JPH0719150Y2 - ウェハ搬送ハンド - Google Patents

ウェハ搬送ハンド

Info

Publication number
JPH0719150Y2
JPH0719150Y2 JP1986167515U JP16751586U JPH0719150Y2 JP H0719150 Y2 JPH0719150 Y2 JP H0719150Y2 JP 1986167515 U JP1986167515 U JP 1986167515U JP 16751586 U JP16751586 U JP 16751586U JP H0719150 Y2 JPH0719150 Y2 JP H0719150Y2
Authority
JP
Japan
Prior art keywords
wafer
groove
receiving
seat
sides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986167515U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6373938U (enExample
Inventor
健生 鈴木
純平 湯山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP1986167515U priority Critical patent/JPH0719150Y2/ja
Priority to US07/112,964 priority patent/US4848814A/en
Publication of JPS6373938U publication Critical patent/JPS6373938U/ja
Application granted granted Critical
Publication of JPH0719150Y2 publication Critical patent/JPH0719150Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B9/00—Hand-held gripping tools other than those covered by group B25B7/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble
    • Y10T29/5313—Means to assemble electrical device
    • Y10T29/53261—Means to align and advance work part

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1986167515U 1986-10-31 1986-10-31 ウェハ搬送ハンド Expired - Lifetime JPH0719150Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1986167515U JPH0719150Y2 (ja) 1986-10-31 1986-10-31 ウェハ搬送ハンド
US07/112,964 US4848814A (en) 1986-10-31 1987-10-27 Wafer transfer hand

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986167515U JPH0719150Y2 (ja) 1986-10-31 1986-10-31 ウェハ搬送ハンド

Publications (2)

Publication Number Publication Date
JPS6373938U JPS6373938U (enExample) 1988-05-17
JPH0719150Y2 true JPH0719150Y2 (ja) 1995-05-01

Family

ID=15851115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986167515U Expired - Lifetime JPH0719150Y2 (ja) 1986-10-31 1986-10-31 ウェハ搬送ハンド

Country Status (2)

Country Link
US (1) US4848814A (enExample)
JP (1) JPH0719150Y2 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4955649A (en) * 1988-02-29 1990-09-11 Tel Sagami Limited Apparatus for holding plates
JPH02265955A (ja) * 1989-04-06 1990-10-30 Sumitomo Chem Co Ltd 樹脂組成物
US5749469A (en) * 1992-05-15 1998-05-12 Fluoroware, Inc. Wafer carrier
US5643366A (en) * 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
CH697146A5 (de) * 1996-10-09 2008-05-15 Tec Sem Ag Greifvorrichtung zur Handhabung von Wafern.
DE19802202C2 (de) * 1998-01-22 2000-11-09 Fraunhofer Ges Forschung Vorrichtung zum Greifen von Scheiben und Verwendung der Vorrichtung
US6474712B1 (en) * 1999-05-15 2002-11-05 Applied Materials, Inc. Gripper for supporting substrate in a vertical orientation
US6467827B1 (en) * 1999-10-30 2002-10-22 Frank J. Ardezzone IC wafer handling apparatus incorporating edge-gripping and pressure or vacuum driven end-effectors
US7374644B2 (en) 2000-02-17 2008-05-20 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US6537011B1 (en) * 2000-03-10 2003-03-25 Applied Materials, Inc. Method and apparatus for transferring and supporting a substrate
US7175214B2 (en) * 2000-03-16 2007-02-13 Ade Corporation Wafer gripping fingers to minimize distortion
US6528767B2 (en) * 2001-05-22 2003-03-04 Applied Materials, Inc. Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications
US6634686B2 (en) * 2001-10-03 2003-10-21 Applied Materials, Inc. End effector assembly
TW522448B (en) * 2001-10-22 2003-03-01 Advanced Semiconductor Eng Semiconductor wafer carrying apparatus
US7641247B2 (en) * 2002-12-17 2010-01-05 Applied Materials, Inc. End effector assembly for supporting a substrate
US6917755B2 (en) * 2003-02-27 2005-07-12 Applied Materials, Inc. Substrate support
US20040226513A1 (en) * 2003-05-12 2004-11-18 Applied Materials, Inc. Chamber for uniform heating of large area substrates
US8033245B2 (en) * 2004-02-12 2011-10-11 Applied Materials, Inc. Substrate support bushing
US8376428B2 (en) 2006-11-15 2013-02-19 Dynamic Micro System Semiconductor Equipment GmbH Integrated gripper for workpiece transfer
WO2016187074A1 (en) * 2015-05-19 2016-11-24 Verselus, Llc Apparatus for transporting an object from one location to another location in a manufacturing environment

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3044097A (en) * 1961-02-06 1962-07-17 Mervyn D Proschold Means for cleaning and packaging phonograph disc records
US3219375A (en) * 1962-10-24 1965-11-23 Seab A Van Pelt Record handling device
US3918756A (en) * 1973-12-26 1975-11-11 Fluoroware Inc Wafer holder
US3961819A (en) * 1975-10-24 1976-06-08 Yocum Richard A Record tool
JPS5881947U (ja) * 1981-11-27 1983-06-03 安藤電気株式会社 幅の異なるケ−スの収容機構
US4452480A (en) * 1981-12-21 1984-06-05 International Jensen Incorporated Record handling device
JPS5995624U (ja) * 1982-12-16 1984-06-28 松下電工株式会社 石英ボ−ト
US4496180A (en) * 1983-07-20 1985-01-29 Cincinnati Milacron Industries, Inc. Vacuum handling apparatus
US4653636A (en) * 1985-05-14 1987-03-31 Microglass, Inc. Wafer carrier and method

Also Published As

Publication number Publication date
JPS6373938U (enExample) 1988-05-17
US4848814A (en) 1989-07-18

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