JPH0726179B2 - Inner peripheral blade for cutting crystalline material - Google Patents
Inner peripheral blade for cutting crystalline materialInfo
- Publication number
- JPH0726179B2 JPH0726179B2 JP60201344A JP20134485A JPH0726179B2 JP H0726179 B2 JPH0726179 B2 JP H0726179B2 JP 60201344 A JP60201344 A JP 60201344A JP 20134485 A JP20134485 A JP 20134485A JP H0726179 B2 JPH0726179 B2 JP H0726179B2
- Authority
- JP
- Japan
- Prior art keywords
- inner peripheral
- cold
- peripheral blade
- strength
- steel sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
- C21D8/02—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips
- C21D8/0205—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips of ferrous alloys
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、シリコンウェハ製造時等に使用される結晶
材料切断用内周刃に関するものである。Description: [Industrial field of use] The present invention relates to an inner peripheral blade for cutting a crystal material, which is used when manufacturing a silicon wafer or the like.
一般に、内周刃は、その使用に際してホルダーに固定さ
れるが、その場合内周刃を構成する円板の半径外周方向
に張力を加えて内周刃に張りを持たせることが行なわれ
ている。Generally, the inner peripheral blade is fixed to the holder when it is used, but in that case, tension is applied to the inner peripheral blade by applying tension in the radial direction of the disc that constitutes the inner peripheral blade. .
従来、シリコンウェハの製造等で使用される結晶材料切
断用内周刃として、優れた耐熱性や耐銹性は勿論のこ
と、例えば降伏強度で120kg/mm2以上の高強度が必要と
されることから、SUS304やSUS301で代表されるオーステ
ナイト系ステンレス鋼の冷延薄鋼板が使用されている。Conventionally, not only excellent heat resistance and rust resistance but also high strength of 120 kg / mm 2 or more in yield strength is required as an inner peripheral blade for crystal material cutting used in the manufacture of silicon wafers, etc. Therefore, cold-rolled thin steel sheet of austenitic stainless steel represented by SUS304 and SUS301 is used.
また、上記の内周刃には、これを構成する冷延薄鋼板の
冷間圧延時に発生した強い面内異方性（圧延方向と圧延
直角方向の強度差）が存在しており、しかも冷延率を上
げてより強度を高めたものについては面内異方性の程度
が更に大きくなることも知られている。In addition, the above-mentioned inner peripheral edge has a strong in-plane anisotropy (strength difference between the rolling direction and the rolling right-angle direction) that occurs during cold rolling of the cold-rolled thin steel sheet that constitutes the inner peripheral blade. It is also known that the degree of in-plane anisotropy is further increased in the case where the elongation is increased to increase the strength.
上記のように内周刃に、強度の面内異方性があると、そ
れに起因して内周刃の真円度に崩れを生じ、その崩れが
内周刃の使用中に部分摩耗を引き起すほか、例え真円が
得られたとしても内周刃に波打ちが発生し易くなるなど
の問題が生じることから、 （ａ）面内異方性に見合っただけ内周刃をいびつ（楕円
形）に加工しておき、ホルダーに張り上げた時点で真円
となるようにする方法（特開昭55−31514号公報）、 （ｂ）内周刃の張り上げを温間で行う方法（特開昭59−
134666号公報）、 等の方法で強度の面内異方性を緩和することが行なわれ
ている。As described above, when the inner peripheral edge has strong in-plane anisotropy, the circularity of the inner peripheral edge collapses due to it, and the collapse causes partial wear during use of the inner peripheral edge. In addition to this, even if a perfect circle is obtained, problems such as waviness are likely to occur on the inner peripheral edge. (A) The inner peripheral edge is distorted (elliptical shape) in proportion to the in-plane anisotropy. ), So that it becomes a perfect circle when it is pulled up to the holder (JP-A-55-31514), and (b) Method of pulling up the inner peripheral blade in a warm state (JP-A-Sho). 59−
No. 134666), etc., the in-plane anisotropy of strength is relaxed.
しかし、上記の従来張り上げ方法で面内異方性が原因の
問題点を回避する方法では、必ずしも内周刃に優れた切
断性能を長期に亘って期待することができないのが現状
である。However, the conventional method of avoiding the problems caused by the in-plane anisotropy in the above-mentioned conventional pulling method cannot always expect excellent cutting performance for the inner peripheral blade for a long time.
なお、クロス圧延等の方法はコイル形態の冷延薄鋼板に
は実施することできず、また内周刃に適用される厚さ:
0.1〜0.2mm程度の冷延薄鋼板に対しては、シート方式
（切断方式）でのクロス圧延を行うことも形状等の点か
ら不可能である。Note that methods such as cross rolling cannot be performed on cold rolled steel sheet in the form of a coil, and the thickness applied to the inner peripheral blade is:
For cold-rolled thin steel sheets of about 0.1 to 0.2 mm, it is also impossible to perform cross rolling by a sheet method (cutting method) in terms of shape and the like.
そこで、本発明者等は、上述のような観点から、強度の
面内異方性の小さい内周刃を開発すべく、特にこれを構
成するオーステナイト系ステンレス鋼冷延薄鋼板に着目
し研究を行なった結果、熱間圧延と冷間圧延で製造され
る冷延薄鋼板を、重量％で（以下、％の表示は重量％を
意味する）、 C:0.20％以下、 Si:0.05〜2.0％、 Mn:0.05〜2.0％、 Cr:15〜25％、 Ni:5〜25％、 N:0.01〜0.2％、 を含有し、残部が実質的にFeから成る組成を有するオー
ステナイト系ステンレス鋼に特定した上で、これに300
〜550℃の温度域に10分以上保持の低温焼鈍を施すと、
この結果のオーステナイト系ステンレス鋼冷延薄鋼板
は、降伏強度の面内異方性指数（圧延方向の降伏強度／
圧延直角方向の降伏強度）が0.94〜1.06となり、この冷
延薄鋼板で構成された内周刃には、ホルダーへ通常の手
段で固定しても波打ちの発生がなく、また結晶材料の切
断に際しても部分摩耗などの発生もなく、長期に亘って
すぐれた切断性能を発揮するという研究結果を得たので
ある。Therefore, in order to develop an inner peripheral blade having a small in-plane anisotropy of strength, the inventors of the present invention particularly focus on the austenitic stainless steel cold-rolled thin steel sheet that constitutes the inner peripheral blade and conduct research. As a result, the cold-rolled thin steel sheet produced by hot rolling and cold rolling in% by weight (hereinafter,% means% by weight), C: 0.20% or less, Si: 0.05 to 2.0% , Mn: 0.05 to 2.0%, Cr: 15 to 25%, Ni: 5 to 25%, N: 0.01 to 0.2%, with the balance being essentially Fe And then 300
When low temperature annealing is performed for 10 minutes or more in the temperature range of ~ 550 ° C,
The resulting austenitic stainless steel cold-rolled thin steel sheet has an in-plane anisotropy index of yield strength (yield strength in rolling direction /
(Yield strength in the direction perpendicular to the rolling direction) is 0.94 to 1.06, and the inner peripheral edge made of this cold-rolled thin steel sheet does not cause waviness even if it is fixed to the holder by ordinary means. The research results show that the cutting performance is excellent over a long period of time without any partial wear.
この発明は、上記の研究結果にもとづいてなされたもの
であって、 C:0.20％以下、 Si:0.05〜2.0％、 Mn:0.05〜2.0％、 Cr:15〜25％、 Ni:5〜25％、 N:0.01〜0.2％、 を含有し、残部が実質的にFeから成る組成を有し、かつ
降伏強度の面内異方性指数が0.94〜1.06であるオーステ
ナイト系ステンレス鋼冷延薄鋼板で構成した結晶材料切
断用内周刃に特徴を有するものである。The present invention was made based on the above research results, and C: 0.20% or less, Si: 0.05 to 2.0%, Mn: 0.05 to 2.0%, Cr: 15 to 25%, Ni: 5 to 25%. %, N: 0.01 to 0.2%, with the balance being essentially Fe, and an in-plane anisotropy index of yield strength of 0.94 to 1.06. The inner peripheral blade for cutting a crystal material having the above-mentioned feature.
つぎに、この発明の内周刃において、これを構成する上
記冷延薄鋼板の組成及び面内異方性指数を上記の通りに
限定した理由を説明する。Next, the reason for limiting the composition and the in-plane anisotropy index of the cold-rolled thin steel sheet constituting the inner peripheral blade of the present invention will be described.
（ａ）Ｃ Ｃ成分には強度を向上させる作用があるが、その含有量
が0.20％を越えると延性が著しく低下するばかりでな
く、耐食性も低下するようになることから、その含有量
を0.20％以下と定めた。なお、望ましくは0.02〜0.20
％、さらに望ましくは0.08〜0.20％の含有がよい。(A) CC component has the effect of improving the strength, but if its content exceeds 0.20%, not only the ductility decreases remarkably, but also the corrosion resistance decreases. Defined to be less than or equal to%. Desirably 0.02 to 0.20
%, And more preferably 0.08 to 0.20%.
（ｂ）SiおよびMn これらの成分は、強力な脱酸作用をもつが、その含有量
がそれぞれ0.05％未満では所望の脱酸効果を確保するこ
とができず、一方その含有量がそれぞれ2.0％を越える
と延性が著しく低下するようになることから、その含有
量をそれぞれ0.05〜2.0％と定めた。(B) Si and Mn These components have a strong deoxidizing action, but if the content of each is less than 0.05%, the desired deoxidizing effect cannot be secured, while the content of each is 2.0%. Since the ductility is remarkably reduced when the content exceeds 1.0%, the content of each is set to 0.05 to 2.0%.
（ｃ）Cr Cr成分には、耐食性を向上させる作用があるが、その含
有量が15％未満では所望のすぐれた耐食性を確保するこ
とができず、一方その含有量が25％を越えると熱間加工
性が低下するようになることから、その含有量を15〜25
％と定めた。(C) Cr The Cr component has the function of improving the corrosion resistance, but if the content is less than 15%, the desired excellent corrosion resistance cannot be ensured, while if the content exceeds 25%, the heat resistance increases. Since the inter-workability will decrease, its content should be 15-25
Defined as%.
（ｄ）Ni Ni成分には、Crとの共存において耐食性を一段と向上さ
せる作用があるが、その含有量が５％未満では前記作用
に所望の効果が得られず、一方その含有量が25％を越え
ると熱間加工性が低下するようになることから、その含
有量を５〜25％と定めた。なお、望ましくは５〜15％の
含有がよい。(D) Ni The Ni component has an effect of further improving the corrosion resistance in the coexistence with Cr, but if the content thereof is less than 5%, the desired effect cannot be obtained on the other hand, while the content thereof is 25%. If the content exceeds the range, the hot workability will decrease, so the content was defined as 5 to 25%. The content is preferably 5 to 15%.
（ｅ）Ｎ Ｎ成分には、強度を向上させる作用があるが、その含有
量が0.01％未満では所望の強度向上効果が得られず、一
方その含有量が0.2％を越えると延性が低下するように
なることから、その含有量を0.01〜0.2％と定めた。(E) NN component has an action of improving strength, but if its content is less than 0.01%, the desired strength-improving effect cannot be obtained, while if its content exceeds 0.2%, ductility decreases. Therefore, the content is defined as 0.01 to 0.2%.
（ｆ）面内異方性指数 この指数が0.94未満でも、また1.06を越えても冷延薄鋼
板の長さ方向と幅方向の強度差はそれだけ大きくなり、
実用に際して内周刃に部分摩耗や波打ちが発生し易くな
ることから、面内異方性指数を0.94〜1.06と定めた。(F) In-plane anisotropy index Even if this index is less than 0.94 or exceeds 1.06, the strength difference between the length direction and the width direction of the cold-rolled thin steel sheet becomes large,
The in-plane anisotropy index was set to 0.94 to 1.06 because partial wear and waviness are likely to occur on the inner peripheral blade during practical use.
また、この発明の内周刃を構成する冷延薄鋼板は、上記
の通りオーステナイト系ステンレス鋼の成分選定に加え
て、通常工程により得られたホットコイルを冷間圧延し
た後、これに低温焼鈍を施すことにより製造されるが以
下にこれらの製造工程について説明する。Further, the cold-rolled thin steel sheet constituting the inner peripheral blade of the present invention is, in addition to the component selection of the austenitic stainless steel as described above, cold-rolled after hot-rolling the hot coil obtained by the normal process, and then low-temperature annealing it. The manufacturing process will be described below.
（ｉ）冷間圧延 冷延圧延工程は、内周刃に十分な強度を確保するために
欠かせない工程であり、上記組成のオーステナイト系ス
テンレス鋼ではこの冷間圧延時に加工誘起マルテンサイ
トを生じることでより有効に硬化が進み、高い強度を安
定して確保することができる。(I) Cold Rolling The cold rolling step is an essential step for ensuring sufficient strength for the inner peripheral edge, and in the austenitic stainless steel having the above composition, work-induced martensite occurs during this cold rolling. As a result, curing proceeds more effectively, and high strength can be stably ensured.
第１図は、C:0.11％、Si:0.60％、Mn:1.02％、Cr:17.23
％、Ni:7.21％、N:0.03％を含むとともに、残部が実質
的にFeから成るオーステナイト系ステンレス鋼につい
て、降伏強度（Y.S.）に及ぼす冷間圧延圧下率の影響を
調査してグラフ化した図面であるが、冷間圧延圧下率が
20％以上になると80kgf/mm2を越える高い強度を確保し
得ることがわかる。なお、前記内周刃に必要とされる降
伏強度:120kgf/mm2以上を達成するには、冷間圧延圧下
率を30％以上にするのが良い。Fig. 1 shows C: 0.11%, Si: 0.60%, Mn: 1.02%, Cr: 17.23
%, Ni: 7.21%, N: 0.03% and the balance of the austenitic stainless steel consisting essentially of Fe, the effect of cold rolling reduction on yield strength (YS) was investigated and plotted. Although it is a drawing, the cold rolling reduction ratio is
It can be seen that when it is 20% or more, high strength exceeding 80 kgf / mm 2 can be secured. In order to achieve the yield strength of 120 kgf / mm 2 or more required for the inner peripheral blade, the cold rolling reduction should be 30% or more.
一方、この第１図からは、冷間圧延圧下率が増大すると
強度の面内異方性｛圧延方向（Ｌ方向）と圧延直角方向
（Ｔ方向）との強度の相違性｝が大きくなること、特に
冷間圧延圧下率が20％以上になると大きな異方性を生じ
ることもわかる。On the other hand, it can be seen from FIG. 1 that the in-plane anisotropy of strength {the difference in strength between the rolling direction (L direction) and the direction perpendicular to rolling (T direction)} increases as the cold rolling reduction increases. It can also be seen that large anisotropy occurs when the cold rolling reduction is 20% or more.
（ii）低温焼鈍温度 冷間圧延後のオーステナイト系ステンレス鋼冷延薄鋼板
の焼鈍温度が300℃を下回ると面内異方性指数が1.06を
越え、また550℃を上回ると同0.94未満となり、強度の
面内異方性が大きくなり、更に前記温度が550℃を越え
ると薄鋼板の強度そのものが低くなることと相まって、
低温焼鈍温度は300〜550℃とする必要があり、これによ
って0.94〜1.06の面内異方性指数を確保することができ
る。(Ii) Low temperature annealing temperature The in-plane anisotropy index exceeds 1.06 when the annealing temperature of the cold-rolled austenitic stainless steel cold-rolled steel sheet after cold rolling exceeds 1.06, and below 0.94 when it exceeds 550 ° C, The in-plane anisotropy of strength increases, and when the temperature exceeds 550 ° C, the strength itself of the thin steel sheet decreases,
The low temperature annealing temperature needs to be 300 to 550 ° C., which can ensure the in-plane anisotropy index of 0.94 to 1.06.
第２図は、前述の第１図で用いたのと同じ組成を有する
オーステナイト系ステンレス鋼冷延薄鋼板（冷延圧延圧
下率:50％）について、降伏強度に及ぼす焼鈍温度の影
響を調査してグラフ化した図面であるが、該第２図から
も、焼鈍温度が300〜550℃の範囲であると降伏強度の異
方性指数が十分に小さい値｛Y.S.（Ｌ）/Y.S.（Ｔ）＝
0.94〜1.06｝に止まることが明らかである。そして、こ
の範囲内程度の異方性であれば、結晶材料切断用内周刃
として実用上何ら問題となることはない。Fig. 2 shows the effect of annealing temperature on the yield strength of an austenitic stainless steel cold rolled thin steel sheet (cold rolling reduction: 50%) having the same composition as used in Fig. 1 above. FIG. 2 also shows that the anisotropy index of the yield strength is sufficiently small when the annealing temperature is in the range of 300 to 550 ° C. {YS (L) / YS (T). =
It is clear that it stops at 0.94 to 1.06}. And, if the anisotropy is within this range, there will be no practical problem as an inner peripheral blade for cutting a crystal material.
なお、300〜550℃の低温焼鈍により強度の異方性が消失
するメカニズムについての詳細は未だ不明ではあるが、
次のように推測することができる。即ち、SUS304系及び
SUS301系ステンレス鋼ではプレス成形後の起き割れ現象
が知られており、Ｃ及びＮによる時効現象とも言われて
いるが、冷間圧延材に低温焼鈍を施す場合も、第２図で
示されるようにas roll状態から若干強度が上昇して500
℃以上で南下傾向を示すことから、やはり時効現象（厳
密には過時効状態である）が起きているものと推定され
る。そして、元々、強度の冷間加工により、導入された
転位や加工誘起マルテンサイトが圧延方向の異方性を生
じるものの、低温焼鈍を施すとＣ或いはＮにより固着さ
れてしまい、異方性が少なくなるのである。Although the details of the mechanism of disappearance of the strength anisotropy due to low temperature annealing at 300 to 550 ° C are still unknown,
It can be guessed as follows. That is, SUS304 series and
For SUS301 series stainless steel, the cracking phenomenon after press forming is known, and it is also called the aging phenomenon due to C and N. However, even when low temperature annealing is applied to cold rolled material, as shown in Fig. 2. The strength is slightly increased from the as roll state to 500
Since it shows a downward trend at temperatures above ℃, it is highly probable that the aging phenomenon (strictly speaking, the overaging condition) is occurring. Originally, due to the cold working with high strength, the introduced dislocations and the work-induced martensite cause anisotropy in the rolling direction, but when low temperature annealing is performed, they are fixed by C or N, and the anisotropy is small. It will be.
（iii）低温焼鈍時間 低温焼鈍における処理時間（均熱時間）が10分を下回る
と十分な異方性改善効果が達成できない。従って、該処
理時間は10分以上必要である。(Iii) Low temperature annealing time If the processing time (soaking time) in low temperature annealing is less than 10 minutes, a sufficient anisotropy improving effect cannot be achieved. Therefore, the processing time is 10 minutes or more.
第３図は、前述の第１図で用いたのと同じ組成のオース
テナイト系ステンレス鋼冷延薄鋼板（冷間圧延率:50
％）について、降伏強度の面内異方性に及ぼす焼鈍時間
の影響を調査してグラフ化した図面であるが、該第３図
からも、焼鈍時間が10分以上になってはじめて十分満足
できる異方性低減を達成できることが明らかである。FIG. 3 is a cold-rolled austenitic stainless steel with the same composition as that used in FIG. 1 (cold rolling rate: 50
%) Is a graph in which the effect of annealing time on the in-plane anisotropy of the yield strength is investigated and is shown in a graph. From FIG. 3 as well, it is sufficiently satisfied only when the annealing time is 10 minutes or more. It is clear that a reduction in anisotropy can be achieved.
つぎに、この発明の内周刃を実施例により具体的に説明
する。Next, the inner peripheral blade of the present invention will be specifically described with reference to Examples.
実施例１ まず、通常の方法によって、C:0.11％、Si:0.61％、Mn:
1.01％、Cr:17.25％、Ni:7.20％、N:0.03％、Fe＋不純
物：残りから成る組成をもったオーステナイト系ステン
レス鋼を溶製し、通常の条件で、熱間圧延、並びに冷間
圧延と焼鈍を施して0.3mm厚の冷延コイルとし、この冷
延コイルに、酸洗後、0.15mm厚（冷間圧延圧下率:50
％）にまで冷間圧延を施して冷延薄鋼板とし、これの圧
延方向（Ｌ方向）と圧延直角方向（Ｔ方向）の降伏強度
を測定し、さらに前記冷延薄鋼板に500℃に１時間保持
後、大気中放冷の低温焼鈍処理を施し、この状態で同じ
く圧延方向と圧延直角方向の降伏強度を測定し、前記の
低温焼鈍処理後及び低温焼鈍処理前のそれぞれの冷延薄
鋼板から直径:546mm×内周径:184mmの寸法をもった本発
明内周刃と従来内周刃をそれぞれ切出した。Example 1 First, C: 0.11%, Si: 0.61%, Mn:
1.01%, Cr: 17.25%, Ni: 7.20%, N: 0.03%, Fe + Impurity: Austenitic stainless steel with the composition of the rest is melted, and hot-rolled and cold-rolled under normal conditions. And annealed to form a 0.3mm thick cold rolled coil, and this cold rolled coil was pickled and then 0.15mm thick (cold rolling reduction: 50
%) To a cold rolled thin steel sheet, and the yield strength in the rolling direction (L direction) and the direction perpendicular to the rolling direction (T direction) is measured. After holding for a period of time, a low-temperature annealing treatment is performed by leaving it to cool in the air, and in this state, the yield strength in the rolling direction and the direction orthogonal to the rolling direction is measured, and the cold-rolled thin steel sheet after the low-temperature annealing treatment and before the low-temperature annealing treatment From the inner peripheral blade of the present invention and the conventional inner peripheral blade having a diameter of 546 mm and an inner peripheral diameter of 184 mm were cut out.
上記の両内周刃を通常のホルダーを用いて張り上げた
後、その内周真円度を測定した。これらの測定結果を第
１表に示した。After the above-mentioned inner peripheral blades were pulled up using an ordinary holder, the inner peripheral circularity was measured. The results of these measurements are shown in Table 1.
なお、上記内周真円度は、式： 内周真円度＝λmax−λmin で算出されるものである。In addition, the above-mentioned inner circularity is expressed by the formula: Inner circularity = λmax−λmin It is calculated by.
実施例２ 通常の方法によって、それぞれ第２表に示される組成を
もったオーステナイト系ステンレス鋼を溶製し、いずれ
も通常の条件で、熱間圧延を施して0.3mm厚の熱延コイ
ルとし、この熱延コイルを酸洗した後、0.15mm厚（冷間
圧延圧下率:50％）にまで冷間圧延し、引続いてこの冷
延薄鋼板に温度:500℃に１時間保持後、大気中放冷の条
件で低温焼鈍処理を施し、この状態でＬ方向とＴ方向の
降伏強度を測定して面内異方性指数を算出し、ついで前
記低温焼鈍処理後の冷延薄鋼板から直径:546mm×内周
径:184mmの寸法に切出すことにより本発明内周刃１〜21
をそれぞれ製造した。 Example 2 Austenitic stainless steels each having a composition shown in Table 2 were melted by a conventional method, and hot rolling was performed under normal conditions to form a hot rolled coil having a thickness of 0.3 mm. After pickling this hot-rolled coil, cold-roll it to 0.15mm thickness (cold rolling reduction: 50%), and then keep this cold-rolled thin steel sheet at a temperature of 500 ° C for 1 hour, A low temperature annealing process is performed under the condition of medium cooling, the in-plane anisotropy index is calculated by measuring the yield strength in the L direction and the T direction in this state, and then the diameter is calculated from the cold rolled thin steel sheet after the low temperature annealing process. : 546mm × inner diameter: 184mm of the present invention by cutting the inner diameter of the blade 1-21
Were manufactured respectively.
この結果得られた本発明内周刃１〜21についても実施例
１におけると同じ条件で内周真円度を測定した。これら
の結果を第２表に示した。With respect to the inner peripheral blades 1 to 21 of the present invention obtained as a result, the inner peripheral circularity was measured under the same conditions as in Example 1. The results are shown in Table 2.
〔発明の効果〕 第1,2表に示される結果から、本発明内周刃は、いずれ
も従来内周刃に比して、これを構成するオーステナイト
系ステンレス鋼冷延薄鋼板における降伏強度の面内異方
性が小さく、ホルダーに張り上げた後も真円度を保ち、
波打ちが生じないことが明らかである。 [Effects of the invention] From the results shown in Tables 1 and 2, the inner peripheral blades of the present invention each have a yield strength in the austenitic stainless steel cold-rolled thin steel sheet that constitutes the inner peripheral blades as compared with the conventional inner peripheral blades. The in-plane anisotropy is small, and the roundness is maintained even after it is pulled up to the holder,
It is clear that no waviness occurs.
上述のように、この発明の内周刃は、強度の面内異方性
が著しく小さいオーステナイト系ステンレス鋼冷延薄鋼
板で構成されているので、特に結晶材料の切断に際して
は長期に亘って優れた切断性能を発揮するのである。As described above, the inner peripheral blade of the present invention is made of austenitic stainless steel cold-rolled thin steel sheet having a significantly small in-plane anisotropy of strength, so that it is excellent for a long period of time particularly when cutting a crystalline material. It exhibits excellent cutting performance.
第１図は、降伏強度及び降伏強度の異方性に及ぼす冷間
圧延圧下率の影響を示したグラフ、 第２図は、降伏強度及び降伏強度の異方性に及ぼす低温
焼鈍温度の影響を示したグラフ、 第３図は、降伏強度の異方性に及ぼす低温焼鈍時間の影
響を示すグラフである。FIG. 1 is a graph showing the effect of cold rolling reduction on yield strength and anisotropy of yield strength, and FIG. 2 shows the effect of low temperature annealing temperature on yield strength and anisotropy of yield strength. The graph shown in FIG. 3 is a graph showing the effect of low temperature annealing time on the anisotropy of the yield strength.
Claims (1)
降伏強度の面内異方性指数が0.94〜1.06であるオーステ
ナイト系ステンレス鋼冷延薄鋼板で構成したことを特徴
とする結晶材料切断用内周刃。1. By weight%, C: 0.20% or less, Si: 0.05 to 2.0%, Mn: 0.05 to 2.0%, Cr: 15 to 25%, Ni: 5 to 25%, N: 0.01 to 0.2%, Containing, the balance has a composition consisting essentially of Fe, and the in-plane anisotropy index of the yield strength is a 0.94 ~ 1.06 austenitic stainless steel cold rolled thin steel sheet characterized by comprising a crystal Inner peripheral blade for material cutting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60201344A JPH0726179B2 (en) | 1985-09-11 | 1985-09-11 | Inner peripheral blade for cutting crystalline material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60201344A JPH0726179B2 (en) | 1985-09-11 | 1985-09-11 | Inner peripheral blade for cutting crystalline material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6260824A JPS6260824A (en) | 1987-03-17 |
| JPH0726179B2 true JPH0726179B2 (en) | 1995-03-22 |
Family
ID=16439473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60201344A Expired - Lifetime JPH0726179B2 (en) | 1985-09-11 | 1985-09-11 | Inner peripheral blade for cutting crystalline material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726179B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4974044A (en) * | 1989-04-21 | 1990-11-27 | At&T Bell Laboratories | Devices having asymmetric delta-doping |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5719738A (en) * | 1980-06-05 | 1982-02-02 | Mitsubishi Paper Mills Ltd | Diffusion transfer material containing developing agent |
-
1985
- 1985-09-11 JP JP60201344A patent/JPH0726179B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6260824A (en) | 1987-03-17 |
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