JPH07180072A - Production of etched parts - Google Patents

Abstract

PURPOSE:To produce high-precision and high-quality etched parts without any roughness at 5 high rate by forming a resist pattern on a thin cold-rolled Ni-Fe alloy sheet having a specified content of carbon and etching the sheet at a high rate. CONSTITUTION:A 42% Ni-Fe alloy or a 36% Ni-Fe alloy is cold-rolled into a sheet having 0.02-0.40mm thickness to obtain an Ni-Fe alloy material to be etched. The carbon content of the material is controlled to <=0.1%, a resist pattern is formed on the surface, and the sheet is etched. In this case, the etching rate is increased by 25-30% as compared with a material to be treated contg. 0.02% C.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a material for etching processing, and more particularly to a method for manufacturing an etching processed component such as an IC lead frame.

[0002]

2. Description of the Related Art Most lead frames for ICs have a thickness of 0.
It is manufactured by press punching or etching a 42% -nickel-iron alloy called a 42 alloy of 10 to 0.30 mm. Also, as a material for various electronic parts such as display tubes, 50% nickel-iron alloy and 52%
Nickel-iron alloys such as nickel-iron alloys have been used.

However, when etching a material made of a nickel-iron alloy, a relatively long etching time is required, and particularly when etching a fine pattern, the etching time becomes long. There is a problem that the force is reduced and the linearity of the processed portion of the product formed by etching is impaired.

Further, there has been a problem that a cross section formed by etching becomes a state called arabi, which causes rasping.

[0005]

SUMMARY OF THE INVENTION Therefore, the present invention is to provide an etching-processed component which eliminates the above-mentioned conventional drawbacks.

[0006]

As a result of research to solve the above problems, the present inventor found that the carbon content in the material was 0.0
It was found that the initial purpose can be achieved by setting the content to 1% or less, and the present invention has been completed based on such findings.

That is, in the method for manufacturing an etched part according to the first aspect of the present invention, 42% Ni-Fe having a plate thickness of 0.020 to 0.40 mm manufactured by cold rolling is used.
A nickel-iron alloy material for etching, which is made of an alloy, wherein a resist pattern is formed on the surface of the material for etching, which has a carbon content of 0.01% or less, and then the material for etching. When etching the material, the carbon content is 25 to 30 compared with the case of etching the material for etching processing having a carbon content of 0.02%.
%, The material for etching is etched at a high etching rate.

Further, the method for manufacturing an etched part according to the second aspect of the present invention is for etching process which is made of a 36% Ni-Fe alloy having a plate thickness of 0.020 to 0.40 mm manufactured by cold rolling. A nickel-iron alloy material, wherein a carbon content of the material is 0.01% or less, a resist pattern is formed on the surface of the material for etching, and then the material for etching is etched, It is characterized in that the material for etching processing is etched at an etching rate which is 25 to 30% faster than that in the case of etching a material for etching processing having a carbon content of 0.02%.

[0009]

In the present invention, however, the carbon content is 0.01
By setting the content to be not more than%, the etching rate is increased and the arabic is eliminated.

The etching rate of a nickel-iron alloy changes depending on the nickel content, and the smaller the nickel content, the faster the etching rate. For nickel-iron alloys having different contents, a common phenomenon was observed that the etching rate was high when the carbon content was 0.01% or less.

The above-mentioned material for etching processing is usually subjected to repeated steps such as hot rolling, cold rolling and annealing in order to process it into a predetermined plate thickness, but particularly cold rolling. Is an essential step for etching processing materials such as IC lead frames and shadow masks. Moreover, as a material for these etching processes, generally 0.020 to
The plate is processed into a plate thickness in the range of 0.40 mm and subjected to predetermined etching. If the plate thickness is less than 0.020 mm, it is disadvantageous as a material for etching processing from the viewpoint of maintaining the shape of the material and strength, while if the plate thickness exceeds 0.40 mm, the etching time increases and the resist strength becomes insufficient. This is not preferable because the dimensional accuracy becomes poor.

FIG. 1 shows the change in etching rate depending on the carbon content determined for a 42% nickel-iron alloy.

As is clear from this figure, when the etching rate is 1 when the carbon content is 0.02%, it is 0.0
1.25 to 1.30 when the carbon content is 1% or less, and 25% to 30% as compared with the case where the carbon content is 0.02%.
Get faster

FIG. 2 also shows the change in etching rate depending on the carbon content obtained for the 36% nickel-iron alloy.

42% for 36% nickel-iron alloy
Similarly, in the case of nickel-iron alloy, the carbon content is 0.01
When it is less than%, the etching rate becomes faster.

[0016]

[Example] Ni% having a plate thickness of 0.15 mm; 41.5%, C
%; 0.007% nickel-iron alloy material with a 100-pin lead frame resist pattern on both sides, and using a 48 ° B'eFeCl ₃ corrosive liquid at a liquid temperature of 70 ° C., 2.0 Kg / cm ^The product was obtained by spray etching from both sides with a spray pressure of ² . Comparative Example Plate thickness 0.15 mm Ni%; 41.8%, C%; 0.0
A resist plate was prepared in the same manner as in the example with respect to a material composed of 23% nickel-iron alloy, and then 2.0 Kg / c was used using a 48 ° B'eFeCl ₃ corrosive solution at a liquid temperature of 70 ° C.
A product was obtained by performing spray etching from both sides with a spray pressure of m ² .

Table 1 shows the results of Examples and Comparative Examples.

Table 1 Ni% C% etching rate Etching state Example 41.5 0.007 1.25 Good comparative example 41.8 0.023 1.0 With arabic (Note) The etching rate is such that the carbon content is 0. The rate at which a predetermined size is reached when 023% of the material is etched is defined as 1.

As shown in Table 1, the one according to the present invention can be etched more quickly and more accurately than the conventional one, and no arabi was observed. FIG. 3 is a SEM photograph (400
4), and FIG. 4 is a similar photograph in the above example. From this photograph, it can be confirmed that in the comparative example, arabic was observed in the etched cross section, and in the example, no arabic was present.

[0020]

As described above in detail, according to the method of the present invention, it is possible to perform etching processing quickly and accurately, without producing arabia, and to manufacture an etching product of high quality.

[Brief description of drawings]

FIG. 1 is a graph showing changes in etching rate depending on the amount of carbon, which was obtained for a 42% Ni—Fe alloy.

FIG. 2 is a graph showing a change in etching rate depending on the amount of carbon, which was obtained for a 36% Ni—Fe alloy.

FIG. 3 is a SEM photograph (400 times) of a metal structure of an etched cross section in a comparative example.

FIG. 4 is a SEM photograph (400 times) of a metal structure of an etched cross section in an example.

Claims (2)

[Claims] 1. A plate thickness of 0.02 produced by cold rolling.
A nickel-iron alloy material for etching, which is made of a 0% to 0.40 mm 42% Ni-Fe alloy, and has a carbon content in the material of 0.01% or less. And then etching the material for etching, the material for etching is 25 to 30% faster than that for etching the material having carbon content of 0.02%. A method for producing an etched part, characterized in that the material is etched. 2. A plate thickness 0.02 produced by cold rolling.
A nickel-iron alloy material for etching, which is composed of a 0-0.40 mm 36% Ni-Fe alloy, and has a carbon content of 0.01% or less in the material. And then etching the material for etching, the material for etching is 25 to 30% faster than that for etching the material having carbon content of 0.02%. A method for producing an etched part, characterized in that the material is etched.