JPH07270808A - Production of liquid crystal display device - Google Patents

Abstract

PURPOSE:To improve the display quality of a liquid crystal display device by reducing the peeling of spacers. CONSTITUTION:This liquid crystal display device is consituted by arranging a liquid crystal layer between one pair of substrate members in which at least one substrate member has tranclucency and areas where display electrodes provided respectively by one pair of substrate members are superposed are made to be pixel areas. The substrate member of one side is formed in such a way that a black color resin film material 28a having photosensitivity is applied on a translucent substrate 25 on which a pixel electrode 26 is formed, spacer 29 are scattered and after one parts of spacers are buried in the black color resin film material 28a while depressing spacers, the substrate is exposed by using a mask 61 having a pattern corresponding to the pixel area and then is developed and baked to form a black matrix 28 and moreover to form an oriented film. Since spacers 29 are scattered and depressed before the exposure and the baking of the black color resign film material 28a, spacers are sufficiently buried in the black color resin film material 28a and the adhesive strength between the spacer 29 and the black matrix 28 is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal used for obtaining excellent display quality by reducing peeling of spacers for maintaining a predetermined space between a pair of substrate members with a liquid crystal layer interposed therebetween. The present invention relates to a method for manufacturing a display device.

[0002]

2. Description of the Related Art A liquid crystal display device is constructed by arranging a pair of substrate members, at least one of which has a light-transmitting property, at a predetermined interval and injecting liquid crystal between the pair of substrate members. In order to maintain a predetermined distance, for example, spherical spacers having a controlled diameter are used. After spacers are scattered on the liquid crystal layer side surface of one of the substrate members, the other substrate member is bonded. . For this reason, the distance between the substrate members is kept substantially equal to the diameter of the spacer. Conventionally, the spacers have been scattered over almost the entire liquid crystal layer side surface of one substrate member. That is, it was also scattered in the area actually related to display. In the liquid crystal display device thus manufactured, there is no liquid crystal in the portion where the spacer is arranged, and the light incident on the portion is always transmitted to cause light leakage, resulting in a problem that the contrast ratio is significantly lowered. Was there. This is because the dispersed spacers and the liquid crystal have different optical anisotropies. In order to solve such a problem, an example in which a liquid crystal display device is manufactured without dispersing spacers in a region related to display is disclosed in, for example, Japanese Patent Laid-Open No. 2-30.
8224, JP-A-63-98634, and JP-A-4-324.
427.

FIG. 9 is a sectional view showing stepwise a part of a conventional method for manufacturing a liquid crystal display device. As shown in FIG. 9A, a color filter 2 including a plurality of red filters 2R, green filters 2G, and blue filters 2B is formed on one surface of the transparent substrate 1 by, for example, a printing method or an electrodeposition method. It is formed. The filters 2R, 2G, 2B are respectively formed corresponding to the pixel regions, and the black matrix 3 which is a light shielding unit is formed between the filters. Also,
The protective layer 4 is formed on the surface of each filter. next,
As shown in FIG. 9B, a resin layer 5 made of, for example, a photosensitive acrylic resin is formed on the surface of the black matrix 3. The resin layer 5 is formed by applying the photosensitive acrylic resin by a spin coating method and then pre-baking it to form a pattern into a desired shape.

Subsequently, as shown in FIG. 9C, spacers 6 made of synthetic resin are scattered on the surfaces of the protective layer 4 and the resin layer 5. When the surface of the substrate 7 is washed after the substrate 7 is sandwiched between a pair of plates having excellent flatness and the spacer 6 is pressed, the spacer 6 not fixed to the resin layer 5 is removed. Substrate 8 as shown in () is completed. An example of such a manufacturing method is disclosed in JP-A-2-
308224.

FIG. 10 is a cross-sectional view showing stepwise a part of another method for manufacturing a conventional liquid crystal display device. Figure 10 (1)
As shown in, the transparent electrode 12 is formed on one surface of the insulating substrate 11. The transparent electrode 12 is patterned into a predetermined shape. Next, as shown in FIG. 10B, a negative resist film material 1 containing a spacer 13 mixed therein.
4a is applied to the surface of the substrate 11 on which the transparent electrode 12 is formed. Resist film material 14 with spacers 13 mixed therein
The application of a is performed by a printing method or a spin coating method, for example. Subsequently, as shown in FIG. 10C, for example, a mask 16 used for patterning the transparent electrode 12 is arranged on the substrate 18 coated with the resist film material 14a, and the substrate 18 is formed. Is exposed to light 17 such as ultraviolet light. The mask 16 has a region corresponding to the transparent electrode 12 as a light shielding region, and the resist film material 14a not irradiated with the light 17 is removed by developing after exposure. That is, FIG.
As shown in (4), the resist film material 14a applied on the transparent electrodes 12 is removed, and the substrate 19 in which the resist film 14 including the spacers 13 is formed between the adjacent transparent electrodes 12 is completed. . The substrate 19 is, for example, 180
The spacer 13 is fixed to the resist film 14 by baking at a temperature of ℃. An example of such a manufacturing method is disclosed in JP-A-63-98634.

Further, Japanese Patent Laid-Open No. 4-324427 discloses an example of a liquid crystal display device using a resin film having a light shielding property as the resist film 14.

[0007]

After the spacers 6 and 13 are arranged as described above, the alignment film is formed.
The surface of the alignment film is subjected to alignment treatment by, for example, a rubbing method. However, in the conventional technique shown in FIG. 9, after the resin layer 5 is cured, the spacers 6 are dispersed,
Pressed. For this reason, the spacer 6 is not sufficiently buried in the resin layer 5, and there is a problem that the adhesion between the spacer 6 and the resin layer 5 is low. Further, the conventional technique shown in FIG.
Since the resist film 14 is formed by applying the resist film material 14a mixed with the spacer 13, if the dispersibility of the spacer 13 is poor, lumps of the spacer 13 will be formed in the applied resist film material 14a. Will be lost.

As described above, if the problem that the adhesion of the spacers 6 is low or that the spacers 13 are agglomerated occurs, the spacers 6 and 13 are separated during the rubbing process of the alignment film. Spacer 6,13
If is peeled off, the pair of substrate members cannot be held at a predetermined interval, and desired display characteristics cannot be obtained. Also, when the peeled spacers 6 and 13 move to the area related to the display, the above-mentioned light leakage is caused,
This causes a decrease in contrast ratio. In addition, display characteristics are deteriorated due to defective rubbing treatment. Furthermore, there is a possibility that the resist film may also peel off when the spacer peels off,
When the resist film is used as the light shielding means, it becomes impossible to obtain a high definition display.

It is an object of the present invention to provide a method of manufacturing a liquid crystal display device which is excellent in display quality and has reduced peeling of spacers.

[0010]

According to the present invention, a liquid crystal layer is disposed between a pair of substrate members, at least one of which has a light-transmitting property, the pair of substrate members including a display electrode for driving a liquid crystal and a liquid crystal. And an alignment film which is provided closest to the layer and regulates the alignment state of the liquid crystal molecules when no voltage is applied,
In the method for manufacturing a liquid crystal display device, in which a pixel region is an area where display electrodes of each of the pair of substrate members overlap, one of the pair of substrate members has an insulating substrate on one surface thereof. Forming display electrodes,
A resin film material having a light-shielding property is applied on an insulating substrate including the display electrodes, spacers for controlling the distance between the pair of substrate members are scattered on the resin film material, and the spacers are pressed to form a resin film. Part of the material is buried in the material, the resin film material is baked to form a resin film, the resin film in the pixel region is removed to form a light-shielding film, and the light-shielding film, the spacer and the display electrode are covered. A method for manufacturing a liquid crystal display device, which is characterized in that it is formed by forming an alignment film.

According to the present invention, a liquid crystal layer is disposed between a pair of substrate members, at least one of which has a light-transmitting property.
The pair of substrate members each have a display electrode for driving a liquid crystal, and an alignment film which is provided closest to the liquid crystal layer and regulates the alignment state of liquid crystal molecules when no voltage is applied. In a method for manufacturing a liquid crystal display device in which a pixel region has an overlapping region of display electrodes, each one of the pair of substrate members has the display electrode formed on one surface of an insulating substrate, A photosensitive resin film material having a light shielding property is applied on an insulating substrate including the display electrodes, spacers for controlling the distance between the pair of substrate members are scattered on the photosensitive resin film material, and the spacers are pressed. Then, a part of the photosensitive resin film material is buried in the photosensitive resin film material, the photosensitive resin film material is exposed and developed using a mask having a pattern shape corresponding to the pixel region, and the remaining photosensitive resin film material is baked. And shade Forming a light shielding film, a method of manufacturing a liquid crystal display device characterized in that it is produced by forming an alignment film covering the spacer and the display electrodes.

The present invention is also characterized in that the surface of the spacer is coated with a thermoplastic resin.

Further, in the present invention, the photosensitive resin film material is a negative photosensitive resin which is insolubilized by light irradiation, and a spacer having a surface coated with a negative photosensitive resin in advance is used. It is characterized in that exposure is performed using a mask having a corresponding light-shielding region.

Further, in the present invention, the photosensitive resin film material is applied by being dissolved in a solvent, and immediately after the application of the photosensitive resin film material, heating is performed to remove the solvent prior to exposure. Characterize.

Further, the present invention is characterized in that the photosensitive resin film material is applied by being dissolved in a solvent, and immediately after the spacers are sprayed, it is heated to remove the solvent immediately before exposure.

Further, the present invention is characterized in that the photosensitive resin film material is applied by being dissolved in a solvent, and immediately after pressing the spacer, prior to exposure, heating is performed to remove the solvent.

[0017]

According to the present invention, at least one of them has a light-transmitting property and controls the alignment state of liquid crystal driving display electrodes and liquid crystal molecules when no voltage is applied, and an alignment film closest to the liquid crystal layer. A liquid crystal layer is disposed between the pair of substrate members each having a. In such a liquid crystal display device, display is performed with a region where the display electrodes of the pair of substrate members overlap as a pixel region. That is, the alignment state of the liquid crystal molecules is changed by applying / not applying a voltage between the display electrodes, and the incident light from the translucent substrate side is transmitted / blocked to perform display by light and dark. For example, in an active matrix type liquid crystal display device having a matrix of pixel regions, an image is displayed by combining a plurality of pixel regions. In such a liquid crystal display device, in order to obtain a display with an excellent contrast ratio,
A light-shielding film is provided to prevent light from leaking to regions other than the pixel region. In addition, spacers are arranged to maintain the distance between the pair of substrate members at a predetermined distance.

In the present invention, one of the substrate members is formed by applying a resin film material having a light-shielding property on an insulating substrate on which display electrodes are formed, spraying spacers on the resin film material, and pressing the spacers. And bury a part of it in the resin film material,
The resin film material is fired to form a resin film, the resin film in the pixel region is removed to form a light shielding film, and an alignment film is formed to cover the light shielding film, the spacers and the display electrodes. . During the baking, an appropriate time and temperature are selected according to the resin film material, and the baking cures the resin film material.

Since the spacers are not arranged in the pixel region, when arranged in the pixel region, the light leakage caused by the difference in optical anisotropy between the spacers and the liquid crystal can be eliminated, and the deterioration of the contrast ratio can be eliminated. it can. Further, the spacers are scattered and pressed before the baking process for hardening the resin film material. Therefore, as compared with the case where the spacers are scattered and pressed after the resin film material is fired to form the resin film, the resin film material is flexible, so that the spacers can be sufficiently embedded in the resin film material. it can.
Therefore, the adhesion between the spacer and the light-shielding film is improved, the peeling of the spacer is reduced when the alignment film is subjected to the alignment treatment such as rubbing, and the light leakage due to the peeled spacer is reduced. Further, since the peeling of the spacer is reduced, the distance between the pair of substrate members can be accurately maintained. Therefore, it is possible to provide a liquid crystal display device having excellent display quality.

Further, according to the present invention, a photosensitive resin film material having a light shielding property is applied on an insulating substrate on which display electrodes are formed, spacers are scattered on the photosensitive resin film material, and the spacers are formed. Pressed. The photosensitive resin film material is exposed and developed using a mask having a pattern shape corresponding to the pixel region, and the remaining photosensitive resin film is baked to form a light shielding film. The baking removes the solvent used during development and completely cures the photosensitive resin film material.

Since the light shielding film is made of a photosensitive resin, it is not necessary to form a resist film at the time of pattern formation, and the light shielding film can be formed relatively easily. Further, since the spacer is not arranged in the pixel region, it is possible to eliminate the light leakage due to the spacer and to prevent the deterioration of the contrast ratio as described above. Further, the spacers are scattered and pressed before exposing the photosensitive resin film material. Therefore, the photosensitive resin film material is relatively flexible,
The spacer can be sufficiently embedded in the photosensitive resin film material, and the adhesiveness between the spacer and the light shielding film is improved. Therefore, the peeling of the spacer is reduced as described above,
Light leakage due to the peeled spacer is reduced. Further, since the peeling of the spacer is reduced, the distance between the pair of substrate members can be accurately maintained. Therefore, it is possible to provide a liquid crystal display device having excellent display quality.

Further, according to the present invention, a spacer having a surface coated with a thermoplastic resin in advance is used. Therefore,
During baking of the resin film material or baking after exposing and developing the photosensitive resin film material, the thermoplastic resin on the spacer surface and the light shielding film are melted to further improve the adhesion between the spacer and the light shielding film. be able to. Therefore, peeling of the spacer can be further reduced, and the display quality can be improved.

According to the invention, the photosensitive resin film material is a negative type photosensitive resin, and a spacer having a negative type photosensitive resin coated on its surface is used. Since the photosensitive resin is composed of a negative type photosensitive resin that is insolubilized by light irradiation, the mask used at the time of exposure is a mask that does not irradiate light to the pixel area but irradiates light to the area other than the pixel area. To be Since the photosensitive resin on the surface of the spacer is also exposed at the same time as the exposure of the photosensitive resin film material, the adhesion between the spacer and the light-shielding film is further improved, the peeling of the spacer is reduced, and the display quality is improved.

Further, according to the invention, the photosensitive resin film material is applied by being dissolved in a solvent, and immediately after the application of the photosensitive resin film material, prior to the exposure, heating is applied to remove the solvent. To be done. The heating is performed immediately after the spacers are dispersed on the photosensitive resin film material which is dissolved in a solvent and applied. Furthermore, the heating is performed immediately after the spacers are dispersed and pressed on the photosensitive resin film material which is dissolved in a solvent and applied. Thus, by removing the solvent of the applied photosensitive resin film material, the photosensitive resin can be cured in a shorter exposure time as compared with the case where the heat treatment for removing the solvent is not performed. . Moreover, since the photosensitive resin film material is in a flexible state in any of the procedures, the spacer can be sufficiently buried.

[0025]

1 is a cross-sectional view showing the structure of a liquid crystal display device 21 produced by the manufacturing method according to the first embodiment of the present invention, and FIG. 2 shows one substrate member 22. It is a top view. The liquid crystal display device 21 is configured to include one substrate member 22, the other substrate member 23, and a liquid crystal layer 24,
The liquid crystal layer 24 is disposed between the pair of substrate members 22 and 23. When at least one of the pair of substrate members 22 and 23 has a light-transmitting property and only one of the substrate members has a light-transmitting property, the pair of substrate members 22 and 23 is used as a reflective type, and both the substrate members are transparent. When it has a light property, it is used as a reflection type or a transmission type. In this embodiment, both substrate members 2
An example in which 2 and 23 have translucency will be described.

The one substrate member 22 is a transparent substrate 25,
A pixel electrode 26, a TFT (thin film transistor) element 27,
Black matrix 28, spacer 29 and alignment film 3
Including 1. Translucent substrate 25 made of glass, for example
One surface has at least an insulating property, and a pixel electrode 26, a TFT element 27, a gate bus wiring 36, and a source bus wiring 37 are formed on the surface by a method described later. As shown in FIG. 2, a plurality of gate bus lines 36 are formed in parallel with each other, and a plurality of source bus lines 37 are formed in a direction orthogonal to the gate bus lines 36. In addition, the gate and source bus lines 36 and 37 are formed so as to maintain insulation between them. A pixel electrode 26 and a TFT element 27 are formed in a rectangular area formed by the gate and source bus lines 36 and 37, respectively. The TFT element 27 receives the display electric signal from the gate and source bus lines 36 and 37 from the picture element electrode 26.
Is a switching element for driving the liquid crystal. The picture element electrode 26 is realized by a transparent electrode such as ITO (Indium Tin Oxide), and the picture element electrode 26 corresponds to the pixel area of the liquid crystal display device 21. The picture element electrode 26
The black matrix 28, which is a light-shielding means, is formed in the other regions by a method described later. The black matrix 28 is for preventing light leakage from regions other than the pixel region.

In this embodiment, a region other than the pixel electrode 26,
That is, a spherical spacer 29 having a controlled diameter is fixed to the black matrix 28 by burying a part thereof. The spacer 29 is for keeping the gap between the one substrate member 22 and the other substrate member 23 at a predetermined gap, and the spacer 29 is arranged by a method described later. An alignment film 31 is further formed to cover the spacers 29, the black matrix 28 and the pixel electrodes 26. For example, an alignment film 3 made of polyimide resin or the like
The surface of No. 1 is subjected to an alignment treatment such as a rubbing method.

On the other hand, the other substrate member 23 includes a transparent substrate 32, a color filter 33, a counter electrode 34 and an alignment film 35. Translucent substrate 3 made of glass, for example
One surface of 2 has an insulating property, and the color filter 33 is formed on the surface. The color filter 33 is composed of a plurality of filters made of, for example, a resin in which red, green, and blue pigments are dispersed, and is formed in a pattern corresponding to a pixel region by a printing method, an electrodeposition method, or a spin coating method. Further, the counter electrode 34 is formed on almost the entire surface of the color filter 33 and the transparent substrate 32. The counter electrode 34 is realized by, for example, ITO and is formed to have a thickness of 50 nm to 100 nm by a sputtering method. An alignment film 35 made of polyimide resin or the like is formed on the counter electrode 34. The surface of the alignment film 35 is subjected to an alignment treatment such as a rubbing method.

The pair of substrate members 22 and 23 are bonded with an adhesive (not shown) so that the alignment films 31 and 35 of the substrate members face each other. A pair of substrate members 2
The space between the second and the second liquid crystal layers 2 and 23 is maintained at a predetermined space by the spacer 29, and liquid crystal is injected into the space to form the liquid crystal layer 2.
4 is formed. The injection port for injecting the liquid crystal is sealed with an adhesive or the like, and is further fired for the purpose of stabilizing the alignment state of the liquid crystal molecules, whereby the liquid crystal display device 21 is completed.

3A to 3C are sectional views showing a method of manufacturing the TFT element 27 step by step. First, as shown in FIG. 3A, the semiconductor layer 41 is formed on one surface 25 a of the transparent substrate 25.
Is formed. For example, p-Si is formed on the one surface 25a.
(Polysilicon) to a thickness of 25 nm to 200 nm, preferably 70 nm to 100 nm, under reduced pressure chemical vapor deposition (LP).
CVD) to form a p-Si film, and the p-S film is formed.
The i film is patterned into a predetermined shape to form the semiconductor layer 41.

Next, as shown in FIG. 3B, a gate insulating film 42 is formed so as to cover one surface 25a of the transparent substrate 25 and the surface of the semiconductor layer 41. For example SiO
₂ is deposited by plasma chemical vapor deposition (PCVD) to a thickness of about 200 nm to 500 nm, preferably about 200 nm to form a SiO ₂ film, and the SiO ₂ film is patterned into a predetermined shape to form a gate insulating film. A film 42 is formed. As shown in FIG. 3C, a gate electrode 43 is formed on the gate insulating film 42 in a predetermined region of the semiconductor layer 41.
Is formed. The gate electrode 43 connected to the gate bus line 36 is formed by depositing a conductive material such as metal to a thickness of 200 nm to 400 nm by a sputtering method. Subsequently, as shown in FIG. 3D, regions other than the predetermined region of the semiconductor layer 41 in which the gate electrode 43 is formed by the ion implantation method are used as contact layers 45a and 45b. The irradiated ions 44 are group V elements such as phosphorus or compounds thereof,
Alternatively, it is realized by a group III element such as boron or a compound thereof, and is irradiated with an accelerating voltage of, for example, 50 keV to 100 keV.

Further, as shown in FIG. 3 (5), an interlayer insulating film 46 is formed on the surfaces of the gate insulating film 42 and the gate electrode 43. For example SiN _x or SiO ₂
Is deposited by PCVD to a thickness of 300 nm to 500 nm to form an interlayer insulating film 46. Then, the predetermined portions of the formed interlayer insulating film 46 and the gate insulating film 42 are etched to form contact holes 47a, 47.
b is formed. By forming the contact holes 47a and 47b, the contact layers 45a and 45b are formed.
Is exposed. The pixel electrode 2 is formed in a predetermined region of the interlayer insulating film 46 in which the contact holes 47a and 47b are formed.
6 is formed. The pixel electrode 26 is formed, for example, by depositing ITO by sputtering to a thickness of 50 nm to 100 nm. Furthermore, FIG. 3 (6)
A source electrode 48 connected to the source bus line 37 and a drain electrode 49 connected to the pixel electrode 26 are formed as shown in FIG. The source electrode 48 and the drain electrode 49 are formed by depositing a conductive material such as metal to a thickness of 200 nm to 700 nm by a sputtering method. The source electrode 48 has a contact hole 47.
The drain electrode 49 is connected to the contact layer 45a through a, and the drain electrode 49 is connected to the contact layer 45b through a contact hole 47b.

Further, as shown in FIG. 3 (7), a passivation film 50 is formed so as to cover the surfaces of the source electrode 48, the drain electrode 49 and the pixel electrode 26. The passivation film 50 is, for example, SiN _x PCVD.
It is formed to a thickness of 300 nm to 500 nm by a method. As described above, the TFT element 27 is completed.

FIG. 4 is a process drawing showing a procedure for making the one substrate member 22, and FIG. 5 is a sectional view showing the procedure stepwise. First, as shown in FIG. 5A, the TFT element 27 and the pixel electrode 26 are formed on one surface of the light-transmissive substrate 25 by the above-described method, and further realized by an amine-based silane coupling agent or the like. A primer layer (not shown) is formed. The primer layer is formed by applying a predetermined film material by, for example, a spin coat method, and then baking it at 100 ° C. for 5 minutes. Process a1
Then, as shown in FIG. 5B, a black resin film material 28a is applied to the surface of the pixel electrode 26 and the TFT element 27 on which the primer layer is formed. Black resin film material 2
As 8a, a photosensitive resin such as a negative resist in which a filler made of carbon or an oxide such as iron or manganese is dispersed is used. In this embodiment, as the black resin film material 28a, a color mosaic CK-20 is used.
00 (manufactured by Fuji Hunt Electronics Technology Co., Ltd.)
Was used. The black resin film material 28a is dissolved in a solvent and applied to a thickness of 0.1 μm to 2 μm, preferably 1 μm by, for example, a spin coating method.

In step a2, the black resin film material 28a is used.
The substrate coated with is baked (prebaked) at 90 ° C. for 15 minutes, for example. By this pre-baking process,
The solvent contained in the black resin film material 28a is removed. By removing the solvent in this manner, the black resin film material 28a can be cured at the time of exposure, which will be described later, in a shorter exposure time than when the pre-baking process is not performed.

In step a3, the black resin film material 28a is used.
As shown in FIG. 5C, spacers 29 are scattered on the surface of the. The spacer 29 includes a pair of substrate members 22, 2
3 is to maintain a constant interval, and its diameter is selected according to the liquid crystal display device to be produced. In this embodiment, a spacer 29 made of synthetic resin having a diameter of 4.5 μm is used as the spacer spraying device 5 as shown in FIG.
4 was used for dry spraying. Dry spraying means spacer 29
Is sprayed from the tip of the nozzle 56 with the pressurized air 55 and is sprayed onto the substrate 25 arranged below the nozzle 56. For example, spacers are dispersed in a resin containing a solvent, and spin is performed. Compared with the wet method of applying by a coating method or the like, the spacers 29 can be evenly dispersed.

In step a4, the substrate on which the spacers 29 are dispersed is sandwiched between a pair of plates having excellent flatness, for example, glass, and a pressure of 1.0 kg / cm ² is applied and pressed. As a result, a part of the spacer 29 is shown in FIG.
As shown in (4), it is embedded and fixed in the black resin film material 28a. Since the spacers 29 are scattered and pressed before the black resin film material 28a is exposed, the spacers 29 can be sufficiently buried.

Although exposure processing is performed in step a5, an oxygen blocking film (not shown) is formed on the spacer 29 and the black resin film material 28a prior to this exposure processing. The oxygen barrier film is provided to prevent the surface of the black resin film material 28a from being oxidized by ozone (O ₃ ) generated at the time of exposure and prolonging the exposure time. For example, a predetermined film material is formed by spin coating. 90 ° C after coating
It is formed by baking for 5 minutes. After the oxygen blocking film is formed, the black resin film material 28a is cured by irradiating it with light 62 such as ultraviolet light through a mask 61 as shown in FIG. The mask 61 has a light-shielding region and a light-transmitting region corresponding to the pixel region, and the position of each region is selected depending on the type of photosensitive resin used as the black resin film material 28a. For example, when a negative resist is used, a mask 61 having a region corresponding to the picture element electrode 26 as a light shielding region is used as shown in the figure. When the exposure is completed, the substrate is washed with water to remove all the oxygen barrier film.

In step a6, development is performed. As a result, as shown in FIG. 5 (6), the black resin film material 28a and the spacers 29 in the region irradiated with the light 62 remain, and the black resin film material 2 in the region not irradiated with the light 62 is left.
8a and the spacer 29 are removed, and the black matrix 28 is formed. After development, it is washed with water.

In step a7, baking (post-baking) is performed at 200 ° C. for 30 minutes, for example. By this post-baking, the solvent and water used during development and washing with water are removed, and the black matrix 28 made of the black resin film material 28a is completely cured. After that, the alignment film 31 is formed, and the one substrate member 22 is completed.

As described above, according to this embodiment, the spacers 29 are scattered and pressed before the exposure. In this way, since the spacers 29 are scattered and pressed on the relatively flexible black resin film material 28a before exposure, the spacers 29 can be sufficiently buried in the black resin film material 28a, and the spacers 29 and the black matrix. The adhesiveness with 28 can be improved. Therefore, the spacer 29 is less likely to be peeled off when the alignment film 31 is aligned, and light leakage due to the peeled spacer 29 is reduced. Since the peeling of the spacer 29 is reduced, the pair of substrate members 2
It is possible to maintain the interval between 2 and 23 with high accuracy, and to provide a liquid crystal display device with excellent display quality.
Further, since the black resin film material 28a is made of a photosensitive resin, it is not necessary to form a resist film at the time of pattern formation, and the black matrix 28 can be formed relatively easily.

In this embodiment, the black resin film material 28a is used.
Although the example in which the spacers 29 are applied and pre-baked and then the spacers 29 are sprayed and pressed has been described, an example in which the black resin film material 28a is applied, the spacers 29 are sprayed and then pre-baked, and the spacers 29 are further pressed, An example in which the black resin film material 28a is applied, the spacers 29 are scattered, the spacers 29 are pressed, and then prebaked is also included in the scope of the present invention, and the same effect as the present embodiment can be obtained.

It is also possible to use a spacer made of a silica material as the spacer 29. Further, a spacer whose surface is coated with a resin, or a spacer whose surface is treated with, for example, an amine silane cup agent, is used. It is also possible to use. Furthermore, the spacer 29 is not limited to being colorless and may be colored.

FIG. 7 is a cross-sectional view showing stepwise the procedure for producing one substrate member 22 based on the method of manufacturing a liquid crystal display device according to the second embodiment of the present invention. The second embodiment is manufactured by the same procedure as described above except that the spacer 63 is used instead of the spacer 29.
Therefore, description will be made with reference to the process chart of FIG. The same members as those in the above-described embodiment are designated by the same reference numerals.

After the TFT element 27 and the pixel electrode 26 as shown in FIG. 7A are formed in the same manner as described above and the not-shown primer layer is formed, in step a1, the step shown in FIG. Black resin film material 28a as shown in 2)
Is applied. In step a2, baking (prebaking) is performed.

In step a3, the spacers 63 are scattered as shown in FIG. 7 (3). The spacer 63 is formed by coating the surface of a sphere 63a made of synthetic resin or the like with a resin film 64. In this embodiment, the diameter is 4.5μ.
A sphere 63a of m coated with a resin film 64 made of a thermoplastic resin was used. Polymethylmethacrylate is used as the thermoplastic resin, 0.2 μm to 0.5 μm
It was coated to a film thickness of m. The coating of the resin film 64 is performed by a known method, for example, by immersing the sphere 63a in a solution in which a thermoplastic resin is dissolved and then drying the taken sphere 63a. Sphere 6
The material 3a is not limited to one made of a synthetic resin, but a material made of a silica-based material can be used.

Thereafter, in steps a4 to a7, the same processing as described above is performed. The black matrix 28 and the resin film 64 forming the spacer 63 are melted by post-baking after development. In FIG. 7 (7), the fact that it is melted is indicated by a chain double-dashed line. Therefore, the adhesiveness between the sphere 63a that substantially functions as a spacer and the black matrix 28 is improved, and the peeling of the spacer can be reduced.

The resin film 64 has substantially the same temperature as that of the black matrix 28 during post baking.
For example, one that is fired at 150 ° C to 220 ° C, preferably 200 ° C is selected.

FIG. 8 is a cross-sectional view showing a step-by-step procedure for producing one substrate member 22 based on the liquid crystal display device manufacturing method according to the third embodiment of the present invention. The third embodiment is manufactured by the same procedure as described above except that the spacer 65 is used instead of the spacers 29 and 63. The spacer 65 is formed by coating a surface of a sphere 65a similar to the sphere 63a with a resin film 66 having the same photosensitivity as the photosensitive resin used as the black matrix 28. In this embodiment, a negative photosensitive resin is used as the resin film 66. The same members as those in the above-described embodiment are designated by the same reference numerals.

Therefore, at the time of exposure, the resin film 66 is exposed at the same time as the black resin film material 28a. Further, the post-baking melts and integrates the black matrix 28 and the resin film 66, as shown in FIG. 8 (7). Therefore, the spacer and the black matrix 28
Adhesion with and is improved, and peeling can be reduced.

[0051]

As described above, according to the present invention, the spacers are scattered and pressed before the baking process for hardening the resin film material. Therefore, the resin film material is flexible, the spacer can be sufficiently embedded in the resin film material, and the adhesion between the spacer and the light shielding film can be improved. Therefore, for example, it is possible to reduce the peeling of the spacer during the alignment treatment of the alignment film, and the light leakage due to the peeled spacer is reduced. Further, since the peeling of the spacers is reduced, it is possible to accurately maintain the distance between the pair of substrate members, and the display quality is improved.

Further, according to the present invention, the spacers are scattered and pressed before the exposure of the photosensitive resin film material. Therefore, similarly to the above, the spacer can be sufficiently embedded in the photosensitive resin film material, and the adhesion between the spacer and the light shielding film can be improved. Therefore, peeling of the spacer can be reduced, and the display quality is improved. Further, at the time of pattern formation, the light shielding film can be formed relatively easily without forming a resist film.

Further, according to the present invention, the thermoplastic resin applied to the surface of the spacer is melted with the resin film material or the photosensitive resin film material during firing. Therefore, the adhesiveness between the spacer and the light shielding film can be further improved.

Further, according to the present invention, since the negative type photosensitive resin film material and the negative type photosensitive resin film material applied to the surface of the spacer are exposed at the same time, the spacer and the light shielding film are adhered to each other. The property can be further improved.

Further, according to the present invention, immediately after applying the photosensitive resin film material by dissolving it in a solvent, it is heated to remove the solvent immediately before the exposure. The heating is performed immediately after the spacers are dispersed on the photosensitive resin film material.
Further, the heating is performed immediately after the spacers are scattered and pressed on the photosensitive resin film material. By removing the solvent of the photosensitive resin film material thus applied,
It is possible to cure the photosensitive resin film material in a shorter exposure time as compared with the case where heat treatment is not performed to remove the solvent. Moreover, the spacers can be sufficiently embedded in the photosensitive resin film material by any of the procedures.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a configuration of a liquid crystal display device 21 produced based on a method for manufacturing a liquid crystal display device according to a first embodiment of the present invention.

FIG. 2 is a plan view showing one substrate member 22. FIG.

3A to 3D are cross-sectional views showing a method of manufacturing the TFT element 27 step by step.

FIG. 4 is the one substrate member 2 according to the first embodiment.
It is a flowchart showing the procedure for creating 2.

FIG. 5 is the one substrate member 2 based on the first embodiment.
It is sectional drawing which shows the procedure for producing 2 in steps.

FIG. 6 is a view showing a spacer spraying device 54.

FIG. 7 is a cross-sectional view showing stepwise a procedure for producing one substrate member 22 based on a method for manufacturing a liquid crystal display device which is a second embodiment of the present invention.

FIG. 8 is a cross-sectional view showing step by step a procedure for producing one substrate member 22 based on a method for manufacturing a liquid crystal display device according to a third embodiment of the present invention.

FIG. 9 is a cross-sectional view showing stepwise a part of a conventional method for manufacturing a liquid crystal display device.

FIG. 10 is a cross-sectional view showing a part of another manufacturing method of the conventional liquid crystal display device step by step.

[Explanation of symbols]

 21 liquid crystal display device 22,23 substrate member 24 liquid crystal layer 25 translucent substrate 26 pixel electrode 28 black matrix 28a black resin film material 29,63,65 spacer 31 alignment film 64,66 resin film

Claims (7)

[Claims] 1. A liquid crystal layer is disposed between a pair of substrate members, at least one of which has a light-transmitting property, and the pair of substrate members are provided so as to be closest to the liquid crystal driving display electrode and the liquid crystal layer. In a method for manufacturing a liquid crystal display device, each of which has an alignment film that controls an alignment state of liquid crystal molecules when no voltage is applied, and a pixel region is a region where display electrodes of each of the pair of substrate members overlap, In any one of the substrate members, the display electrode is formed on one surface of an insulating substrate, and a resin film material having a light-shielding property is applied onto the insulating substrate including the display electrode. Spacers for controlling the distance between the pair of substrate members are scattered on the film material, the spacers are pressed to bury a part thereof in the resin film material, and the resin film material is baked to form a resin film, Tree of the pixel area By removing the film to form a light shielding film, the light-shielding film, a method of manufacturing a liquid crystal display device characterized by being produced by forming an alignment film covering the spacer and the display electrodes. 2. A liquid crystal layer is disposed between a pair of substrate members, at least one of which has a light-transmitting property, and the pair of substrate members are provided so as to be closest to the liquid crystal driving display electrode and the liquid crystal layer. In a method for manufacturing a liquid crystal display device, each of which has an alignment film that controls an alignment state of liquid crystal molecules when no voltage is applied, and a pixel region is a region where display electrodes of each of the pair of substrate members overlap, Any one of the substrate members, the display electrode is formed on one surface of an insulating substrate, a photosensitive resin film material having a light-shielding property is applied onto the insulating substrate including the display electrode, Spacers for controlling the distance between the pair of substrate members are scattered on the photosensitive resin film material, and the spacers are pressed to bury a part of the spacers in the photosensitive resin film material to form a pattern shape corresponding to the pixel region. Have The photosensitive resin film material is exposed and developed using a mask, and the remaining photosensitive resin film material is baked to form a light shielding film, and an alignment film is formed to cover the light shielding film, the spacers and the display electrodes. A method for manufacturing a liquid crystal display device, characterized in that 3. The method for manufacturing a liquid crystal display device according to claim 1, wherein the surface of the spacer is coated with a thermoplastic resin. 4. The light-sensitive resin film material is a negative-type photosensitive resin which is insolubilized by light irradiation, and uses a spacer having a surface coated with the negative-type photosensitive resin in advance to shield light corresponding to the pixel region. The method for manufacturing a liquid crystal display device according to claim 2, wherein the exposure is performed using a mask having a region. 5. The photosensitive resin film material is applied by being dissolved in a solvent, and immediately after applying the photosensitive resin film material, it is heated to remove the solvent prior to exposure. The method for manufacturing a liquid crystal display device according to claim 2. 6. The photosensitive resin film material is applied by dissolving it in a solvent, and immediately after spraying the spacer, heating is performed to remove the solvent prior to exposure. Manufacturing method of the liquid crystal display device of. 7. The photosensitive resin film material is applied by being dissolved in a solvent, and immediately after pressing the spacer, it is heated to remove the solvent immediately before the exposure. Manufacturing method of the liquid crystal display device of.