JPH0721569Y2 - 真空成膜装置の仕切弁装置 - Google Patents

真空成膜装置の仕切弁装置

Info

Publication number
JPH0721569Y2
JPH0721569Y2 JP10110990U JP10110990U JPH0721569Y2 JP H0721569 Y2 JPH0721569 Y2 JP H0721569Y2 JP 10110990 U JP10110990 U JP 10110990U JP 10110990 U JP10110990 U JP 10110990U JP H0721569 Y2 JPH0721569 Y2 JP H0721569Y2
Authority
JP
Japan
Prior art keywords
valve
sluice
film forming
opening
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10110990U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0460549U (cs
Inventor
佳興 横山
吉次 大畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP10110990U priority Critical patent/JPH0721569Y2/ja
Publication of JPH0460549U publication Critical patent/JPH0460549U/ja
Application granted granted Critical
Publication of JPH0721569Y2 publication Critical patent/JPH0721569Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10110990U 1990-09-26 1990-09-26 真空成膜装置の仕切弁装置 Expired - Lifetime JPH0721569Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10110990U JPH0721569Y2 (ja) 1990-09-26 1990-09-26 真空成膜装置の仕切弁装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10110990U JPH0721569Y2 (ja) 1990-09-26 1990-09-26 真空成膜装置の仕切弁装置

Publications (2)

Publication Number Publication Date
JPH0460549U JPH0460549U (cs) 1992-05-25
JPH0721569Y2 true JPH0721569Y2 (ja) 1995-05-17

Family

ID=31844284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10110990U Expired - Lifetime JPH0721569Y2 (ja) 1990-09-26 1990-09-26 真空成膜装置の仕切弁装置

Country Status (1)

Country Link
JP (1) JPH0721569Y2 (cs)

Also Published As

Publication number Publication date
JPH0460549U (cs) 1992-05-25

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