JPH0718444U - Continuous heat curing furnace equipment - Google Patents

Abstract

(57) [Abstract] [Purpose] Heating by a high temperature gas flow in a continuous heat curing furnace device that continuously heat cures a large number of work pieces such as die bonding members by spraying high temperature gas with a plurality of heating blocks arranged in tandem. Stabilize the action. [Structure] An exhaust gas passage is provided which communicates individually with an exhaust port formed between the end portions of adjacent heating block bodies in a heating block row of a continuous thermosetting furnace device, and the flow rate of each exhaust gas passage is adjusted. Valves are provided, and the flow rate of the exhaust gas in each exhaust gas flow path is adjusted by these control valves to control the blowing of the high-temperature gas onto the work to be heat-treated on each heating block body.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a continuous thermosetting furnace apparatus, and more particularly, to a thermosetting furnace apparatus for continuously thermosetting an adhesive or the like used for a die bonding member in a manufacturing process of semiconductor IC devices and the like.

[0002]

[Technical background]

 Generally, in the manufacture of electronic devices, a semiconductor chip such as silicon on which an integrated circuit or the like is formed is temporarily attached to a lead frame using an adhesive such as silver paste, and such temporary attachment treatment, so-called die bonding treatment is performed. The member is continuously conveyed in a vertically long thermosetting furnace chamber to heat and cure the adhesive used for the die bonding member.

As a continuous thermosetting furnace apparatus for continuously performing the thermosetting treatment as described above, there has been conventionally known a type shown in FIGS. 3 to 5. In this conventional type thermosetting furnace apparatus, a vertically long furnace chamber 1 having a substantially rectangular cross-sectional shape and an inner wall lined with a heat-resistant material is formed, and the furnace chamber 1 will be described in detail in FIGS. 4 and 5. As shown in the drawing, heating block bodies 4 having eight rectangular surface portions are arranged in a row from the inlet 2 at one end (right end in the figure) of the furnace chamber to the outlet 3 at the other end (left end in the figure). ing. Each heating block body 4 is formed, for example, by attaching an electric heater to a rectangular parallelepiped block made of stainless steel. A nozzle 5 is attached to an upper portion near the inlet 2 of the furnace chamber 1, and a high temperature impermeability is provided from the nozzle 5 to a gas supply chamber 7 defined by a partition wall 6 above the furnace chamber 1 toward an outlet end. The active gas is released, and the hot gas is blown onto the surface portion of each heating block body 4 from the ejection port 8 provided in the partition wall 6 corresponding to each heating block body 4.

Three grooves 9 are provided along the longitudinal axis of the heating block body rows arranged side by side in a row, and an endless wire rope (not shown) is provided in each groove 9 in the furnace chamber 1 by a known method. The pulleys 12 and 13 respectively provided at the entrance and exit ends are intermittently rotatably driven by an electric motor (not shown) to run intermittently. On the other hand, a work to be heat-treated, for example, a die bonding member (not shown), is sequentially placed on the three endless wire ropes at predetermined intervals from the carry-in stage 14 at the entrance end so as to traverse the wire ropes. It The workpieces (not shown) sequentially loaded into the workpiece transport section in this manner are transported to the outlet 3 at the upper portion of the heating block array. When the loaded work reaches a position just above the heating block body 4, the pulleys 12 and 13 stop rotating and descend as shown by the arrows, and the endless wire ropes sink into the groove 9 respectively. Then, the work is brought into contact with the surface portion of the heating block body 4. In this way, each work is subjected to a predetermined heat treatment by the heat from the heating block body 4 in contact with each other and the heat of the high temperature gas blown from the gas supply chamber 7. Next, the pulleys 12 and 13 are again raised and are rotationally driven, and are transferred toward the next heating block body 4. In this way, each work is sequentially conveyed toward the outlet 3 while undergoing a heating process for a predetermined time in each heating block body 4. The workpiece that has undergone the final heat treatment in the heating block body 4 closest to the outlet 3 is carried out from the outlet 3 of the furnace chamber 1 to the carry-out stage 15.

As described above, the so-called exhaust gas, which has acted in cooperation with each heating block body 4 to heat each work, is heated by the adjacent heating elements as shown by the solid arrows in FIG. Each of the exhaust ports 16 formed in the gap between the ends of the block body 4 is discharged to the outside of the furnace apparatus through the exhaust gas flow path 17 commonly connected to the exhaust ports 16.

By the way, in the above-mentioned conventional type thermosetting furnace apparatus, although a predetermined amount of high temperature gas is stably supplied from the nozzle 5 to the gas supply chamber 7, the work carried out from the furnace chamber 1 There is considerable variation in the heat treatment effect, and especially when the type of workpiece to be heat treated is changed, it is troublesome to change the setting of the operating conditions related to each heating block body 4 or high temperature gas, and the heat treatment product with stable quality There was a serious drawback that it was difficult to obtain. As a result of diligent research conducted by the inventor of the present invention in order to investigate the cause, there is a large difference between the exhaust gas flow rate at the inlet side exhaust port 16 and the exhaust gas flow rate at the outlet side exhaust port 16. It was found that the fluctuation range was large.

[0007]

[Problems to be solved by the present invention]

 The present invention has been made in order to completely eliminate the drawbacks of the above-mentioned conventional type continuous thermosetting furnace apparatus, and an object thereof is to provide a continuous thermosetting furnace apparatus which can always obtain a heat-treated product with stable quality. .

[0008]

[Configuration of problem solving means]

 The present invention was devised on the basis of the above-mentioned knowledge of the present inventor, and in the continuous thermosetting furnace apparatus of the above type, the exhaust gas formed in the gap between the adjacent end portions of the heating block body in the heating block body row. An exhaust gas flow path that communicates individually with the mouth is provided, and each exhaust gas flow path is provided with a flow rate adjusting valve, and the exhaust gas flow rate of each exhaust gas flow path is adjusted by these adjusting valves to adjust the flow rate on each heating block body. It is characterized in that the blowing of hot gas onto the heated workpiece to be heated is controlled.

[0009]

【Example】

 The present invention will be described with reference to FIGS. 1 and 2 showing one embodiment.

The continuous thermosetting furnace apparatus according to the present invention is, compared with the conventional type apparatus shown in FIGS. 3 to 5, as is apparent from the partially enlarged view of FIG. Only the different parts are designated by the same reference numerals, and the description thereof will be omitted.

1 and 2, each elongated hole-shaped exhaust port 16 formed between the end portions of the adjacent heating block bodies 4 in the heating block body rows arranged side by side in the furnace chamber 1 is A hearth 21 made of a refractory material is connected to an individual conducting path 22 extending vertically downward. The cross-sectional shape of these conduction paths 22 is substantially the same as that of the exhaust port 16. These conduits 22 are connected to an exhaust pipe 24 via a pipe joint 23 attached to the lower surface of the hearth 21. In this way, each exhaust port 16 is connected to an individual exhaust gas passage 25 constituted by the guide passage 22 and the exhaust pipe 24. Further, a manual adjustment valve 26 and a flow rate indicator 27 are attached to each exhaust pipe 24. Further, these exhaust pipes 24 are commonly connected to an exhaust duct 28 arranged at the bottom of a base frame 30 of the device, and exhaust gas is exhausted through a fan 31 attached to an outlet 29 of the exhaust duct. Is sucked and discharged to the outside of the device.

The opening of each control valve 26 is manually adjusted so that the flow rate value is determined according to the heat treatment condition while observing the instruction value of the corresponding flow rate indicator 27.

It should be noted that electromagnetic control valves are used in place of the manual control valve 26, flow rate indicators corresponding to these electromagnetic control valves are attached to a control panel (not shown) of the device, and these flow control valves are operated remotely. You may make it centrally manage by a system.

[0014]

[Function and effect of the present invention]

 According to the present invention, individual closed exhaust gas passages are connected to the exhaust ports formed between the end portions of each adjacent heating block body, and the flow control valves provided in the respective exhaust gas passages are connected. The flow rate of the exhaust gas discharged from each exhaust port is made constant by the bulge, thus stabilizing the flow of the high temperature gas sprayed from the gas supply chamber to the surface of each heating block body, and placing it on each heating block body by the high temperature gas. It is possible to effectively reduce the fluctuation of the heating action on the formed work, and to obtain a heat-treated product with extremely stable quality.

[Brief description of drawings]

FIG. 1 is a schematic front view of a continuous thermosetting furnace apparatus of the present invention.

FIG. 2 is an enlarged vertical sectional view of a heat treatment portion in the continuous thermosetting furnace apparatus of FIG.

FIG. 3 is a schematic front view corresponding to FIG. 1 of a conventional type continuous thermosetting furnace apparatus.

4 is an enlarged vertical cross-sectional view of a heat treatment portion of the furnace apparatus of FIG. 3 corresponding to FIG.

FIG. 5 is an enlarged plan view of a heat treatment portion of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 furnace chamber 2 inlet 3 outlet 4 heating block body 5 nozzle 6 partition wall 7 gas supply chamber 8 high-temperature gas jetting outlet 12 pulley 13 pulley 14 carry-in stage 15 carry-out stage 17 conventional exhaust gas flow passage 21 hearth floor 22 conductive passage 23 Pipe joint part 24 Exhaust pipe 25 Exhaust gas flow path of the present invention 26 Flow control valve 27 Flow indicator.

Claims (2)

[Scope of utility model registration request] 1. A plurality of heating block bodies are arranged in a row in a vertically elongated thermosetting furnace chamber having inlets and outlets formed at both ends, and the heating is performed via a conveying means provided near the heating block body row. While the work to be heated and cured carried into the furnace chamber is conveyed from the heating block body on the inlet side toward the heating block body on the outlet side while sequentially contacting each heating block body, each heating from the upper part of the heating furnace chamber is carried out. A high-temperature gas is blown toward the heat-cured work to be brought into contact with the block body, and the exhaust gas is allowed to flow out of the furnace chamber through the exhaust port formed between the end portions of the adjacent heating block bodies in the heating block row. In the continuous thermosetting furnace device, the exhaust gas flow path is formed to communicate with the exhaust port between the end portions of the adjacent heating block bodies in the heating block body row, and Control valves are provided in the exhaust gas flow passages, and the flow rate of the exhaust gas in each exhaust gas flow passage is adjusted by these control valves to control the spraying of high-temperature gas onto the workpiece to be heated that is heated on each heating block. A continuous thermosetting furnace device characterized by the above. 2. The continuous thermosetting furnace apparatus according to claim 1, wherein a flow rate indicator is provided near the flow rate control valve of each exhaust gas flow path.