JPH0726364Y2 - 気相成長装置用の固形原料供給装置 - Google Patents

気相成長装置用の固形原料供給装置

Info

Publication number
JPH0726364Y2
JPH0726364Y2 JP7365889U JP7365889U JPH0726364Y2 JP H0726364 Y2 JPH0726364 Y2 JP H0726364Y2 JP 7365889 U JP7365889 U JP 7365889U JP 7365889 U JP7365889 U JP 7365889U JP H0726364 Y2 JPH0726364 Y2 JP H0726364Y2
Authority
JP
Japan
Prior art keywords
raw material
carrier gas
solid raw
solid
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP7365889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314166U (OSRAM
Inventor
邦全 植松
昇平 小芝
Original Assignee
日本酸素株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本酸素株式会社 filed Critical 日本酸素株式会社
Priority to JP7365889U priority Critical patent/JPH0726364Y2/ja
Publication of JPH0314166U publication Critical patent/JPH0314166U/ja
Application granted granted Critical
Publication of JPH0726364Y2 publication Critical patent/JPH0726364Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP7365889U 1989-06-23 1989-06-23 気相成長装置用の固形原料供給装置 Expired - Fee Related JPH0726364Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7365889U JPH0726364Y2 (ja) 1989-06-23 1989-06-23 気相成長装置用の固形原料供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7365889U JPH0726364Y2 (ja) 1989-06-23 1989-06-23 気相成長装置用の固形原料供給装置

Publications (2)

Publication Number Publication Date
JPH0314166U JPH0314166U (OSRAM) 1991-02-13
JPH0726364Y2 true JPH0726364Y2 (ja) 1995-06-14

Family

ID=31612668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7365889U Expired - Fee Related JPH0726364Y2 (ja) 1989-06-23 1989-06-23 気相成長装置用の固形原料供給装置

Country Status (1)

Country Link
JP (1) JPH0726364Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101264394B1 (ko) * 2004-12-08 2013-05-14 롬 앤드 하스 일렉트로닉 머트어리얼즈, 엘.엘.씨. 인도 장치

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI118805B (fi) * 2000-05-15 2008-03-31 Asm Int Menetelmä ja kokoonpano kaasufaasireaktantin syöttämiseksi reaktiokammioon
US6921062B2 (en) 2002-07-23 2005-07-26 Advanced Technology Materials, Inc. Vaporizer delivery ampoule
JP4982147B2 (ja) * 2006-10-20 2012-07-25 英一 小山 目隠板の取付構造、及びその取付方法
JP5262083B2 (ja) * 2007-11-26 2013-08-14 宇部興産株式会社 固体有機金属化合物の供給装置
JP5242140B2 (ja) * 2007-11-27 2013-07-24 大陽日酸株式会社 固体原料供給方法及び装置
JP2012190828A (ja) * 2011-03-08 2012-10-04 Air Liquide Japan Ltd 固体材料ガスの供給装置および供給方法
KR20160137961A (ko) * 2014-03-27 2016-12-02 우베 고산 가부시키가이샤 유기 금속 화합물 함유 가스의 공급 장치
JP7553192B2 (ja) * 2020-09-15 2024-09-18 東京エレクトロン株式会社 原料供給装置及び原料供給方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101264394B1 (ko) * 2004-12-08 2013-05-14 롬 앤드 하스 일렉트로닉 머트어리얼즈, 엘.엘.씨. 인도 장치

Also Published As

Publication number Publication date
JPH0314166U (OSRAM) 1991-02-13

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