JPH0720298A - Electron beam irradiator - Google Patents

Abstract

PURPOSE:To provide an electron beam irradiator in which the interval between upper and lower transfer chambers can be kept constant through a simple structure. CONSTITUTION:The transfer chamber comprises an upper transfer chamber 32, a lower transfer chamber 34, a hinge 36, and a patching lock 38. The hinge 36 pivots the lower transfer chamber 34 rotatably at the left end thereof in the direction perpendicular to the transferring direction of an object. The patching lock 38 comprises a body 42 having a movable stop member 42a and a lever 42b, and a stopper 44 and engages with the upper and lower transfer chambers 32, 34, so that they can be opened or closed freely, at the right end of the transfer chamber in the direction perpendicular to the transferring direction. After the movable stop member 42a is stopped at the stopper 44, the lever 42b is turned down thus engaging the upper and lower transfer chambers 32, 34.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron beam irradiation device for irradiating an object to be processed with a curtain-shaped electron beam.

[0002]

2. Description of the Related Art FIG. 4 is a schematic block diagram of a conventional electron beam irradiation apparatus, and FIG. 5 is a schematic sectional view of a transfer chamber of the conventional electron beam irradiation apparatus in a direction perpendicular to the transfer direction of an object to be processed. As shown in FIG. 4, the electron beam irradiation apparatus includes an electron beam generator 110.
An irradiation window (not shown), a transfer chamber 130 in which the object to be processed is transferred, and a hydraulic cylinder 140.

The electron beam generator 110 accelerates the thermoelectrons emitted from the linear cathode by heating the linear cathode (not shown) with an electric current to generate a curtain-shaped electron beam. The electron beam generator 110 is installed in the transfer chamber 13
It is provided at the upper center of 0. The electron beam generator 1
The inside of 10 is kept vacuum by a diffusion pump or the like in order to prevent electrons from colliding with gas molecules and losing energy.

The irradiation window is provided with the electron beam generator 110 and the transfer chamber 1.
It is provided at the boundary with 30, and has a window foil made of metal foil. The window foil separates the vacuum atmosphere in the electron beam generator 110 from the irradiation atmosphere in the transfer chamber 130, and the electron beam penetrating the window foil is taken out into the transfer chamber 130.

As shown in FIGS. 4 and 5, the transfer chamber 130 has an upper transfer chamber 132 and a lower transfer chamber 134. For example, when irradiating a sheet-shaped object to be processed with an electron beam, the object to be processed is conveyed from the left side to the right side in FIG. 4 in the transfer chamber 130 by a transfer mechanism such as a roller 150 provided in the lower transfer chamber 134. To be done. Also, as shown in FIG. 5, packings 134c and 134c are provided between the upper transfer chamber 132 and the tips of the bent portions 134a and 134b that are bent upward at both ends of the lower transfer chamber 134. , 134c seal the upper transfer chamber 132 and the lower transfer chamber 134.

The electron beam generator 110 and the transfer chamber 130 are lead-shielded so that X-rays that are secondarily generated during electron beam irradiation do not leak outside. For example, the upper transfer chamber 132 and the lower transfer chamber 134 of the transfer chamber 130 are
It has a two-layer structure in which the inside is lead P and the outside is stainless steel S. In addition, the bent portions 1 at both ends of the lower transfer chamber 134
Bent portions 132a and 132b in which 34a and 134b are bent downward at both ends of the upper transfer chamber 132 and the upper transfer chamber 132
By forming the transfer chamber 130 so as to be inserted between the protrusions 132c and 132c provided on the transfer chamber 13,
0 has a structure in which X-rays do not easily leak to the outside.

The hydraulic cylinder 140 opens and closes the transfer chamber 130 by moving up and down the lower transfer chamber 134. When performing maintenance and inspection of the window foil, the roller 150, the transfer chamber 130, etc., the lower transfer chamber 134 is lowered to the position shown by the dotted line in FIG. 4 by the hydraulic cylinder 140. Further, as the opening / closing mechanism of the transfer chamber 130, in addition to the mechanism using the hydraulic cylinder 140, for example, a motor is also used.
Conventionally, when such an opening / closing mechanism for the transfer chamber 130 is used, the stop position of the lower transfer chamber 134 is controlled using a limit switch.

[0008]

By the way, for example, 9
In a low energy type electron beam irradiation apparatus that accelerates an electron beam with an accelerating voltage of 0 to 300 kV, braking X-rays are less likely to occur, and self-shielding can be simplified. For this reason,
In such a low energy type electron beam irradiation apparatus, as compared with the high energy type electron beam irradiation apparatus, the transfer chamber 13
It is possible to simplify the X-ray shielding structure such as the transfer chamber 130 by reducing the thickness of lead used for 0. However, conventionally, even in a low-energy type electron beam irradiation apparatus, since the expensive hydraulic cylinder 140 or the like is still used as the opening / closing mechanism of the transfer chamber 130, there is a problem that cost reduction cannot be achieved. It was Moreover,
When the lower transfer chamber 134 is raised using the hydraulic cylinder 140 or the like, the stop switch is controlled by the limit switch so that the lower transfer chamber 134 is set to the same position with respect to the upper transfer chamber 132 each time. It is difficult to stop it accurately, and it is therefore difficult to contact the lower transfer chamber 134 with the upper transfer chamber 132 via the packings 134c and 134c without a gap.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an electron beam irradiation apparatus capable of keeping a constant distance between an upper transfer chamber and a lower transfer chamber with a simple structure. To do.

[0010]

SUMMARY OF THE INVENTION To achieve the above object, the present invention provides an electron beam generating section for generating an electron beam, an upper transfer chamber and a lower transfer chamber for transferring an object to be processed. An electron beam irradiating apparatus that irradiates an object to be processed that moves in the transfer chamber with an electron beam, the chamber including a chamber and a window that takes out an electron beam generated by the electron beam generator into the transfer chamber. A pivoting means for pivotally pivoting the lower transfer chamber is provided at one end of the transfer chamber in a direction perpendicular to the transfer direction, and the transfer chamber in the direction perpendicular to the transfer direction of the object to be processed is provided. The other end is provided with an engaging means for engaging the upper transfer chamber and the lower transfer chamber in an openable and closable manner.

Further, it is preferable that the upper transfer chamber and the lower transfer chamber have a structure in which lead is sandwiched between stainless steels.

Further, it is desirable to provide a shock reducing means in the lower transfer chamber.

[0013]

According to the present invention, according to the above construction, pivoting means for pivotally pivoting the lower transfer chamber is provided at one end of the transfer chamber in the direction perpendicular to the transfer direction of the object to be processed, and the object to be processed is provided. The mechanism for opening and closing the transfer chamber is extremely simple by providing the attachment means for opening and closing the upper transfer chamber and the lower transfer chamber at the other end of the transfer chamber in the direction perpendicular to the transfer direction of the article. Therefore, the cost can be reduced as compared with the conventional opening / closing mechanism using the hydraulic cylinder. Moreover, by using the pivoting means and the engaging means, it is possible to always keep the interval between the upper transfer chamber and the lower transfer chamber constant when closing the transfer chamber. It is also possible to adjust the distance between the upper transfer chamber and the lower transfer chamber by adjusting the positions where the pivotal attachment means and the engagement means are attached.

Since the upper transfer chamber and the lower transfer chamber have a structure in which lead is sandwiched between stainless steels, the lead is not exposed on the surfaces of the upper transfer chamber and the lower transfer chamber.
For example, when the transfer chamber is opened for maintenance and inspection, lead does not come into direct contact with the worker's hand, and therefore, the worker can be improved in health and hygiene.

Further, by providing the impact reducing means in the lower transfer chamber, it is possible to prevent the lower transfer chamber from rapidly rotating downward when the engaging means is removed.

[0016]

An embodiment of the present invention will be described below with reference to the drawings. 1 is a schematic sectional view of an electron beam irradiation apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic side view of a transfer chamber of the electron beam irradiation apparatus according to the present embodiment in a direction perpendicular to the transfer direction of an object to be processed, FIG. 3 is a schematic sectional view of a transfer chamber of the electron beam irradiation apparatus.

The electron beam irradiation apparatus shown in FIGS. 1 and 2 has an electron beam generating section 10, an irradiation window section 20, a transfer chamber 30 in which an object to be processed is transferred, and a damper (damp) as a shock reducing means.
er) 60 and a leg portion 70 that supports the transfer chamber 30 and the like.

As shown in FIG. 1, the electron beam generator 10 is provided at a substantially central upper portion of the transfer chamber 30, and a terminal 12 for generating an electron beam and an electron beam generated at the terminal 12 are accelerated space (vacuum space). And an accelerating tube 14 that accelerates at. The inside of the electron beam generator 10 is kept in a vacuum of 10 ⁻⁶ to 10 ⁻⁷ Torr by a diffusion pump (not shown) or the like in order to prevent electrons from colliding with gas molecules and losing energy. The terminal 12 includes a filament 12a as a linear cathode that emits thermoelectrons, a gun structure 12b that supports the filament 12a, and a filament 1a.
Grid 12 for controlling thermoelectrons generated in 2a
with c and.

The irradiation window portion 20 has a window foil 22 made of a metal foil.
And a window frame structure 24 that supports the window foil 22 while cooling the window foil 22. The window foil 22 separates a vacuum atmosphere in the electron beam generating unit 10 from an irradiation atmosphere in the transfer chamber 30, and the transfer chamber 3 is separated by the window foil 22.
The electron beam is taken out within 0. The window foil 22 is mainly made of titanium foil which has sufficient mechanical strength to maintain a vacuum atmosphere in the electron beam generator 10 and has excellent heat resistance.

The transfer chamber 30 has an upper transfer chamber 32 and a lower transfer chamber 34, a hinge 36 as a pivoting means, and a patch lock 38 as an engaging means, and the lower transfer chamber 34 and the upper transfer chamber 32 are provided. The object to be processed is conveyed in the space surrounded by.
An object to be processed moving in the transfer chamber 30 is irradiated with an electron beam in a space (irradiation space) X in the transfer chamber 30 corresponding to a portion where the irradiation window 20 is formed. Further, the object to be processed is conveyed from the left side to the right side in FIG. 1 and the direction perpendicular to the paper surface in FIG. There are mainly two types of such transport mechanisms depending on the type of the object to be processed. When the sample to be processed is a small sample, a mechanism is used in which the sample to be processed is placed in a tray and the tray is transported by a transport chain or the like. When the object to be processed is a sheet, a mechanism for conveying the object to be processed by rollers or the like is used.

As shown in FIG. 3, the hinge 36 pivotally attaches the lower transfer chamber 34 to the left end of the transfer chamber 30 in the direction perpendicular to the transfer direction of the object to be processed. Hinge 3
The plate 6 is attached to the plate 52 mounted inside the lower bent portion 32a on the left side of the upper transfer chamber 32 and the left end bottom of the lower transfer chamber 34.

As shown in FIG. 3, the patch lock 38 has an upper transfer chamber 32 and a lower transfer chamber 34 which are openably and closably attached to the right end of the transfer chamber 30 in a direction perpendicular to the transfer direction of the object to be processed. Is. The patch lock 38 includes a main body 42 and a locking piece 44. The main body 42 has a movable locking member 42a and a lever 42b. The main body 42 is
It is attached to the lower bent portion 34b on the right side of the lower transfer chamber 34, and the locking piece 44 is attached to the outside of the lower bent portion 32b on the right side of the upper transfer chamber 32. After the movable locking member 42a is locked to the locking piece 44, the lever 42b is tilted downward to lock the upper transfer chamber 32 and the lower transfer chamber 34 together.

The distance d between the upper transfer chamber 32 and the lower transfer chamber 34 can be adjusted by adjusting the positions where the hinge 36 (or the plate 52) and the patch lock 38 are attached to the transfer chamber 30. is there.

Further, as shown in FIG. 3, the lower transfer chamber 34
A standing end portion 34c having an L-shaped cross section and having a length substantially the same as the length of the lower transfer chamber 34 in the direction perpendicular to the paper surface is attached to the right end of the. And the lower transfer chamber 3
The packings 54, 54 are attached to the inside of the upper bent portion 34a at the left end of 4 and the inside of the standing end portion 34c at the right end,
The packings 54, 54 seal the upper transfer chamber 32 and the lower transfer chamber 34. Also, as shown in FIG.
A reinforcing member 56 is provided on the bottom surface of the lower transfer chamber 34. One end of the damper 60 is attached to a substantially central portion of the reinforcing member 56, and the other end of the damper 60 is attached to the leg portion 70. By providing the damper 60 in this way, it is possible to prevent the lower transfer chamber 34 from rapidly rotating downward when the patch lock 38 is removed, for example.
It is possible to ensure the safety of work when opening and closing the transfer chamber 30.

The electron beam generator 10 and the transfer chamber 30 are lead-shielded so that X-rays that are secondarily generated during electron beam irradiation do not leak outside. In particular, the transfer chamber 3
The upper transfer chamber 32 and the lower transfer chamber 34 of No. 0 have a sandwich structure in which lead P is sandwiched between stainless steels S, as shown in FIG. Further, by the lower bent portions 32a and 32b at both ends of the upper transfer chamber 32, the upper bent portion 34a at the left end of the lower transfer chamber 34 and the standing end portion 34c at the right end, the X-ray seals at both ends of the transfer chamber 30 are formed. Is made into a double structure, and the transfer chamber 30 has a structure in which X-rays do not easily leak to the outside.

In the electron beam irradiation apparatus constructed as described above, when the filament 12a is heated by applying an electric current, the filament 12a emits thermoelectrons, and the thermoelectrons emit a thermoelectric voltage applied between the filament 12a and the grid 12c. Will pull you in all directions. Of these, only those that have passed through the grid 12c are effectively extracted as electron beams. Then, the electron beam extracted from the grid 12c is accelerated in the acceleration space in the acceleration tube 14 by the acceleration voltage applied between the grid 12c and the window foil 32, then penetrates the window foil 32, and the irradiation window The object to be processed conveyed in the irradiation chamber 20 below the section 30 is irradiated.

Now, for example, when the transfer chamber 30 is opened for maintenance and inspection of the window foil 22, the transfer mechanism, the transfer chamber 30, etc. after the process of irradiating the electron beam is completed, first of all, the patch lock 38 is opened. The lever 42b is raised and the movable locking member 42a is removed from the locking piece 44. And the lower transfer chamber 3
Slowly rotate 4 to the position shown by the dotted line in FIG. In this way, the operator can easily open the transfer chamber 30, and can immediately perform maintenance and inspection. Also,
The upper transfer chamber 32 and the lower transfer chamber 34 have a structure in which lead P is sandwiched between stainless steel S, and harmful lead P is not exposed on the surfaces of the upper transfer chamber 32 and the lower transfer chamber 34. ,
Lead will not come into direct contact with workers 'hands, which will be favorable for workers' health and hygiene.

In the electron beam irradiation apparatus of this embodiment, a hinge for pivotally rotatably pivoting the lower transfer chamber is provided at one end of the transfer chamber in the direction perpendicular to the transfer direction of the workpiece.
A mechanism for opening and closing the transfer chamber is extremely provided by providing a patch lock that opens and closes the upper transfer chamber and the lower transfer chamber at the other end of the transfer chamber in the direction perpendicular to the transfer direction of the workpiece. Since it is simple, the transfer chamber can be easily opened and closed, and the cost can be reduced as compared with the conventional opening and closing mechanism using the hydraulic cylinder. Further, oil such as lubricating oil is not necessary, which is hygienic. Furthermore, by using a mechanical hinge and a patch lock when closing the transfer chamber, the interval between the upper transfer chamber and the lower transfer chamber can always be made constant, and therefore the lower transfer chamber can be placed in the upper transfer chamber without any gap via the packing. The contact can be ensured. It is also possible to adjust the distance between the upper transfer chamber and the lower transfer chamber by adjusting the position where the hinge and the patch lock are attached. Therefore, the electron beam irradiation apparatus of the present embodiment is particularly suitable for a low energy type in which the generation of braking X-rays is small and self-shielding can be simplified.

The present invention is not limited to the above embodiment, but various modifications can be made within the scope of the invention.

[0030]

As described above, according to the present invention, the pivoting means for pivotally pivoting the lower transfer chamber is provided at one end of the transfer chamber in the direction perpendicular to the transfer direction of the object to be processed. The transfer chamber is opened and closed by providing an attachment means for opening and closing the upper transfer chamber and the lower transfer chamber at the other end of the transfer chamber in the direction perpendicular to the transfer direction of the object to be processed. Since the mechanism to operate is extremely simple, the cost can be reduced compared to the opening / closing mechanism using the conventional hydraulic cylinder, and the interval between the upper transfer chamber and the lower transfer chamber is always constant when the transfer chamber is closed. It is possible to provide an electron beam irradiation device capable of performing the above.

Since the upper transfer chamber and the lower transfer chamber have a structure in which lead is sandwiched between stainless steels, lead is not exposed on the surfaces of the upper transfer chamber and the lower transfer chamber.
For example, when the carrier chamber is opened for maintenance and inspection, lead does not come into direct contact with the operator's hand, and it is possible to provide an electron beam irradiation apparatus capable of improving the operator's health and hygiene.

Further, by providing an impact reducing means in the lower transfer chamber, it is possible to prevent the lower transfer chamber from rapidly rotating downward when the engaging means is removed, so that the transfer chamber can be opened and closed. It is possible to provide an electron beam irradiating device that can ensure the safety of work when performing.

[Brief description of drawings]

FIG. 1 is a schematic sectional view of an electron beam irradiation apparatus that is an embodiment of the present invention.

FIG. 2 is a schematic side view of a transfer chamber of the electron beam irradiation apparatus of the present embodiment in a direction perpendicular to the transfer direction of an object to be processed.

FIG. 3 is a schematic sectional view of a transfer chamber of the electron beam irradiation apparatus.

FIG. 4 is a schematic configuration diagram of a conventional electron beam irradiation apparatus.

FIG. 5 is a schematic cross-sectional view of a transfer chamber of a conventional electron beam irradiation apparatus in a direction perpendicular to the transfer direction of an object to be processed.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Electron beam generation part 12 Terminal 12a Filament 12b Gun structure 12c Grid 14 Accelerator tube 20 Irradiation window part 22 Window foil 24 Window frame structure 30 Transfer chamber 32 Upper transfer chamber 34 Lower transfer chamber 36 Hinge 38 Patch lock 42 Main body 42a Movable Locking member 42b Lever 44 Locking piece 52 Plate 54 Packing 56 Reinforcing member 60 Damper 70 Leg

Claims (3)

[Claims] 1. An electron beam generating section for generating an electron beam, a transfer chamber having an upper transfer chamber and a lower transfer chamber for transferring an object to be processed, and an electron beam generated by the electron beam generating section for transferring the electron beam. An electron beam irradiating device that irradiates an object to be processed that is moving in the transfer chamber with an electron beam, the window part being taken out into a room, wherein one end of the transfer chamber in a direction perpendicular to a direction of transferring the object to be processed. A pivoting means for pivotally pivoting the lower transfer chamber is provided, and the upper transfer chamber and the lower transfer chamber are provided at the other end of the transfer chamber in the direction perpendicular to the transfer direction of the object to be processed. An electron beam irradiating device, characterized in that it is provided with engaging means for engaging in opening and closing. 2. The upper transfer chamber and the lower transfer chamber,
The electron beam irradiation apparatus according to claim 1, which has a structure in which lead is sandwiched between stainless steels. 3. The electron beam irradiation apparatus according to claim 1 or 2, wherein impact reducing means is provided in the lower transfer chamber.