JP2009068973A - Electron beam irradiation equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide electron beam irradiation equipment which improves the workability in the replacement of electron generating members of an electron beam source and also to reduce the space required for the electron beam irradiation equipment including replacement work. <P>SOLUTION: The electron beam irradiation equipment 1A includes an accommodation section 2 and the electron beam source 3. The accommodation section 2 has a main body 22 and a lid 24 mounted on the section 2 so that the lid 24 can be opened and closed and stores an object A to be irradiated in an electron beam irradiation chamber 21. The electron beam source 3 has a vacuum container 13, which includes a base end 14 and a point end 15. The point end 15 is fixed onto the lid 24. An irradiation window section 12 which is so constituted that it can be attached to and detached from the side of the electron beam irradiation chamber 21 is mounted on the point end 15. A door 25 for carrying in and out the object A to be irradiated is installed at the front of the main body 22. The vacuum container 13 can be opened and closed by using a hinge 18 placed on the back side as a supporting point. The lid 24 can be opened and closed by using a hinge 23 placed on the back side as a supporting point. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an electron beam irradiation apparatus.

  As this type of electron beam irradiation apparatus, for example, the following is known. The electron beam irradiation apparatus disclosed in Patent Document 1 includes a vacuum container that houses an electron gun, and a vacuum pump is attached to the vacuum container. Further, it is described that the electron transmission window is configured to be detachable from the vacuum container, and the electron gun and the electron transmission window are exchanged by opening the vacuum container to the atmosphere.

  Moreover, the electron beam irradiation apparatus disclosed in Patent Document 2 includes an electron beam irradiation chamber for accommodating an irradiation object and irradiating an electron beam, and an electron beam irradiation apparatus body (that is, an electron beam source) is provided. It is attached to the electron beam irradiation room. And it describes that a tray is provided in the electron beam irradiation chamber, and the irradiation object is carried in and out by this tray.

  Moreover, in the electron beam irradiation apparatus disclosed in Patent Document 3, a part of a shield that constitutes a space for irradiating an electron beam is used as a door that can be opened and closed, and the irradiated object is conveyed inside the door. A roll for is arranged.

Patent Document 4 also describes an electron beam irradiation apparatus including an electron beam irradiation chamber. In the electron beam irradiation apparatus described in Patent Document 4, a door for loading / unloading an irradiation object into / from an electron beam irradiation chamber and one end of a sample stage on which the irradiation object is placed are fixed to each other.
JP 2004-170353 A JP 2005-331417 A No. 7-33199 Japanese Patent Application Laid-Open No. 60-80799

  In the electron beam irradiation apparatus, in order to prevent leakage of electron beams and X-rays to the outside of the apparatus, for example, as in the configurations described in Patent Documents 2 to 4, the irradiation object is accommodated and irradiated with the electron beam. An electron beam irradiation chamber is provided. On the other hand, the electron beam source used in the electron beam irradiation apparatus is a so-called opening capable of exchanging an irradiation window (electron transmission window) or an electron generating member such as a filament as in the configuration described in Patent Document 1. There is a type. Conventionally, when exchanging an electron generating member and an irradiation window in such an electron beam irradiation apparatus, it has been necessary to temporarily remove the electron beam source from a portion constituting the electron beam irradiation chamber. Therefore, readjustment after replacement (positioning of the electron beam source and the irradiation object in the electron beam irradiation chamber, etc.) is required, which is a cause of lowering work efficiency.

  Moreover, in order to install an electron beam irradiation apparatus in the work space where space is limited, it is preferable that the space occupied by the electron beam irradiation apparatus is smaller. However, when removing the electron beam source and replacing the electron generating member and the irradiation window, a space for replacing the removed electron beam source is required, and an electron beam irradiation device is installed in the workplace. It becomes a restriction when doing.

  The present invention has been made in view of the above-described problems, and can improve the workability when exchanging the electron generating member and the irradiation window portion of the electron beam source, and the electron beam irradiation apparatus including the replacement work can be improved. It aims at providing the electron beam irradiation apparatus which can make a required space small.

  In order to solve the above-described problems, a first electron beam irradiation apparatus according to the present invention includes a main body having an opening and a lid attached to the opening so as to be openable and closable. An electron beam irradiation chamber configured to have an accommodating portion for accommodating an irradiation object, a proximal end portion, and a distal end portion disposed between the proximal end portion and the lid portion and fixed to the lid portion; A cylindrical vacuum vessel in which a joint portion between the base end and the base end portion can be opened and closed, an electron gun which is held at the base end portion and emits an electron beam, and held at the front end portion to direct the electron beam toward the electron beam irradiation chamber An electron beam source having an irradiation window portion configured to be detachable from the electron beam irradiation chamber side and a vacuum pump for exhausting the inside of the vacuum vessel, and for carrying in and out an irradiation object The first door is attached to the front side of the main body, and the vacuum vessel is The first hinge provided on the back side of the container can be opened and closed with a fulcrum, and the lid can be opened and closed with the second hinge provided on the back side of the housing as a fulcrum. Features.

  Moreover, the 2nd electron beam irradiation apparatus by this invention has the main-body part which has an opening part, and the cover part attached to the opening part so that opening and closing was possible, and the electron beam irradiation chamber comprised by a main-body part and a cover part And a proximal end portion, and a distal end portion disposed between the proximal end portion and the lid portion and fixed to the lid portion, and coupling between the distal end portion and the proximal end portion. A cylindrical vacuum container whose part can be opened and closed, an electron gun that is held at the base end and emits an electron beam, and held at the tip to transmit the electron beam toward the electron beam irradiation chamber, and an electron beam An irradiation window configured to be detachable from the irradiation chamber side, and an electron beam source having a vacuum pump for exhausting the inside of the vacuum vessel, and a first door for carrying in and out the irradiation object is a main body The vacuum vessel is provided on one side of the vacuum vessel. The lid can be opened and closed with the first hinge as a fulcrum, and the lid can be opened and closed with the second hinge provided on the same side as the one side of the housing portion as a fulcrum. To do.

  The electron beam source included in the first and second electron beam irradiation apparatuses described above can be opened and closed with the first hinge as a fulcrum at the proximal end and the distal end of the vacuum vessel. A vacuum pump is provided, which has a so-called open type configuration in which the electron generating member can be replaced. And in each electron beam irradiation apparatus, the front-end | tip part of the vacuum vessel of an electron beam source is being fixed to the accommodating part (lid part). Therefore, when exchanging the electron generating member, it is possible to replace the electron generating member by opening the base end portion without removing the electron beam source from the accommodating portion while the distal end portion is fixed to the accommodating portion. In addition, since the tip of the electron beam source is fixed to the lid, and the irradiation window is configured to be removable from the electron beam irradiation chamber side, the operator can easily access the irradiation window by opening the lid. The irradiation window can be replaced without removing the electron beam source from the housing. As described above, according to the first and second electron beam irradiation apparatuses described above, it is necessary to remove the electron beam source from the accommodating portion constituting the electron beam irradiation chamber when replacing the electron generating member and the irradiation window portion. Absent. Therefore, readjustment after replacement becomes unnecessary, and workability can be improved, and space for performing replacement work can be saved.

  Further, in the first electron beam irradiation apparatus described above, a vacuum container (electron beam source) and a lid part (accommodating part) with respect to the front surface to which the first door for carrying in and out the irradiation object is attached. Both of them can be opened and closed with a hinge provided on the back side of each as a fulcrum. Further, in the above-described second electron beam irradiation apparatus, both the vacuum container (electron beam source) and the lid part (accommodating part) can be opened and closed with a hinge provided on one side surface of each as a fulcrum. Yes. Thus, by configuring the vacuum vessel and the lid to open and close in the same direction, the space required for opening and closing them can be reduced, and the installation area of the electron beam irradiation apparatus can be reduced. That is, since the first electron beam irradiation device opens the vacuum container and the lid rearward (backward direction), the lateral width of the device can be reduced, and the second electron beam irradiation device has the vacuum container and the lid portion on one side. Since it opens, the depth of the device can be reduced. In the first and second electron beam irradiation apparatuses, the vacuum container and the lid are opened rearward or one side, so that the space on the front side may be narrow. Therefore, since the accommodating portion and the electron beam source can be arranged close to the front side, workability can be further improved.

  The first electron beam irradiation device further includes an atmosphere replacement device that replaces the atmosphere in the electron beam irradiation chamber, and one end of the piping connecting the atmosphere replacement device and the electron beam irradiation chamber on the electron beam irradiation chamber side is a housing portion. It is good also as being characterized by being attached to the back side. The second electron beam irradiation device further includes an atmosphere replacement device that replaces the atmosphere in the electron beam irradiation chamber, and one end of the piping connecting the atmosphere replacement device and the electron beam irradiation chamber on the electron beam irradiation chamber side is a housing portion. It may be characterized by being attached to one of the side surfaces. As described above, when the electron beam irradiation apparatus includes an atmosphere replacement device, when one end of the piping on the electron beam irradiation chamber side is attached to the same side as the first and second hinges (the back side or one side). Good. Thereby, the open / close space and the piping space of the vacuum vessel and the accommodating portion can be made common, and the installation area of the electron beam irradiation apparatus can be further reduced.

  Further, the first electron beam irradiation apparatus may be characterized in that a vacuum pump is disposed on the back side of the vacuum container. Further, the second electron beam irradiation apparatus may be characterized in that the vacuum pump is disposed on the same side as one side surface of the vacuum container. Accordingly, when the vacuum container and the housing are opened, the center of gravity of the structure above the hinge is lowered, and a stable open state can be realized.

  Further, the first and second electron beam irradiation apparatuses are accommodated in order to prevent leakage of X-rays from the electron beam source and X-rays that are incidentally generated when the electron beam hits the irradiation object to the outside. It is preferable to further include a housing for housing the unit and the electron beam source. In that case, it is more preferable that the second door is attached to the front side of the housing, and the observation windows are respectively provided at positions facing each other in the first and second doors. In the first and second electron beam irradiation apparatuses described above, the housing portion can be arranged close to the front side, so that the observation window of the housing and the observation window of the housing portion can be arranged close to each other, and the irradiation target is passed through these observation windows. Things can be observed easily.

  The first and second electron beam irradiation apparatuses further include an electron beam control unit that is electrically connected to the electron beam source and performs emission control of the electron beam, and the housing includes the housing unit and the electron beam source. An electron beam source accommodating chamber for accommodating, a control unit accommodating chamber for accommodating the electron beam control unit, and a metal partition member that partitions the electron beam source accommodating chamber and the control unit accommodating chamber from each other may be provided. As a result, the X-rays leaked from the electron beam source and the accommodation unit accommodated in the electron beam source accommodation chamber are shielded by the partition member, so that the influence of the X-rays on the electron beam control unit accommodated in the control unit accommodation chamber is reduced. Can be reduced.

  According to the electron beam irradiation apparatus of the present invention, it is possible to improve workability when exchanging the electron generating member and the irradiation window portion of the electron beam source, and it is possible to reduce the necessary space of the electron beam irradiation apparatus including replacement work.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of an electron beam irradiation apparatus according to the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted. Further, in the following description, the front is a surface facing an operator who operates the electron irradiation device, specifically, a door for carrying in / out an irradiation object that is an electron beam irradiation target, or irradiation. A surface on which an observation window for observing the state is arranged is indicated.

<First Embodiment>
FIG. 1 is a front view showing a configuration of an electron beam irradiation apparatus 1A as a first embodiment of the present invention. 1, the front half of the housing 7 (electron beam source accommodation chamber 72) is shown in a front view with the door 71 open, and the lower half of the housing 7 (control unit accommodation chamber 73) is internal. In order to show the configuration, the front panel of the housing 7 is omitted. 2 is a side view of the electron beam irradiation apparatus 1A shown in FIG. 1, and the accommodating portion 2 and the housing 7 are shown in cross-section along the line II-II in FIG.

  The electron beam irradiation apparatus 1A according to the present embodiment is an apparatus for irradiating an irradiation object A with an electron beam. For example, ink drying, film modification, resin film curing, semiconductor member modification, and the like. Is preferably used. Referring to FIGS. 1 and 2, the electron beam irradiation apparatus 1 </ b> A includes a housing 2, an electron beam source 3, and a housing 7.

  The accommodating part 2 has an electron beam irradiation chamber (irradiation chamber) 21 for accommodating the irradiation object A. An XY stage 26 is accommodated in the electron beam irradiation chamber 21. The XY stage 26 supports the irradiation object A and positions the irradiation object A in a plane orthogonal to the electron beam irradiation axis. An adjustment table 27 for adjusting the height of the irradiation object A is arranged on the XY stage 26, and a table 28 for placing the irradiation object A is provided on the adjustment table 27. Yes. During electron beam irradiation, the internal atmosphere of the electron beam irradiation chamber 21 is replaced with an inert gas such as nitrogen gas. A door 25 (first door) is provided in front of the housing portion 2, and the operator opens the door 25 to carry in and out the irradiation object A. The door 25 is provided with an observation window 25 b for observing the inside of the electron beam irradiation chamber 21.

  The electron beam source 3 is a device for irradiating the irradiation object A accommodated in the electron beam irradiation chamber 21 with an electron beam, and is fixed to the accommodating portion 2. The electron beam source 3 has a vacuum container 13, and an electron generating member (filament) is disposed inside the vacuum container 13. The electron beam emitted from the electron generating member passes through the irradiation window portion 12 attached to the tip of the vacuum vessel 13 and is irradiated onto the irradiation object A on the table 28.

  The housing 7 accommodates the accommodating portion 2 and the electron beam source 3, and leakage of X-rays generated from the electron beam source 3 to the outside when the electron beam strikes the irradiation target A. prevent. The housing 7 has a rectangular parallelepiped box shape that is long in the height direction, and the inside of the housing 7 is divided into an electron beam source accommodation chamber 72 provided in the upper portion and a control portion accommodation chamber 73 provided in the lower portion. It is partitioned. The electron beam source accommodating chamber 72 accommodates the accommodating portion 2 and the electron beam source 3. The wall surface of the housing 7 constituting the electron beam source accommodation chamber 72 is made of a material having extremely high X-ray absorption rate (that is, extremely low X-ray transmittance), such as stainless steel, lead, iron, tungsten, or the like. . A door 71 (second door) is attached to the front side of the electron beam source accommodation chamber 72, and the operator carries the irradiation object A into and out of the electron beam irradiation chamber 21 and maintains the electron beam source 3. Can be performed by opening the door 71. An observation window 71a is provided at a position of the door 71 facing the observation window 25b. Thereby, the operator can observe the inside of the electron beam irradiation chamber 21 with the door 71 closed. The observation windows 25b and 71a are preferably made of an X-ray absorber such as lead glass in order to prevent leakage of X-rays that are secondarily generated in the electron beam irradiation chamber 21.

  Various control devices (electron beam source controller 74, exhaust pump 75, stage controller 76, and atmosphere adjustment controller 77) are accommodated in the control unit accommodation chamber 73. The electron beam source controller 74 is an electron beam controller in the present embodiment. The electron beam source controller 74 is electrically connected to the electron beam source 3 and controls the emission of the electron beam. The exhaust pump 75 is connected to the vacuum pump 33 that exhausts the inside of the vacuum vessel 13 through a pipe, and exhausts the gas exhausted from the vacuum pump 33 to the outside of the housing 7. The stage controller 76 is electrically connected to the XY stage 26 and the adjustment table 27 described above, and controls the position of the irradiation object A. The atmosphere adjustment controller 77 is an atmosphere replacement device in the present embodiment. The atmosphere adjustment controller 77 is connected to the electron beam irradiation chamber 21 of the housing portion 2 via the pipe 77a, and replaces the internal atmosphere of the electron beam irradiation chamber 21 with an inert gas such as nitrogen gas, and the internal atmosphere after replacement. To maintain. The operation of the electron beam source controller 74, the exhaust pump 75, the stage controller 76, and the atmosphere adjustment controller 77 is performed by an operator via an input means such as a keyboard. Further, these operation states are displayed by a display device 78 attached to the housing 7.

  The electron beam source accommodation chamber 72 and the control unit accommodation chamber 73 are partitioned from each other by a metal partition member 79. The partition member 79 is made of a material having an extremely high X-ray absorption rate, such as stainless steel, lead, iron, tungsten, or the like. As a result, the X-rays generated from the electron beam source 3 and the electron beam irradiation chamber 21 accommodated in the electron beam source accommodation chamber 72 are shielded by the partition member 79, so that various kinds of components accommodated in the control unit accommodation chamber 73 are stored. The influence of X-rays on the control device can be reduced.

  Then, the structure of the accommodating part 2 and the electron beam source 3 of this embodiment is demonstrated concretely, referring FIGS. 3-7. FIG. 3 is a front view showing the configuration of the accommodating portion 2 and the electron beam source 3. In FIG. 3, a part of the housing portion 2 is cut out for easy understanding. FIG. 4 is a side view of the housing part 2 and the electron beam source 3, and the housing part 2 shows a side cross-section along the line IV-IV in FIG. 3. FIG. 5 is a top view of the accommodating portion 2 and the electron beam source 3. 6 and 7 are diagrams showing the operation of the housing 2 and the electron beam source 3.

  The accommodating portion 2 is a substantially rectangular parallelepiped stainless steel box-shaped container mainly composed of a main body portion 22 and a lid portion 24 and having a hollow (electron beam irradiation chamber 21) inside. A rectangular opening 22 a is formed on the upper surface of the main body 22, and the lid 24 is disposed so as to close the opening 22 a and constitutes a part of the top plate of the electron beam irradiation chamber 21. The main body portion 22 and the lid portion 24 are connected to each other via a hinge (second hinge) 23 provided on the back side of the housing portion 2, and the lid portion 24 can be opened and closed with this hinge as a fulcrum. Yes.

  The lid portion 24 has an electron beam source mounting portion 24a into which the vacuum container 13 of the electron beam source 3 is inserted and fixed. The electron beam source mounting portion 24 a is formed in a substantially cylindrical shape extending along the longitudinal direction of the vacuum vessel 13, and the inner diameter thereof is substantially the same as the outer diameter of the vacuum vessel 13. Note that a handle 24 b for facilitating opening and closing of the lid portion 24 is attached to the lid portion 24 at a portion near the front surface of the lid portion 24. In addition, the portions where the main body portion 22 and the lid portion 24 are in contact with each other overlap each other, thereby preventing leakage of X-rays that are secondarily generated by the electron beam irradiation in the electron beam irradiation chamber 21 to the outside. Although possible, in order to further reduce the leakage X-ray dose, an X-ray shielding sheet such as a lead sheet or a tungsten sheet may be provided.

  FIG. 6 shows a state where the lid portion 24 is opened. The lid portion 24 opens upward with the hinge 23 as a fulcrum. At this time, the electron beam source 3 fixed to the lid portion 24 also moves with the lid portion 24 using the hinge 23 as a fulcrum. As will be described later, in the present embodiment, the irradiation window portion 12 of the electron beam source 3 is configured to be detachable from the electron beam irradiation chamber 21 side. Thus, the operator can easily replace the irradiation window 12. As shown in FIG. 6, when the lid portion 24 is opened upward as in this embodiment, the lid portion 24 and the electron beam source 3, which are heavy objects, are prevented from closing suddenly. A shock absorber (buffer member) 34 is preferably provided between the lid 24 and the main body 22.

  Referring to FIGS. 3 to 5 again, the front surface of the main body 22 is a rectangular opening 22b (see FIG. 4) for carrying in and out the irradiation object A, and the opening 22b includes a hinge 25c. A door 25 is attached to be openable and closable. A handle 25 a for facilitating opening and closing of the door 25 is attached to the door 25. In the present embodiment, the hinge 25 c is attached to the lower end of the door 25, and the handle 25 a is attached to the upper end of the door 25. Further, at the time of electron beam irradiation, in order to replace the inside of the electron beam irradiation chamber 21 with an inert gas such as nitrogen gas, a pipe extending from the atmosphere adjustment controller 77 (see FIGS. 1 and 2) is provided on the back surface of the main body portion 22. One end of 77a is attached. In order to maintain the internal atmosphere of the electron beam irradiation chamber 21, an airtight sealing member is provided between the lid portion 24, the door 25, and the vacuum container 13 in the opening portion 22 a, the opening portion 22 b, and the electron beam source mounting portion 24 a. Is provided.

  As described above, the electron beam irradiation chamber 21 of the storage unit 2 is provided with the XY stage 26, the adjustment table 27, and the table 28. As shown in FIG. 7, the XY stage 26, the adjustment table 27, and the table 28 can be translated (slid) toward the opening 22b. When the door 25 is opened, the table 28 is electronic. It is structured to be able to move to the outside of the beam irradiation chamber 21. By this mechanism, the operator can easily perform the operation of setting the irradiation object A on the table 28. In addition, in order to reduce generation | occurrence | production of the X-ray by irradiating the electron beam to the table 28, it is preferable that the table 28 is comprised with light element materials, such as carbon. Alternatively, the surface of the table 28 may be covered with a film or sheet made of a light element material such as carbon.

  Next, the configuration of the electron beam source 3 will be described in detail. FIG. 8 is a side sectional view showing the internal configuration of the electron beam source 3. The electron beam source 3 has an electron gun 16. The electron gun 16 includes a detachable cathode terminal portion 17 and emits an electron beam B from the cathode terminal portion 17 in a predetermined direction. The electron beam source 3 further includes an irradiation window portion 12 that transmits the electron beam B from the electron gun 16, a cylindrical vacuum vessel 13, and a vacuum pump 33 that exhausts the inside of the vacuum vessel 13 (FIGS. 1 to 5). Reference: omitted in FIG.

  The electron beam source 3 according to the present embodiment is an open type, and unlike a closed type for disposable use, a vacuum state can be arbitrarily created, and a cathode terminal portion 17 including a filament 17a that is an electron generating member or irradiation. The window part 12 can be replaced. That is, the vacuum container 13 is a stainless steel container that is in a vacuum state during operation, and a base end part 14 positioned on one end side (opposite side of the housing part 2) in the irradiation direction of the electron beam B, and the like It is divided into a front end portion 15 located on the end side (accommodating portion 2 side). The base end portion 14 accommodates the cathode terminal portion 17 including the filament 17 a of the electron gun 16 and holds the electron gun 16. Further, the distal end portion 15 holds the irradiation window portion 12. The proximal end portion 14 and the distal end portion 15 are connected to each other by a hinge 18 (first hinge) disposed on the back side of the vacuum vessel 13 and can be opened and closed with the hinge 18 as a fulcrum. The distal end portion 15 is fixed to the electron beam source mounting portion 24a of the lid portion 24, and as shown in FIG. 7, the base end portion 14 is rotated so as to lie down with the hinge 18 as a fulcrum. The base end part 14 can be opened, and access to the cathode terminal part 17 accommodated in the base end part 14 is made possible.

  A cylindrical coil portion 15 a that functions as an electromagnetic deflection lens is provided in the distal end portion 15, and an electron passage 15 e extends in the longitudinal direction of the vacuum vessel 13 so as to pass through the center of the coil portion 15 a. A disk plate 31 is fixed to the end of the distal end portion 15 on the base end portion 14 side so as to cover it, and an electron introduction hole 31a communicating with the electron passage 15e is formed at the center of the disk plate 31. ing.

  An irradiation window portion 12 that is located at the end of the electron passage 15e and transmits the electron beam B toward the electron beam irradiation chamber 21 is attached to the end portion of the distal end portion 15 on the accommodating portion 2 side. The irradiation window portion 12 is disposed so as to face the electron beam irradiation chamber 21, and projects from the inner surface 24 c of the lid portion 24 in the electron beam irradiation direction. In the present embodiment, the end portion of the electron beam source mounting portion 24a on the electron beam irradiation chamber 21 side protrudes from the inner surface 24c of the lid portion 24, and the irradiation window portion 12 faces the end surface of the electron beam source mounting portion 24a. It protrudes further. The irradiation window portion 12 includes a window material that is transmitted from the electron beam B that is generated from the cathode terminal portion 17 (filament 17a) and passes through the electron passage 15e, and is fixed to the tip portion 15 by a screw or the like. Yes. Therefore, by removing the screw, the irradiation window portion 12 including the window material which is a consumable item can be replaced.

  The vacuum pump 33 (see FIGS. 1 to 5) is fixed to the base end portion 14. The vacuum pump 33 is for exhausting the inside of the vacuum vessel 13 to a high vacuum state. That is, when the electron beam source 3 is equipped with the vacuum pump 33, the cathode terminal portion 17 and the irradiation window portion 12 which are consumables can be replaced. Moreover, the vacuum pump 33 of this embodiment is arrange | positioned at the back side of the vacuum vessel 13, as shown in FIG.2 and FIG.4. Thus, by placing the vacuum pump 33, which is a heavy object, on the same back side as the hinge 23 of the storage unit 2 and the hinge 18 of the electron beam source 3, the hinge is opened when the vacuum container 13 or the storage unit 2 is opened. The center of gravity of the structure above 18 can be lowered, and a stable open state can be realized.

  A mold power supply unit 34 that is integrated with the electron gun 16 is fixed to the proximal end side of the vacuum vessel 13. The mold power source 34 is molded with an electrically insulating resin (for example, epoxy resin) and is housed in a metal case 35.

  FIG. 9 is a side cross-sectional view showing the configuration of the mold power supply unit 34. The mold power supply unit 34 is located on the proximal end side of the electron beam source 3 and has a rectangular parallelepiped block-shaped power supply main body portion 34 a, and a proximal end portion from the power supply body portion 34 a toward the distal end side of the electron beam source 3. 14 and a cylindrical neck portion 34b protruding into the interior 14. In the power source main body 34a, a high voltage generator 34c that constitutes a transformer that generates a high voltage (for example, a maximum of −160 kV when the irradiation window 12 is grounded) is enclosed.

  The electron gun 16 is disposed at the tip of the neck portion 34b so as to face the irradiation window portion 12 with the electron passage 15e interposed therebetween. FIG. 10 is a side sectional view showing the configuration of the electron gun 16 in detail. As shown in FIG. 10, the electron gun 16 has a grid base 37 to be attached to the neck portion 34b. The grid base 37 is a screw portion with respect to a grid terminal 38 embedded in the front end surface of the neck portion 34b. It is fixed via 37a.

  Further, a filament terminal 39 is embedded in the front end surface of the neck portion 34b. A heater socket 40 is screwed into the terminal 39, and the cathode terminal portion 17 is detachably attached to the tip of the heater socket 40. Here, FIG. 11 is a side sectional view showing the configuration of the cathode terminal portion 17 and its periphery, FIG. 12 is a plan view of the cathode terminal portion 17 shown in FIG. 11, and FIG. It is a fragmentary sectional view in alignment with the XIII-XIII line. As shown in FIGS. 11 to 13, the cathode terminal portion 17 includes a filament 17 a, a filament support pin 41, a base member 42, a side wall member 43, and an aperture member 44.

  The filament 17a is an electron generating member that generates and emits electrons, and is made of a material having high electron emission efficiency (for example, W, Mo, Re, Nd, Ta, ThW line, etc.). The central portion of the filament 17a is bent into a V shape or a U shape, and electrons are emitted from this central portion. The filament support pin 41 is made of a conductive material (for example, Kovar (Fernico)). The end of the filament 17a is fixed to the tip of the filament support pin 41, and the filament 17a and the filament support pin 41 are electrically connected. The filament support pin 41 is detachably inserted into the heater socket 40. The base member 42 is made of an insulating material (for example, ceramics) and fixes the filament support pin 41.

  The side wall member 43 is made of a conductive material having a substantially cylindrical shape (for example, stainless steel), and has an opening 43a on the electron emission direction side of the filament 17a. The side wall member 43 is provided on the base member 42 so as to surround the filament 17 a, and the filament 17 a is located inside the side wall member 43. The base member 42 and the side wall member 43 are fixed by screws 45.

  The aperture member 44 is made of a thin plate-like conductive material (for example, stainless steel), and is fixed to the side wall member 43 by spot welding so as to cover the opening 43a. The aperture member 44 has an opening 44a in front of the filament 17a in the electron emission direction. The thickness of the aperture member 44 is set to about 0.1 to 0.25 mm, for example, and the diameter of the opening 44a is set to about 1.0 to 1.5 mm, for example.

  As shown in FIGS. 10 and 11, the cathode terminal portion 17 is covered with a holder member 36. The cathode terminal portion 17 is fixed to the holder member 36 by tightening the presser ring 46 inside the holder member 36. The holder member 36 to which the cathode terminal portion 17 is fixed is covered with a grid fixing ring 48, and the grid fixing ring 48 is screwed to the grid base 37 to be fixed to the grid base 37. With such a configuration, the cathode terminal portion 17 (filament 17a) can be replaced as necessary.

  The holder member 36 is made of a conductive material (for example, stainless steel) and is positioned with respect to the side wall member 43. That is, the end of the screw 47 screwed from the outside of the holder member 36 protrudes from the inner surface of the holder member 36, and a guide groove 42 a that can be engaged with the end of the screw 47 is formed on the outer periphery of the base member 42. Is provided. When the cathode terminal portion 17 is inserted into the holder member 36, the end portion of the screw 47 and the guide groove 42a engage with each other, whereby the holder member 36 and the side wall member 43 (cathode terminal portion 17) are positioned. Is made. The side wall member 43 is provided with a guide groove 43b at a position corresponding to the guide groove 42a so that the end portion of the screw 47 and the side wall member 43 do not interfere when the cathode terminal portion 17 is covered.

  The holder member 36 has an opening 36 a at a position corresponding to the opening 44 a of the aperture member 44. The diameter of the opening 36a of the holder member 36 is set to about 6 mm, which is smaller than the diameter (about 12 mm) of the aperture member 44 and larger than the diameter of the opening 44a. Therefore, the aperture member 44 is sandwiched and fixed between the holder member 36 and the side wall member 43.

  In the electron gun 16 having such a configuration, a grid electrode (focusing electrode) is configured by the grid base 37, the grid fixing ring 48, and the holder member 36 that are electrically connected to the grid terminal 38. A cathode electrode is constituted by the cathode terminal portion 17 (filament 17a) electrically connected to the filament terminal 39 via the heater socket 40.

  As shown in FIG. 9, an electron emission control unit 34 d that is electrically connected to the high voltage generation unit 34 c is enclosed in the power supply main body 34 a of the mold power supply unit 34. The electron emission control unit 34d is connected to the grid terminal 38 and the filament terminal 39 via the grid connection wiring 49a and the filament connection wiring 49b, respectively. Therefore, it is enclosed in the neck portion 34b.

  In other words, not only the high voltage generator 34c but also the grid connection wiring 49a that supplies power to the grid electrode and the filament connection wiring 49b that supplies power to the cathode terminal portion 17 (filament 17a) are increased in voltage. Specifically, when the irradiation window 12 is grounded, a maximum of −160 kV can be generated by the high pressure generator 34c. At this time, in a state of floating at a high voltage (−160 kV), −hundreds of volts is applied to the grid connection wiring 49a, and −2 to 3V is applied to the filament connection wiring 49b.

  As shown in FIG. 9, the power supply main body 34 a is accommodated in a metal case 35, and a gap C is provided between the power supply main body 34 a and the case 35, and high voltage control is performed in the gap C. Part 50 is arranged. A power source terminal 51 for connection to an external power source is fixed to the case 35, and the high voltage control unit 50 is connected to the power source terminal 51, and the high voltage generating unit 34c and the electron in the mold power source unit 34 are connected. The discharge control unit 34d is connected via wirings 49c and 49d, respectively. Further, based on a control signal from the electron beam source controller 74 (see FIGS. 1 and 2), the high voltage controller 50 changes the voltage generated in the high voltage generator 34c from a high voltage (for example, 160 kV) to a low voltage (0 V). Controlled until. Further, the electron emission control unit 34d controls the electron emission timing, tube current, and the like. A cooling fan 52 may be further disposed in the gap C.

  Then, the structure of the irradiation window part 12 of this embodiment is demonstrated in detail. FIG. 14A is a side sectional view showing the configuration of the irradiation window 12 and the vicinity thereof. Moreover, FIG.14 (b) is an expanded sectional view of the principal part of the irradiation window part 12 shown to Fig.14 (a). FIG. 15 is a plan view showing the configuration of the irradiation window 12. The irradiation window portion 12 is a portion for transmitting the electron beam B emitted from the electron gun 16 shown in FIG. 8 and irradiating it outside the vacuum vessel 13 (inside the electron beam irradiation chamber 21). It attaches to the front-end | tip (end part of the electronic channel | path 15e) of this front-end | tip part 15 so that attachment or detachment is possible.

  The irradiation window portion 12 has a substantially disk-like appearance, and includes a frame member 61, a window member 62, and a fixing member 63. The frame member 61 is a substantially disk-shaped member and is made of a metal such as stainless steel, for example. The frame member 61 is disposed on a plane surrounded by the wall portion of the step portion 15 f of the tip portion 15. The frame member 61 is formed with a recess 61a for accommodating the window member 62 and the fixing member 63 and an electron passage hole 61c for allowing the electron beam B to pass therethrough. Among these, the electron passage hole 61 c penetrates the frame member 61 in the emission direction of the electron beam B, and is formed in the central portion of the frame member 61. The width (inner diameter) of the electron passage hole 61 c on the side of the vacuum vessel 13 is increased in a tapered shape toward the inside of the vacuum vessel 13. On the other hand, the width (inner diameter) of the electron passage hole 61c on the side opposite to the vacuum container 13 is substantially constant along the emission direction of the electron beam B. That is, the electron passage hole 61c has a diameter that is tapered from the electron incident side (vacuum container 13 side) toward the electron emitting side so as to be continuous with the portion that maintains a substantially constant diameter from the electron emitting side. It consists of parts to do.

  The concave portion 61a is formed so that the bottom surface includes one end of the electron passage hole 61c, and is formed in a circular shape when viewed from the thickness direction of the irradiation window portion 12 (that is, the emission direction of the electron beam B). Around the recess 61a, a plurality of bolt holes 61d are formed side by side in the circumferential direction of the frame member 61. In the frame member 61, a bolt 64 is inserted into the bolt hole 61d. It is attached to the tip portion 15 by being screwed into the screw hole. The frame member 61 can be detached from the distal end portion 15 by removing the bolt 64. The frame member 61 has a screw hole 61e different from the bolt hole 61d. The screw hole 61e tightens the bolt 64 too much so that the irradiation window portion 12 is fixed to the tip portion 15 and cannot be easily detached from the tip portion 15, so that the irradiation window portion 12 is screwed into the irradiation window portion 12 by screwing an appropriate screw. Used to pull away from the tip 15.

  The window member 62 is a film-like member that transmits the electron beam B emitted from the electron gun 16 and emits the electron beam B to the outside of the vacuum vessel 13, and is a material that transmits the electron beam B (for example, beryllium, titanium, aluminum). Etc.). The window material 62 is formed to a thickness of, for example, several μm to 10 μm, and is extremely thin as compared with a window material used for an X-ray generator, for example. The window member 62 is disposed on the bottom surface of the recess 61 a of the frame member 61 so as to cover one end of the electron passage hole 61 c of the frame member 61. Further, the window material 62 is brazed to the frame material 61 by using the brazing material 65, and is thus airtightly joined to the frame material 61 so as to close the electron passage hole 61c. In addition to the brazing, the window member 62 may be airtightly joined to the frame member 61 by welding, for example. One surface of the window material 62 is located outside the vacuum vessel 13 and is exposed to the atmosphere. Further, the other surface of the window member 62 is located inside the vacuum vessel 13.

  The fixing member 63 is a member for securely fixing the window member 62 to the frame member 61. The fixing member 63 is formed in an annular shape having an opening 63a at the center, and is arranged on the bottom surface of the recess 61a and on the window member 62 so that the opening 63a communicates with the electron passage hole 61c of the frame member 61. By being provided, the window material 62 is sandwiched between the frame material 61. The outer diameter of the fixing member 63 is set smaller than the inner diameter of the recess 61a, and a gap is provided between the side surface 63b of the fixing member 63 and the side wall 61b of the recess 61a. This gap is a gap that is much larger than a gap that is generally provided due to component tolerances, and is, for example, several percent to several tens percent of the inner diameter of the recess 61a.

  Further, as shown in FIG. 14B, a brazing material 65 is filled between the fixing member 63 and the frame member 61, and a part of the brazing material 65 is also in contact with the window material 62. . In this manner, the fixing member 63 is brazed to the window material 62 and the frame material 61, whereby the window material 62 is firmly joined to the frame material 61 and between the frame material 61 and the window material 62. Airtightness increases. Note that the fixing member 63 may have a spot welding mark 63c as shown in FIG. The spot welding marks 63 c are marks that are spot-welded to the frame member 61 for temporarily fixing the fixing member 63 when the fixing member 63 is brazed to the frame member 61. Since spot welding is performed avoiding the window material 62, the spot welding marks 63 c are scattered around the window material 62.

  Further, as shown in FIG. 14B, a metal for improving the adhesion of the brazing material 65 on the surface of the frame material 61 on the side in contact with the brazing material 65 (that is, the bottom surface of the recess 61 a of the frame material 61). A film 66a is formed. Similarly, a metal film 66 b is also formed on the surface of the fixing member 63 on the side in contact with the brazing material 65. The metal films 66a and 66b are made of a metal material (for example, copper) having a good compatibility with the brazing material 65, and are formed by vapor deposition or the like. In this embodiment, since the outer diameter of the fixing member 63 is smaller than the inner diameter of the recess 61a, the metal film 66a is exposed from the gap between the side surface 63b of the fixing member 63 and the side wall 61b of the recess 61a. .

  An O-ring 67 is provided between the irradiation window 12 and the vacuum vessel 13 (tip 15). The O-ring 67 is a member for hermetically sealing the gap between the irradiation window portion 12 and the vacuum vessel 13 (tip portion 15). The O-ring 67 is made of an elastic material such as resin, and is provided between the frame member 61 and the vacuum vessel 13 so as to surround the electron passage hole 61c. A groove 13a for accommodating and positioning the O-ring 67 is formed on the vacuum vessel 13 side, and the O-ring 67 is accommodated in the groove 13a.

  In addition, as an irradiation window part in 1 A of electron beam irradiation apparatuses of this embodiment, the thing of various structures other than the irradiation window part 12 shown in FIG.14 and FIG.15 is applied. FIGS. 16A and 16B and FIGS. 17A and 17B are cross-sectional views each showing a configuration example of the irradiation window portion.

  The difference between the configuration shown in FIG. 16A and the above-described configuration (FIGS. 14 and 15) is the mounting configuration of the irradiation window portion. That is, in the form shown in FIG. 16A, the pressing member 68 is provided at the tip of the vacuum vessel 13. The holding member 68 fixes the irradiation window portion 12 to the vacuum vessel 13 (tip portion 15) by screwing (screwing) with the vacuum vessel 13 (tip portion 15) while holding the outer peripheral portion of the frame member 61. Specifically, the pressing member 68 is formed by integrally forming a cylindrical screwing portion 68a and a plate-like portion 68b provided at one end of the screwing portion 68a. A screw thread 68d is formed on the inner peripheral surface of the threaded portion 68a, and the screw member 68d is screwed with a screw thread 15g formed on the outer peripheral surface of the distal end portion 15. Screwed to the tip 15. At this time, the plate-like portion 68 b presses the frame member 61 of the irradiation window portion 12 against the tip portion 15. The pressing member 68 has a circular opening 68c formed in the plate-like portion 68b for allowing the electron beam B to pass therethrough. The inner diameter of the opening 68 c is formed larger than the inner diameter of the concave portion 61 a of the frame member 61, so that the plate-like portion 68 b does not contact the fixing member 63.

  Further, the difference between the configuration shown in FIG. 16B and the above-described configuration (FIGS. 14 and 15) is the mounting configuration of the irradiation window portion. That is, the irradiation window portion 12a shown in FIG. 16B has a frame member 69 instead of the frame member 61 (see FIG. 14). The frame member 69 is fixed to the vacuum vessel 13 by screwing with the vacuum vessel 13 (tip portion 15). Specifically, the frame member 69 is formed by integrally forming a cylindrical screw portion 69a and a plate-like portion 69b provided at one end of the screw portion 69a. Then, a screw thread 69d is formed on the inner peripheral surface of the threaded portion 69a, and the screw thread 69d is screwed with a screw thread 15g formed on the outer peripheral surface of the distal end portion 15, whereby the irradiation window portion 12a. Is screwed to the vacuum vessel 13 (tip 15).

  As in the case of the frame member 61 shown in FIG. 14, the frame member 69 communicates with the recess 69 c for accommodating the window member 62 and the fixing member 63 and the electron passage 15 e of the tip portion 15. And an electron passage hole 69e through which B passes. The window member 62 is disposed so as to close the electron passage hole 69e, and the frame member 69, the window member 62, and the fixing member 63 are joined to each other via the brazing member 65. In the configuration shown in FIG. 16B, the tip 15 does not need to have a step 15f (see FIG. 14A) for positioning the irradiation window.

  Further, the difference between the configuration shown in FIG. 17A and the above-described configuration (FIGS. 14 and 15) is the shape of the frame material. That is, the irradiation window part 12b shown to Fig.17 (a) has the frame material 70 instead of the frame material 61 (refer FIG. 14). The frame member 70 is a substantially disk-shaped member, and communicates with the concave portion 70a for accommodating the window member 62 and the fixing member 63 and the electron passage 15e of the tip portion 15 and allows the electron beam B to pass therethrough. A passage hole 70c and a bolt hole 70e for passing the bolt 64 are provided. The vicinity of the concave portion 70a of the frame member 70 is formed thicker than the outer peripheral portion including the bolt hole 70e, forming a convex portion 70d. In this modification, the inner diameter of the electron passage hole 70c is constant along the emission direction. However, like the electron passage hole 61c shown in FIG. 14B, the electron passage hole 70c on the vacuum vessel side. The inner diameter may be enlarged in a tapered shape.

  The configuration shown in FIG. 17B includes a configuration in which the irradiation window portion 12b shown in FIG. 17A is fixed by the pressing member 68 shown in FIG. That is, the holding member 68 fixes the irradiation window portion 12b to the vacuum vessel 13 (tip portion 15) by screwing (screwing) with the vacuum vessel 13 (tip portion 15) while holding the outer peripheral portion of the frame member 70. To do. Further, the inner diameter of the circular opening 68c for allowing the electron beam B to pass through is formed larger than the outer diameter of the protrusion 70d of the frame member 70, and the protrusion 70d protrudes from the opening 68c.

  The effects of the electron beam irradiation apparatus 1A having the above configuration will be described. In the electron beam source 3 provided in the electron beam irradiation apparatus 1A, the base end portion 14 and the tip end portion 15 of the vacuum vessel 13 can be opened and closed with a hinge 18 as a fulcrum. Is provided and has a so-called open type configuration in which the filament 17a can be replaced. And in this electron beam irradiation apparatus 1A, the front-end | tip part 15 of the vacuum vessel 13 is being fixed to the cover part 24 of the accommodating part 2. As shown in FIG. Therefore, when replacing the filament 17a, the base end portion 14 is opened without removing the electron beam source 3 from the housing portion 2 as shown in FIG. The filament 17a can be exchanged. Moreover, since the front end 15 of the electron beam source 3 is fixed to the lid 24 and the irradiation window 12 is configured to be detachable from the electron beam irradiation chamber 21 side, the operator opens the lid 24. Thus, the irradiation window portion 12 can be easily accessed, and the irradiation window portion 12 can be replaced without removing the electron beam source 3 from the housing portion 2.

  Thus, according to the electron beam irradiation apparatus 1A of the present embodiment, it is necessary to remove the electron beam source 3 from the accommodating portion 2 constituting the electron beam irradiation chamber 21 when the filament 17a and the irradiation window portion 12 are replaced. Absent. Therefore, readjustment for emitting an electron beam in a desired state after replacement (positioning of the electron beam source 3 and the irradiation object A in the electron beam irradiation chamber 21, alignment of the electron gun 16 and the electron introduction hole 31a, and irradiation) This eliminates the need for readjustment of the mechanical misalignment with the window portion 12, etc., and improves workability and saves space for replacement work.

  Further, in the electron beam irradiation apparatus 1A of the present embodiment, the vacuum container 13 of the electron beam source 3 and the lid of the storage unit 2 are mounted on the front surface where the door 25 for carrying in and out the irradiation object A is attached. Both of the parts 24 can be opened and closed with hinges 18 and 23 provided on the back sides thereof as fulcrums. Thus, by opening and closing the vacuum vessel 13 and the lid portion 24 in the same direction, the space required for opening and closing them can be reduced, and consequently the installation area of the electron beam irradiation apparatus 1A can be reduced. That is, since both the vacuum vessel 13 and the lid portion 24 are opened rearward (backward direction), the lateral width of the housing 7 can be reduced. In addition, since a large space is not required on the front side of the housing 7, the housing portion 2 and the electron beam source 3 can be arranged close to the front side inside the housing 7. Therefore, the workability at the time of carrying in / out the irradiation object A or replacing the filament 17a and the irradiation window portion 12 can be further improved. Furthermore, since the observation window 25b of the housing part 2 and the observation window 71a of the housing 7 can be brought close to each other, the inside of the electron beam irradiation chamber 21 can be easily confirmed.

  In addition, as in the present embodiment, it is preferable that one end of the piping 77 a that connects the atmosphere adjustment controller 77 and the electron beam irradiation chamber 21 on the electron beam irradiation chamber 21 side is attached to the back side of the housing portion 2. Thus, by attaching one end of the pipe 77a on the electron beam irradiation chamber 21 side to the same side (back side) as the hinges 18 and 23, the space in the housing 7 necessary for opening and closing the vacuum vessel 13 and the accommodating portion 2 is obtained. And the space in the housing 7 required for the piping 77a can be made common, the lateral width of the housing 7 can be reduced, and the installation area of the electron beam irradiation apparatus 1A can be reduced.

<Modification>
FIG. 18 is a diagram showing a configuration of an electron beam source 3a as a modification of the embodiment. The electron beam source 3a according to this modification further includes an irradiation window portion 11 different from the irradiation window portion 12 in addition to the configuration of the electron beam source 3 of the above embodiment. The irradiation window portion 11 covers the irradiation window portion 12 and transmits the electron beam B toward the electron beam irradiation chamber 21. The irradiation window portion 11 is disposed facing the electron beam irradiation chamber 21 and protrudes from the inner surface 24c of the lid portion 24 in the electron beam irradiation direction. The irradiation window portion 11 includes a window material 11 a that is arranged in the electron beam irradiation direction with respect to the irradiation window portion 12 and transmits the electron beam B.

  The window member 11a is held by a disk-shaped holding member 11b having a hole for passing an electron beam, and is installed so as to close the hole of the holding member 11b. The edge of the holding member 11b is fixed to one end of the cylindrical member 11c with a screw or the like. Both the holding member 11b and the member 11c are made of a conductive material, and the other end of the member 11c is fixed to the distal end portion 15 of the vacuum vessel 13 via an annular insulating member 11d. In addition, the introduction pipe 11e and the discharge pipe 11f for filling the clearance gap between the irradiation window part 11 and the vacuum vessel 13 with an inert gas are attached to the member 11c.

  When the irradiation object is irradiated with the electron beam B, components of the irradiation object may be scattered. In this modification, it is possible to prevent scattered objects from adhering to the irradiation window portion 12 by covering the irradiation window portion 12 with the irradiation window portion 11. Further, the electron beam B that has passed through the irradiation window portion 11 collides with the gas in the electron beam irradiation chamber 21 and is scattered, and a part of the electron beam B is taken into the holding member 11 b of the irradiation window portion 11. Therefore, even when the scattered object from the irradiation object adheres to the window material 11a and the transmittance decreases, the electron beam irradiation amount (that is, the window) is detected by detecting the amount of current output from the holding member 11b. Therefore, the window material 11a and the holding member 11b can be exchanged according to the decrease in the electron beam transmission amount.

  FIG. 19 is a diagram showing a configuration of an electron beam source 3b as another modification of the embodiment. FIG. 20 is a cross-sectional view taken along line XX-XX of the electron beam source 3b shown in FIG. The difference between the electron beam source 3b according to this modification and the electron beam source 3 of the above embodiment is the configuration of the mold (power source) unit. That is, the mold part 53 of the electron beam source 3b in the present modification is located on the base end side of the electron beam source 3b and forms a rectangular parallelepiped block-like main body part 53a, and the main body part 53a to the electron beam source 3b. It consists of a columnar neck portion 53b projecting into the proximal end portion 14 toward the distal end side. A high pressure-resistant connector 54 attached to the side surface of the case 35 is embedded in the main body 53a.

  The connector 54 is a high voltage type connector (receptacle) for receiving supply of power supply voltage from the outside of the electron beam irradiation apparatus 1 </ b> A, and is disposed so as to penetrate from the outer side surface of the case 35 to the inner side surface. A portion 54 a of the connector 54 located inside the case 35 is embedded and fixed in the main body portion 53 a of the mold portion 53. In addition, an uneven shape is formed on the surface of the portion 54a. Thereby, when the mold part 53 is molded, the mold part 53 bites into the uneven shape and hardens, so that the mold part 53 and the connector 54 are firmly fixed. Further, the connector 54 is fixed to the side wall of the case 35, and the mold part 53 and the case 35 are firmly fixed via the connector 54. The connector 54 is inserted with a power plug that holds the tip of an external wiring extending from a power supply device (not shown).

  Both ends of the filament 17a are connected to internal wirings 55a and 55b extending from the connector 54 to the filament 17a, respectively. Therefore, when the power plug is inserted into the connector 54, both ends of the filament 17a are electrically connected to the power supply device via the external wiring. Further, since the internal wirings 55a and 55b are applied with a high voltage from the power supply device, they are embedded in the mold part 53 made of an insulating material, thereby ensuring insulation from the case 35.

  As in this modification, the electron beam source may include a connector for receiving power supply from the outside of the electron beam irradiation apparatus, instead of the high voltage generator that generates a high voltage. Even if it is such a structure, the electron beam irradiation apparatus can show | play the effect by the said embodiment suitably.

<Second Embodiment>
FIG. 21 is a front view showing a configuration of an electron beam irradiation apparatus 1B as the second embodiment of the present invention. FIG. 21 shows a front view of the upper half of the casing 7 (electron beam source accommodating chamber 72) with the door 71 open, and the lower half of the casing 7 (control unit accommodating chamber 73) is internal. In order to show the configuration, the front panel of the housing 7 is omitted. FIG. 22 is a side view of the electron beam irradiation apparatus 1B shown in FIG. 21, and the accommodating portion 2 and the housing 7 are side cross-sections taken along the line XXII-XXII of FIG.

  The electron beam irradiation apparatus 1B according to the present embodiment and the electron beam irradiation apparatus 1A according to the first embodiment have the same configuration except for the following differences. That is, instead of the hinge 18 (see FIG. 4) of the electron beam source 3 of the electron beam irradiation apparatus 1A, in the electron beam irradiation apparatus 1B of the present embodiment, the hinge 19 of the electron beam source 3 is one side surface of the housing 7. It is attached to the side (in this embodiment, the right side as viewed from the front as shown in FIG. 21). Further, in place of the hinge 23 (see FIG. 4) of the housing part 2 of the electron beam irradiation apparatus 1A, in the electron beam irradiation apparatus 1B of the present embodiment, the hinge 29 of the housing part 2 is the same as the hinge 19 of the electron beam source 3. Is attached to one side surface (right side surface) of the housing 7. The hinge 19 is a first hinge in the present embodiment, and the hinge 29 is a second hinge in the present embodiment.

  FIG. 23 and FIG. 24 are diagrams showing the behavior of the accommodating portion 2 and the electron beam source 3 in the present embodiment. As shown in FIG. 23, the lid 24 opens upward with the hinge 29 as a fulcrum. At this time, the electron beam source 3 fixed to the lid portion 24 also moves together with the lid portion 24 using the hinge 29 as a fulcrum. As described in the first embodiment, the irradiation window portion 12 of the electron beam source 3 is configured to be detachable from the electron beam irradiation chamber 21 side, and the irradiation window portion 12 is formed by opening the lid portion 24 in this way. Thus, the operator can easily replace the irradiation window portion 12.

  Further, the electron beam source 3 of the present embodiment is an open type as in the first embodiment, and the cathode terminal portion 17 including the filament 17a shown in FIG. 8 can be replaced. For this reason, as shown in FIG. 24, the base end part 14 and the front-end | tip part 15 of the vacuum vessel 13 can be opened and closed by using the hinge 19 as a fulcrum. The distal end portion 15 is fixed to the electron beam source mounting portion 24a of the lid portion 24, and the proximal end portion 14 is rotated so that the proximal end portion 14 lies horizontally with the hinge 19 as a fulcrum, thereby opening the proximal end portion 14. It is possible to access the cathode terminal portion 17 accommodated in the base end portion 14.

  Further, in this embodiment, as shown in FIG. 21, one end of a pipe 77a extending from the atmosphere adjustment controller 77 for replacing the inside of the electron beam irradiation chamber 21 with an inert gas such as nitrogen gas is connected to the hinges 19, 29. Are attached to the same side, that is, the right side surface of the main body 22. Further, the vacuum pump 33 is also disposed on the same side as the hinges 19 and 29, that is, on the right side of the vacuum vessel 13.

  In the electron beam irradiation apparatus 1B according to the present embodiment, the filament 17a can be exchanged by opening the base end portion 14 without removing the electron beam source 3 from the accommodating portion 2 as in the first embodiment. Further, the operator can easily access the irradiation window 12 by opening the lid 24, and can replace the irradiation window 12 without removing the electron beam source 3 from the housing 2. Therefore, readjustment for emitting the electron beam in a desired state after the replacement is not necessary, so that workability can be improved and a space for performing the replacement work can be saved.

  Moreover, in the electron beam irradiation apparatus 1B of this embodiment, both the vacuum vessel 13 of the electron beam source 3 and the lid portion 24 of the housing portion 2 are on one side surface (on the front side where the door 25 is attached). In the present embodiment, the hinges 19 and 29 provided on the right side) side can be opened and closed. Thus, by opening and closing the vacuum vessel 13 and the lid part 24 in the same direction, the space required for opening and closing them can be reduced, and consequently the installation area of the electron beam irradiation apparatus 1B can be reduced. That is, since both the vacuum vessel 13 and the lid portion 24 are opened sideways (leftward), the depth of the housing 7 can be reduced. In addition, since a large space is not required on the front side of the housing 7, the housing portion 2 and the electron beam source 3 can be arranged close to the front side inside the housing 7. Therefore, the workability at the time of carrying in / out the irradiation object A or replacing the filament 17a and the irradiation window portion 12 can be further improved. Furthermore, since the observation window 25b of the housing part 2 and the observation window 71a of the housing 7 can be brought close to each other, the inside of the electron beam irradiation chamber 21 can be confirmed more accurately.

  Further, by attaching one end of the pipe 77a on the electron beam irradiation chamber 21 side to the same side (right side surface) as the hinges 19 and 29, the space in the housing 7 necessary for opening and closing the vacuum vessel 13 and the accommodating portion 2 can be reduced. Since the space in the housing 7 necessary for the piping 77a can be made common, the depth of the housing 7 can be reduced and the installation area of the electron beam irradiation apparatus 1B can be reduced. Further, by placing the vacuum pump 33 which is a heavy object on the same right side as the hinge 29 of the housing part 2 and the hinge 19 of the electron beam source 3, the hinge 19 is opened when the vacuum container 13 and the housing part 2 are opened. The center of gravity of the upper structure is lowered, and a stable open state can be realized.

  The electron beam irradiation apparatus according to the present invention is not limited to the above-described embodiment, and various other modifications are possible. For example, in the second embodiment, the position at which the first and second hinges are attached is the right side of the vacuum vessel and the storage unit, but these may be attached to the left side. Even in this case, the same effect as the electron beam irradiation apparatus according to the second embodiment can be obtained. Moreover, the structure of the irradiation window part and electron generation member shown in 1st Embodiment is an example of the structure which can be attached or detached, and various structures other than the said embodiment are applicable to an irradiation window part and an electron generation member.

It is a front view which shows the structure of the electron beam irradiation apparatus which concerns on 1st Embodiment of this invention. The front half of the case (electron beam source accommodation chamber) shows a front view with the door open, and the lower half of the case (control unit accommodation room) shows the front configuration to show the internal configuration. The panel is omitted. It is a side view of the electron beam irradiation apparatus shown in FIG. 1, and about the accommodating part and the housing | casing, the side surface cross section along the II-II line of FIG. 1 is shown. It is a front view which shows the structure of a accommodating part and an electron beam source, and has shown notching a part of accommodating part. It is a side view of a storage part and an electron beam source, About the storage part, the side surface cross section along the IV-IV line of FIG. 3 is shown. It is a top view of an accommodating part and an electron beam source. It is a figure which shows the mode of operation | movement of the accommodating part and electron beam source in 1st Embodiment. It is a figure which shows the mode of operation | movement of the accommodating part and electron beam source in 1st Embodiment. It is side surface sectional drawing which shows the internal structure of an electron beam source. It is side surface sectional drawing which shows the structure of a mold power supply part. It is side surface sectional drawing which shows the structure of an electron gun in detail. It is side surface sectional drawing which shows the structure of a cathode terminal part and its periphery. It is a top view of the cathode terminal part shown in FIG. It is a fragmentary sectional view in alignment with the XIII-XIII line of FIG. (A) It is side surface sectional drawing which shows the structure of an irradiation window part and its vicinity. (B) It is an expanded sectional view of the principal part of the irradiation window part shown to (a). It is a top view which shows the structure of an irradiation window part. (A), (b) It is sectional drawing which shows the structural example of an irradiation window part. (A), (b) It is sectional drawing which shows the structural example of an irradiation window part. It is a figure which shows the structure of an electron beam source as one modification of 1st Embodiment. It is a figure which shows the structure of an electron beam source as another modification of 1st Embodiment. It is sectional drawing along the XX-XX line of FIG. It is a front view which shows the structure of the electron beam irradiation apparatus which concerns on 2nd Embodiment of this invention. The front half of the case (electron beam source accommodation chamber) shows a front view with the door open, and the lower half of the case (control unit accommodation room) shows the front configuration to show the internal configuration. The panel is omitted. It is a side view of the electron beam irradiation apparatus shown in FIG. 21, and about the accommodating part and the housing | casing, the side surface cross section along the XXII-XXII line | wire of FIG. 21 is shown. It is a figure which shows the mode of operation | movement of the accommodating part and electron beam source in 2nd Embodiment. It is a figure which shows the mode of operation | movement of the accommodating part and electron beam source in 2nd Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1A, 1B ... Electron beam irradiation apparatus, 2 ... Accommodating part, 3 ... Electron beam source, 7 ... Case, 11, 12, 12a, 12b ... Irradiation window part, 13 ... Vacuum container, 14 ... Base end part, 15 ... Tip portion, 16 ... electron gun, 17 ... cathode terminal portion, 17a ... filament, 18, 19 ... (first) hinge, 23, 29 ... (second) hinge, 21 ... electron beam irradiation chamber, 22 ... main body Part, 24 ... lid part, 25 ... (first) door, 25a, 71a ... observation window, 26 ... stage, 27 ... adjustment table, 28 ... table, 33 ... vacuum pump, 34 ... mold power supply part, 35 ... case , 71 ... (second) door, 72 ... electron beam source accommodation chamber, 73 ... control unit accommodation chamber, 74 ... electron beam source controller, 75 ... exhaust pump, 76 ... stage controller, 77 ... atmosphere control controller, 79 ... Partition member, A ... irradiation object, B ... electron beam.

Claims (9)

A main body having an opening, and a lid that is attached to the opening so as to be openable and closable, and a housing that houses an irradiation object in an electron beam irradiation chamber constituted by the main body and the lid;
A proximal end portion, and a distal end portion disposed between the proximal end portion and the lid portion and fixed to the lid portion, and a joint portion between the distal end portion and the proximal end portion can be opened and closed; A cylindrical vacuum container, an electron gun held at the base end and emitting an electron beam, and held at the tip to transmit the electron beam toward the electron beam irradiation chamber, and the electron beam irradiation An irradiation window configured to be detachable from the chamber side, and an electron beam source having a vacuum pump for exhausting the inside of the vacuum vessel,
A first door for carrying in and carrying out the irradiation object is attached to the front side of the main body,
The vacuum vessel can be opened and closed with a first hinge provided on the back side of the vacuum vessel as a fulcrum,
The lid portion can be opened and closed with a second hinge provided on the back side of the housing portion as a fulcrum,
An electron beam irradiation apparatus characterized by that. An atmosphere replacement device for replacing the atmosphere in the electron beam irradiation chamber;
One end on the electron beam irradiation chamber side of a pipe connecting the atmosphere replacement device and the electron beam irradiation chamber is attached to the back side of the housing portion.
The electron beam irradiation apparatus according to claim 1.   The electron beam irradiation apparatus according to claim 1, wherein the vacuum pump is disposed on a back side of the vacuum container. A main body having an opening, and a lid that is attached to the opening so as to be openable and closable, and a housing that houses an irradiation object in an electron beam irradiation chamber constituted by the main body and the lid;
A proximal end portion, and a distal end portion disposed between the proximal end portion and the lid portion and fixed to the lid portion, and a joint portion between the distal end portion and the proximal end portion can be opened and closed; A cylindrical vacuum container, an electron gun held at the base end and emitting an electron beam, and held at the tip to transmit the electron beam toward the electron beam irradiation chamber, and the electron beam irradiation An irradiation window configured to be detachable from the chamber side, and an electron beam source having a vacuum pump for exhausting the inside of the vacuum vessel,
A first door for carrying in and carrying out the irradiation object is attached to the front side of the main body,
The vacuum vessel can be opened and closed with a first hinge provided on one side of the vacuum vessel as a fulcrum,
The lid portion can be opened and closed with a second hinge provided on the same side as the one side surface of the housing portion as a fulcrum,
An electron beam irradiation apparatus characterized by that. An atmosphere replacement device for replacing the atmosphere in the electron beam irradiation chamber;
One end on the electron beam irradiation chamber side of a pipe connecting the atmosphere replacement device and the electron beam irradiation chamber is attached to the one side surface side of the housing portion,
The electron beam irradiation apparatus according to claim 4.   The electron beam irradiation apparatus according to claim 4, wherein the vacuum pump is disposed on the same side as the one side surface of the vacuum container.   The electron beam irradiation apparatus according to claim 1, further comprising a housing that accommodates the housing portion and the electron beam source. A second door is attached to the front side of the housing;
Observation windows are provided at positions facing each other in the first and second doors,
The electron beam irradiation apparatus according to claim 7. An electron beam control unit that is electrically connected to the electron beam source and performs emission control of the electron beam;
The housing includes an electron beam source accommodating chamber that accommodates the accommodating portion and the electron beam source, a control portion accommodating chamber that accommodates the electron beam control unit, and the electron beam source accommodating chamber and the control portion accommodating chamber. Having metal partition members that partition each other;
The electron beam irradiation apparatus according to claim 7 or 8, wherein

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