JPH07238122A - Photosensitive resin composition - Google Patents

Photosensitive resin composition

Info

Publication number
JPH07238122A
JPH07238122A JP6068862A JP6886294A JPH07238122A JP H07238122 A JPH07238122 A JP H07238122A JP 6068862 A JP6068862 A JP 6068862A JP 6886294 A JP6886294 A JP 6886294A JP H07238122 A JPH07238122 A JP H07238122A
Authority
JP
Japan
Prior art keywords
water
copolymer
photosensitive resin
groups
epoxy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6068862A
Other languages
Japanese (ja)
Inventor
Atsuyuki Ninomiya
淳行 二宮
Hikoji Yoshimura
彦二 吉村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AMUKO ENTERP KK
Tokyo Metropolitan Government
Original Assignee
AMUKO ENTERP KK
Tokyo Metropolitan Government
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AMUKO ENTERP KK, Tokyo Metropolitan Government filed Critical AMUKO ENTERP KK
Priority to JP6068862A priority Critical patent/JPH07238122A/en
Publication of JPH07238122A publication Critical patent/JPH07238122A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00Chemical modification by after-treatment
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/52Amides or imides
    • C08F220/54Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide
    • C08F220/58Amides, e.g. N,N-dimethylacrylamide or N-isopropylacrylamide containing oxygen in addition to the carbonamido oxygen, e.g. N-methylolacrylamide, N-(meth)acryloylmorpholine

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

PURPOSE:To provide a photosensitive resin compsn. which is water-sol. and becomes water-resistant when cured by light exposure by attaching specific photoreactive side chains to a water-sol. chain polymer having groups derived from acryloylmorpholine. CONSTITUTION:A copolymer is prepared by copolymerizing 20-90 pts. acryloymorpholine, 5-40 pts. monomer having a terminal carboxyl or epoxy group and copolymerizable with acryloylmorpholine, and 5-40 pts. other copolymerizable monomer in a solvent mainly comprising water. Theme the polymer reaction of carboxyl groups of the side chains of the copolymer with glycidyl (meth)acrylate or of epoxy groups of the side chains of the copolymer with (meth)acrylic acid is conducted to convert at least a part of the carboxyl or epoxy groups into epoxy ester groups, giving a copolymer having (meth) acryloyl groups introduced into side chains. Thus obtd. copolymer is used as the main component of the title compsn.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は感光性樹脂組成物にかか
わるもので、更に詳しくは主要成分樹脂の幹ポリマー部
分にポリアクリロイルモルホリン構造を有し、側鎖部に
エポキシエステル結合されたアクリロイル基またはメタ
クリロイル基を有する水系溶媒に可溶で、かつ光硬化に
際して、非露光部は水のみで容易に洗浄除去することが
でき、露光部は不溶性となる感光性樹脂組成物に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photosensitive resin composition, and more specifically, it has a polyacryloylmorpholine structure in the main polymer portion of the main component resin and has an epoxy ester-bonded acryloyl group in the side chain portion. Alternatively, the present invention relates to a photosensitive resin composition which is soluble in an aqueous solvent having a methacryloyl group, and can be easily washed and removed with water only in an unexposed area during photocuring, and an exposed area becomes insoluble.

【0002】[0002]

【従来の技術】感光性樹脂は金属加工産業、エレクトロ
ニクス産業、印刷産業、塗料・インキ産業などの発展と
供にその利用分野を広範囲に拡大して来た。具体的用途
の主たるものは、(a)金属の部分的エッチングによる
銅張積層板、LSIなどの精密な電子回路の作成、
(b)樹脂印刷用製版の作成、(c)スクリーン印刷用
インキなどである。従って、最終の使用目的、条件、作
成者側の工程の簡素化、環境面への配慮などから当然感
光性樹脂組成物の変性化が要求される。現在では、特性
の異なる多品種の感光性樹脂が市販・上市されている。
これらの感光性樹脂を用いて金属箔などの部分的エッチ
ング液による回路作成、あるいは樹脂印刷製版の作成を
行う場合には次のような工程が用いられる。即ち、塗布
された感光性樹脂組成物の薄膜上にネガマスクを置き、
光照射して露光部を光硬化させ、非露光部を洗浄によっ
て除去したのち、露出した金属部分はエッチング液への
浸漬によって溶出させ回路作成する。また、印刷用製版
では、エッチングの工程は不要である。
2. Description of the Related Art Photosensitive resins have been widely used in a wide range of fields, along with the development of metal working industry, electronics industry, printing industry, paint / ink industry and the like. The main applications are (a) copper-clad laminate by partial etching of metal, creation of precise electronic circuits such as LSI,
(B) Preparation of plate for resin printing, (c) Ink for screen printing. Therefore, the modification of the photosensitive resin composition is naturally required in view of the final purpose of use, conditions, simplification of the process on the side of the creator, environmental consideration, and the like. At present, various types of photosensitive resins with different characteristics are on the market and on the market.
The following steps are used when a circuit is formed using a partial etching solution such as a metal foil using these photosensitive resins, or a resin printing plate is formed. That is, a negative mask is placed on the thin film of the coated photosensitive resin composition,
After irradiating light to photo-cure the exposed part and removing the non-exposed part by washing, the exposed metal part is dissolved by immersion in an etching solution to form a circuit. Further, in the plate making for printing, the etching step is unnecessary.

【0003】従来、感光性樹脂組成物は、一般に感光性
樹脂、光増感剤、開始剤、架橋剤等から成るもので、有
機溶媒で希釈されるか、あるいはそのまま用いられる。
樹脂成分は例えばアクリロイル基を含有し、重合によっ
て硬化するもの、シンナモイル基を含有し、シクロブタ
ン環を形成して硬化するものなど多くのものがある。こ
れらのうちアクリロイル基を含有するものは製造も比較
的容易であって、低廉で使い易いことから超精密な解像
性を特に要求されないものに幅広く用いられている。し
かし、非硬化部の洗浄除去時に用いられる洗浄液は有機
溶媒あるいはアルカリ水溶液が大部分をしめ、これらの
洗浄液は非硬化部分の除去と同時に硬化部の侵食も徐々
に進行させ、解像性に限界が生じる。また、有機溶媒或
いはアルカリ水溶液を用いた時は、使用済み洗浄液の環
境への影響が問題視されている。従って、非露光、非硬
化部分の除去を公害のない水で行うことが出来、且つ、
露光硬化部が侵食されずに良い解像性を有する新しい感
光性樹脂組成物の開発が求められていた。
Conventionally, a photosensitive resin composition generally comprises a photosensitive resin, a photosensitizer, an initiator, a cross-linking agent, etc., and is diluted with an organic solvent or used as it is.
There are many resin components such as those containing an acryloyl group and cured by polymerization, those containing a cinnamoyl group and forming a cyclobutane ring and curing. Of these, those containing an acryloyl group are relatively easy to manufacture, and are inexpensive and easy to use, and are therefore widely used for those that do not require ultra-precision resolution. However, most of the cleaning liquid used for cleaning and removing the non-cured part is an organic solvent or an alkaline aqueous solution, and these cleaning liquids gradually remove the non-cured part and at the same time cause erosion of the cured part, which limits the resolution. Occurs. Further, when an organic solvent or an alkaline aqueous solution is used, the influence of the used cleaning liquid on the environment is regarded as a problem. Therefore, the non-exposed and non-cured parts can be removed with water that does not cause pollution, and
There has been a demand for the development of a new photosensitive resin composition which has good resolution without being eroded by the exposure-cured portion.

【0004】[0004]

【発明が解決しようとする課題】本発明は上記の如き背
景の下でなされたもので、非露光、未硬化部が水溶性
で、露光、硬化部は充分に水洗に対して耐性のある感光
性樹脂組成物を提供する事を目的とし、さらに詳しく
は、水溶性のアクリロイルモルホリンを含有する幹ポリ
マーに光反応性のアクリロイル基或いはメタクリロイル
基をもつ側鎖をつけることにより、露光によって水不溶
性で硬質の皮膜、或いは像を形成し、未露光部は水によ
って容易に溶解し充分な解像力を示すような感光性樹脂
組成物を提供することを課題とする。
SUMMARY OF THE INVENTION The present invention has been made under the background as described above, and the unexposed and uncured portions are water-soluble, and the exposed and cured portions are sufficiently resistant to washing with water. For the purpose of providing a water-soluble resin composition, more specifically, by attaching a side chain having a photoreactive acryloyl group or a methacryloyl group to a trunk polymer containing a water-soluble acryloylmorpholine, water-insoluble by exposure. An object of the present invention is to provide a photosensitive resin composition which forms a hard film or an image, and the unexposed portion is easily dissolved by water to exhibit sufficient resolution.

【0005】[0005]

【課題を解決するための手段】本発明はアクリロイルモ
ルホリン20〜90部、末端にカルボキシル基またはエ
ポキシ基を有してアクリロイルモルホリンと共重合可能
なモノマー5〜40部、その他の共重合可能なモノマー
5〜40部を、水を主成分とする溶媒中で重合させて得
られた共重合体に対し、該共重合体の側鎖のカルボキシ
ル基にはグリシジルアクリレートあるいはグリシジルメ
タクリレートを、エポキシ基にはアクリル酸あるいはメ
タクリル酸を各々高分子反応させて、カルボキシル基ま
たはエポキシ基の一部または全部をエポキシエステル化
して、側鎖にアクリロイル基またはメタクリロイル基が
導入された共重合高分子化合物を主要成分とすることを
特徴とする感光性樹脂組成物に係る。
The present invention comprises 20 to 90 parts of acryloylmorpholine, 5 to 40 parts of a monomer having a terminal carboxyl group or epoxy group and copolymerizable with acryloylmorpholine, and other copolymerizable monomers. For a copolymer obtained by polymerizing 5 to 40 parts in a solvent containing water as a main component, glycidyl acrylate or glycidyl methacrylate is used for the carboxyl group of the side chain of the copolymer, and epoxy group is used for the epoxy group. Acrylic acid or methacrylic acid are respectively polymer-reacted, a part or all of a carboxyl group or an epoxy group is epoxyesterified, and a copolymerized polymer compound in which an acryloyl group or a methacryloyl group is introduced into a side chain is used as a main component. The present invention relates to a photosensitive resin composition.

【0006】本発明の感光性樹脂組成物に含有される主
要成分である共重合高分子化合物は、共重合体の合成と
それに続く高分子反応によるアクリロイル基の導入の2
段階で合成される。
The copolymerizable polymer compound, which is the main component contained in the photosensitive resin composition of the present invention, is prepared by synthesizing the copolymer and subsequently introducing an acryloyl group by polymer reaction.
It is synthesized in stages.

【0007】(1)共重合体の合成 アクリロイルモルホリン、末端にカルボキシル基または
エポキシ基を有するモノマー及びその他のモノマーを
水、或いは水と水に可溶な、例えばN,N−ジメチルホ
ルムアミド、ジオキサンなどを混合した溶媒中で共重合
される。重合開始剤はこれらの溶媒に溶ける過硫酸カリ
ウム、過硫酸アンモニウム、α,α′−アゾビスイソブ
チロニトリルなどが好ましい。分子量の調節、速度のコ
ントロールなどは通常の溶液重合で行われる方法が採用
できる。第2段階目の反応であるアクリロイル基の導入
は同一溶媒中、同一反応器内で連続的に行うことが出来
る。
(1) Synthesis of Copolymer Acryloylmorpholine, a monomer having a carboxyl group or an epoxy group at the terminal and other monomers are water, or water and water soluble, for example, N, N-dimethylformamide, dioxane, etc. Are copolymerized in a mixed solvent. The polymerization initiator is preferably potassium persulfate, ammonium persulfate, α, α′-azobisisobutyronitrile, etc. which are soluble in these solvents. For the adjustment of the molecular weight and the control of the speed, a method which is usually carried out by solution polymerization can be adopted. The introduction of the acryloyl group, which is the second-stage reaction, can be carried out continuously in the same solvent and in the same reactor.

【0008】アクリロイルモルホリン量は20〜90部
が好適な範囲でこれ以上では次の段階での側鎖のアクリ
ロイル基導入量が小さくなり、露光による硬化後、水膨
潤性が大きく特性上感光性樹脂としては不適当である。
また、これ以下の使用量ではアクリロイルモルホリンの
特性が充分発揮されず、共重合時の濁り、或いはアクリ
ロイル基導入時の濁り、或いは室温放置時の分離などが
生じる。
The amount of acryloylmorpholine is preferably in the range of 20 to 90 parts. Above this amount, the amount of acryloyl group introduced into the side chain in the next step becomes small, and after curing by exposure, water swellability is large and the photosensitive resin is characteristically sensitive. Is unsuitable as
In addition, if the amount used is less than this, the characteristics of acryloylmorpholine will not be fully exhibited, and turbidity during copolymerization, turbidity upon introduction of an acryloyl group, or separation upon standing at room temperature will occur.

【0009】アクリロイルモルホリンと共重合可能なカ
ルボキシル基またはグリシジル基含有コモノマーとして
はアクリル酸、メタクリル酸、イタコン酸、グリシジル
アクリレート、グリシジルメタクリレートなどが使用可
能である。これらモノマーの部数は5〜40部が好まし
く、これ以下では架橋不足となり、以上では水または水
主要溶媒中で濁りを生じたり、不溶解物が生じたり、感
光性樹脂としては不適当になる。
Acrylic acid, methacrylic acid, itaconic acid, glycidyl acrylate, glycidyl methacrylate and the like can be used as the carboxyl group- or glycidyl group-containing comonomer copolymerizable with acryloylmorpholine. The number of parts of these monomers is preferably from 5 to 40 parts, and if it is less than this, the crosslinking becomes insufficient, and if it is more than this, turbidity occurs in water or a water main solvent, insoluble matter occurs, and it becomes unsuitable as a photosensitive resin.

【0010】合成された共重合高分子化合物の溶媒に対
する溶解性、硬化時の樹脂の軟質化、硬質化或いは水洗
のし易さなど物性の調整のためにその他のコモノマーと
してアクリルアミド、ダイアセトンアクリルアミド、ア
クリル酸エステル類などが使用可能である。樹脂液の均
一溶解性、適性な架橋密度を有する感光性樹脂とするた
めには5〜40部が好ましい範囲である。これを超える
と急激に架橋密度が減ずると共に、硬化物が水洗ではぎ
落とされるなど好ましくない。
Acrylamide, diacetone acrylamide as other comonomer for adjusting physical properties such as solubility of the synthesized copolymerized polymer compound in a solvent, softening and hardening of resin at the time of curing, and ease of washing with water, Acrylic acid esters and the like can be used. In order to obtain a photosensitive resin having a uniform solubility of the resin liquid and an appropriate crosslinking density, 5 to 40 parts is a preferable range. If it exceeds this, the crosslinking density is rapidly reduced, and the cured product is washed off with water, which is not preferable.

【0011】(2)アクリロイル基の導入 共重合体の合成後、残留する開始剤を加熱により分解さ
せ、重合禁止剤および所定量のアクリル酸、メタクリル
酸またはグリシジルアクリレート、グリシジルメタクリ
レートを加え、更に、エポキシエステル化の触媒として
アミン類、アンモニウム塩類またはアンモニアを添加し
還流下に数時間反応させれば、共重合体中のカルボキシ
ル基及びエポキシ基のエポキシエステル化はほぼ完了す
る。
(2) Introduction of acryloyl group After synthesis of the copolymer, the residual initiator is decomposed by heating, and a polymerization inhibitor and a predetermined amount of acrylic acid, methacrylic acid or glycidyl acrylate, glycidyl methacrylate are added, and further, When amines, ammonium salts or ammonia is added as a catalyst for epoxy esterification and the mixture is reacted under reflux for several hours, the epoxy esterification of carboxyl groups and epoxy groups in the copolymer is almost completed.

【0012】本発明の感光性樹脂組成物の調製には上記
によって得られた樹脂溶液をそのまま使えるが、その他
の薬液を選択添加して用いることがより好ましい。他の
配合物選択添加に際して、溶解不十分になることがある
ので、樹脂溶液の溶媒を蒸溜により一部除去し他の溶
媒、例えばジオキサン、テトラヒドロフラン、N,N−
ジメチルホルムアミド、N,N−ジメチルアセトアミ
ド、ジメチルスルホオキシドなど水に任意に溶けるもの
を加えて使用することもできる。
For the preparation of the photosensitive resin composition of the present invention, the resin solution obtained as described above can be used as it is, but it is more preferable to selectively add other chemicals. When other additives are selectively added, dissolution may be insufficient. Therefore, the solvent of the resin solution is partially removed by distillation, and other solvents such as dioxane, tetrahydrofuran, N, N-
It is also possible to add and use a substance such as dimethylformamide, N, N-dimethylacetamide, and dimethyl sulfoxide, which is freely soluble in water.

【0013】感光性樹脂組成物は上記樹脂溶液と配合成
分を均一混合することによって得られる。配合成分とし
ては、増感剤、重合開始剤、架橋剤などがあり、必要に
より選択使用される。増感剤、重合開始剤としては、例
えばベンゾインイソプロピルエーテルなどのベンゾイン
アルキルエーテル類、ベンジル、4−ベンゾイル−N,
N,N−トリメチルベンゼンメタンアンモニウムクロリ
ド、ミヒラーズケトン、α,α′−アゾビスイソブチル
ニトリル、ベンゾイルペルオキシドなどがある。架橋剤
には例えばエチレングリコールジアクリレート、ジエチ
レングリコールジアクリレート、ポリエチレングリコー
ルジアクリレート、ネオペンチルグリコールジアクリレ
ート、トリメチロールプロパントリアクリレートなどの
多官能アクリレート、エチレンビスアクリルアミドなど
が使用可能である。その他に皮膜作成時平滑性を良好に
したり、水洗性を良好にするため高分子量の水溶性化合
物を併用することもできる。
The photosensitive resin composition is obtained by uniformly mixing the above resin solution and the compounding ingredients. As the compounding ingredients, there are a sensitizer, a polymerization initiator, a cross-linking agent and the like, which are selected and used if necessary. Examples of the sensitizer and the polymerization initiator include benzoin alkyl ethers such as benzoin isopropyl ether, benzyl, 4-benzoyl-N,
Examples include N, N-trimethylbenzenemethanoammonium chloride, Michler's ketone, α, α′-azobisisobutylnitrile, and benzoyl peroxide. As the cross-linking agent, for example, a polyfunctional acrylate such as ethylene glycol diacrylate, diethylene glycol diacrylate, polyethylene glycol diacrylate, neopentyl glycol diacrylate, trimethylolpropane triacrylate, or ethylene bisacrylamide can be used. In addition, a high-molecular weight water-soluble compound may be used in combination to improve smoothness during film formation and to improve water washability.

【0014】本発明の感光性樹脂組成物を基板に数〜数
+μmの膜厚に均一に塗布し、暗所で溶媒を揮散させ、
ネガフィルムを置いて超高圧水銀灯、高圧水銀燈などで
照射して、光照射部分を架橋反応させる。その後、水洗
のみで、非露光部分を洗い流すと、精密な解像性を有す
る像が得られる。
The photosensitive resin composition of the present invention is uniformly applied to a substrate to a film thickness of several to several + μm, and the solvent is volatilized in a dark place,
Place a negative film and irradiate it with an ultra-high pressure mercury lamp or a high-pressure mercury lamp to cross-link the light-irradiated portion. After that, the unexposed portion is washed away only by washing with water, whereby an image having precise resolution is obtained.

【0015】[0015]

【実施例1】共重合体の合成とアクリロイル基の導入例
を以下に示す。
Example 1 An example of synthesis of a copolymer and introduction of an acryloyl group is shown below.

【表1】 Aに示す化合物を300または500ml四ツ口フラス
コに秤り込み、冷却管、温度計を付し、窒素雰囲気下、
油浴中1時間で60℃、更に2時間で70℃、1時間で
90℃、最終的に還流温度まで上昇させ、2時間保持し
て終了した。いずれも均一透明でやゝ粘稠な液体を得
た。
[Table 1] The compound shown in A was weighed into a 300 or 500 ml four-necked flask, equipped with a cooling tube and a thermometer, and under a nitrogen atmosphere,
In an oil bath, the temperature was 60 ° C. for 1 hour, 70 ° C. for 2 hours, and 90 ° C. for 1 hour. All were uniformly transparent and slightly viscous liquids were obtained.

【0016】上記共重合体に対してBに示す化合物を同
様に秤り込み、空気雰囲気中還流下に4〜5時間反応さ
せ、エポキシエステル結合をかいして、アクリロイルま
たはメタクリロイル基が導入された均一でやゝ黄褐色透
明な共重合高分子化合物の溶液が得られた。A配合、B
配合共、反応後高速液体クロマトグラフィにより残存モ
ノマーを調べたが、いずれも2wt.%以下であった。
Similarly to the above copolymer, the compound shown in B was weighed and reacted for 4 to 5 hours under reflux in an air atmosphere to break the epoxy ester bond and introduce an acryloyl or methacryloyl group. A uniform and slightly yellowish brown transparent solution of the copolymerized polymer compound was obtained. A combination, B
After the reaction, the mixture was examined for residual monomer by high performance liquid chromatography. % Or less.

【0016】[0016]

【実施例2】実施例1で得られた、No.3およびN
o.4共重合高分子化合物溶液に過剰のエタノールを加
えエバポレーターで大部分の水を除いたのち粉末状の樹
脂を得た。
[Example 2] No. 1 obtained in Example 1 3 and N
o. Excess ethanol was added to the 4 copolymer polymer solution to remove most of the water with an evaporator, and then a powdery resin was obtained.

【0017】これらに以下に示す配合剤を加え超音波攪
拌で溶解し、均一溶液の感光性樹脂組成物を調製した。
The following compounding ingredients were added to these and dissolved by ultrasonic agitation to prepare a uniform solution of a photosensitive resin composition.

【0018】このものを厚さ3mm,30×30mmの
ガラス基板上に回転塗布機を用いて、膜厚約30μmの
塗布板を作成し、自然乾燥後一夜50℃で減圧乾燥し
た。これらの操作はすべて暗所で行った。
This product was coated on a glass substrate having a thickness of 3 mm and a size of 30 × 30 mm with a spin coater to prepare a coating plate having a film thickness of about 30 μm, which was naturally dried and dried under reduced pressure at 50 ° C. overnight. All these operations were performed in the dark.

【0019】上記乾燥塗布板上にコダックステップタブ
レットNo.2ネガフィルムを置き、石英ガラス板をの
せて十分密着させた。これを被光照射装置内にセット
し、平行光束型250W超高圧水銀灯で、50cmの距
離から光照射した。現像は直径9cmのシャーレに水道
水を満し、照射塗布板を静かに30秒間置き、その後1
分間振盪、更に、落下水流で縦方向の洗浄を行った。
On the dried coating plate, Kodak Step Tablet No. 2 Negative film was placed, and a quartz glass plate was placed on the film so that they were sufficiently adhered. This was set in a light irradiation device, and light was irradiated from a distance of 50 cm with a parallel light flux type 250 W ultra-high pressure mercury lamp. For development, fill a petri dish with a diameter of 9 cm with tap water, gently place the irradiation coating plate for 30 seconds, and then 1
Shaking for a minute and further washing with a falling water stream in the vertical direction.

【0020】測定の結果両組成物とも、空気雰囲気下で
解像力は〜200μm以上、感度は30秒間の露光で5
以上のステップ段数で硬化することが分った。
As a result of measurement, both compositions have a resolution of about 200 μm or more in an air atmosphere and a sensitivity of 5 after exposure for 30 seconds.
It has been found that the above steps cure.

【0021】 配合剤 本発明による共重合高分子化合物 2.0g (No.3またはNo.4粉末品) DPCA−60* 0.6g N,N−ジメチルホルムアミド 6.0g アクリロイルモルホリン 1.0g ベンゾインイソプロピルエーテル 0.125g ミヒラーズケトン 0.0082g 2,6−ジターシャリブチルクレゾール 0・0073g ポリビニルピロリドン 0.7g (固形物として、Mw〜16万) 水 1.1g *ジペンタエリスリトールのε−カプロラクトン付加物
のヘキサアクリレート(日本化薬)
Compounding Agent Copolymer Polymer Compound According to the Present Invention 2.0 g (No. 3 or No. 4 Powder) DPCA-60 * 0.6 g N, N-Dimethylformamide 6.0 g Acryloylmorpholine 1.0 g Benzoin isopropyl Ether 0.125 g Michler's ketone 0.0082 g 2,6-ditertiary butyl cresol 0.0073 g Polyvinylpyrrolidone 0.7 g (as solid matter, Mw ~ 160,000) Water 1.1 g * Dipentaerythritol epsilon-caprolactone adduct hexa Acrylate (Nippon Kayaku)

【0022】[0022]

【発明の効果】水または水を主成分とする混合溶媒中
で、アクリロイルモルホリンを幹ポリマーに含み、アク
リロイル基またはメタクリロイル基を側鎖に導入して成
る共重合高分子化合物を主要成分とする感光性樹脂組成
物は、従来困難とされていた非露光部分を水洗のみによ
って現像を行うことができた。露光硬化部は侵食される
ことなく、かつ良好な解像性を有する感光性樹脂組成物
が得られた。
EFFECT OF THE INVENTION Photosensitization containing, as a main component, a copolymerized polymer compound containing acryloylmorpholine in a backbone polymer and having an acryloyl group or a methacryloyl group introduced into a side chain in water or a mixed solvent containing water as a main component. The resinous composition was able to be developed only by washing the unexposed portion, which was conventionally considered difficult, with water. A photosensitive resin composition having good resolution without being eroded in the exposure-cured part was obtained.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 アクリロイルモルホリン20〜90
部、末端にカルボキシル基またはエポキシ基を有してア
クリロイルモルホリンと共重合可能なモノマー5〜40
部、その他の共重合可能なモノマー5〜40部を、水を
主成分とする溶媒中で重合させて得られた共重合体に対
し、該共重合体の側鎖のカルボキシル基にはグリシジル
アクリレートあるいはグリシジルメタクリレートを、エ
ポキシ基にはアクリル酸あるいはメタクリル酸を各々高
分子反応させて、カルボキシル基またはエポキシ基の一
部または全部をエポキシエステル化して、側鎖にアクリ
ロイル基またはメタクリロイル基が導入された共重合高
分子化合物を主成分とすることを特徴とする感光性樹脂
組成物。
1. Acryloylmorpholine 20-90
5 to 40 monomers having a carboxyl group or an epoxy group at the end thereof and copolymerizable with acryloylmorpholine
Parts, and 5 to 40 parts of other copolymerizable monomers in a solvent containing water as a main component, the glycidyl acrylate is contained in the carboxyl group of the side chain of the copolymer. Alternatively, glycidylmethacrylate is polymerized with acrylic acid or methacrylic acid as an epoxy group, and a part or all of a carboxyl group or an epoxy group is epoxyesterified to introduce an acryloyl group or a methacryloyl group into a side chain. A photosensitive resin composition comprising a copolymerized polymer compound as a main component.
JP6068862A 1994-03-01 1994-03-01 Photosensitive resin composition Pending JPH07238122A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6068862A JPH07238122A (en) 1994-03-01 1994-03-01 Photosensitive resin composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6068862A JPH07238122A (en) 1994-03-01 1994-03-01 Photosensitive resin composition

Publications (1)

Publication Number Publication Date
JPH07238122A true JPH07238122A (en) 1995-09-12

Family

ID=13385908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6068862A Pending JPH07238122A (en) 1994-03-01 1994-03-01 Photosensitive resin composition

Country Status (1)

Country Link
JP (1) JPH07238122A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004106431A3 (en) * 2003-05-28 2005-02-24 Showa Denko Kk Curable polymer compound

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004106431A3 (en) * 2003-05-28 2005-02-24 Showa Denko Kk Curable polymer compound

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