JPH07192218A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To improve flatness of a magnetic gap forming face, to stably form the magnetic gap forming face, to produce a magnetic head having good characteristics, and to simplify the production process. CONSTITUTION:A first thin film magnetic core half body 2 is formed on a substrate comprising a nonmagnetic material in such a manner that the film thickness T2 of the part 2b for the magnetic gap forming face is almost equal to the specified track width. The part 2b for the magnetic gap forming face is cut in the film thickness direction to obtain a magnetic gap forming face 2a having a specified azimuth angle theta of the cut face. A gap spacer comprising a nonmagnetic material having almost the same thickness as the specified gap length is formed on the magnetic gap forming face 2a. Then, a second thin film magnetic core half body 2 is formed on the substrate half body in such a manner that the second core half faces the first core half body 2 to interpose the gap spacer.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head using a magnetic metal thin film as a magnetic core half body.

[0002]

2. Description of the Related Art In the field of magnetic recording, a track gap between magnetic gaps in a magnetic head has been promoted along with high density recording of recording tracks. Then, as a magnetic head corresponding to the above-mentioned narrow track, a thin film magnetic head in which the film thickness of the magnetic metal thin film is used as the track width is proposed.

In the above-mentioned thin-film magnetic head, a pair of thin-film magnetic core halves made of magnetic metal are formed on a substrate made of a non-magnetic material so that at least the magnetic gap forming portion has a film thickness equal to the track width. The pair of thin film magnetic core halves have a thickness equal to the gap length in each magnetic gap forming portion and are abutted via a gap spacer made of a non-magnetic material to form a closed magnetic path. A magnetic gap is formed between the butt surfaces,
An example is a structure in which a coil is wound around a closed magnetic circuit formed by the pair of thin film magnetic core halves.

The thin film magnetic head as described above is manufactured by the following manufacturing method, for example. First, a coil forming groove (not shown) is formed at a predetermined position of the substrate 101 as shown in FIG. 7, and the lower thin film conductor forming the coil is embedded in the groove. Next, as shown in FIG. 7, the main surface 1 of the substrate 101 on which the lower thin film conductor is formed
The first thin film magnetic core half body 102 is formed on 01a so as to straddle the lower thin film conductor by a method such as sputtering or etching. At this time, the width in the film thickness direction of the magnetic gap forming surface 102a of the first thin film magnetic core half body 102 is set equal to a predetermined track width. In FIG. 7, the first thin film magnetic core half body 102 is schematically shown and the thickness thereof is shown to be extremely thick, but the actual film thickness is about 10 μm.

Then, as shown in FIG. 8, a gap spacer 103 having a thickness equal to a predetermined gap length is formed on the magnetic gap forming surface 102a of the first thin film magnetic core half body 102 by a method such as sputtering. To do.
Subsequently, as shown in FIG. 9, one main surface 101 of the substrate 101
The second thin film magnetic core half body 104 such that the magnetic gap forming surface 102a of the first thin film magnetic core half body 102 and the magnetic gap forming surface 104a face each other via the gap spacer 103 on a is subjected to sputtering or etching. The first and second thin film magnetic core halves 102 and 104 form a closed magnetic circuit, and a magnetic gap is formed between the magnetic gap forming surfaces 102a and 104a. At this time, the second thin film magnetic core half 104
The width of the magnetic gap forming surface 104a in the film thickness direction is equal to a predetermined track width. Note that, also in FIG. 9, the second thin film magnetic core half body 104 is schematically shown and the thickness thereof is shown extremely thick, but the actual film thickness is about 10 μm.

Then, a side thin film conductor is formed on the lower thin film conductor in the film thickness direction of the thin film magnetic core halves 102 and 104 so as to be connected thereto, and an upper thin film conductor is further formed on the side thin film conductor. Form. As a result, the coil composed of the lower, side and upper thin film conductors is wound around the closed magnetic circuit composed of the first and second thin film magnetic core halves 102 and 104, thus completing the thin film magnetic head. .

Further, as a method of manufacturing the above-mentioned thin film magnetic head, the following manufacturing method can also be mentioned. That is, one main surface 111 of the substrate 111 as shown in FIG. 10 in which the lower thin film conductor is formed in the same manner as the manufacturing method described above.
A first thin film magnetic core half 112 is formed on a by a method such as sputtering. At this time, the first thin-film magnetic core half 112 is formed so as to straddle the lower thin-film conductor, and the film thickness of the portion where the magnetic gap forming surface is to be formed is made equal to a predetermined track width. . In addition,
In FIG. 10, the first thin film magnetic core half 112 is schematically shown and its thickness is shown to be extremely thick, but the actual film thickness is about 10 μm.

Then, as shown in FIG. 11, a V-shaped cross section having a predetermined angle is formed at a portion forming a magnetic gap forming surface of one main surface 112b which is an upper surface of the first thin film magnetic core half 112. The groove portion 113 whose tip reaches the main surface 111a of the substrate 111 is formed by cutting with a diamond cutting tool. At this time, the groove 11
3 is formed so that the angle θ formed between the magnetic gap forming surface 112a, which is one slope formed by the groove 113, and the film thickness direction of the first thin film magnetic core half 112 is a predetermined azimuth angle. . Subsequently, the first thin film magnetic core half 112 in the portion indicated by the broken line in FIG. 11 is removed.

Next, as shown in FIG. 12, a gap spacer 114 having a thickness equivalent to a predetermined gap length is formed on the magnetic gap forming surface 112a of the first thin film magnetic core half 112 by a method such as sputtering. Form.
Further, as shown in FIG. 12, one main surface 1 of the substrate 111 is
A second gap 11a in which the magnetic gap forming surface 112a of the first thin film magnetic core half 112 and the magnetic gap forming surface 115a face each other via the gap spacer 114.
Of the thin film magnetic core halves 115 are formed by a method such as sputtering, and the first and second thin film magnetic core halves 112, 11 are formed.
5 forms a closed magnetic circuit, and a magnetic gap is formed between the magnetic gap forming surfaces 112a and 115a. At this time, the width in the film thickness direction of the magnetic gap forming surface 115a of the second thin film magnetic core half body 115 is set to a predetermined track width or more. Note that, also in FIG. 12, the second thin film magnetic core half 115 is schematically shown and the thickness thereof is shown to be extremely thick, but the actual film thickness is about 10 μm.

Then, as shown in FIG. 13, one main surface 115b, which is the upper surface of the second thin film magnetic core half body 115, is lapped, and the one main surface 115b of the first thin film magnetic core half body 112 is lapped. The main surface 112b is flush with the magnetic gap forming surface 115a of the second thin film magnetic core half 115, and the width in the film thickness direction is equal to a predetermined track width.

Finally, similar to the manufacturing method described above, the side part,
A coil that forms the upper thin film conductor and is composed of the lower, side, and upper thin film conductors is the first and second thin film magnetic core halves 11.
The thin film magnetic head is completed by being wound in a closed magnetic circuit constituted by 2, 115.

[0012]

However, when the thin film magnetic head is manufactured by the manufacturing method as described above, the following inconvenience occurs. For example, when the thin film magnetic head is manufactured by the former manufacturing method, the flatness of the magnetic gap forming surface 102a can be increased because the first thin film magnetic core half body 102 is formed by a method such as sputtering or etching. Have difficulty. For this reason, there arises inconveniences such as a decrease in head efficiency of the manufactured magnetic head, a decrease in azimuth angle accuracy when an azimuth angle is set, and a limit in lengthening the sandwiching gap.

On the other hand, when the thin film magnetic head is manufactured by the latter manufacturing method, the magnetic gap forming surface 112a of the first thin film magnetic core half 112 is formed by cutting with a diamond cutting tool to form the groove 113. However, since the machining area by the diamond bite at this time is considerably large, the wear of the machining tools such as the diamond bite is remarkable, and when machining is continuously performed with such a machining tool, the magnetic gap forming surface is It is difficult to form the magnetic head stably, and it is difficult to stabilize the characteristics of the manufactured magnetic head.

Further, when a thin film magnetic head is manufactured by the latter manufacturing method, after the magnetic gap forming surface 112a of the first thin film magnetic core half 112 is formed, an obstacle as a similar gap of the manufactured thin film magnetic head. In order to remove the above, it is necessary to remove an unnecessary portion (the portion indicated by the broken line in FIG. 11) of the first thin film magnetic core half body 112 by etching or the like, which causes a disadvantage that it is difficult to simplify the process.

Therefore, the present invention has been proposed in view of the conventional circumstances, and it is possible to enhance the flatness of the magnetic gap forming surface, stably form the magnetic gap forming surface, and to provide a magnetic material having excellent characteristics. It is an object of the present invention to provide a method of manufacturing a magnetic head that can manufacture a head and can simplify the process.

[0016]

In order to achieve the above-mentioned object, a method of manufacturing a magnetic head according to the present invention is such that at least a film thickness of a magnetic gap forming portion is equal to a track width on a substrate made of a non-magnetic material. A step of forming a certain first thin film magnetic core half, and a magnetic gap forming part of the first thin film magnetic core half is cut in the film thickness direction, and the cut surface has a magnetic gap forming surface having a predetermined azimuth angle. And a step of forming a gap spacer made of a non-magnetic material having a thickness equal to a predetermined gap length on the magnetic gap forming surface, and sandwiching the gap spacer to form a first thin film magnetic core half body. The method has a step of forming second thin film magnetic core halves on a substrate so as to face each other.

[0017]

In the method of manufacturing a magnetic head according to the present invention, since the magnetic gap forming surface of the first thin film magnetic core half is formed by cutting, the flatness of the magnetic gap forming surface is increased. Further, in the present invention, since the cutting work for forming the magnetic gap forming surface as described above is performed only on the magnetic gap forming surface, it is possible to delay the progress of wear of the working tool during the cutting work. The magnetic gap forming surface can be stably formed even if processing is continuously performed using this. Furthermore, in the present invention, it is not necessary to remove an unnecessary portion of the first thin film magnetic core half after forming the first thin film magnetic core half and forming the magnetic gap forming surface by cutting. The process is simplified.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described in detail below with reference to the drawings.

First, FIG. 1 shows a magnetic head manufactured by the method of manufacturing a magnetic head to which the present invention is applied. In the above magnetic head, the film thickness T of the portion where the magnetic gap forming surface 2a is formed on the one main surface 1a of the substrate 1 made of a non-magnetic material.
₂ is the first thin film magnetic core half 2 made of a magnetic metal having the same track width Tw as the magnetic gap g, and similarly the film thickness T ₃ of the magnetic gap forming surface 3a forming portion is the track width of the magnetic gap g. A second thin film magnetic core half 3 made of a magnetic metal equivalent to Tw is formed. The pair of thin film magnetic core halves 2 and 3 are projected between the magnetic gap forming surfaces 2a and 3a via a gap spacer (not shown) made of a non-magnetic material and having a thickness equivalent to the gap length of the magnetic gap g. Together, they form a magnetic gap g and a closed magnetic circuit. The magnetic gap g has a predetermined azimuth angle.

Further, the pair of thin film magnetic core halves 2, 3
Winding windows 4 and 5 for winding a coil are formed in each of the winding windows 4 and 5, and the winding windows 4 and 5 are wound with the coils 6 and 7 partially embedded in the substrate 1. The coils 6 and 7 are wound around the closed magnetic path formed by the pair of thin film magnetic core halves 2 and 3. The coils 6 and 7 are composed of lower thin film conductors 6a and 7a,
It is composed of side thin film conductors 6b and 7b and upper thin film conductors 6c and 7c.

Next, a method of manufacturing the magnetic head of this embodiment will be described. First, not-shown grooves for forming coils 6 and 7 are formed at predetermined positions of the substrate 1 as shown in FIG.
Lower thin film conductors 6a, 7a forming coils 6, 7 on this
Are formed so as to be embedded.

Next, as shown in FIG. 2, a first thin film magnetic core half 2 is formed on the main surface 1a of the substrate 1 on which the lower thin film conductors 6a and 7a are formed by a method such as sputtering or etching. To do. At this time, the first thin film magnetic core half 2 has a film thickness T of the magnetic gap forming surface forming portion 2b.
₂ becomes equal to the track width Tw of the magnetic gap g formed in the subsequent step, and the winding window 4 is formed in the lower thin film conductor 6 described above.
It is formed so as to straddle a and 7a. In FIG. 2, the first thin film magnetic core half body 2 is schematically shown and its thickness is shown to be extremely thick, but the actual film thickness is about 10 μm.

Next, as shown in FIG. 3, the magnetic gap forming portion 2b of the first thin film magnetic core half 2 is machined by diamond bite machining, mechanical machining such as grinding, or energy beam machining, and the like. The portion indicated by the middle broken line is removed to form the magnetic gap forming surface 2a having a predetermined azimuth angle θ.

In the method of manufacturing the magnetic head of the present embodiment, the magnetic gap forming surface is cut by mechanical processing such as diamond cutting or grinding or energy beam processing as described above. It is possible to improve the flatness. Further, since the range of cutting work is narrow, it is possible to delay the progress of wear of the working tool, etc., and even if the working tool is continuously used for working, a magnetic gap having a predetermined azimuth angle is formed. The surface can be stably formed. Further, in the method of manufacturing the magnetic head of the present embodiment, after the magnetic gap forming surface 2a of the first thin film magnetic core half body 2 is formed by cutting, the first thin film magnetic core half body is formed by a conventional method. Two
It is not necessary to remove the unnecessary portion of the above by a method such as etching, and the process is simplified.

Then, as shown in FIG. 4, a gap spacer 8 having a thickness equivalent to a predetermined gap length is formed on the magnetic gap forming surface 2a of the first thin film magnetic core half body 2 by a method such as sputtering. .

Subsequently, as shown in FIG. 5, the magnetic gap forming surface 2 a of the first thin film magnetic core half 2 and the magnetic gap forming surface 3 a are provided on the one main surface 1 a of the substrate 1 via the gap spacer 8. The second thin-film magnetic core half body 3 facing each other is formed by a method such as sputtering.
A closed magnetic path is formed by the thin film magnetic core halves 2 and 3 and a magnetic gap is formed between the magnetic gap forming surfaces 2a and 3a. At this time, the film thickness of the portion where the magnetic gap forming surface 3a of the second thin film magnetic core half 2 is formed is not less than the track width Tw of the magnetic gap g. In FIG. 5, the second thin film magnetic core half 3 is also schematically shown and its thickness is shown to be extremely thick, but the actual film thickness is about 10 μm.

Then, as shown in FIG. 6, the one main surface 3b which is the upper surface of the second thin film magnetic core half 3 is lapped, and the one main surface 3b of the first thin film magnetic core half 2 is lapped. The main surface 2c serving as the upper surface is flush with the main surface 2c so that the film thickness T _{3 of the} portion of the second thin film magnetic core half 3 where the magnetic gap forming surface 3a is formed is equal to the track width Tw of the magnetic gap g.

Then, side thin film conductors 6b and 7b are formed on the lower thin film conductors 6a and 7a in the film thickness direction of the first and second thin film magnetic core halves 2 and 3 so as to be connected thereto.
Further, on the side thin film conductors 6b, 7b, the upper thin film conductor 6c,
7c to form the lower, side and upper thin film conductors 6a, 6b,
A coil 6 composed of 6c and 7a, 7b, 7c,
The thin film magnetic head is completed by placing 7 in a state in which it is wound in a closed magnetic circuit formed by the first and second thin film magnetic core halves 2 and 3.

In the magnetic head manufactured by the method of manufacturing the magnetic head of this embodiment, the flatness of the magnetic gap forming surface is improved, so that the deterioration of the head efficiency of the magnetic head is reduced and the azimuth angle accuracy is improved. It is possible to further reduce the limit gap length for narrowing the gap length, and the characteristics are greatly improved.

Further, in the method of manufacturing the magnetic head of the present embodiment, it is possible to delay the progress of wear of the working tool and the like, and even if the working tool is continuously used to perform working, a predetermined azimuth angle is obtained. Since the magnetic gap forming surface of the magnetic head can be stably formed, it is possible to improve the compatibility between the manufactured magnetic heads. Further, in the method of manufacturing the magnetic head of the present embodiment, since the product life of the working tool is extended, the manufacturing cost can be reduced and the productivity can be improved.

Further, in the method of manufacturing the magnetic head of this embodiment, it is not necessary to remove the unnecessary portion of the first thin film magnetic core half by etching or the like as in the prior art, so the process is simplified. Therefore, the manufacturing cost can be reduced and the productivity can be improved.

[0032]

As is apparent from the above description, in the method of manufacturing a magnetic head according to the present invention, the magnetic gap forming surface of the first thin film magnetic core half is formed by cutting, so that the magnetic gap is formed. It is possible to increase the flatness of the surface, reduce the reduction in head efficiency of the manufactured magnetic head, improve the azimuth angle accuracy, and further reduce the limit gap length for narrowing the gap length. The characteristics are greatly improved.

Further, in the present invention, since the cutting work for forming the magnetic gap forming surface as described above is performed only on the magnetic gap forming surface, the progress of wear of the working tool during the cutting work is delayed. The magnetic gap forming surface can be stably formed even if the continuous processing is performed by using this. Therefore, it is possible to improve the compatibility between the manufactured magnetic heads. Furthermore, in the present invention, since the product life of the processing tool is extended,
The manufacturing cost can be reduced and the productivity can be improved.

Further, in the present invention, it is necessary to form the first thin film magnetic core half and to form the magnetic gap forming surface by cutting, and then remove the unnecessary portion of the first thin film magnetic core half. Since there is no such thing and the process is simplified,
Therefore, the manufacturing cost can be reduced and the productivity can be improved.

[Brief description of drawings]

FIG. 1 is a schematic perspective view of an essential part of a magnetic head manufactured by a method of manufacturing a magnetic head to which the present invention is applied.

FIG. 2 shows a method of manufacturing a magnetic head to which the present invention is applied in the order of steps, and is a schematic cross-sectional view of a main part schematically showing a step of forming a first thin film magnetic core half on a substrate.

FIG. 3 is a schematic cross-sectional view of an essential part schematically showing a step of forming a magnetic gap forming surface of the first thin film magnetic core half body.

FIG. 4 is a schematic cross-sectional view of essential parts schematically showing a step of forming a gap spacer on the magnetic gap formation surface of the first thin film magnetic core half.

FIG. 5 is a schematic cross-sectional view of an essential part schematically showing a step of forming a second thin film magnetic core half body.

FIG. 6 is a schematic cross-sectional view of a main part schematically showing a step of lapping one main surface which is an upper surface of a second thin film magnetic core half body.

FIG. 7 shows an example of a method of manufacturing a conventional thin film magnetic head in order of steps, and is a schematic cross-sectional view of a main part schematically showing a step of forming a first thin film magnetic core half on a substrate.

FIG. 8 is a schematic cross-sectional view of an essential part schematically showing a step of forming a gap spacer on the magnetic gap formation surface of the first thin film magnetic core half body.

FIG. 9 is a schematic cross-sectional view of an essential part schematically showing a step of forming a second thin film magnetic core half body.

FIG. 10 shows another example of a conventional method for manufacturing a thin film magnetic head in the order of steps, and is a schematic cross-sectional view of a main part schematically showing a step of forming a first thin film magnetic core half on a substrate. is there.

FIG. 11 is a schematic cross-sectional view of a main part schematically showing a step of forming a groove in the first thin film magnetic core half and forming a magnetic gap forming surface.

FIG. 12 is a schematic cross-sectional view of a main part schematically showing a step of forming a gap spacer on the magnetic gap formation surface of the first thin film magnetic core half and forming the second thin film magnetic core half.

FIG. 13 is a schematic cross-sectional view of a main part schematically showing a step of lapping one main surface which is an upper surface of a second thin film magnetic core half body.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Substrate 1a ... Main surface 2 ... 1st thin film magnetic core half body 2a, 3a ... Magnetic gap formation surface 2b ... Magnetic gap formation part 2c, 3b ... Main Surface 3 ... Second thin film magnetic core half body 8 ... Gap spacer g ... Magnetic gap T ₂ , T ₃ ... Film thickness Tw ... Track width

Claims (1)

[Claims] 1. A step of forming a first thin film magnetic core half on which a film thickness of at least a magnetic gap forming portion is equal to a track width on a substrate made of a non-magnetic material, and the first thin film magnetic core. The step of cutting the magnetic gap forming portion of the half body in the film thickness direction to make the cut surface a magnetic gap forming surface having a predetermined azimuth angle, and the magnetic gap forming surface having a thickness equivalent to a predetermined gap length The method has a step of forming a gap spacer made of a non-magnetic material, and a step of sandwiching the gap spacer and forming a second thin film magnetic core half on the substrate so as to face the first thin film magnetic core half. A method of manufacturing a magnetic head, comprising: