JPH072038Y2 - 真空槽の物品出し入れ装置 - Google Patents
真空槽の物品出し入れ装置Info
- Publication number
- JPH072038Y2 JPH072038Y2 JP1986013624U JP1362486U JPH072038Y2 JP H072038 Y2 JPH072038 Y2 JP H072038Y2 JP 1986013624 U JP1986013624 U JP 1986013624U JP 1362486 U JP1362486 U JP 1362486U JP H072038 Y2 JPH072038 Y2 JP H072038Y2
- Authority
- JP
- Japan
- Prior art keywords
- article
- piston
- cylinder
- chamber
- receiving plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000696 magnetic material Substances 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 description 8
- 230000029058 respiratory gaseous exchange Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986013624U JPH072038Y2 (ja) | 1986-01-31 | 1986-01-31 | 真空槽の物品出し入れ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986013624U JPH072038Y2 (ja) | 1986-01-31 | 1986-01-31 | 真空槽の物品出し入れ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62126248U JPS62126248U (enrdf_load_stackoverflow) | 1987-08-11 |
| JPH072038Y2 true JPH072038Y2 (ja) | 1995-01-25 |
Family
ID=30802859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986013624U Expired - Lifetime JPH072038Y2 (ja) | 1986-01-31 | 1986-01-31 | 真空槽の物品出し入れ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH072038Y2 (enrdf_load_stackoverflow) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59164696A (ja) * | 1983-03-10 | 1984-09-17 | Matsushita Electric Ind Co Ltd | 真空容器の搬送装置 |
| JPS61120628A (ja) * | 1984-11-16 | 1986-06-07 | Matsushita Electric Ind Co Ltd | 真空処理装置 |
| JPS61291032A (ja) * | 1985-06-17 | 1986-12-20 | Fujitsu Ltd | 真空装置 |
-
1986
- 1986-01-31 JP JP1986013624U patent/JPH072038Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62126248U (enrdf_load_stackoverflow) | 1987-08-11 |
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