JPH0314166U - - Google Patents

Info

Publication number
JPH0314166U
JPH0314166U JP7365889U JP7365889U JPH0314166U JP H0314166 U JPH0314166 U JP H0314166U JP 7365889 U JP7365889 U JP 7365889U JP 7365889 U JP7365889 U JP 7365889U JP H0314166 U JPH0314166 U JP H0314166U
Authority
JP
Japan
Prior art keywords
raw material
solid raw
carrier gas
chamber
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7365889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0726364Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7365889U priority Critical patent/JPH0726364Y2/ja
Publication of JPH0314166U publication Critical patent/JPH0314166U/ja
Application granted granted Critical
Publication of JPH0726364Y2 publication Critical patent/JPH0726364Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP7365889U 1989-06-23 1989-06-23 気相成長装置用の固形原料供給装置 Expired - Fee Related JPH0726364Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7365889U JPH0726364Y2 (ja) 1989-06-23 1989-06-23 気相成長装置用の固形原料供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7365889U JPH0726364Y2 (ja) 1989-06-23 1989-06-23 気相成長装置用の固形原料供給装置

Publications (2)

Publication Number Publication Date
JPH0314166U true JPH0314166U (OSRAM) 1991-02-13
JPH0726364Y2 JPH0726364Y2 (ja) 1995-06-14

Family

ID=31612668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7365889U Expired - Fee Related JPH0726364Y2 (ja) 1989-06-23 1989-06-23 気相成長装置用の固形原料供給装置

Country Status (1)

Country Link
JP (1) JPH0726364Y2 (OSRAM)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001323374A (ja) * 2000-05-15 2001-11-22 Asm Microchemistry Oy 気相反応物を反応室内へ供給するための方法および装置
JP2008101420A (ja) * 2006-10-20 2008-05-01 Hidekazu Koyama 目隠板の取付金具、及びその取付方法
JP2009127096A (ja) * 2007-11-26 2009-06-11 Ube Ind Ltd 固体有機金属化合物の供給装置
JP2009125703A (ja) * 2007-11-27 2009-06-11 Taiyo Nippon Sanso Corp 固体原料供給方法及び装置
JP2012082527A (ja) * 2004-12-08 2012-04-26 Rohm & Haas Electronic Materials Llc 供給装置
WO2012120472A1 (en) * 2011-03-08 2012-09-13 L'air Liquide Societe, Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Supply apparatus and method of solid material gas
JP2015158015A (ja) * 2002-07-23 2015-09-03 インテグリス・インコーポレーテッド 蒸発器配送アンプル
JPWO2015145907A1 (ja) * 2014-03-27 2017-04-13 宇部興産株式会社 有機金属化合物含有ガスの供給装置
CN116018426A (zh) * 2020-09-15 2023-04-25 东京毅力科创株式会社 原料供给装置和原料供给方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001323374A (ja) * 2000-05-15 2001-11-22 Asm Microchemistry Oy 気相反応物を反応室内へ供給するための方法および装置
JP2015158015A (ja) * 2002-07-23 2015-09-03 インテグリス・インコーポレーテッド 蒸発器配送アンプル
US10465286B2 (en) 2002-07-23 2019-11-05 Entegris, Inc. Method and apparatus to help promote contact of gas with vaporized material
JP2012082527A (ja) * 2004-12-08 2012-04-26 Rohm & Haas Electronic Materials Llc 供給装置
JP2008101420A (ja) * 2006-10-20 2008-05-01 Hidekazu Koyama 目隠板の取付金具、及びその取付方法
JP2009127096A (ja) * 2007-11-26 2009-06-11 Ube Ind Ltd 固体有機金属化合物の供給装置
JP2009125703A (ja) * 2007-11-27 2009-06-11 Taiyo Nippon Sanso Corp 固体原料供給方法及び装置
WO2012120472A1 (en) * 2011-03-08 2012-09-13 L'air Liquide Societe, Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Supply apparatus and method of solid material gas
JPWO2015145907A1 (ja) * 2014-03-27 2017-04-13 宇部興産株式会社 有機金属化合物含有ガスの供給装置
CN116018426A (zh) * 2020-09-15 2023-04-25 东京毅力科创株式会社 原料供给装置和原料供给方法

Also Published As

Publication number Publication date
JPH0726364Y2 (ja) 1995-06-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees