preionization electrode and the second preionization electrode is provided on the dielectric surface, and a voltage is applied between the first preionization electrode and the second preionization electrode. Since a preionization source for generating a creeping discharge in the groove on the surface of the dielectric is applied, the discharge distance of the creeping discharge can be increased and the surface area of the light source can be increased without lowering the current density. In addition, high preionization electron density is obtained, stable main discharge is formed, and highly efficient laser oscillation is obtained.

As described above, the discharge-excited gas laser device according to claim 7 of the present invention includes the first and second main electrodes, which are opposed to each other to cause a main discharge in the laser gas, and the first and second main electrodes. An excitation circuit connected to the first and second main electrodes, and a dielectric disposed alongside the main electrode of at least one of the first and second main electrodes, and the dielectric surface. A first preionization electrode is provided along the first preionization electrode, and a second preionization electrode is provided outside the first preionization electrode along the dielectric surface outside the main electrode.
Further, a meandering groove connecting the first preionization electrode and the second preionization electrode is provided on the dielectric surface, and a voltage is applied between the first preionization electrode and the second preionization electrode. Since a preionization source for generating a creeping discharge in the groove on the surface of the dielectric is applied, the discharge distance of the creeping discharge can be increased and the surface area of the light source can be increased without lowering the current density. , High preionization electron density is obtained,
The effect that stable main discharge is formed and highly efficient laser oscillation can be obtained.

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration of a discharge part of a discharge excitation gas laser device according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a circuit configuration of the discharge excitation gas laser device according to the first embodiment of the present invention.

FIG. 3 is a perspective view showing a preionization source of a discharge excitation gas laser device according to a second embodiment of the present invention.

FIG. 4 is a perspective view showing a preionization source of a discharge excitation gas laser device according to a third embodiment of the present invention.

FIG. 5 is a perspective view showing a preionization source of a discharge excitation gas laser device according to a fourth embodiment of the present invention.

FIG. 6 is a schematic diagram showing a structure of a discharge part of a discharge excitation gas laser device according to a fifth embodiment of the present invention.

FIG. 7 is a perspective view showing a preionization source of a discharge excitation gas laser device according to a sixth embodiment of the present invention.

FIG. 8 is a schematic diagram showing a discharge part of a discharge excitation gas laser device according to a seventh embodiment of the present invention.

FIG. 9 is a perspective view showing a preionization source of a discharge excitation gas laser device according to an eighth embodiment of the present invention.

FIG. 10 is a perspective view showing a preionization source of a discharge excitation gas laser device according to Embodiment 9 of the present invention.

FIG. 11 is a perspective view showing a preionization source of a discharge excitation gas laser device according to Embodiment 10 of the present invention.

FIG. 12 is a perspective view showing a preionization source of a discharge excitation gas laser device according to an eleventh embodiment of the present invention.

FIG. 13 is a perspective view showing a preionization source of a discharge excitation gas laser device according to Embodiment 12 of the present invention.

FIG. 14 is a perspective view showing a preliminary ionization source of a conventional discharge excitation gas laser device.

FIG. 15 is a perspective view showing a discharge part of a conventional discharge excitation gas laser device.

FIG. 16 is a schematic diagram showing a discharge part of a conventional discharge excitation gas laser device.

FIG. 17 is a schematic diagram showing a discharge part of a conventional discharge excitation gas laser device.

[Explanation of symbols]

 1 First Preionization Electrode 2 Second Preionization Electrode 3 Dielectric 4 Creeping Discharge 5 First Main Electrode 6 Second Main Electrode 8 Preionization Source 15 Excitation Circuit 16 Preionization Seaway 17 Delayed Signal Generator 18 Protrusion 22 Groove for creeping discharge

Front page continuation (72) Inventor Yoshio Saito 8-1-1 Tsukaguchihonmachi, Amagasaki City Mitsubishi Electric Corporation Central Research Institute (72) Inventor Takeo Haruta 8-1-1 Tsukaguchihonmachi, Amagasaki City Mitsubishi Electric Corporation Central In the laboratory

Claims (7)

[Claims] 1. A first and a second main electrode provided to face each other for causing a main discharge in a laser gas, and an excitation circuit connected to the first and the second main electrode.
A dielectric is arranged along the side of at least one of the first and second main electrodes, a first preionization electrode is provided along the surface of the dielectric, and the surface of the dielectric is A second preionization electrode is provided outside the first preionization electrode with respect to the main electrode, and a voltage is applied between the first preionization electrode and the second preionization electrode. And a preionization source for generating a creeping discharge on the surface of the dielectric material. 2. A first and a second main electrode provided to face each other to cause a main discharge in a laser gas, and an excitation circuit connected to the first and the second main electrode.
A dielectric is arranged along the side of at least one of the first and second main electrodes, a first preionization electrode is provided along the surface of the dielectric, and a dielectric layer is provided on the surface of the dielectric. A second preionization electrode is provided outside the first preionization electrode with respect to the main electrode, and the first and second preionization electrodes are provided.
Of at least one of the preionization electrodes, the plurality of projections for starting the creeping discharge are provided, and a voltage is applied between the first preionization electrode and the second preionization electrode to produce the dielectric surface. A discharge excitation gas laser device, comprising: a preionization source for generating a creeping discharge. 3. A first and a second main electrode, which are opposed to each other to cause a main discharge in a laser gas, and an excitation circuit connected to the first and the second main electrodes.
A dielectric is arranged along the side of at least one of the first and second main electrodes, and one main electrode on which the dielectric is arranged is also used as a first preionization electrode,
And a second outer surface with respect to the main electrode along the dielectric surface.
And a preionization source for applying a voltage between the first preionization electrode and the second preionization electrode to generate a creeping discharge on the surface of the dielectric. Characteristic discharge-excited gas laser device. 4. A first and a second main electrode provided to face each other for causing a main discharge in a laser gas, and an excitation circuit connected to the first and the second main electrode.
A dielectric is arranged along the side of at least one of the first and second main electrodes, a first preionization electrode is provided along the surface of the dielectric, and a dielectric layer is provided on the surface of the dielectric. A second preionization electrode is provided outside the first preionization electrode with respect to the main electrode, and the first preionization electrode and the second preionization electrode are provided on the dielectric surface. And a preionization source for generating a creeping discharge in the groove of the dielectric surface by applying a voltage between the first preionization electrode and the second preionization electrode. Discharge excitation gas laser device. 5. A first and a second main electrode, which are opposed to each other to cause a main discharge in a laser gas, and an excitation circuit connected to the first and the second main electrodes.
A dielectric is arranged along the side of at least one of the first and second main electrodes, a first preionization electrode is provided along the surface of the dielectric, and a dielectric layer is provided on the surface of the dielectric. A second preionization electrode is provided outside the first preionization electrode with respect to the main electrode, and the first preionization electrode and the second preionization electrode are provided on the dielectric surface. A groove is provided obliquely to the direction connecting the shortest distances, and a voltage is applied between the first preliminary ionization electrode and the second preliminary ionization electrode to generate a creeping discharge in the groove on the dielectric surface. A discharge excitation gas laser device comprising: an ionization source. 6. A first and a second main electrode provided to face each other for causing a main discharge in a laser gas, and an excitation circuit connected to the first and the second main electrode.
A dielectric is arranged along the side of at least one of the first and second main electrodes, a first preionization electrode is provided along the surface of the dielectric, and a dielectric layer is provided on the surface of the dielectric. A second preionization electrode is provided outside the first preionization electrode with respect to the main electrode, and the first preionization electrode and the second preionization electrode are provided on the dielectric surface. A zigzag-shaped groove for connection is provided, and a preionization source for applying a voltage between the first preionization electrode and the second preionization electrode to generate a creeping discharge in the groove on the dielectric surface is provided. A discharge excitation gas laser device characterized by the above. 7. A first and a second main electrode provided to face each other to cause a main discharge in a laser gas, and an excitation circuit connected to the first and the second main electrode.
A dielectric is arranged along the side of at least one of the first and second main electrodes, a first preionization electrode is provided along the surface of the dielectric, and a dielectric layer is provided on the surface of the dielectric. A second preionization electrode is provided outside the first preionization electrode with respect to the main electrode, and the first preionization electrode and the second preionization electrode are provided on the dielectric surface. A meandering groove is provided, and a preionization source for applying a voltage between the first preionization electrode and the second preionization electrode to generate a creeping discharge in the groove on the dielectric surface is provided. A discharge excitation gas laser device characterized by the above.