JPH07230081A - Method for recovering glass substrate - Google Patents
Method for recovering glass substrateInfo
- Publication number
- JPH07230081A JPH07230081A JP2022494A JP2022494A JPH07230081A JP H07230081 A JPH07230081 A JP H07230081A JP 2022494 A JP2022494 A JP 2022494A JP 2022494 A JP2022494 A JP 2022494A JP H07230081 A JPH07230081 A JP H07230081A
- Authority
- JP
- Japan
- Prior art keywords
- color filter
- glass substrate
- substrate
- black matrix
- manufacturing process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 47
- 239000011521 glass Substances 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims description 26
- 238000004519 manufacturing process Methods 0.000 claims abstract description 21
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 14
- 239000011159 matrix material Substances 0.000 claims abstract description 12
- 230000002950 deficient Effects 0.000 claims abstract description 11
- 239000007864 aqueous solution Substances 0.000 claims description 9
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 claims description 6
- 125000000217 alkyl group Chemical group 0.000 claims description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims description 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- 238000007598 dipping method Methods 0.000 claims 1
- 229910052717 sulfur Inorganic materials 0.000 claims 1
- 239000011593 sulfur Substances 0.000 claims 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 abstract description 15
- -1 alkyl diol Chemical class 0.000 abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 10
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 abstract description 9
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 abstract description 9
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract description 7
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 22
- 239000004925 Acrylic resin Substances 0.000 description 4
- 229920000178 Acrylic resin Polymers 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
Landscapes
- Liquid Crystal (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Optical Filters (AREA)
- Processing Of Solid Wastes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、製造工程で発生した液
晶ディスプレイ用などのカラーフィルターの不良基板
の、カラーフィルター層とオーバーコート層とを剥離し
て、ブラックマトリックスを形成したガラス基板を回収
する、製造工程で再利用できるガラス基板の回収方法に
関するものである。FIELD OF THE INVENTION The present invention collects a glass substrate having a black matrix formed by peeling off a color filter layer and an overcoat layer from a defective substrate for a color filter such as a liquid crystal display generated in a manufacturing process. The present invention relates to a method for recovering a glass substrate that can be reused in a manufacturing process.
【０００２】[0002]
【従来の技術】現在の、例えば顔料分散法による液晶デ
ィスプレイ用などのカラーフィルター基板の、一般的な
製造工程については、ブラックマトリックスを形成し
たガラス基板の洗浄工程と、適宜の感光性樹脂に顔料
を分散した顔料分散レジストの塗布工程と、温風で顔
料分散レジスト塗布層を定着固化させるプリベーク工程
と、フォトマスクを用いて、例えばＲedパターンを露
光現像するＲedパターニング工程と、同様にから
を繰返す、例えばＧreenパターニング工程と、また同
様にからを繰返す、例えばＢlueパターニング工程
と、最終的な検査,修正工程とオーバーコート層の形
成工程とを経て、完成した液晶ディスプレイ用などのカ
ラーフィルター基板が、次工程の透明電極(ＩＴＯ)層の
形成工程に供給されるものである。2. Description of the Related Art At present, a general manufacturing process of a color filter substrate for a liquid crystal display, for example, by a pigment dispersion method, includes a washing process of a glass substrate on which a black matrix is formed and an appropriate photosensitive resin pigment. Steps of applying a pigment-dispersed resist having dispersed therein, a pre-baking step of fixing and solidifying the pigment-dispersed resist coating layer with warm air, a Red patterning step of exposing and developing, for example, a Red pattern using a photomask, and repeating the same steps. After the green patterning process, for example, the blue patterning process, the final patterning process, the repairing process, and the overcoat layer forming process, the completed color filter substrate for a liquid crystal display is completed. It is supplied to the next step of forming the transparent electrode (ITO) layer.
【０００３】また現在の、例えば印刷法による液晶ディ
スプレイ用などのカラーフィルター基板の、一般的な製
造工程については、ブラックマトリックスを形成した
ガラス基板の洗浄工程と、適宜の印刷インキを用いた
凹版オフセット印刷法などの、例えばＲedパターンの印
刷工程と、同様の、例えばＧreenパターンの印刷工程
と、また同様の、例えばＢlueパターンの印刷工程
と、温風でそれぞれの印刷インキ層を定着固化させる
ポストベーク工程と、最終的な検査,修正工程とオー
バーコート層の形成工程とを経て、完成した液晶ディス
プレイ用などのカラーフィルター基板が、同様に次工程
の透明電極(ＩＴＯ)層の形成工程に供給されるものであ
る。[0003] At present, for example, a general manufacturing process of a color filter substrate for a liquid crystal display by a printing method includes a cleaning process of a glass substrate on which a black matrix is formed and an intaglio offset using an appropriate printing ink. For example, a printing process such as a Red pattern printing process, a similar printing process such as a Green pattern printing process, and a similar printing process such as a Blue pattern printing process, and a post-baking process in which each printing ink layer is fixed and solidified with warm air. After the steps, the final inspection, the correction step and the overcoat layer forming step, the completed color filter substrate for liquid crystal display is similarly supplied to the next step of forming the transparent electrode (ITO) layer. It is something.
【０００４】[0004]
【発明が解決しようとする課題】前述した、液晶ディス
プレイ用などのカラーフィルター基板の製造工程におい
ては、厳重に管理された無塵室内で慎重に製造されてい
るにもかかわらず、種々の原因によって、カラーフィル
ター基板の欠陥発生が避けられないものであって、最終
的なカラーフィルター基板の収率は、決して高いもので
はなかった。In the above-described manufacturing process of the color filter substrate for liquid crystal displays, etc., due to various causes, despite being carefully manufactured in a tightly controlled dust-free room. The occurrence of defects in the color filter substrate is unavoidable, and the final yield of the color filter substrate was not high.
【０００５】本発明は、製造工程で多量に発生して従来
は廃棄処分していた、液晶ディスプレイ用やプロジェク
ション用や撮像デバイス用などの、カラーフィルターの
不良基板の、カラーフィルター層とオーバーコート層と
を剥離して、ブラックマトリックスを形成したガラス基
板を回収する、製造工程で再利用できるガラス基板の回
収方法を提供するものである。The present invention provides a color filter layer and an overcoat layer of a defective color filter substrate for a liquid crystal display, a projection, an image pickup device, etc., which was generated in a large amount in the manufacturing process and was conventionally discarded. The present invention provides a method for recovering a glass substrate on which a black matrix has been formed by recovering and removing the glass substrate, which can be reused in a manufacturing process.
【０００６】[0006]
【課題を解決するための手段】本発明は、製造工程で発
生した液晶ディスプレイ用などのカラーフィルターの不
良基板を、必要に応じて濃硫酸に浸漬した後に、構造式
ＨＯ-Ｒ1-ＯＨ(式中のＲ1はＣnＨ2n(ｎは２〜６)を示
す)のアルキルジオールと、構造式Ｒ2-(Ｏ-ＣＨ2-Ｃ(-
Ｒ3)Ｈ)n-ＯＲ4(式中のＲ2はアルキル基又はアリル基、
Ｒ3はＨ又はメチル基、Ｒ4はＨ又はアルキル基又はアリ
ル基、ｎは正の整数を示す)のグリコールエーテルと、を
含有したアルカリ水溶液に浸漬して、カラーフィルター
層とオーバーコート層とを剥離して、ブラックマトリッ
クスを形成したガラス基板を回収する、製造工程で再利
用できるガラス基板の回収方法である。According to the present invention, a defective substrate of a color filter such as for a liquid crystal display generated in a manufacturing process is immersed in concentrated sulfuric acid as needed, and then the structural formula HO-R 1 -OH ( In the formula, R 1 is an alkyl diol of C n H 2n (n is 2 to 6) and a structural formula R 2 — (O—CH 2 —C (—
R 3 ) H) n —OR 4 (wherein R 2 is an alkyl group or an allyl group,
R 3 is H or a methyl group, R 4 is H or an alkyl group or an allyl group, and n is a positive integer), and is immersed in an alkaline aqueous solution containing a color filter layer and an overcoat layer. Is a method of recovering a glass substrate on which a black matrix is formed by recovering the glass substrate, which can be reused in the manufacturing process.
【０００７】本発明のガラス基板の回収方法における、
アルキルジオールとグリコールエーテルとを含有したア
ルカリ水溶液については、アルキルジオール(例えばプ
ロピレングリコール(ＨＯ-ＣＨ2-Ｃ(-ＣＨ3)Ｈ-ＯＨ))
の２０〜３０重量部と、グリコールエーテル(例えばエ
チレングリコールモノメチルエーテル(ＣＨ3-Ｏ-ＣＨ2-
ＣＨ2-ＯＨ))の５〜２０重量部と、水酸化ナトリウム
(ＮaＯＨ)の１０〜２０重量部とを、３０〜６５重量部
の水(Ｈ2Ｏ)に溶解して、５５℃程度に加温したもので
ある。In the glass substrate recovery method of the present invention,
For an alkaline aqueous solution containing an alkyl diol and a glycol ether, an alkyl diol (for example, propylene glycol (HO-CH 2 -C (-CH 3 ) H-OH))
20 to 30 parts by weight of glycol ether (eg ethylene glycol monomethyl ether (CH 3 —O—CH 2 —
CH 2 -OH)) and 20 parts by weight of sodium hydroxide
10 to 20 parts by weight of (NaOH) was dissolved in 30 to 65 parts by weight of water (H 2 O) and heated to about 55 ° C.
【０００８】[0008]
【作用】本発明のガラス基板の回収方法においては、製
造工程で発生した液晶ディスプレイ用などのカラーフィ
ルターの不良基板を、前述したアルキルジオールとグリ
コールエーテルとを含有したアルカリ水溶液に、１０〜
１５分間程度浸漬することによって、ガラス基板と定着
固化させたカラーフィルター層との密着力及びこのカラ
ーフィルター層とオーバーコート層との密着力が低下し
て、それぞれ剥離するものであって、硼珪酸ガラス製の
ガラス基板に変質や損傷などを与えないで、支障なく製
造工程で再利用できる状態で、ブラックマトリックスを
形成したガラス基板を回収できるものである。In the method for recovering a glass substrate of the present invention, a defective substrate for a color filter such as for a liquid crystal display generated in the manufacturing process is treated with an alkaline aqueous solution containing the above-mentioned alkyl diol and glycol ether for 10 to 10 times.
By soaking for about 15 minutes, the adhesion between the glass substrate and the fixed and solidified color filter layer and the adhesion between the color filter layer and the overcoat layer are reduced, and they are peeled off. The glass substrate on which the black matrix is formed can be recovered in a state in which the glass substrate made of glass is not deteriorated or damaged and can be reused in the manufacturing process without any trouble.
【０００９】また、本発明のガラス基板の回収方法にお
いては、製造工程で発生した液晶ディスプレイ用などの
カラーフィルターの不良基板を、必要に応じて濃度９８
％程度の濃硫酸に、５〜３０分間浸漬することによっ
て、定着固化させたカラーフィルター層とオーバーコー
ト層との表面が粗化して、アルキルジオールとグリコー
ルエーテルとを含有したアルカリ水溶液の、それぞれの
密着力を低下させて剥離させる作用を容易にするもので
ある。Further, in the glass substrate recovery method of the present invention, a defective substrate of a color filter for a liquid crystal display or the like generated in the manufacturing process may have a concentration of 98 if necessary.
% Of concentrated sulfuric acid, the surfaces of the color filter layer and the overcoat layer, which have been fixed and solidified, are roughened by immersing them in an alkaline aqueous solution containing an alkyl diol and a glycol ether. The adhesive force is reduced to facilitate the peeling action.
【００１０】[0010]
＜実施例１＞アクリル樹脂系の顔料分散レジストを用い
て、顔料分散法によって製造した液晶ディスプレイ用の
カラーフィルター基板の、製造工程で発生した不良基板
を、濃度９８％の濃硫酸(常温)に１０分間浸漬した後
に、水洗して、５５℃に加温した後述する構成の、アル
キルジオールとグリコールエーテルとを含有したアルカ
リ水溶液に１０分間浸漬して、必要に応じて純水中で軽
くスポンジラビング(手こすり)して、アクリル樹脂系の
カラーフィルター層とアクリル樹脂系のオーバーコート
層とを剥離して、洗浄して乾燥させたところ、硼珪酸ガ
ラス製のガラス基板に変質や損傷などを全く与えない
で、支障なく製造工程で再利用できる状態で、ブラック
マトリックスを形成したガラス基板が回収できたもので
ある。<Example 1> A defective substrate generated in the manufacturing process of a color filter substrate for a liquid crystal display manufactured by a pigment dispersion method using an acrylic resin-based pigment-dispersed resist was changed to 98% concentrated sulfuric acid (normal temperature). After soaking for 10 minutes, rinse with water, heat to 55 ° C., and soak for 10 minutes in an alkaline aqueous solution containing an alkyl diol and glycol ether, which will be described later, and lightly sponge rub in pure water as necessary. (Rubbing) to peel off the acrylic resin color filter layer and the acrylic resin overcoat layer, and after washing and drying, the glass substrate made of borosilicate glass did not show any deterioration or damage. The glass substrate on which the black matrix was formed could be recovered in a state where it could be reused in the manufacturing process without any problem without giving any problem.
【００１１】本実施例の、アルキルジオールとグリコー
ルエーテルとを含有したアルカリ水溶液の構成は、プロ
ピレングリコール(ＨＯ-ＣＨ2-Ｃ(-ＣＨ3)Ｈ-ＯＨ))の
２４重量部と、エチレングリコールモノメチルエーテル
(ＣＨ3-Ｏ-ＣＨ2-ＣＨ2-ＯＨ))の８重量部と、水酸化ナ
トリウム(ＮaＯＨ)の１２重量部とを、５６重量部の水
(Ｈ2Ｏ)に溶解したものであった。The composition of the alkaline aqueous solution containing the alkyl diol and the glycol ether in this example is 24 parts by weight of propylene glycol (HO-CH 2 -C (-CH 3 ) H-OH)) and ethylene glycol. Monomethyl ether
(CH 3 —O—CH 2 —CH 2 —OH)) 8 parts by weight, sodium hydroxide (NaOH) 12 parts by weight, and water 56 parts by weight.
It was dissolved in (H 2 O).
【００１２】＜実施例２＞メラミン-エポキシ樹脂系の
印刷インキを用いて、印刷法によって製造したプロジェ
クション用のカラーフィルター基板の、製造工程で発生
した不良基板を、濃度９８％の濃硫酸(常温)に２０分間
浸漬した後に、水洗して、５５℃に加温した実施例１と
同一構成の、アルキルジオールとグリコールエーテルと
を含有したアルカリ水溶液に１５分間浸漬して、純水中
で軽くスポンジラビング(手こすり)して、メラミン-エ
ポキシ樹脂系のカラーフィルター層とアクリル樹脂系の
オーバーコート層とを剥離して、洗浄して乾燥させたと
ころ、実施例１と同様に、硼珪酸ガラス製のガラス基板
に変質や損傷などを全く与えないで、支障なく製造工程
で再利用できる状態で、ブラックマトリックスを形成し
たガラス基板が回収できたものである。<Embodiment 2> A defective substrate generated in the manufacturing process of a projection color filter substrate manufactured by a printing method using a melamine-epoxy resin-based printing ink is replaced with concentrated sulfuric acid (concentration: 98%) at room temperature. ) For 20 minutes, then washed with water and heated to 55 ° C. for 15 minutes in an alkaline aqueous solution containing alkyl diol and glycol ether having the same structure as in Example 1, and lightly sponge in pure water. The melamine-epoxy resin-based color filter layer and the acrylic resin-based overcoat layer were peeled off by rubbing (rubbing), washed and dried. The glass substrate on which the black matrix is formed can be collected in a state where it can be reused in the manufacturing process without any problems without causing any deterioration or damage to the glass substrate. Those were.
【００１３】[0013]
【発明の効果】以上、作用及び実施例に示すとおり、本
発明のガラス基板の回収方法においては、製造工程で発
生した液晶ディスプレイ用などのカラーフィルターの不
良基板を、必要に応じて濃硫酸に浸漬した後に、構造式
ＨＯ-Ｒ1-ＯＨ(式中のＲ1はＣnＨ2n(ｎは２〜６)を示
す)のアルキルジオールと、構造式Ｒ2-(Ｏ-ＣＨ2-Ｃ(-
Ｒ3)Ｈ)n-ＯＲ4(式中のＲ2はアルキル基又はアリル基、
Ｒ3はＨ又はメチル基、Ｒ4はＨ又はアルキル基又はアリ
ル基、ｎは正の整数を示す)のグリコールエーテルと、を
含有したアルカリ水溶液に、１０〜１５分間程度浸漬す
ることによって、カラーフィルター層とオーバーコート
層とを、それぞれの密着力を低下させて剥離して、硼珪
酸ガラス製のガラス基板に変質や損傷などを全く与えな
いで、支障なく製造工程で再利用できる状態で、ブラッ
クマトリックスを形成したガラス基板を回収できるもの
であって、原材料費(製品価格)の低減と資源の有効活用
とに寄与できるものである。As described above, according to the operation and the embodiment, in the method for recovering the glass substrate of the present invention, the defective substrate of the color filter such as for the liquid crystal display generated in the manufacturing process is changed to concentrated sulfuric acid if necessary. After the immersion, an alkyl diol of the structural formula HO-R 1 -OH (wherein R 1 represents C n H 2n (n is 2 to 6)) and a structural formula R 2- (O-CH 2 -C (-
R 3 ) H) n —OR 4 (wherein R 2 is an alkyl group or an allyl group,
R 3 is H or a methyl group, R 4 is a H or an alkyl group or an allyl group, and n is a positive integer) glycol ether, and is immersed in an alkaline aqueous solution for about 10 to 15 minutes to obtain a color. The filter layer and the overcoat layer are peeled off by lowering their respective adhesive strengths, and the glass substrate made of borosilicate glass is not deteriorated or damaged at all, and can be reused in the manufacturing process without any trouble. The glass substrate on which the black matrix is formed can be recovered, and it can contribute to the reduction of raw material cost (product price) and effective use of resources.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｇ０２Ｆ 1/1335 ５００ Ｇ０９Ｆ 9/30 ３７６ 7610−5Ｇ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical display location G02F 1/1335 500 G09F 9/30 376 7610-5G
Claims (1)
どのカラーフィルターの不良基板を、必要に応じて濃硫
酸に浸漬した後に、構造式ＨＯ-Ｒ1-ＯＨ(式中のＲ1は
ＣnＨ 2n(ｎは２〜６)を示す)のアルキルジオールと、構
造式Ｒ2-(Ｏ-ＣＨ2-Ｃ(-Ｒ3)Ｈ)n-ＯＲ4(式中のＲ2はア
ルキル基又はアリル基、Ｒ3はＨ又はメチル基、Ｒ4はＨ又
はアルキル基又はアリル基、ｎは正の整数を示す)のグリ
コールエーテルと、を含有したアルカリ水溶液に浸漬し
て、カラーフィルター層とオーバーコート層とを剥離す
ることを特徴とする、ブラックマトリックスを形成した
ガラス基板の回収方法。1. A liquid crystal display produced in a manufacturing process.
Defective substrate of which color filter, if necessary, concentrated sulfur
Structural formula HO-R after soaking in acid1-OH (R in the formula1Is
CnH 2n(n represents 2 to 6))
Model R2-(O-CH2-C (-R3) H)n-ORFour(R in the formula2A
Rukyl group or allyl group, R3Is H or a methyl group, RFourIs H
Is an alkyl group or an allyl group, and n is a positive integer)
Dipping in an alkaline aqueous solution containing
Peel off the color filter layer and the overcoat layer.
Formed a black matrix, characterized in that
Method of collecting glass substrates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022494A JPH07230081A (en) | 1994-02-17 | 1994-02-17 | Method for recovering glass substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022494A JPH07230081A (en) | 1994-02-17 | 1994-02-17 | Method for recovering glass substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07230081A true JPH07230081A (en) | 1995-08-29 |
Family
ID=12021204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022494A Pending JPH07230081A (en) | 1994-02-17 | 1994-02-17 | Method for recovering glass substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07230081A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009041126A1 (en) * | 2007-09-26 | 2009-04-02 | Sharp Kabushiki Kaisha | Method for manufacturing liquid crystal panel |
| JP2010015080A (en) * | 2008-07-07 | 2010-01-21 | Toppan Printing Co Ltd | Method of regenerating glass substrate for color filter |
| WO2010016214A1 (en) * | 2008-08-04 | 2010-02-11 | 凸版印刷株式会社 | Apparatus for reclaiming glass substrate |
| KR20170125119A (en) * | 2012-09-26 | 2017-11-13 | 다이니폰 인사츠 가부시키가이샤 | Glass reprocessing method, remade glass substrate, and photo mask blank and photo mask employing same |
-
1994
- 1994-02-17 JP JP2022494A patent/JPH07230081A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009041126A1 (en) * | 2007-09-26 | 2009-04-02 | Sharp Kabushiki Kaisha | Method for manufacturing liquid crystal panel |
| US8134680B2 (en) | 2007-09-26 | 2012-03-13 | Sharp Kabushiki Kaisha | Manufacturing method of liquid crystal panel |
| JP2010015080A (en) * | 2008-07-07 | 2010-01-21 | Toppan Printing Co Ltd | Method of regenerating glass substrate for color filter |
| WO2010016214A1 (en) * | 2008-08-04 | 2010-02-11 | 凸版印刷株式会社 | Apparatus for reclaiming glass substrate |
| KR101243545B1 (en) * | 2008-08-04 | 2013-03-20 | 도판 인사츠 가부시키가이샤 | Apparatus for reclaiming glass substrate |
| JP5299428B2 (en) * | 2008-08-04 | 2013-09-25 | 凸版印刷株式会社 | Glass substrate recycling equipment |
| KR20170125119A (en) * | 2012-09-26 | 2017-11-13 | 다이니폰 인사츠 가부시키가이샤 | Glass reprocessing method, remade glass substrate, and photo mask blank and photo mask employing same |
| KR20180129996A (en) * | 2012-09-26 | 2018-12-05 | 다이니폰 인사츠 가부시키가이샤 | Glass reprocessing method, remade glass substrate, and photo mask blank and photo mask employing same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW296536B (en) | ||
| JPH07230081A (en) | Method for recovering glass substrate | |
| JP3897442B2 (en) | Color filter manufacturing method and liquid crystal device using the color filter | |
| JPH04104102A (en) | Production of multicolor display device | |
| JP3336674B2 (en) | Method of reproducing color filter substrate and method of manufacturing color filter using the same | |
| JP3033632B2 (en) | Method for manufacturing color filter and liquid crystal display element | |
| JP2000137335A (en) | Developing device for production of color filter | |
| JPH1195019A (en) | Color filter support base recycling method | |
| JPH11337724A (en) | Production of color filter panel and production of liquid crystal display device | |
| JP2720238B2 (en) | Photopolymerizable composition, color filter using the same, and method for producing the same | |
| JP2001124916A (en) | Method of regenerating glass substrate for color filter | |
| JP2001188364A (en) | Resist removing solvent, method for producing color filter and liquid crystal display | |
| JPH05224015A (en) | Production of color filter | |
| JP3254798B2 (en) | Reproduction method of color filter light shielding film | |
| JPH09274104A (en) | Production of color filters | |
| JP2002014218A (en) | Method and device for manufacturing color filter | |
| JP2991271B2 (en) | Manufacturing method of color filter | |
| JPH0440401A (en) | Production of color filter | |
| JPH06347635A (en) | Production of color filter | |
| JPH1152121A (en) | Production of color filter | |
| JPH06308317A (en) | Method for correcting defective point of thin-film pattern and formation of thin-film pattern | |
| JP3290131B2 (en) | Manufacturing method of color filter | |
| JPH04156403A (en) | Manufacture of color filter | |
| JP2001091730A (en) | Method for regenerating color filter glass substrate having chromium shading layer | |
| JPH1123829A (en) | Manufacture of color filter |