JPH07273265A - Method for manufacturing lead frame with resin dam bar - Google Patents

Method for manufacturing lead frame with resin dam bar

Info

Publication number
JPH07273265A
JPH07273265A JP6121394A JP6121394A JPH07273265A JP H07273265 A JPH07273265 A JP H07273265A JP 6121394 A JP6121394 A JP 6121394A JP 6121394 A JP6121394 A JP 6121394A JP H07273265 A JPH07273265 A JP H07273265A
Authority
JP
Japan
Prior art keywords
resin
insulating resin
leads
thermoplastic insulating
lead frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6121394A
Other languages
Japanese (ja)
Inventor
Hiroshi Sugimoto
洋 杉本
Takashi Suzumura
隆志 鈴村
Masaharu Takagi
正治 高城
Tatsuya Otaka
達也 大高
Yasuharu Kameyama
康晴 亀山
Hideyuki Koyama
秀幸 小山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP6121394A priority Critical patent/JPH07273265A/en
Publication of JPH07273265A publication Critical patent/JPH07273265A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To eliminate resin leakage when forming a mold by prescribing drying and forming conditions after applying resin. CONSTITUTION:A thermoplastic insulation resin 4 in varnish shape after being melded in a solvent medium is applied to leads 2. After the coating, a lead frame 1 is heated closer to glass transformation temperature and is dried until the amount of remaining solvent medium contained in the thermoplastic insulation resin 4 is equal to or less than 5%. After that, both sides of the application site of the thermopllastic insulation resin 4 is held by hot plates 6, 6 by including heat resistance macromolecular films 5, 5. The hot plates 6, 6 are heated to a temperature exceeding the glass transformation temperature of the thermoplastic insulation resin 4. When the application site of the thermoplastic insulation resin 4 is pressurized by the heated hot plate 6, the area between the leads 2 is completely filled with the thermoplastic insulation resin 4, thus completing a dam bar.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、リード間に絶縁性樹脂
のダムバーを形成することによって、モールド後にダム
バーを取り除かないでも済むようにした樹脂ダムバー付
リードフレームの製造方法に係り、特にアウタリードピ
ッチが非常に狭い多ピンリードフレームであってもモー
ルド時樹脂漏れが生じないようにしたものに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a lead frame with a resin dam bar, in which a dam bar made of an insulating resin is formed between the leads so that the dam bar does not have to be removed after molding, and more particularly to an outer lead. The present invention relates to a multi-pin lead frame having an extremely narrow pitch, which prevents resin leakage during molding.

【0002】[0002]

【従来の技術】これまでのリードフレームは、リード間
がリードと同一材料からなる金属製のダムバーにより一
体形成されているので、モールド後ダムバーを専用の打
抜き金型で切断しなければならないが、多ピン化が進み
リード間の間隔が狭くなってくると、ダムバーの切断が
困難になってくる。例えば半導体装置の外形寸法が28
mm×28mmでピン数208本の場合、アウタリード間隔
は0.3mm以下となり、それと同じ外形寸法でピン数3
44本となるとアウタリード間隔は0.2mm以下とな
る。このような非常に狭い間隔を打ち抜くパンチは非常
に壊れ易くかつ製造およびメンテナンスに時間と費用が
多大にかかる。
2. Description of the Related Art In conventional lead frames, the spaces between the leads are integrally formed by metal dam bars made of the same material as the leads. Therefore, after molding, the dam bars must be cut with a dedicated punching die. As the number of pins increases and the distance between leads becomes narrower, it becomes difficult to cut the dam bar. For example, the external dimensions of the semiconductor device are 28
If the number of pins is mm x 28 mm and the number of pins is 208, the outer lead spacing will be 0.3 mm or less.
The outer lead spacing is 0.2 mm or less when there are 44 wires. Punches with such very close spacing are very fragile and time consuming and expensive to manufacture and maintain.

【0003】そこでダムバー切断を省略するために、ダ
ムバーを絶縁性樹脂で構成する構造が提案されている。
これは、ワニス状の絶縁樹脂をリードに塗布し、その後
乾燥することにより、金属製のダムバーの代わりにする
というものである。
Therefore, in order to omit the dam bar cutting, a structure in which the dam bar is made of an insulating resin has been proposed.
In this method, a varnish-like insulating resin is applied to the leads and then dried to replace the metal dam bar.

【0004】[0004]

【発明が解決しようとする課題】しかし、金属製のダム
バーの代わりに絶縁樹脂を設けるという従来の方法で
は、絶縁樹脂を塗布後乾燥してダムバーとするだけで
は、リードの上下面に絶縁樹脂が残り、リードの厚さが
見かけ上厚くなってしまう。またワニス状の絶縁樹脂中
には溶媒が多量に含まれており、塗布後の乾燥による蒸
発でリード間の樹脂の厚さがリードの厚さより薄くなり
すぎてしまう。このようにリード上の絶縁樹脂とリード
間の絶縁樹脂との段差が強調されると、モールド時に樹
脂が漏れる可能性が非常に高くなり、それはピン数が多
いゆえに樹脂漏れ確率の高い多ピンリードフレームにあ
っては大きな問題となっていた。
However, in the conventional method of providing the insulating resin instead of the metal dam bar, the insulating resin is applied to the upper and lower surfaces of the leads only by applying the insulating resin and then drying it to form the dam bar. Remaining, the thickness of the lead is apparently increased. Further, a large amount of solvent is contained in the varnish-like insulating resin, and the thickness of the resin between the leads becomes too thinner than the thickness of the leads due to evaporation by drying after coating. If the step between the insulating resin on the leads and the insulating resin between the leads is emphasized in this way, the possibility of resin leakage during molding becomes extremely high. It was a big problem for the frame.

【0005】本発明の目的は、前記した従来技術の欠点
を解消し、モールド時に樹脂漏れのない樹脂ダムバー付
リードフレームの製造方法を提供することにある。
An object of the present invention is to solve the above-mentioned drawbacks of the prior art and to provide a method of manufacturing a lead frame with a resin dam bar in which resin does not leak during molding.

【0006】[0006]

【課題を解決するための手段】本発明の樹脂ダムバー付
リードフレームの製造方法は、溶媒に溶かしてワニス状
にした熱可塑性絶縁樹脂をリードに塗布してリード間に
ダムバーを設ける工程を有し、ダムバーとなる熱可塑性
絶縁樹脂のリードへの塗布後、熱可塑性絶縁樹脂中の残
存溶媒量を5%以下になるまで蒸発させ、その後、熱可
塑性絶縁樹脂を塗布した部位を、そのガラス転位温度以
上の温度で加圧することにより熱可塑性絶縁樹脂をリー
ド間に押し流すようにしたものである。
A method of manufacturing a lead frame with a resin dam bar according to the present invention includes a step of applying a thermoplastic varnish-like thermoplastic insulating resin dissolved in a solvent to the leads to provide a dam bar between the leads. After applying the thermoplastic insulating resin that becomes the dam bar to the leads, evaporate the residual solvent amount in the thermoplastic insulating resin to 5% or less, and then, the portion where the thermoplastic insulating resin is applied is changed to the glass transition temperature. By pressing at the above temperature, the thermoplastic insulating resin is pushed between the leads.

【0007】熱可塑性絶縁樹脂からなるダムバーは主に
アウタリード部に設けられ、半導体装置のモールド時の
樹脂漏れ防止、またはリード固定に使用される。ダムバ
ーを形成するために、熱可塑性絶縁樹脂をリードに塗布
する手段にはディスペンサを用いる。熱可塑性絶縁樹脂
はポリエーテルアミドイミドが適しており、熱可塑性絶
縁樹脂をワニス状にする溶媒としては、N−メチル−2
−ピロリドンやブチルセロソルブアセテートが適してい
る。
The dam bar made of a thermoplastic insulating resin is mainly provided in the outer lead portion and is used for preventing resin leakage during molding of the semiconductor device or fixing the lead. A dispenser is used as a means for applying the thermoplastic insulating resin to the leads in order to form the dam bar. Polyether amide imide is suitable for the thermoplastic insulating resin, and N-methyl-2 is used as a solvent for forming the thermoplastic insulating resin into a varnish.
-Pyrrolidone and butyl cellosolve acetate are suitable.

【0008】[0008]

【作用】まず、溶媒に溶かしてワニス状にした熱可塑性
絶縁樹脂をリードに塗布する。熱可塑性絶縁樹脂を用い
ると、熱硬化性樹脂のように硬化促進のためのキュアが
不要になり、またガラス転移温度を境にして整形が容易
となる。塗布後、リードフレームをガラス転移温度付近
に加熱して、熱可塑性絶縁樹脂中に含まれる残存溶媒量
を5%以下になるまで乾燥させる。すると絶縁樹脂によ
る見かけ上の厚さが実質的になくなるため、その後加熱
してもリード間の樹脂の厚さがリードの厚さより薄くな
ることがなくなる。5%より多いと見かけ上のリードの
厚さが無視できず樹脂漏れが防止できない。熱可塑性絶
縁樹脂中の残存溶媒量が5%以下であると判定するに
は、乾燥前後のリードフレームを含めた重量の差を求め
ることにより行なう。
First, the leads are coated with a varnished thermoplastic insulating resin dissolved in a solvent. The use of the thermoplastic insulating resin eliminates the need for curing to accelerate curing unlike the thermosetting resin, and facilitates shaping at the glass transition temperature. After application, the lead frame is heated to near the glass transition temperature and dried until the amount of residual solvent contained in the thermoplastic insulating resin is 5% or less. Then, since the apparent thickness of the insulating resin is substantially eliminated, the resin between the leads will not become thinner than the thickness of the leads even after heating. If it exceeds 5%, the apparent lead thickness cannot be ignored and resin leakage cannot be prevented. In order to determine that the residual solvent amount in the thermoplastic insulating resin is 5% or less, the difference in weight including the lead frame before and after drying is determined.

【0009】次に、熱可塑性絶縁樹脂の塗布部位を両側
からホットプレートで挟み込む。このとき塗布部位を、
熱可塑性絶縁樹脂と剥離容易な耐熱性高分子フィルムで
挟み込み、その両側から加圧することが好ましい。耐熱
性高分子フィルムで塗布部位を挟み込むようにすると、
絶縁樹脂のリード間への移動が円滑に行われ、加圧力も
ソフトにリードに加わるため樹脂整形時リードの変形が
なくなる。
Next, the portions where the thermoplastic insulating resin is applied are sandwiched by hot plates from both sides. At this time,
It is preferable to sandwich it between a thermoplastic insulating resin and a heat-resistant polymer film that is easily peeled off, and apply pressure from both sides. If you sandwich the application site with a heat resistant polymer film,
The insulating resin moves smoothly between the leads, and the applied pressure is also softly applied to the leads, so that the leads are not deformed during resin shaping.

【0010】ホットプレートの温度は、熱可塑性絶縁樹
脂のガラス転位温度を超える温度とする。熱可塑性絶縁
樹脂をリード間に円滑に押し流すには、ガラス転位温度
以上の温度で熱可塑性絶縁樹脂に流動性を持たせ、これ
を加圧してやるとよい。
The temperature of the hot plate is set to a temperature higher than the glass transition temperature of the thermoplastic insulating resin. In order to smoothly push the thermoplastic insulating resin between the leads, it is advisable to impart fluidity to the thermoplastic insulating resin at a temperature equal to or higher than the glass transition temperature and pressurize this.

【0011】加熱されたホットプレートで熱可塑性絶縁
樹脂の塗布部位を加圧すると、リード表面上の余剰な熱
可塑性絶縁樹脂がリード間に流れて隙間なくリード間を
埋めるため、段差のないダムバーが完成する。これによ
りモールド成形時の樹脂漏れが有効に防止できる。
When a heated hot plate is applied to a portion to which the thermoplastic insulating resin is applied, excess thermoplastic insulating resin on the lead surface flows between the leads and fills the gaps without gaps, so that a stepless dam bar is formed. Complete. This effectively prevents resin leakage during molding.

【0012】[0012]

【実施例】以下、本発明の樹脂ダムバー付リードフレー
ムの製造方法の実施例を、図1〜図4を用いて説明す
る。なお、図2には便宜的にピン数の少ないリードフレ
ームを例示してあるが、これを多ピンリードフレームと
見ても差しつかえない。
EXAMPLE An example of a method for manufacturing a lead frame with a resin dam bar according to the present invention will be described below with reference to FIGS. Although a lead frame having a small number of pins is illustrated in FIG. 2 for convenience, it may be regarded as a multi-pin lead frame.

【0013】まず、熱可塑性絶縁樹脂は予め溶媒に溶か
してワニス状にする。これをディスペンサ3に入れて熱
可塑性絶縁樹脂4を、リード間を跨がるようにリード2
に直線状に塗布していく(図2)。塗布はリード2の両
面に施すとよい。塗布方法はリードフレーム1を移動す
るようにしても、ディスペンサ3を移動するようにして
も、ともに移動するようにしてもよい。リード2と交差
する方向に直線状に塗布すると、リード2間に熱可塑性
絶縁樹脂4からなるダムバーの原型が形成される。
First, the thermoplastic insulating resin is dissolved in a solvent in advance to form a varnish. This is put in the dispenser 3 and the thermoplastic insulating resin 4 is placed over the leads 2 so as to straddle the leads.
It is applied linearly on the surface (Fig. 2). The coating may be applied to both sides of the lead 2. As a coating method, the lead frame 1 may be moved, the dispenser 3 may be moved, or both may be moved. When it is linearly applied in a direction intersecting with the leads 2, a dambar master made of the thermoplastic insulating resin 4 is formed between the leads 2.

【0014】熱可塑性絶縁樹脂4のリード2への塗布
後、リードフレーム1をガラス転移温度付近の温度に加
熱したホットプレート6上で所定時間放置し、熱可塑性
絶縁樹脂中に含まれる残存溶媒量が5%以下になるまで
乾燥する(図3)。5%以下の判定は、リアルタイムで
行うようにしても、あるいは放置後ホットプレートから
降ろして測定するようにしてもよい。
After the application of the thermoplastic insulating resin 4 to the leads 2, the lead frame 1 is left on the hot plate 6 heated to a temperature near the glass transition temperature for a predetermined time, and the amount of the residual solvent contained in the thermoplastic insulating resin is increased. To 5% or less (Fig. 3). The determination of 5% or less may be performed in real time, or may be taken out from the hot plate after standing and measured.

【0015】その後、熱可塑性絶縁樹脂4を塗布した部
位を、両側からホットプレート6、6間に挟み込む(図
1)。このとき、当該部位を熱可塑性絶縁樹脂4と剥離
容易な耐熱性高分子フィルム5、5で挟み込むとよい。
耐熱性高分子フィルム5はポリイミド系のフィルムと
し、その厚さは、耐熱性、離型性、及び平坦度確保の点
から、塗布部位のリード2の厚み程度ないしリード2よ
りも薄いことが好ましい。
After that, the portion coated with the thermoplastic insulating resin 4 is sandwiched between the hot plates 6, 6 from both sides (FIG. 1). At this time, it is advisable to sandwich the part between the thermoplastic insulating resin 4 and the heat-resistant polymer films 5 and 5 which are easily peeled off.
The heat-resistant polymer film 5 is a polyimide film, and its thickness is preferably about the thickness of the lead 2 at the application site or thinner than the lead 2 in terms of heat resistance, releasability, and flatness. .

【0016】両側から挟み込むホットプレート6の温度
は、熱可塑性絶縁樹脂4のガラス転位温度を超える温度
とする。この温度に加熱されたホットプレート6、6間
で熱可塑性絶縁樹脂4を塗布した部位を加圧すると、流
動化した熱可塑性絶縁樹脂4がリード2間に流れ込みリ
ード2間が熱可塑性絶縁樹脂4で隙間なく埋められ、ダ
ムバーが完成する(図4)。これによりモールド成形時
の樹脂漏れが有効に防止できる。
The temperature of the hot plates 6 sandwiched from both sides is set to a temperature higher than the glass transition temperature of the thermoplastic insulating resin 4. When the area coated with the thermoplastic insulating resin 4 is pressed between the hot plates 6 and 6 heated to this temperature, the fluidized thermoplastic insulating resin 4 flows between the leads 2 and the thermoplastic insulating resin 4 between the leads 2. It is filled with no gaps and the dam bar is completed (Fig. 4). This effectively prevents resin leakage during molding.

【0017】(実施例1)本実施例では、リードフレー
ムは42合金、リード厚0.15mm、アウタリードピッ
チ0.5mm、アウタリード幅0.2mm、アウタリード間
隔0.3mmで、ピン数208本、半導体装置の外形寸法
が28×28のQFP(Quad Flat Package )タイプを
使用した。
(Embodiment 1) In this embodiment, the lead frame is 42 alloy, the lead thickness is 0.15 mm, the outer lead pitch is 0.5 mm, the outer lead width is 0.2 mm, the outer lead interval is 0.3 mm, and the number of pins is 208. A semiconductor device of a QFP (Quad Flat Package) type having an outer dimension of 28 × 28 was used.

【0018】絶縁樹脂4はワニス状であり、ガラス転位
温度230℃の熱可塑性のポリエーテルアミドイミドで
ある日立化成(株)製のHM−1(商品名)を用いた。
これをディスペンサでリード上を移動させながら塗布し
た。塗布後、ホットプレート上で所定時間放置して熱可
塑性絶縁樹脂中の溶媒を蒸発させるが、ホットプレート
温度または放置時間等の乾燥条件を変えて、表1に示す
ように熱可塑性絶縁樹脂中の溶媒量を変化させた。
The insulating resin 4 was in the form of varnish, and HM-1 (trade name) manufactured by Hitachi Chemical Co., Ltd., which is a thermoplastic polyether amide imide having a glass transition temperature of 230 ° C., was used.
This was applied while moving on the lead with a dispenser. After application, the solvent in the thermoplastic insulating resin is evaporated by leaving it on the hot plate for a predetermined time. However, as shown in Table 1, the drying conditions such as the hot plate temperature or the standing time may be changed. The amount of solvent was changed.

【0019】次に、熱可塑性絶縁樹脂4と剥離容易な耐
熱性高分子フィルム5、ここでは厚さ0.1mmのポリイ
ミド系のフィルムで、リードフレーム1の絶縁樹脂4の
塗布部位を挟み込み、さらにその両側から絶縁樹脂のガ
ラス転位温度を超える250℃のホットプレート6で加
熱,加圧して、リード間に絶縁樹脂4を埋め込みダムバ
ーを形成した。加圧力は、リード表面上の余剰樹脂をリ
ード間に押し流すに十分な大きさで、かつリードに変形
を与えない大きさ、例えば1リード当り50N程度であ
る。
Next, the thermoplastic insulating resin 4 and the heat-resistant polymer film 5 which is easily peeled off, here a polyimide-based film having a thickness of 0.1 mm, sandwiches the insulating resin 4 application portion of the lead frame 1, and further A dam bar was formed by embedding the insulating resin 4 between the leads by heating and applying pressure from both sides of the hot plate 6 at 250 ° C., which exceeds the glass transition temperature of the insulating resin. The pressing force is large enough to push the excess resin on the surface of the leads between the leads and not to deform the leads, for example, about 50 N per lead.

【0020】その後、このリードフレームに半導体素子
を搭載し(ペレット付け)、半導体素子とインナリード
間をワイヤボンディングした後、樹脂モールドしてパッ
ケージ化した。そのときのモールド樹脂の漏れについて
調べた結果を表1に示す。なお、表結果は、208箇所
について測定したものである。
Thereafter, a semiconductor element was mounted on this lead frame (pellet attachment), wire bonding was performed between the semiconductor element and the inner lead, and then resin molding was performed to form a package. Table 1 shows the results of the examination of the leakage of the mold resin at that time. The table result is measured at 208 points.

【0021】[0021]

【表1】 [Table 1]

【0022】残存溶媒量が5%を超えると、モールド時
にモールド樹脂の漏れが発生する。これは、ペレット付
け、ワイヤボンディング時の加熱によってリード間に埋
め込まれた樹脂中の残存溶媒が蒸発することによって、
樹脂の体積が減少し、リード間の樹脂に隙間が生じたた
めに、モールド樹脂が漏れたものと思われる。この結果
から熱可塑性絶縁樹脂中の残存溶媒量は5%以下でなく
てはならない。
If the amount of residual solvent exceeds 5%, leakage of the molding resin occurs during molding. This is because the residual solvent in the resin embedded between the leads evaporates due to heating during pelleting and wire bonding,
It is considered that the mold resin leaked because the volume of the resin decreased and a gap was created in the resin between the leads. From this result, the amount of residual solvent in the thermoplastic insulating resin must be 5% or less.

【0023】(実施例2)実施例1と同じ条件でワニス
状の熱可塑絶縁性樹脂を塗布,乾燥して、樹脂中の残存
溶媒量を3%とした。この樹脂ダムバー付リードフレー
ムフレームについて、表2に示すような温度で加熱加圧
して、リード間に樹脂を埋め込んだ。なお、この樹脂の
ガラス転位温度は前述したように230℃である。
Example 2 A varnish-like thermoplastic insulating resin was applied and dried under the same conditions as in Example 1 to make the residual solvent amount in the resin 3%. The lead frame with a resin dam bar was heated and pressed at the temperatures shown in Table 2 to embed a resin between the leads. The glass transition temperature of this resin is 230 ° C. as described above.

【0024】その後、ペレット付け、ワイヤボンディン
グを行って樹脂モールドし、そのときのモールド樹脂の
漏れを調べた。その結果を表2に示す。なお、表結果
は、表1と同様、208箇所について測定したものであ
る。
Thereafter, pelleting and wire bonding were carried out for resin molding, and the leakage of the molding resin at that time was examined. The results are shown in Table 2. The table results are measured at 208 points, as in Table 1.

【0025】[0025]

【表2】 [Table 2]

【0026】ガラス転位温度(230℃)以下の温度で
加熱、加圧した場合には、漏れが発生した。これは、ガ
ラス転位温度以下では、樹脂のフローが充分でないため
に、リード間を樹脂で埋めることができず、リード間に
隙間ができモールド樹脂がその隙間から漏れてしまうた
めである。この結果から、樹脂を加熱、加圧する際の温
度はガラス転位温度以上でなくてはならない。
When heating and pressurizing at a temperature below the glass transition temperature (230 ° C.), leakage occurred. This is because below the glass transition temperature, the resin flow is not sufficient, so that the space between the leads cannot be filled with the resin, and a gap is formed between the leads, and the mold resin leaks from the gap. From this result, the temperature at which the resin is heated and pressed should be higher than the glass transition temperature.

【0027】(実施例3)ピン数344本、アウタリー
ド間隔0.2mm以下である点を除いて実施例1と同一使
用のリードフレームにも適用したが、実施例1及び実施
例2と同様な結果が得られた。
(Example 3) The present invention was applied to a lead frame used in the same way as in Example 1 except that the number of pins was 344 and the outer lead interval was 0.2 mm or less, but the same as in Examples 1 and 2. Results were obtained.

【0028】[0028]

【発明の効果】本発明によれば、残存溶媒量を5%以下
まで蒸発させた後、ガラス転位温度以上で塗布部位の熱
可塑性絶縁樹脂を加圧するようにしたので、モールド時
に樹脂漏れが無い。
EFFECTS OF THE INVENTION According to the present invention, after the residual solvent amount is evaporated to 5% or less, the thermoplastic insulating resin at the application site is pressed at the glass transition temperature or higher, so that there is no resin leakage during molding. .

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の樹脂ダムバー付リードフレームの製造
方法の実施例を説明するための樹脂加熱、加圧時の説明
図である。
FIG. 1 is an explanatory diagram at the time of heating and pressurizing a resin for explaining an embodiment of a method for manufacturing a lead frame with a resin dam bar according to the present invention.

【図2】本実施例の樹脂塗布時のリードフレームの外観
図である。
FIG. 2 is an external view of a lead frame when a resin is applied according to this embodiment.

【図3】本実施例の樹脂乾燥後のダムバー部の断面図で
ある。
FIG. 3 is a cross-sectional view of a dam bar portion after resin drying according to this embodiment.

【図4】本実施例による樹脂加熱、加圧後のダムバー部
の断面図である。
FIG. 4 is a sectional view of the dam bar portion after resin heating and pressurization according to the present embodiment.

【符号の説明】[Explanation of symbols]

1 リードフレーム 2 リード 3 ディスペンサ 4 熱可塑性絶縁樹脂 5 耐熱性高分子フィルム 6 ホットプレート 1 lead frame 2 lead 3 dispenser 4 thermoplastic insulating resin 5 heat resistant polymer film 6 hot plate

───────────────────────────────────────────────────── フロントページの続き (72)発明者 大高 達也 茨城県土浦市木田余町3550番地 日立電線 株式会社システムマテリアル研究所内 (72)発明者 亀山 康晴 茨城県土浦市木田余町3550番地 日立電線 株式会社システムマテリアル研究所内 (72)発明者 小山 秀幸 茨城県土浦市木田余町3550番地 日立電線 株式会社システムマテリアル研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tatsuya Otaka 3550 Kidayo-cho, Tsuchiura-shi, Ibaraki Hitachi Cable Ltd. System Materials Laboratory (72) Inventor Yasuharu Kameyama 3550 Kidayo-cho, Tsuchiura-shi, Ibaraki Hitachi Cable (72) Inventor Hideyuki Koyama, 3550 Kidayo-cho, Tsuchiura-shi, Ibaraki Hitachi Cable, Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】溶媒に溶かしてワニス状にした熱可塑性絶
縁樹脂をリードに塗布してリード間にダムバーを設ける
工程を有し、上記ダムバーとなる熱可塑性絶縁樹脂のリ
ードへの塗布後、上記熱可塑性絶縁樹脂中の残存溶媒量
を5%以下になるまで蒸発させ、その後、上記熱可塑性
絶縁樹脂を塗布した部位を、該熱可塑性絶縁樹脂のガラ
ス転位温度以上の温度で加圧することにより上記熱可塑
性絶縁樹脂をリード間に押し流すようにしたことを特徴
とする樹脂ダムバー付リードフレームの製造方法。
1. A varnish-like thermoplastic insulating resin dissolved in a solvent is applied to the leads to form dam bars between the leads. After applying the thermoplastic insulating resin to be the dam bars to the leads, By evaporating the amount of residual solvent in the thermoplastic insulating resin to 5% or less, and then pressing the portion coated with the thermoplastic insulating resin at a temperature equal to or higher than the glass transition temperature of the thermoplastic insulating resin, A method of manufacturing a lead frame with a resin dam bar, characterized in that a thermoplastic insulating resin is pushed between the leads.
【請求項2】上記熱可塑性絶縁樹脂を塗布した部位を加
圧する際に、該部位を熱可塑性絶縁樹脂と剥離容易な耐
熱性高分子フィルムで挟み込み、その両側から加圧する
ようにしたことを特徴とする請求項1に記載の半導体装
置用リードフレームの製造方法。
2. When pressurizing a portion coated with the thermoplastic insulating resin, the portion is sandwiched between the thermoplastic insulating resin and a heat-resistant polymer film that is easily peeled off, and pressure is applied from both sides thereof. The method for manufacturing a lead frame for a semiconductor device according to claim 1.
【請求項3】上記熱可塑性絶縁樹脂がポリエーテルアミ
ドイミドであることを特徴とする請求項1または2に記
載の樹脂ダムバー付リードフレームの製造方法。
3. The method for producing a lead frame with a resin dam bar according to claim 1, wherein the thermoplastic insulating resin is polyether amide imide.
JP6121394A 1994-03-30 1994-03-30 Method for manufacturing lead frame with resin dam bar Pending JPH07273265A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6121394A JPH07273265A (en) 1994-03-30 1994-03-30 Method for manufacturing lead frame with resin dam bar

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6121394A JPH07273265A (en) 1994-03-30 1994-03-30 Method for manufacturing lead frame with resin dam bar

Publications (1)

Publication Number Publication Date
JPH07273265A true JPH07273265A (en) 1995-10-20

Family

ID=13164704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6121394A Pending JPH07273265A (en) 1994-03-30 1994-03-30 Method for manufacturing lead frame with resin dam bar

Country Status (1)

Country Link
JP (1) JPH07273265A (en)

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