JPH07251417A - Jig for ingot slice guide - Google Patents

Abstract

PURPOSE:To correctly decide a cutting direction of an ingot with a single operation. CONSTITUTION:On a downside face, an ingot fitting groove 2 is formed so as to set astride an ingot 1. On an upside face, wire inserting grooves 3 are formed for inserting ingot cutting wires 12 arranged in accordance with the cutting direction at predetermined intervals.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ingot slice guide jig for slicing an ingot having various shapes such as a disc, a square, a polygon and the like to form a wafer for a semiconductor integrated circuit or a solar cell. Regarding

[0002]

2. Description of the Related Art A wafer is obtained by cutting a silicon single crystal into thin slices and grinding the surface. Generally, when cutting an ingot, it is required to cut the ingot at a right angle to the center line of the ingot. To be done. Therefore, set the ingot on the mounting base of the ingot cutting device, adjust the mounting base axially and at the mounting angle so that the wire is at a right angle to the center line of the ingot, and then run the wire to center the ingot. I was trying to cut at right angles to the line.

Since such an adjusting operation is related to the cutting accuracy of the wafer, it is necessary to make an extremely accurate adjustment, which is time-consuming in addition to the adjustment, which causes a reduction in the efficiency of the cutting operation. Further, the cutting of the ingot is performed at right angles to the center line, and also to the crystal axis (which is tilted with respect to the center line and does not necessarily coincide with the center axis, and is determined by a goniometer measurement). It may be cut at a right angle, and in this case, it was more difficult to adjust the cutting direction than that at a right angle to the center line of the ingot.

[0004]

The problems to be solved by the present invention are as follows.
It is to be able to accurately determine the cutting direction of the ingot with one touch.

[0005]

The first of the slice guide jigs for an ingot according to the present invention is, as described in claim 1, an ingot fitting groove formed on the lower surface of the ingot so as to be straddled over the ingot (1). (2) is formed, and the wire insertion groove (3) for inserting the wire (12) for cutting the ingot is formed on the upper surface at a predetermined interval in accordance with the cutting direction. Characterize.

As a result, the slice guide jig (B) is fitted to the ingot (1) set in the ingot cutting device (A), and the wire (3) is inserted into the wire insertion groove (3) of the slice guide jig (B). It is possible to determine the central axis or crystal axis of the ingot (1) and the right angle of the wire (12) simply by fitting 12) accurately.
The cutting work of the ingot (1) can be performed very efficiently.

[0007]

1 is a side view of an ingot cutting device (A) used in the present invention. (10) is a set of three wire rollers, which are rotatably attached to the frame (11) so as to occupy the vertices of an equilateral triangle or an isosceles triangle as shown in FIG. A wire (12) for cutting the ingot (1) is wound around and suspended on the wire roller (10) in multiple layers at regular intervals.

(13) is a wire driving unit, and in this embodiment, an endless belt (25) such as a timing belt or a relay pulley is used.
One of the wire rollers (10) is rotated via the (26) so that the wire (12) is run in one direction.

(1) is an ingot, and the ingot mount (1
4) It is fixed on top with an adhesive (16). The ingot mount (14) is fixed to the moving base (15), and the moving base (15)
With it, it slides on the moving base (17). Reference numeral (18) is an adjusting screw screwed to the movable table (15), and is rotated by the axial adjustment motor (19).

The moving base (17) is rotatably mounted on the elevating base (22) via a bearing (20), and is moved by an angle adjusting motor (21) attached to the elevating base (22). The angle is adjusted. The lifting base (22) is
Guided by 4), the lifting screw (23) rotates to move up and down.

(B) is a slice guide jig, the lower surface of which is opened so that the ingot (1) is fitted in the fitting groove (2) in the sungot. On the upper surface of the slice guide jig (B), align the wire insertion groove (3) with the distance between the wires (12).
Is recessed. The recessed direction of the wire insertion groove (3) is formed at right angles to the inner wall of the ingot fitting groove (2). The depth of the wire insertion groove (3) is not particularly limited. It may be deeply formed so as to communicate with the ingot fitting groove (2).
In this case, it can be observed through the wire insertion groove (3) whether or not the ingot (1) is correctly fitted in the ingot fitting groove (2).

(5) is not necessarily required, but is a fixing screw attached to the front surface of the slice guide jig (B),
The slice guide jig (B) is accurately fixed to the ingot (1) by pressing the end face of the ingot (1) fitted in the ingot fitting groove (2).

Then, as shown in FIG. 1, the ingot (1) is fixed to the ingot mounting base (14) with the adhesive (16), and further the ingot mounting base (14) is mounted on the moving base (15). , Insert the slice guide jig (B) into the ingot (1), and check that the ingot (1) is correctly fitted in the ingot fitting groove (2), and then fix the fixing screw (5). Screw in to fix the slice guide jig (B) to the ingot (1) accurately. In this state, the axial adjustment motor (19) is operated to move the ingot mount (14) directly under the wire (12), and the adjustment screw (18) is used to adjust the axial direction. ) To adjust the angle direction, and insert the wire insertion groove (3) and wire (1
2) Match exactly with.

When the wire insertion groove (3) and the wire (12) substantially coincide with each other, the lifting screw (23) is operated to move the ingot (1) to the wire (12) side. At this time, the adjustment is completed if the wire (12) is correctly inserted in the wire insertion groove (3). (19) and the angle adjustment motor (21) are operated to adjust the positions so that they match each other.

When the wire insertion groove (3) and the wire (12) are exactly aligned, the lifting screw (23) is reversed, and then the ingot (1) is lowered to move the wire (12) from the wire insertion groove (3). )
Then, the fixing screw (5) is loosened and the slice guide jig (B) is removed from the ingot (1). Then activate the lifting screw (23) again to raise the ingot (1) again,
At the same time, the wire driving part (13) is operated to move the wire (12) in one direction. Further, while applying the grinding fluid (27) containing abrasive grains to the surface of the ingot (1), the wire (12) is ingot (1)
Accurately cut the ingot (1) at the intervals of the wires (12) by contacting the upper end of the.

FIG. 4 is a front view showing a state in which the ingot (1) reaches the top dead center and is cut by the wire (12).
When the cutting of the ingot (1) is completed, the lifting screw (23) is reversed to lower the ingot (1) for which the cutting work has been completed, and the wire (12) is released from the cutting groove of the ingot (1).
Pull out the moving base (15) and move the ingot mounting base (14) to the moving base.
It is taken out from (15) and the adhesive (16) is removed to obtain a sliced wafer. As a result, the ingot (1) is sliced at right angles to the central axis.

The outer peripheral surface of the ingot (1) is ground and shaped in advance exactly parallel to the central axis of the ingot (1), while the ingot fitting groove of the slice guide jig (B) is formed. (2) is formed to have a size substantially matching the outer peripheral surface of the ingot (1), and the wire insertion groove (3) is formed at a right angle to the ingot fitting groove (2).

Next, the case of cutting at a right angle to the crystal axis of the ingot (1) (in other words, the case of slicing in the direction inclined with respect to the central axis of the ingot (1)) will be described. In this case goniometer, ingot (1)
The crystal axis of is accurately measured, and the crystal axis direction of the ingot (1) is measured in advance. As the slice guide jig (B) used in this case, a large number of slice guide jigs (3) in which the wire insertion groove (3) is inclined with respect to the ingot fitting groove (2) are prepared. Then, one having an angle matching the measurement result is selected, and the ingot (1) is cut at a right angle to the crystal axis by the cutting method as described above.

As another method, as shown in FIG. 5, a slice guide jig (B) is constituted by a jig body (8) and a groove forming portion (6), and an ingot is fitted into the jig body (8). The insertion groove (2) and the wire insertion groove (3) are formed in the groove forming portion (6),
By rotating the groove forming portion (6) around the angle adjusting shaft (7), the angle of the wire insertion groove (3) with respect to the ingot fitting groove (2) is fixed in accordance with the crystal axis of the ingot (1), It is also possible to use a slice guide jig (B) whose angle is adjusted. The method of using the slice guide jig (B) is the same as described above.

Also, a pressing plate (28) is arranged on one of the inner surface sides of the slide jig (B), and the side screws (29) press the ingot (1) on the other inner surface so that the ingot (1) is A slide jig (B) may be attached. In this case, one type of slide jig for ingots (1) of various thicknesses.
(B) can be applied.

According to the present invention, an ingot fitting groove is formed on the lower surface of the ingot so as to be straddled over the ingot, and an ingot cutting wire is provided on the upper surface thereof at a predetermined interval in accordance with the cutting direction. Since the wire insertion groove for insertion is formed, simply insert the slice guide jig into the ingot set in the ingot cutting device and insert the wire accurately into the wire insertion groove of the slice guide jig. There is an advantage that the center axis or crystal axis of the ingot and the right angle of the wire can be identified, and the ingot cutting operation can be performed extremely efficiently.

[Brief description of drawings]

FIG. 1 is a side view of an ingot cutting device used in the present invention.

FIG. 2 is a front view of the wire shown in FIG. 1 and the wire insertion groove when they are aligned with each other.

FIG. 3 is an explanatory perspective view of a method of aligning a wire with a wire insertion groove formed at right angles to the central axis of the ingot according to the present invention.

4 is a front view after cutting the ingot with the wire of FIG. 1. FIG.

FIG. 5 is an explanatory perspective view of a method for aligning a wire with a wire insertion groove formed at right angles to a crystal axis of an ingot in the present invention.

FIG. 6 is another embodiment of the slice guide jig according to the present invention, in which the slice guide jig is composed of a jig body and a groove forming part, and the groove forming part is adjusted according to the crystal axis of the ingot. Plan view of using a guide jig to align the wire with the wire insertion groove adjusted at right angles to the crystal axis of the ingot

[Explanation of symbols]

 (1)… Ingot (2)… Ingot fitting groove (3)… Wire insertion groove (12)… Wire for cutting ingot

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Haruyuki Kinan 3-6-16 Yanaka, Taito-ku, Tokyo M Setek Co., Ltd. (72) Hiroyuki Saito 3-16-16 Yanaka, Taito-ku, Tokyo M Setek Co., Ltd. (72) Inventor Takehiro Asano 3-6-16 Yanaka, Taito-ku, Tokyo M Setek Co., Ltd.

Claims (1)

[Claims] 1. An ingot fitting groove is formed on a lower surface of the ingot so as to be straddled over the ingot, and an ingot cutting wire is provided on the upper surface of the ingot at predetermined intervals so as to match the cutting direction. A slice guide jig for an ingot, which has a wire insertion groove.