JPH0718021Y2 - 光ディスクの露光装置 - Google Patents
光ディスクの露光装置Info
- Publication number
- JPH0718021Y2 JPH0718021Y2 JP1989142589U JP14258989U JPH0718021Y2 JP H0718021 Y2 JPH0718021 Y2 JP H0718021Y2 JP 1989142589 U JP1989142589 U JP 1989142589U JP 14258989 U JP14258989 U JP 14258989U JP H0718021 Y2 JPH0718021 Y2 JP H0718021Y2
- Authority
- JP
- Japan
- Prior art keywords
- aperture
- spatial filter
- laser
- diameter
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 25
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 239000003504 photosensitizing agent Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Landscapes
- Optical Head (AREA)
- Moving Of The Head For Recording And Reproducing By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989142589U JPH0718021Y2 (ja) | 1989-12-09 | 1989-12-09 | 光ディスクの露光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989142589U JPH0718021Y2 (ja) | 1989-12-09 | 1989-12-09 | 光ディスクの露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0384919U JPH0384919U (enrdf_load_stackoverflow) | 1991-08-28 |
JPH0718021Y2 true JPH0718021Y2 (ja) | 1995-04-26 |
Family
ID=31689413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989142589U Expired - Lifetime JPH0718021Y2 (ja) | 1989-12-09 | 1989-12-09 | 光ディスクの露光装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0718021Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-12-09 JP JP1989142589U patent/JPH0718021Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0384919U (enrdf_load_stackoverflow) | 1991-08-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5699185A (en) | Use of fresnel zone plates for material processing | |
US5552856A (en) | Projection exposure apparatus | |
US4521087A (en) | Optical system with diffuser for transformation of a collimated beam into a self-luminous arc with required curvature and numerical aperture | |
JPH0651495A (ja) | 2色性フォトマスク及びその製造方法 | |
US4444456A (en) | Holographic method and apparatus for transformation of a light beam into a line source of required curvature and finite numerical aperture | |
US5798823A (en) | Illumination optical apparatus and projection exposure apparatus using it | |
JPH0718021Y2 (ja) | 光ディスクの露光装置 | |
JP3321194B2 (ja) | フォトマスク | |
JPH01319718A (ja) | アフオーカル光学系 | |
JP2727942B2 (ja) | 光ディスクマスタリング用露光原盤 | |
EP0093781B1 (en) | Method of manufacturing in-line hologram lens | |
US6208611B1 (en) | Light exposure apparatus for master optical disc | |
JP2508076B2 (ja) | 光デイスク原盤露光方法 | |
JP2002357766A (ja) | 対物レンズ、レーザ露光装置、レーザ露光方法、ディスク原盤作成装置 | |
JPH0815619A (ja) | 光量調整光学系 | |
KR19990030206A (ko) | 광 디스크 제조용 원반을 형성하는 방법 | |
JP2000173094A (ja) | 光ディスク用原盤の製造方法及び光ディスク用原盤の製造装置 | |
JPS63149846A (ja) | 光デイスク原盤露光方法 | |
JPH11162022A (ja) | 光学記録装置 | |
JPH09288850A (ja) | 露光装置及び露光方法 | |
JPH02244440A (ja) | 光ディスク原盤の製造方法 | |
JPH08221811A (ja) | 情報記録媒体の原盤作製方法および光ディスク用光学系 | |
JPH0511454A (ja) | ホログラム描画装置 | |
RU2197933C1 (ru) | Преобразователь распределения энергии для лазерной офтальмологической установки | |
JPH0338020A (ja) | 微細パターン描画装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |