JPH07273179A - Substrate cassette - Google Patents

Abstract

PURPOSE:To deflect the liquid well by preventing a liquid pool phenomenon where a liquid, e.g. a chemical, permeates the gap between a metal core member and a fluororesin tube composing a stopper and stays positively and temporally. CONSTITUTION:In a substrate cassette employing a rod member comprising a metal core member 4 coated with a fluororesin tube 5 as a stopper 3, of the core member 4 is set longer than the tube 5 to form space parts 20 at the opposite ends of the tube 5. A fluororesin plug member 21 is inserted into the space part 20 and the outer face of the plug member 21 is bonded to the inner peripheral face of the tube 5 defining the space part through a paste 22 of fusible fluororesin thus constituting a stopper 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate and various other types of substrates, which are optimally used for accommodating and transporting glass substrates in a state where they are separated from each other so as not to come into contact with each other.
In particular, it relates to an improvement of a stopper used for receiving a substrate in this substrate cassette.

[0002]

2. Description of the Related Art As the substrate cassette, for example, as shown in FIG. 3, a pair of rectangular flat frame-like frames 1, 1 arranged at a predetermined interval from each other are arranged above and below (or in the front and back).
A plurality of round bar 2 with a groove is installed in parallel between both side edges,
A side end portion of the substrate W is inserted into each groove portion 2a of the grooved round bar 2 to hold it laterally immovably, and a rod-shaped stopper 3 for receiving the substrate W is provided in the inner portion between the frames 1 and 1. Those arranged are known (see, for example, Japanese Patent Laid-Open No. 3-273664).

Here, in this type of substrate cassette, it is widely practiced to perform various kinds of processing on the substrate in the process of carrying it while a plurality of substrates are accommodated therein. It is required that the substrate cassette has chemical resistance and heat resistance.

Further, in the stopper 3, it is necessary to prevent the substrate W from colliding with the stopper 3 so as to be cracked or cracked, and to have sufficient strength to support the substrate W.

Therefore, conventionally, as the stopper 3, as shown in FIG. 4, for example, an SU having a high rigidity is used.
A tube made of a fluororesin having excellent chemical resistance, heat resistance and impact resistance such as PTFE (polytetrafluoroethylene) over the entire length of the core material 4 made of metal such as S (stainless steel). 5, and the core material 4
An internal thread portion 7 for fixing the stopper 3 to the frame 1 via a bolt 6 is formed on the end face of the, or, as shown in FIG. 5, the end portion of the metal core member 4 is wedge-shaped outwardly. After forming a plurality of protruding ridges 4a and covering the core material 4 with a fluororesin tube 5, the end is covered with a metal cover 8 and the metal cover 8 is caulked to form the ridges. It is generally known that 4a is bited into the inside of the tube 5, and further, an external thread portion 10 for fixing the stopper 3 to the frame 1 via the nut 9 is formed on the end surface of the core material 4.

[0006]

However, in the above-mentioned conventional example, since the fluororesin does not adhere to any substance, that is, the adhesive does not work,
When a metal core material is covered with a fluororesin tube, a gap occurs between the outer peripheral surface of the core material and the inner peripheral surface of the tube, and the substrate cassette is immersed in the chemical solution when processing the substrate. Then, there is a problem in that a liquid pool phenomenon occurs in which the chemical liquid is soaked and accumulated in the gap.

That is, when the liquid pooling phenomenon occurs in this way, it is meaningless to corrode the core material and cover the core material with a tube made of a fluororesin without allowing the liquid stored in the gap to easily escape. Not only the liquid, but when it was dipped in another liquid chemical, the liquid (medicine liquid) accumulated in the gap gradually exuded, and the liquid chemical sometimes mixed with each other.

This is the same even if the outer peripheral portion of the core material is made to dig into the fluororesin tube by caulking with a metal cover, as shown in FIG. This is because the fluororesin tube causes a creep phenomenon due to heat cycles under high temperature and high humidity, and the creep phenomenon loosens the bite of the core material into the tube.

In view of the above, the present invention has a stopper, which is formed by coating a metal core material with a fluororesin tube, in a gap formed between the core material and the fluororesin so that a liquid such as a chemical solution An object of the present invention is to provide a product that prevents the liquid pooling phenomenon that is soaked in and accumulates reliably and with good liquid drainage.

[0010]

In order to achieve the above object, a substrate cassette according to the present invention is a substrate cassette in which a rod member obtained by coating a metal core material with a fluororesin tube is used as a stopper. , The length of the core material is shorter than the length of the tube to form a space portion at both ends of the tube, and a plug member made of a fluororesin is inserted into the space portion, and an outer peripheral surface of the plug member is formed. It is characterized in that the stopper is formed by fusion bonding with an inner peripheral surface of a tube which defines the space portion.

[0011]

According to the present invention constructed as described above, both ends of the tube of the stopper formed by coating the metal core material with the fluororesin tube are closed by the fluororesin stopper member, Moreover, since the outer peripheral surface of the stopper member is joined to the inner peripheral surface of the tube in a sealed state by fusion bonding, the inflow of the liquid into the tube is reliably prevented here, and the liquid pool is prevented, and the heat cycle is performed. Even if a creep phenomenon occurs in the tube due to such reasons, this effect can be maintained.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. As described above, the substrate cassette, as shown in FIG. 3, has a plurality of grooves between the upper and lower (or front and rear) side edges of the pair of rectangular flat plate frame-shaped frames 1 and 1 which are spaced apart from each other by a predetermined distance. The attached round bars 2 are installed in parallel, and the side end portions of the substrate W are inserted into the respective groove portions 2a of the grooved round rods 2 to hold them laterally immovable, and the frame 1,
A bar-shaped stopper 3 for receiving the substrate W is arranged in the inner portion of the space 1.

Details of the stopper 3 are shown in FIG. That is, the stopper 3 uses the metal core material 4 such as SUS as the PTF.
It is mainly constituted by being covered with a fluororesin tube 5 such as E, which has a metal core 4 with sufficient strength, and the fluororesin tube 5 provides chemical resistance and heat resistance. And is configured to have impact resistance.

The length of the core material 4 is the tube 5
The length is set to be shorter than the length, and when the core material 4 is covered with the tube 5, the space portions 20 are formed at both ends of the tube 5.

A cylindrical plug member 21 made of fluororesin, such as PTFE, having an outer diameter substantially the same as the inner diameter is inserted into the space 20 so that the end faces thereof are flush with each other. The outer peripheral surface of the member 21 and the inner peripheral surface of the tube 5 that defines the space portion 20 are joined by fusion.

[0016] When the PTFE is used for both the tube 5 and the plug member 21, this fusion is caused by the melting point (about 327).
C.) a meltable fluororesin having a melting point lower than that of PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer resin) having a melting point of about 305.degree.
It is performed by heating above the melting point of PTFE.

Since PTFE has a property that it does not flow even when the temperature exceeds the melting point, the shapes of the tube 5 and the plug member 21 do not change even if they are heat-sealed as described above. .

With this structure, both ends of the fluororesin tube 5 coated with the metal core material 4 are closed by the fluororesin plug members 21, and the inner peripheral surface of the tube 5 and the plug member 21 are closed. When the substrate cassette is immersed in a chemical solution in a hermetically sealed state by fusion bonding with the outer peripheral surface of 21 to prevent the liquid from flowing into the tube 5 and prevent the liquid pool, Moreover, even if a creep phenomenon occurs in the tube 5 due to heat cycle or the like, this effect can be maintained.

A female screw portion 23 is formed on the end surface of the plug member 21, and a bolt 6 is screwed into the female screw portion 23 to fix the stopper 3 to the frame 1.

In the case of this embodiment, since the core member 4 and the plug member 21 are separated from each other, the weight of both the members 4 and 21 when the substrate W is supported in relation to the tensile strength of the tube 5.
Although it is easy for the joint to bend, it can be made difficult to bend by configuring as shown in FIG.

That is, FIG. 2 shows another embodiment,
In this embodiment, a recess 24 extending in the axial direction is formed on the end surface of the metal core material 4, and a small diameter portion 25 having an outer diameter substantially equal to the inner diameter of the recess 24 and an outer diameter substantially equal to the inner diameter of the space portion 20. The small diameter portion 2 of the plug member 21 of different diameter having the large diameter portion 26 of
5, the large diameter portion 26 is positioned in the recess 24, and the large diameter portion 26 is positioned in the space portion 20, and the outer peripheral surface of the large diameter portion 26 and the inner peripheral surface of the tube 5 partitioning the space portion 20 are formed in the same manner as described above. Of the bolt 6 for fixing the stopper 3 to the frame 1 so as to reach the inside of the recess 24. .

With this structure, the bolt 6
The shaft portion of the core member 4 is inserted through the inside of the joint portion between the end surface of the core material 4 and the plug member 21, and the shear strength or the compressive strength of the plug member 21 causes the joint portion between the end surface of the core material 4 and the plug member 21. The occurrence of bending can be prevented as much as possible.

In the above embodiment, an example is shown in which the core member 4 is formed with the female screw portion 23, and the bolt 6 is screwed into the female screw portion 23 to fix the stopper 3 to the frame 1. However, it is also possible to project a male screw portion on the end surface of the core material and screw a nut to the male screw portion to fix the stopper to the frame.

[0024]

Since the present invention has the above-mentioned structure,
By forming a stopper by covering a metal core material with a tube made of a fluororesin, requirements such as strength, chemical resistance, heat resistance and impact resistance as a stopper can be satisfied.

Moreover, both ends of the fluororesin tube coated with the metal core material are closed with fluororesin plug members, and the outer peripheral surface of the plug member is hermetically sealed by fusion bonding to the inner peripheral surface of the tube. By joining with, the flow of liquid into the tube is surely blocked, and the liquid pool phenomenon is reliably prevented, and even if the tube creeps due to heat cycle etc., this effect is maintained. Therefore, the drainage can be improved.

[Brief description of drawings]

FIG. 1 is a sectional view showing an essential part of an embodiment of the present invention.

FIG. 2 is a vertical cross-sectional view showing the main parts of another embodiment.

FIG. 3 is a perspective view showing a substrate cassette.

FIG. 4 is a sectional view showing a main part of a conventional example.

FIG. 5 is a vertical cross-sectional view showing a main part of another conventional example.

[Explanation of symbols]

 2 Round bar with groove 3 Stopper 4 Core material 5 Tube 20 Space part 21 Plug member 22 Glue

Continuation of front page (51) Int.Cl. ⁶ Identification number Office reference number FI technical display location H01L 21/31 // B65D 81/24 A

Claims (1)

[Claims] 1. A cassette for a substrate, wherein a rod member having a metal core material coated with a fluororesin tube is used as a stopper, wherein the length of the core material is shorter than the length of the tube. While forming a space in the space, a stopper member made of fluororesin is inserted into the space, and the outer peripheral surface of the plug member and the inner peripheral surface of the tube defining the space are fused to form the stopper. A substrate cassette characterized by being configured.