JPH0723957Y2 - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPH0723957Y2
JPH0723957Y2 JP4279089U JP4279089U JPH0723957Y2 JP H0723957 Y2 JPH0723957 Y2 JP H0723957Y2 JP 4279089 U JP4279089 U JP 4279089U JP 4279089 U JP4279089 U JP 4279089U JP H0723957 Y2 JPH0723957 Y2 JP H0723957Y2
Authority
JP
Japan
Prior art keywords
permanent magnet
plasma
holder
diffusion chamber
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4279089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02132939U (ru
Inventor
正博 谷井
靖典 安東
潔 緒方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP4279089U priority Critical patent/JPH0723957Y2/ja
Publication of JPH02132939U publication Critical patent/JPH02132939U/ja
Application granted granted Critical
Publication of JPH0723957Y2 publication Critical patent/JPH0723957Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Electron Sources, Ion Sources (AREA)
JP4279089U 1989-04-11 1989-04-11 プラズマ処理装置 Expired - Fee Related JPH0723957Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4279089U JPH0723957Y2 (ja) 1989-04-11 1989-04-11 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4279089U JPH0723957Y2 (ja) 1989-04-11 1989-04-11 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH02132939U JPH02132939U (ru) 1990-11-05
JPH0723957Y2 true JPH0723957Y2 (ja) 1995-05-31

Family

ID=31554639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4279089U Expired - Fee Related JPH0723957Y2 (ja) 1989-04-11 1989-04-11 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0723957Y2 (ru)

Also Published As

Publication number Publication date
JPH02132939U (ru) 1990-11-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees