JPH07275778A - Rotary cup type device for treating chemical - Google Patents

Abstract

PURPOSE:To prevent a seal member which has once attached from easily coming off and from generating dust even when a rotating cup is rotated at high speed. CONSTITUTION:An annular weir part is provided projectingly on the surface of the peripheral edge part of a rotary cup 2. An annular projection 28 is provided on the surface of the annular weir part, and also on the other hand, an annular groove which corresponds to the 2nd projection 28 and into which the projection 28 is inserted is provided recessingly. On the bottom part inside the projection, a fitting groove into which an annular O-ring 9 is inserted and which opens transversely is provided. The depth of the groove is set so that the upper side part of the O-ring 9 may be exposed outward from the fitting groove with the O-ring 9 being inserted into the annular groove. In the fitting groove, an upper inclined wall and a lower inclined wall having upward inclination and parallel to each other are formed. In the edge part inside the annular groove, a taper surface on which the exposed part of the O-ring 9 is abutted is formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the formation of a thin film on the surface of a wafer, a mask, a liquid crystal panel or the like, or the development or etching of the surface in the manufacturing process of semiconductor devices and masks, liquid crystal panels, etc. The present invention relates to a rotary cup type chemical liquid processing device that utilizes the centrifugal force of

[0002]

2. Description of the Related Art In a semiconductor manufacturing process, a coating film such as a photosensitive solution is uniformly applied on a substrate such as a wafer. A predetermined process is applied to such a coating film to manufacture a semiconductor product. Since the thickness of the coating film is usually as thin as a few microns, and a uniform thickness is required,
A chemical liquid processing apparatus 10 as shown in FIG. 7 that can satisfy the above requirements is used.

As shown in this figure, the chemical treatment device 10
Has a configuration including a rotary cup 20, a hood 30 that covers the upper surface of the rotary cup 20, and a casing 40 that rotatably supports the rotary cup 20 around its axis and covers the outer peripheral portion. There is. The substrate B is adsorbed and arranged on the upper surface of the rotating cup 20, the coating agent is dropped on the substrate B, and the rotating cup 20 is covered with the hood 30 to rotate the rotating cup 20 at a high speed. Is diffused to form a uniform coating film on the substrate B.

A hood 3 is provided on the outer peripheral edge of the rotary cup 20.
0 and the rotating cup 20 between the base mounting space S
A plurality of discharge holes 201 communicating with the outside are bored, and excess coating agent is discharged into the recovery passage 401 provided in the casing 40 via these discharge holes 201.

When an air vortex is formed on the substrate B by the high speed rotation of the rotary cup 20, ripples are formed on the surface of the coating film, and the uniformity of the thickness of the coating film is impaired. The upper part of the mounting space S is sealed by the hood 30. In order to ensure this sealed state, a ring groove 203 in the shape of a dovetail groove is formed in the annular projection 202 provided on the upper portion of the peripheral portion of the hood 30, and the ring groove 203 has flexibility such as rubber. An O-ring 204 formed of a sealing material is fitted.

Since the upper part of the O-ring 204 is slightly projected from the ring groove 203 to the outside, when the hood 30 is mounted on the rotary cup 20, the lower surface of the hood becomes the slightly projected part of the O-ring 204. The upper part of the board mounting space S is brought into contact with each other and is closed.

[0007]

By the way, in the conventional structure for closing the space S for mounting the substrate, the O-ring 204 is used.
When the upper surface portion (contact surface) of the hood 30 is fitted in the ring groove 203 so as to be flush, the lower surface of the hood 30 is
04, the O-ring 204 seals against the contact surface of the O-ring 04 without any clearance, and the upper part of the base mounting space S is effectively closed. However, the ring groove 203 prevents the O-ring 204 from coming off. Since the opening width is narrowed, the O-ring 204 is fitted while being pressed toward the ring groove 203, so that the density distribution in the circumferential direction of the O-ring 204 fitted in the ring groove 203 may become uneven. As a result, as a result, unevenness is formed on the contact surface of the O-ring 204.

Therefore, even if the hood 30 is put on the rotary cup 20, a gap is formed between the lower surface of the hood 30 and the O-ring 204 due to the above-mentioned unevenness, and the upper part of the board mounting space S is in a good closed state. However, the flow of air leaking from the gap causes a vortex in the substrate mounting space S, and a uniform coating film is not formed on the surface of the substrate B.

In order to eliminate such an inconvenience, it is conceivable to enlarge the opening of the ring groove 203 to have a shape different from that of the dovetail groove. With this arrangement, when the hood 30 is opened, the O-ring is formed on the back surface. There arises a new problem that 204 is attached and comes off the ring groove 203.

Further, when the hood 30 is mounted on the rotary cup 20 in an eccentric state, when the rotary cup 20 is rotated at a high speed, the peripheral surface portion of the hood 30 is a step wall formed outside the lower peripheral surface 202. It is said that the substrate B is contaminated and the yield of the coated product is reduced because the fine particles are generated due to this violent abrasion and are sucked into the substrate mounting space S in the negative pressure state. There are also problems.

The present invention has been made to solve the above-mentioned problems, and surely closes the upper part of the rotary cup in the space for mounting the base in a hermetically sealed state and removes the O-ring once mounted. It is an object of the present invention to provide a rotary cup type chemical liquid processing device that does not generate dust even when the rotary cup is rotated at a high speed.

[0012]

According to a first aspect of the present invention, there is provided a rotary cup type chemical liquid treatment device having a rotary cup and a hood which covers the rotary cup from above via an annular elastic seal member. In the cup type chemical liquid treatment device, an annular protrusion is provided on the upper surface of the peripheral portion of the rotary cup, and an annular groove into which the elastic seal member can be fitted is formed on the inner peripheral side surface of the annular protrusion, and the annular protrusion is formed. The upper end of the groove is formed with a restricting piece part for restricting the elastic seal member from coming off.

According to a second aspect of the present invention, there is provided the rotary cup type chemical liquid treatment device according to the first aspect, wherein the hood is partially exposed from the annular groove of the elastic seal member during coating. The inclined surface that comes into contact with the above surface is formed in an annular shape.

According to a third aspect of the present invention, there is provided the rotary cup type chemical liquid treatment device according to the first aspect, wherein the hood is partially exposed from the annular groove of the elastic seal member during coating. It is characterized in that a stepped surface composed of a vertical wall and a horizontal wall that abut on the surface is formed in an annular shape.

According to a fourth aspect of the present invention, there is provided the rotary cup-type chemical liquid treatment device according to any one of the first to third aspects, wherein the annular groove has a part of a lower portion of the annular groove. It is characterized in that the peripheral edge of the annular projection is formed by shallowly forming it.

According to a fifth aspect of the present invention, there is provided the rotary cup type chemical liquid treatment device according to the first or second aspect, wherein the inclined surface is a flat surface.

According to a sixth aspect of the present invention, there is provided the rotary cup type chemical liquid treatment device according to the first or second aspect, wherein the inclined surface has a curvature at least equal to or less than the curvature of the elastic seal member. It has a concave curved surface.

According to a seventh aspect of the present invention, there is provided the rotary cup type chemical liquid treatment device according to any one of the first to sixth aspects, wherein the rotary cup is concentric with the annular protrusion. An annular dustproof protrusion is formed on the inner peripheral side of the annular protrusion, and the hood is provided with an annular dustproof groove that fits into the protrusion when covered.

The rotary cup type chemical treatment device according to claim 8 of the present invention is the rotary cup type chemical treatment device according to any one of claims 1 to 7, wherein the annular projection has the annular groove and an outer peripheral side surface. It is characterized in that one or a plurality of holes penetrating therethrough are provided.

[0020]

According to the rotary cup type chemical liquid treatment device of the above-mentioned claim 1, the annular projection is formed with an annular groove into which the elastic seal member can be fitted, and an upper end of the annular groove. Has a restricting piece portion for restricting the elastic seal member from coming out, the elastic seal member once fitted by the retaining function of the overhang-like restricting piece portion formed in the fitting groove is inserted into the fitting groove. When the hood is lifted, the elastic member adheres to the back surface of the hood and is entrained in the hood, and the seal member does not come off the annular groove.

Further, since the annular groove does not have to be a dovetail groove as in the prior art due to the presence of the restriction piece portion, when the sealing member is attached to the annular groove, the sealing member is forcibly pressed and deformed. It is possible to surely avoid the problem that the exposed surface of the seal member does not become flush with each other due to the non-uniformity of the density distribution resulting from this, and thus the sealability is impaired.

According to the rotary cup type chemical liquid treatment apparatus of the second aspect, the hood is formed with an annular inclined surface that abuts the surface of the elastic seal member that is partially exposed from the annular groove when covered. Therefore, the inclined surface of the hood that presses the seal member receives a repulsive force obliquely upward from the seal member, so that the horizontal component of this repulsive force pushes the hood toward the center of rotation, and the hood is always the center of rotation of the rotating cup. The rubbing contact between the part of the hood and the part of the rotating cup caused by the eccentricity of the hood is effectively avoided, and the generation of fine dust due to the rubbing contact is prevented.

According to the rotary cup type chemical liquid treatment device of the third aspect, when the hood is covered, there is a step formed by a vertical wall and a horizontal wall that come into contact with the surface of the elastic seal member that is partially exposed from the annular groove. Since the surfaces are formed in an annular shape, stable sealing is performed with the vertical wall and the horizontal wall of the stepped surface sandwiching the exposed surface of the seal member. Since the vertical surface receives a repulsive force from the seal member toward the center of rotation, the repulsive force always pushes the hood back to the center of rotation of the rotating cup, causing a part of the hood and a part of the rotating cup caused by eccentricity. The rubbing contact is effectively avoided, and generation of fine dust due to the rubbing contact is prevented.

According to the rotary cup type chemical liquid treatment device of the above-mentioned claim 4, since the annular groove is formed by shallowly forming a part of the lower portion of the annular projection, the annular groove is formed in the annular groove. The fitted elastic seal member enters into a portion shallowly formed in the peripheral edge of the annular projection, and the fitted state of the elastic seal member in the annular groove is stabilized.

According to the rotary cup type chemical liquid treatment device of the fifth aspect, since the inclined surface formed on the hood is a flat surface, it is possible to form the inclined surface with a minimum work effort.

According to the rotary cup type chemical treatment device of the sixth aspect, since the inclined surface formed on the hood is a concave curved surface having a curvature that is at least less than or equal to the curvature of the elastic seal member, the inclined surface and the elastic surface are elastic. The contact area with the seal member is increased, and the sealing effect of the rotary cup by mounting the hood is further improved.

According to the rotary cup type chemical liquid treatment device of the seventh aspect, the rotary cup is provided with an annular dust-proof projection concentric with the annular projection on the inner peripheral side thereof, and the hood is provided on the rotary cup side at the time of coating. Since the annular dust-proof groove that fits into the dust-proof projection is provided, even if dust is generated due to the fitting of both dust-proof projections into the dust-proof groove, intrusion into the rotary cup is effectively prevented.

According to the rotary cup type chemical liquid treatment device of the eighth aspect, since one or a plurality of holes penetrating the annular projection are provided, when the seal member once mounted in the annular groove is removed. By inserting a metal fitting into this hole from the outer peripheral side and pressing it, the seal member can be easily taken out from the fitting groove.

[0029]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a partially cutaway perspective view showing an example of a rotary cup type chemical liquid processing device according to the present invention, and FIG. 2 is a sectional view taken along line AA. As shown in these figures, the chemical treatment device 1 attaches and detaches a disc-shaped rotary cup 2, a hood 3 covering the upper surface of the rotary cup 2, a casing 4 in which the rotary cup 2 is fitted, and a hood 3. The hood attachment / detachment mechanism 5, a cup rotation mechanism 6 for rotating the rotary cup 2, and a lifting mechanism 7 for lifting the rotary cup 2 are configured.

The rotary cup 2 comprises a medium diameter shaft portion 21 and an annular dish portion 22. The upper surface of the annular dish portion 22 is dimensioned so as to be flush with the upper surface of the medium-diameter shaft portion 21 or slightly flush with the upper surface of the medium-diameter shaft portion 21. B is placed so as to coincide with the central axis of the medium diameter shaft portion 21. An annular weir portion 22a protruding upward is provided on the outer peripheral edge portion of the annular dish portion 22, and the hood 3 is received by the annular weir portion 22a. The base mounting space S is formed in a portion surrounded by the annular weir portion 22a with the hood 3 attached.

A plurality of small-diameter discharge holes 201 are formed at predetermined intervals on the lower peripheral surface of the annular weir portion 22a and are inclined downward from the substrate mounting space S outward. Excess coating material in the board mounting space S is discharged to the outside through the hole 201.

A concentric rotating shaft 23 is rotatably coupled to the lower portion of the medium diameter shaft portion 21. An intake passage 23a is formed in the shaft center portion of the medium diameter shaft portion 21 and the rotary shaft 23 so as to penetrate them, and a tube 23b connected to the lower end portion of the rotary shaft 23 by operating a vacuum pump (not shown). The base B is sucked into the medium diameter shaft portion 21 via the.

The rotary cup 2 is fixed to the large-diameter shaft portion 24 with the small-diameter portion of the medium-diameter shaft portion 21 fitted in the cylindrical hole of the cylindrical large-diameter shaft portion 24. A flange portion is formed on the upper portion of the large-diameter shaft portion 24, and the annular dish portion 22 of the rotary cup 2 is fixed to the flange portion.

The lower portion of the large-diameter shaft portion 24 is fitted into the mounting hole P1 formed in the support base P, and the flange 25 is provided on the outer peripheral surface.
It is fitted into a support cylinder 25 having a through a bearing 26. Therefore, the rotary cup 2 is rotatable about the axis of the rotary shaft 23 with respect to the support base P.

The hood 3 has a hood main body 31, a cylindrical grip portion 32 having a central portion of the hood main body 31 protruding upward, and a bulging edge portion 33 in which an outer peripheral edge portion of the hood main body 31 bulges upward. It consists of This bulge 33
Is provided corresponding to the annular weir portion 22a, and the bottom portion of the bulging edge portion 33 contacts the upper surface portion of the annular weir portion 22a to close the rotary cup 2. On the top portion of the grip portion 32, the body portion 3 under the hood attachment / detachment mechanism 5 to enable attachment / detachment operation is performed.
A collar portion 32b having a diameter larger than that of 2a is formed.

The casing 4 has an annular body and is supported and fixed to the flange 25a with the large-diameter shaft portion 24 fitted therein, and the upper portion thereof surrounds the rotary cup 2.

An annular recovery passage 4 is provided inside the casing 4.
01 is formed, an annular discharge band hole 41 is provided in the upper portion of the recovery passage 401, and the opening of the discharge band hole 41 faces the discharge hole 201 formed in the annular dam portion 22a. Is provided. Therefore, the unwanted matter discharged from the base mounting space S of the rotary cup 2 is discharged through the discharge band hole 41.
It is introduced into the recovery passage 401 via the. Recovery passage 40
A vertical hole 42 is provided downward in a part of the circumferential direction of No. 1, and unnecessary substances accumulated in the recovery passage 401 are discharged to the outside through the vertical hole 42.

In addition, in the chemical liquid processing apparatus 1, the hood attaching / detaching mechanism 5 is provided for attaching / detaching the hood 3 to / from the rotary cup 2.
Is provided. The hood attaching / detaching mechanism 5 is surrounded by the casing 4 and closes the hood 3, a lid 51, an L-shaped arm 52 having a horizontal arm fixed to the lid 51, and the L-shaped arm 52.
It is composed of a cylinder 53 that moves the character arm 52 up and down. The cylinder 53 is placed vertically, and the upper end of a cylinder rod 54 protruding from the top of the cylinder 53 is L-shaped.
It is fixed to the vertical arm of the letter arm 52.

The grip portion 32 is provided at the center of the lid 51.
An insertion hole 51a having a diameter larger than the outer diameter of the body portion 32a and smaller than the collar portion 32b is provided, and a cover bowl portion 51a for accommodating the collar portion 32b therein is provided at a central portion of the lid body 51. ing. When the lid 51 is pulled up by the cylinder 53, the edge of the fitting hole 51a engages with the flange 32b, and the hood 3 is also pulled up.

In order to rotate the rotary cup 2 about the axis of the rotary shaft 23, a cup rotating mechanism 6 is provided below the support frame P. This cup rotation mechanism 6
Is a drive motor 61, a drive pulley 62 provided so as to rotate together with the drive shaft of the drive motor 61, and the large-diameter shaft portion 2
4 and the ball spline 63a, a driven pulley 63 provided so as to rotate together, and a belt 64 stretched between the drive pulley 62 and the driven pulley 63.

A spline is formed on the outer peripheral surface of the rotary shaft 23, and a ball spline 63a meshing with the spline is fitted and fixed in the lower portion of the cylindrical hole of the large diameter shaft portion 24. The driven pulley 63 is fixed so as to rotate together with the large diameter shaft portion 24 and the ball spline 63a. Therefore, the rotational force of the drive motor 61 is transmitted to the large-diameter shaft portion 24 and the ball spline 63a via the drive pulley 62, the belt 64, and the driven pulley 63, and is also transmitted to the rotary shaft 23 via the ball spline 63a. The rotating cup 2 including the medium diameter shaft portion 21 and the annular dish portion 22 is adapted to rotate.

An elevating mechanism 7 is provided below the rotary shaft 23. The lifting mechanism 7 includes a second cylinder 71 vertically installed near the lower end of the rotary shaft 23, a lifting block 73 coupled to the upper end of a cylinder rod 72 of the second cylinder 71, and the lifting block 73.
And a guide rail 74 extending in the vertical direction for guiding the vertical movement of the.

The lifting block 73 includes a bearing 73.
It is connected to the lower part of the rotary shaft 23 via a, and the second cylinder 71 is operated to move the cylinder rod 72 up and down to move the rotary shaft 23 up and down. When the rotary shaft 23 is lifted by the operation of the second cylinder 71, the coupled state between the medium-diameter shaft portion 21 and the large-diameter shaft portion 24 provided at the top of the second cylinder 71 is released,
Only the medium diameter shaft portion 21 moves upward with respect to the annular dish portion 22, so that the base B can be easily placed and picked up.

Since the rotary cup type chemical liquid treatment device of the present invention is constructed as described above, in order to form a coating film on the surface of the substrate B, first, as shown by the chain double-dashed line in FIG. By operating 53, the lid 51 is raised via the cylinder rod 54, the L-shaped arm 52 and the connecting portion 51b. As a result, the prone bowl 51a becomes the brim 3 of the grip 32.
The hood 3 is lifted upward while the 2b is picked up, and the base mounting space S of the rotating cup 2 is exposed to the outside.

If the second cylinder 71 is further operated in this state to raise the elevating block 73, this rise raises the medium diameter shaft portion 21 via the rotary shaft 23, and the upper surface portion thereof is placed on the base mounting space. It is in a state of protruding from S to the outside.
In this state, the base B is accurately placed on the upper surface of the medium-diameter shaft portion 21 by a robot arm (not shown) or by manual operation, and a predetermined amount of the coating agent is dropped on the surface of the base B. Then, or immediately after the placement, vacuum suction is performed via the intake passage 23a. After that, the second cylinder 71 is operated in the opposite manner to lower the intermediate diameter shaft portion 21 and bring it into the same state as the annular dish portion 22 again.

Then, the cylinder 53 is operated in the opposite manner to lower the hood 3 to close the board mounting space S.
The suction of the board B may be performed after the hood 3 is closed, that is, before the rotation of the rotary cup 2 is started.

When the drive motor 61 of the cup rotating mechanism 6 is driven in this state, the rotation is driven by the drive pulley 62,
The rotary cup 2 is rotated at a predetermined speed by being transmitted to the large-diameter shaft portion 24 and the ball spline 63a via the belt 64 and the driven pulley 63, and also transmitted to the rotary shaft 23 via the ball spline 63a and the ball spline 63a. The coating agent dropped on the base B by the centrifugal force generated by the rotation of the rotary cup 2 is thinly dispersed in the radial direction, and a coating film is formed on the surface of the base B. The excess coating agent shaken off from the base B is discharged from the discharge hole 201 formed in the annular weir portion 22a of the rotary cup 2 and introduced into the recovery passage 401 through the discharge band hole 41 of the casing 4. And is led out from the vertical hole 42.

After a predetermined time has passed, the drive motor 61
Of the hood 3 by stopping the rotational driving of the hood 3 and driving the cylinder 53 to move the cylinder rod 54 upward.
Is lifted, and the base B immediately after the coating film on the rotary cup 2 is formed is exposed. In this state, the cylinder rod 72 is raised by the operation of the second cylinder 71, and the medium diameter shaft portion 21 of the rotary cup 2 is raised via the rotary shaft 23 coupled to the cylinder rod 72, and is mounted thereon. The laid base B is pushed out from the base mounting space S to the outside. Then, the board B is similarly taken out from the rotary cup 2 by a robot arm or the like and transferred to the next step. By repeating the above operation, a uniform coating film of the coating agent is formed on the surface of the substrate B.

FIG. 3 is a partially enlarged view of FIG. 2, showing an example of a seal structure between the rotary cup 2 and the hood 3. As shown in this figure, on the upper surface of the annular weir portion 22a formed on the outer peripheral portion of the rotary cup 2, there are formed two annular projections, which are an annular inner projection 27 and an outer projection 28, each having a rectangular cross section. It is provided at a predetermined interval in the direction.

An annular retaining piece 28a protruding inward is provided on the inner peripheral surface of the outer protrusion 28. The retaining piece 28a is tapered, and an oblique upper inclined wall 28b is formed on the lower surface thereof.

A lower inclined wall 28c, which is parallel or substantially parallel to the upper inclined wall 28b, is located between the inner protrusion 27 and the outer protrusion 28 and faces the retaining piece 28a.
An annular fitting groove 29 having a cross-sectional shape into which at least half of the flexible annular O-ring 9 such as rubber is formed is formed between the upper inclined wall 28b and the lower inclined wall 28c. The O-ring 9 is fitted in the fitting groove 29 to form a seal structure.

In the present embodiment, the fitting groove 29 is formed with a horizontal surface and a vertical surface, but the shape is not limited to a flat surface, and a curved surface is formed along the cross-sectional shape of the O-ring 9. You may However, the fitting groove 29 is set to have a size and shape which is at least equal to or slightly larger than the cross section of the fitting portion of the O ring 9 so that the density distribution of the inserted O ring 9 becomes uniform. Preferably.

On the other hand, an inner annular groove 33a corresponding to the inner protrusion 27 and an outer annular groove corresponding to the outer protrusion 28 are formed on the lower surface of the bulged edge portion 33 which is bulged above the peripheral edge of the hood body 31. 33b are recessed in a rectangular cross section, and an annular fitting protrusion (annular protrusion) 33c is fitted between the inner annular groove 33a and the outer annular groove 33b in the gap between the inner protrusion 27 and the outer protrusion 28. It is supposed to be done.

As shown in FIG. 4, a tapered surface 33d which is in contact with the O-ring 9 is formed at a portion of the fitting projection 33c facing the fitting groove 29.
A horizontal surface 33e extends on the upper portion of 3d. The horizontal surface 33e is brought into contact with the vicinity of substantially the top of the O-ring 9 to keep the distance from the base B constant.

Therefore, if the base mounting space S of the rotary cup 2 is closed by the hood 3 with the O-ring 9 mounted in the fitting groove 29, the upper sloping wall 28b and the lower sloping wall 28c of the fitting groove 29 are removed. The portion of the O-ring 9 that is held between the fitting groove 29 and the outside is exposed to the fitting protrusion 33.
The taper surface 33d of c and the horizontal surface 33e are pressed against each other, and the upper portion of the substrate mounting space S is sealed by the O-ring 9.

As described above, the rotary cup type chemical liquid processing device of the present invention is provided with the upper inclined wall 28b and the lower inclined wall 28c, which are diagonally opposed to each other and are parallel to each other, in the fitting groove 29 provided in the outer protrusion 28. The O-ring 9 is fitted between the upper inclined wall 28b and the lower inclined wall 28c, and the O-ring 9 is fitted to the fitting protrusion 33c of the bulging edge portion 33.
Since the taper surface 33d and the horizontal surface 33e that come into contact with the exposed portion of the O-ring 9 are formed, the mounting operation of the O-ring 9 into the fitting groove 29 is extremely easy. First, the conventional groove is a dovetail groove. The difficulty of the operation of mounting the O-ring 9 that had to be pushed in due to the accident is eliminated.

Further, the retaining piece 2 is provided above the fitting groove 29.
Since 8a is provided in an overhang state with respect to the fitting groove 29, once the O-ring 9 is fitted into the fitting groove 29, the O-ring 9 attached to the tapered surface 33d when the hood 3 is opened raises the hood 3. There is no case that the user will come out of the fitting groove 29 by being accompanied by.

Further, even if the hood 3 is mounted in an eccentric state with respect to the center of rotation of the rotary cup 2, FIG.
As shown in, the tapered surface 33d of the hood 3 pressing the O-ring 9 receives a repulsive force F directed obliquely upward and leftward from the O-ring 9, so that a horizontal component force Tx of the repulsive force F is generated and Since 3 is pushed toward the center of rotation, the hood 3 is always pushed back to the center of rotation of the rotating cup 2.

Therefore, the hood 3 receives a force outward from the center of rotation due to the centrifugal force generated by the rotation of the rotary cup 2 as in the conventional case, and comes into contact with a part of the rotary cup 2. As a result, dust is generated due to abrasion wear. Such inconvenience is effectively suppressed.

In this embodiment, the outer protrusion 28
One portion or an appropriate number of punched holes 29a penetrating the outer protrusion 28 in the width direction, as shown by the dotted line in FIG. Then, the O-ring 9 can be easily taken out from the fitting groove 29 by inserting a metal fitting into the hole 29a from the outside and pressing it.

In this embodiment, the inner protrusion 27 is provided further inside the outer protrusion 28 as described above.
Since the inner annular groove 33a fitted into the inner protrusion 27 is provided in the bulging edge portion 33 and has a double dustproof structure with respect to the outside, it is possible to more effectively prevent dust from entering the substrate mounting space S. Can be stopped.

In this embodiment, the rotating cup 2
Although the inner protrusion 27 and the outer protrusion 28 are provided on the annular weir portion 22a, and the fitting protrusion 33c that is fitted between the inner protrusion 27 and the outer protrusion 28 is provided on the bulged edge portion 33 of the hood 3, The rotary cup is not limited to the inner projection 27 and the outer projection 28 provided on the annular weir portion 22a, and the fitting projection 33c provided on the hood 3, but the projection is provided on the hood 3 and fitted on the rotary cup 2. You may make it provide a protrusion.

Further, in the present embodiment, the hood 3 is formed with the bulging edge portion 33, and the inner annular groove 33a and the outside for fitting the inner protrusion 27 and the outer protrusion 28 on the back surface of the bulging edge portion 33. Although the annular groove 33b is provided as a recess, the present invention is not limited to the structure in which the inner annular groove 33a and the outer annular groove 33b are provided as recesses on the back surface of the bulging edge portion 33. The hood body 31 is formed to have the same thickness without providing the bulging edge portion 33, and the hood body 3 having the same thickness is used.
It is also possible to project only the fitting protrusion 33c, which is on the back surface of No. 1, and is fitted into the gap between the inner protrusion 27 and the outer protrusion 28, which are projected on the annular dish portion 22 of the rotary cup 2.

Further, in this embodiment, the fitting projection 33
Although a flat taper surface 33d is formed on c, the taper surface 33d is not limited to a linear shape as shown in FIG. It is also possible to set a curve having a curvature between 0 and 0 (that is, a straight line). By doing this, the O-ring 9 and the tapered surface 3 are
The contact area with 3d becomes large, and the closing effect by the O-ring 9 is improved.

Further, in this embodiment, the inner protrusion 2
7, the vertical cross section of the outer protrusion 28, the inner annular groove 33a and the outer annular groove 33b is set to a rectangular shape, but these are not limited to being set to a rectangular shape, and an arc shape or the like. May be

In addition, in this embodiment, the opening of the fitting groove 29 is set to have substantially the same size as the diameter of the O-ring 9, but it may be smaller than the diameter of the O-ring 9. Also,
Since the O-ring 9 is effectively prevented from coming off by the retaining piece 28a, the lower inclined wall 28 of the fitting groove 29 is prevented.
c may not be provided in particular.

FIG. 5 is a cross-sectional view showing another example of the hood seal structure. In the case of this example, the fitting groove 29 that penetrates the O-ring 9 is flush with the bottom surface of the groove formed between the inner dustproof protrusion 27 and the outer protrusion 28. Others are the same as the seal structure of the previous example. As described above, even if the fitting groove 29 is flush with the bottom surface of the groove formed between the inner dust-proof projection 27 and the outer projection 28, the O-ring 9 is restricted by the upper retaining piece 28a. O-ring 9
Is effectively suppressed from exiting from the outside.

FIG. 6 is a sectional view showing a seal structure of a hood of another brick. In the case of this example, the surface of the fitting protrusion 33c of the hood 3 which is in contact with the O-ring 9 is formed by a step surface 33f composed of a vertical wall and a horizontal wall. Others are the same as the first example. Therefore, when the rotary cup 2 is closed by the hood 3 and sealed by the O-ring 9, the vertical surface of the step surface 33f and the horizontal surface are the O-ring 9.
It comes into contact with the surface of, and the sealing effect is further improved.

[0069]

According to the rotary cup type chemical liquid treatment device of the first aspect of the present invention, the annular projection is formed with an annular groove into which the elastic seal member can be fitted and the annular groove is formed in the annular projection. Since the restriction piece portion for restricting the elastic seal member from coming out is formed at the upper end of the groove, the elastic seal once fitted by the retaining action of the overhang-shaped restriction piece portion formed in the fitting groove. The member is effectively prevented from coming off the fitting groove, and when the hood is raised, the elastic member sticks to the back surface of the hood and is entrained in the hood, and the sealing member does not come off the annular groove.

Further, since the annular groove does not have to be a dovetail groove as in the conventional case due to the presence of the above-mentioned restriction piece portion, when the sealing member is attached to the annular groove, the sealing member is forcibly pressed and deformed. It is possible to surely avoid the problem that the exposed surface of the seal member does not become flush with each other due to the non-uniformity of the density distribution resulting from this, and thus the sealability is impaired.

According to the rotating cup type chemical liquid treatment device of the second aspect of the present invention, the hood is formed with an annular inclined surface which comes into contact with the surface of the elastic seal member which is partially exposed from the annular groove when covered. Therefore, the inclined surface of the hood that presses the seal member receives a repulsive force directed obliquely upward from the seal member, so that the horizontal component of this repulsive force pushes the hood toward the rotation center, and the hood is always rotated. The rubbing contact between a part of the hood and a part of the rotating cup caused by the eccentricity caused by being pushed back to the center of rotation is effectively avoided, and generation of fine dust due to the rubbing contact is prevented. As a result, rubbing contact between a part of the hood and a part of the rotating cup caused by the eccentricity is effectively avoided, and generation of fine dust due to the rubbing contact can be prevented.

According to the rotary cup type chemical liquid treatment device of the third aspect of the present invention, the hood is composed of a vertical wall and a horizontal wall which come into contact with the surface of the elastic seal member which is partially exposed from the annular groove when covered. Since the stepped surface is formed in an annular shape, stable sealing is performed with the vertical wall and the horizontal wall of the stepped surface sandwiching the exposed surface of the seal member. Since the vertical surface receives a repulsive force from the seal member toward the center of rotation, the repulsive force always pushes the hood back to the center of rotation of the rotating cup, causing a part of the hood and a part of the rotating cup caused by eccentricity. The rubbing contact is effectively avoided, and generation of fine dust due to the rubbing contact is prevented. As a result, rubbing contact between a part of the hood and a part of the rotating cup caused by the eccentricity is effectively avoided, and generation of fine dust due to the rubbing contact can be prevented.

According to the rotary cup type chemical liquid treatment device of the fourth aspect of the present invention, since the annular groove is formed such that a part of the lower portion thereof is formed by shallowly drilling the peripheral portion of the annular projection, The elastic seal member fitted in the groove can enter the portion shallowly formed in the peripheral portion of the annular projection, and can stabilize the fitted state of the elastic seal member in the annular groove.

According to the rotary cup type chemical liquid treatment device of the fifth aspect of the present invention, since the inclined surface formed on the hood is a flat surface, the inclined surface can be formed with a minimum work effort.

According to the rotary cup type chemical liquid treatment device of the sixth aspect of the present invention, since the inclined surface formed on the hood is a concave curved surface having a curvature not less than the curvature of the elastic seal member, the inclined surface. The contact area between the elastic cup and the elastic seal member is increased, and the sealing effect of the rotary cup by mounting the hood can be further improved.

According to the rotary cup type chemical treatment device of the seventh aspect of the present invention, the rotary cup is concentric with the annular projection, and the annular dustproof projection is formed on the inner peripheral side thereof, and the hood is covered with the rotary cup on the rotary cup side. Since the annular dustproof groove that fits into the dustproof projection is provided, it is possible to effectively prevent dust from entering the rotary cup by the dustproof projection and the groove.

In the rotary cup type chemical liquid treatment device according to claim 8 of the present invention, the annular projection is provided with one or a plurality of holes penetrating in the width direction. The sealing member can be easily taken out from the fitting groove only by inserting and pressing.

[Brief description of drawings]

FIG. 1 is a partially cutaway perspective view showing an example of a rotary cup type chemical liquid processing device according to the present invention.

FIG. 2 is a sectional view taken along the line AA of FIG.

3 is a partially enlarged view of a main part of FIG. 2, showing a seal structure of a hood.

FIG. 4 is a partially enlarged view of a main part of FIG.

FIG. 5 is a cross-sectional view showing another example of the hood seal structure.

FIG. 6 is a cross-sectional view showing still another example of the hood seal structure.

FIG. 7 is an explanatory view of a cross-sectional view for explaining a conventional rotary cup type chemical liquid processing device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Chemical treatment device 2 Rotation cup 21 Medium diameter shaft part 22 Annular dish part 22a Annular weir part 201 Discharge hole 23 Rotation shaft 23a Intake passage 23b Tube 24 Large diameter shaft part 25 Support cylinder 25a Flange 26 Bearing 27 Inner protrusion 28 Outer protrusion 29 Fitting groove 3 Hood 31 Hood main body 32 Gripping portion 33 Bulging edge portion 4 Casing 41 Discharge band hole 401 Recovery passage 42 Vertical hole 5 Hood attaching / detaching mechanism 51 Lid 52 L-arm 53 Cylinder 54 Cylinder rod 6 Cup rotating mechanism 61 Drive motor 62 Drive pulley 63 Driven pulley 7 Lifting mechanism 71 Second cylinder 72 Cylinder rod 73 Lifting block 739 O-ring

Continuation of the front page (51) Int.Cl. ⁶ Identification number Office reference number FI technical display location H01L 21/306 21/68 N

Claims (8)

[Claims] 1. A rotary cup type chemical liquid treatment device having a rotary cup and a hood covering the rotary cup from above via an annular elastic seal member, wherein the rotary cup is provided with an annular projection on an upper surface of a peripheral edge portion. An annular groove into which the elastic seal member can be fitted is formed on the inner peripheral surface of the annular projection, and a restriction piece portion that restricts the elastic seal member from coming out is formed at the upper end of the annular groove. A rotating cup type chemical liquid treatment device characterized by being provided. 2. The rotary cup type according to claim 1, wherein the hood is formed with an inclined surface which is in contact with a surface of the elastic seal member which is partially exposed from the annular groove when the hood is covered. Chemical processing equipment. 3. The hood has an annular stepped surface formed of a vertical wall and a horizontal wall that come into contact with a surface of the elastic seal member that is partially exposed from the annular groove when the hood is covered. The rotary cup type chemical liquid processing device according to claim 1. 4. The rotary cup according to claim 1, wherein a part of a lower portion of the annular groove is formed by shallowly forming a peripheral edge portion of the annular protrusion. Chemical treatment equipment. 5. The rotary cup type chemical treatment device according to claim 1, wherein the inclined surface is a flat surface. 6. The rotary cup type chemical liquid processing apparatus according to claim 1, wherein the inclined surface is a concave curved surface having a curvature that is at least less than or equal to the curvature of the elastic seal member. 7. The rotary cup is concentric with the annular protrusion, and an annular dust-proof protrusion is formed on the inner peripheral side of the annular protrusion, and the hood is an annular dust-proof protrusion fitted to the protrusion when covered. A groove is provided, The groove is provided.
7. The rotary cup type chemical liquid treatment device according to any one of 1 to 6. 8. The rotary cup according to claim 1, wherein the annular protrusion is provided with one or a plurality of holes penetrating the annular groove and the outer peripheral side surface. Chemical treatment equipment.