JP3268369B2 - High precision rolled metal sheet manufacturing equipment - Google Patents
High precision rolled metal sheet manufacturing equipmentInfo
- Publication number
- JP3268369B2 JP3268369B2 JP03353693A JP3353693A JP3268369B2 JP 3268369 B2 JP3268369 B2 JP 3268369B2 JP 03353693 A JP03353693 A JP 03353693A JP 3353693 A JP3353693 A JP 3353693A JP 3268369 B2 JP3268369 B2 JP 3268369B2
- Authority
- JP
- Japan
- Prior art keywords
- processing surface
- metal plate
- tapered
- rolling
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Metal Rolling (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、電子機器、精密機械等
に使用される板厚精度が高精度でさらに力学的異方性も
改善され、しかも極めて薄い帯鋼等の金属板を製造する
のに適した装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is to produce a metal sheet such as a strip of steel, which is used for electronic equipment, precision machinery, etc., has a high thickness accuracy, has improved mechanical anisotropy, and is extremely thin. A device suitable for
【0002】[0002]
【従来の技術】従来、板厚精度の高い平坦で薄い金属板
を製造する方法として、本願出願人の出願に係わる特公
平2−51695号公報に記載された方法が知られてい
る。この方法は、図1及び図2に示すように、長尺の金
属板aを、テーパ状の加工面bとこれに続く平坦部の加
工面cを備えた金型d及び該加工面に沿って転動するロ
ールeの間に介在させ、該ロールeの前記転動の終了毎
に該金属板aを長さ方向に間歇的に移動させて圧延する
方法が知られている。この方法によれば、例えば厚さ
1.2mmで板厚精度が±3/1000mmのステンレ
ス板を製造することができる。また、一般的なロール圧
延方法では、圧延された板がエッジドロップ即ち板の両
端部の板厚が中央部よりも薄くなってしまう現象があ
り、板の両端部は所定の板厚がないので取り除いて使用
されることになって材料の無駄が生じるので、これを圧
延するロールにクラウンを付けておき、図3に誇大して
示したように金属板fを一対のロールg,gで圧延する
ことも行なわれている。エッジドロップは図1、図2に
示した圧延方法の場合にも発生しており、圧延後に金属
板の両端部分を切除して製品としている。2. Description of the Related Art Conventionally, as a method of manufacturing a flat and thin metal plate having a high plate thickness accuracy, a method described in Japanese Patent Publication No. 2-51695 filed by the present applicant has been known. According to this method, as shown in FIGS. 1 and 2, a long metal plate a is formed along a mold d having a tapered processing surface b followed by a processing surface c of a flat portion, and along the processing surface. A method is known in which the metal plate a is intermittently moved in the length direction every time the rolling e of the roll e is completed, and rolling is performed. According to this method, for example, a stainless steel plate having a thickness of 1.2 mm and a thickness accuracy of ± 3/1000 mm can be manufactured. In addition, in a general roll rolling method, there is a phenomenon that a rolled plate is edge-dropped, that is, the plate thickness at both ends of the plate is smaller than the center portion, and since both ends of the plate do not have a predetermined plate thickness, Since the roll is rolled and rolled with a crown, the metal plate f is rolled by a pair of rolls g and g as shown exaggeratedly in FIG. It is also done. The edge drop also occurs in the case of the rolling method shown in FIGS. 1 and 2, and after rolling, both ends of the metal plate are cut off to obtain a product.
【0003】更に、従来の一般的なロール圧延法では、
金属板は圧延方向(長さ方向)に結晶が引き伸ばされる
ことにより力学的な異方性を生じ、その金属板の方向す
なわち長さ方向、幅方向、斜め方向などの方向によって
機械的性質や物理的性質が異方性となり、材料の使用方
向が限定される不都合もあった。Further, in a conventional general roll rolling method,
A metal plate has mechanical anisotropy due to mechanical anisotropy caused by the crystal being stretched in the rolling direction (length direction), depending on the direction of the metal plate, that is, the length direction, width direction, oblique direction, and the like. There is also a disadvantage that the material properties become anisotropic and the direction of use of the material is limited.
【0004】[0004]
【発明が解決しようとする課題】図1、図2の上記金型
圧延方法で使用されるロールeを図3のようなクラウン
形に形成すれば、金型圧延方法でも幅方向の板厚の制御
は可能でエッジドロップを解消できるが、ロールクラウ
ンの管理が困難であるうえ、材料の不均一な伸びのため
長さ方向の高精度な板厚制御が十分にできない。また、
ロール圧延により圧延された金属板の異方性を抑制また
は防止するには、通常、熱処理する以外になく、かかる
処理は面倒である。If the roll e used in the mold rolling method shown in FIGS. 1 and 2 is formed into a crown shape as shown in FIG. 3, the thickness in the width direction can be reduced even in the mold rolling method. Although the control is possible and the edge drop can be eliminated, it is difficult to control the roll crown, and it is not possible to sufficiently control the thickness in the length direction with high precision due to the uneven elongation of the material. Also,
In order to suppress or prevent anisotropy of the metal sheet rolled by roll rolling, there is usually no other than heat treatment, and such processing is troublesome.
【0005】本発明は、薄い金属板の長さ方向の板厚精
度を高精度とし、その幅方向には板厚精度を損なわずに
エッジドロップを防止できると共に圧延による力学的異
方性を緩和できる製造装置を提供することを目的とする
ものである。According to the present invention, the precision of thickness of a thin metal plate in the longitudinal direction is made high, the edge drop can be prevented in the width direction without impairing the thickness precision, and the mechanical anisotropy by rolling is reduced. It is an object of the present invention to provide a manufacturing apparatus capable of performing the above.
【0006】[0006]
【課題を解決するための手段】本発明では、長尺の金属
板を、テーパ状の加工面とこれに続く平坦部の加工面を
有すると共にこれらの加工面の両側に該平坦部の加工面
からの立上がり高さが所望板厚に等しい段差を有する間
隙規制縁を備えた金型と、該加工面に沿って転動するロ
ールとの間に介在させ、該ロールの前記転動の終了毎に
該金属板を長さ方向に間歇的に移動させて圧延する装置
に於いて、該金型のテーパ状の加工面を、該金属板の長
さ方向に2段階にせり上がったテーパ状の長さ方向加工
面に形成すると共に、該長さ方向加工面とこれに続く平
坦部の加工面に幅方向の両端部へ延びる幅方向テーパ部
を形成することにより、上記の目的を達成するようにし
た。According to the present invention, a long metal plate has a tapered processing surface and a flat surface processing surface following the tapered processing surface, and has a flat surface processing surface on both sides of these processing surfaces. Between the mold having a gap regulating edge having a step height equal to a desired plate thickness and a roll rolling along the processing surface, and each time the rolling of the roll is completed. In an apparatus for rolling by intermittently moving the metal plate in the length direction, the tapered processing surface of the mold is tapered in two steps in the length direction of the metal plate. The above-described object is achieved by forming a width-direction tapered portion extending to both ends in the width direction on the length-direction processing surface and forming the length-direction processing surface and a processing surface of a flat portion following the length-direction processing surface. I made it.
【0007】[0007]
【作用】該金属板の一側面を金型のテーパ状の加工面と
平坦部の加工面とに載せ、該金型の間隙規制面に接触さ
せながらロールを転動させると、該金属板の肉厚が該金
型のテーパの分だけ減少する。該ロールの転動後に該金
属板をその長さ方向に多少移動させて再びロールを転動
させることを繰返すことにより、該金属板は次第に板厚
を減少し、加工面の平坦部にて高精度の所望板厚に加工
される。こうした作用は従来の加工面にテーパを形成し
たものと略同様であるが、本発明に於いては、該金型の
テーパ状の加工面を、該金属板の長さ方向に2段階にせ
り上がったテーパ状の長さ方向加工面に形成すると共
に、該長さ方向加工面とこれに続く平坦部の加工面に幅
方向の両端部へ延びる幅方向テーパ部を形成したので、
該金属板はテーパ状加工面の第1段階で板厚が減少さ
れ、更に第2段階により板厚が減少するときに同時に幅
方向のテーパによりわずかに材料が移動されるのでエッ
ジドロップが防止される。加工の終えた金属板はエッジ
ドロップがないので、その両端部を切除する必要がな
く、材料の無駄と切除のための工程を省略できる。When one side of the metal plate is placed on the tapered processing surface of the mold and the processing surface of the flat portion, and the roll is rolled while contacting the clearance regulating surface of the metal mold, The thickness is reduced by the taper of the mold. After rolling the roll, the metal plate is slightly moved in the longitudinal direction and the roll is rolled again. By repeating the rolling, the thickness of the metal plate gradually decreases, and the height of the flat surface of the processing surface is reduced. It is processed to the desired thickness with accuracy. Such an operation is substantially the same as that of a conventional machined surface having a tapered surface. However, in the present invention, the tapered machined surface of the mold is raised in two stages in the longitudinal direction of the metal plate. Since it was formed on the raised tapered lengthwise processing surface, the widthwise tapered portion extending to both ends in the width direction was formed on the lengthwise processing surface and the processing surface of the flat portion following it,
The metal plate is reduced in thickness in the first step of the tapered surface, and furthermore, when the thickness is reduced in the second step, the material is slightly moved by the taper in the width direction, so that edge drop is prevented. You. Since the processed metal plate has no edge drop, it is not necessary to cut both ends thereof, so that the step of wasting material and cutting off can be omitted.
【0008】更に、本発明の装置により加工された金属
板は、変形挙動が幅方向に流れる割合が高く、通常、長
さ方向に結晶方位が揃うロール圧延材に比べて結晶方位
の揃う現象が抑制され、材料の力学的異方性が緩和され
る。Further, the metal sheet processed by the apparatus of the present invention has a high ratio of deformation behavior flowing in the width direction, and usually has a phenomenon in which the crystal orientation is uniform as compared with a rolled material in which the crystal orientation is aligned in the length direction. It is suppressed and the mechanical anisotropy of the material is reduced.
【0009】[0009]
【実施例】本発明の実施例を図4に基づき説明すると、
同図に於いて符号1はステンレス鋼、銅合金等の長尺の
金属板、2は金型、3はロールを示す。該金型2は図5
に示すように、テーパ状の加工面4とこれに続く平坦部
の加工面5を備え、更にこれらの加工面4、5の両側に
該平坦部の加工面5からの立上がり高さが所望板厚に等
しい段差を有する間隙規制縁6、6を設けるようにし
た。該ロール3は該間隙規制縁6、6に接しながら金属
板1の長さ方向に往復転動し、ロール3の往復転動の終
了毎に金型2とロール3の圧接を解除して該金属板1を
長さ方向に間歇的に移動させることを繰返すと、次第に
該金属板1が圧延され、該平坦部の加工面5からの立上
がり高さに設定した板厚に圧延されることは従来のもの
と略同様であるが、本発明では、圧延された金属板1の
エッジドロップを防ぐために、該テーパ状の加工面4
を、図5のように、該金属板1の長さ方向に第1段と第
2段で2段階にせり上がった長さ方向加工面4a、4b
とし、更に図6のように、これらの加工面4と平坦部の
加工面5に幅方向の両端部へ延びる幅方向テーパ部7
a,7bを形成するようにした。Embodiment An embodiment of the present invention will be described with reference to FIG.
In FIG. 1, reference numeral 1 denotes a long metal plate such as stainless steel or copper alloy, 2 denotes a mold, and 3 denotes a roll. The mold 2 is shown in FIG.
As shown in FIG. 2, a processing surface 4 having a tapered shape and a processing surface 5 of a flat portion following the tapered surface 4 are provided. Further, on both sides of the processing surfaces 4 and 5, the rising height from the processing surface 5 of the flat portion is a desired plate. The gap regulating edges 6, 6 having a step equal to the thickness are provided. The roll 3 reciprocates in the longitudinal direction of the metal plate 1 while being in contact with the gap regulating edges 6, 6, and releases the pressure contact between the mold 2 and the roll 3 each time the reciprocation of the roll 3 is completed. When the intermittent movement of the metal plate 1 in the length direction is repeated, the metal plate 1 is gradually rolled, and the flat portion is rolled to a plate thickness set to the rising height from the processing surface 5. Although substantially the same as the conventional one, in the present invention, in order to prevent the edge drop of the rolled metal plate 1, the tapered processing surface 4 is used.
As shown in FIG. 5, as shown in FIG.
Further, as shown in FIG. 6, a width direction taper portion 7 extending to both ends in the width direction is formed on the processing surface 4 and the processing surface 5 of the flat portion.
a, 7b were formed.
【0010】該金属板1は金型2に接して転動するロー
ル3により圧延されるが、その圧延が進行して所定の板
厚になる前に幅方向テーパ部7a,7bにより金属板1
の材料がその両端部へ多少移動され、圧延された金属板
1のエッジドロップがなくなる。The metal plate 1 is rolled by a roll 3 which rolls in contact with a mold 2, and before the rolling progresses to a predetermined thickness, the metal plate 1 is formed by the tapered portions 7a and 7b in the width direction.
Is slightly moved to both ends thereof, and the edge drop of the rolled metal plate 1 is eliminated.
【0011】本発明の具体的な実施例を、寸法(厚さ×
幅×長さ)が1.4×60×50000mmのJIS SPCE-SDの帯状鋼
帯の金属板に加工率10.7%の圧延を施して板厚1.25mmの
長尺帯鋼を製造する場合につき説明すると、次の通りで
ある。金型2として図2に示すように、目的寸法(段
差)Dを1.25mm、第1段の長さ方向加工面4aのテーパ
を1/800、第2段の長さ方向加工面4bのテーパを1/500
0、幅方向テーパ部7a,7bのテーパを1/600、平坦部
の加工面5の縦×横の寸法を40×30mmに加工・研磨した
ものを用意し、ロール3として、直径90mm、長さ120mm
の圧延ロールを用意する。そして、該ロール3を従来と
同様に金型2の間隙規制縁6、6に接触させながら押圧
転動させ、その転動の完了毎に金属板1を5mmずつ矢印
方向に移動させて所望板厚の圧延金属板を製造した。製
造された金属板1の板厚の長さ方向の板厚変動は図7の
曲線Aの如であり、素材のJIS SPCE-SDの帯状鋼帯の板
厚変動は同図の曲線Bのようであったので、長さ方向に
は板厚が数ミクロンのオーダーで均一化されていること
が分る。また、製造された金属板1は、その幅方向には
素材が図8の曲線Cで示すようにエッジドロップのある
ものであったが、本発明の装置を使用すると同図の曲線
Dのようにエッジドロップはなくなり、通常のロール圧
延のみで圧延加工したとき(曲線E)よりも良好な結果
が得られた。曲線Dの場合は両端部が多少厚くなるが、
圧延された該金属板を更にロール圧延するか金型の幅方
向のテーパを緩やかにすれば、その厚みも修正すること
ができる。A specific embodiment of the present invention will be described in terms of dimensions (thickness × thickness).
To explain the case where a long strip of 1.25 mm in thickness is manufactured by rolling a metal plate of a JIS SPCE-SD strip steel strip with a width of 1.4 x 60 x 50000 mm and processing rate of 10.7%, It is as follows. As shown in FIG. 2, as the mold 2, the target dimension (step) D is 1.25 mm, the taper of the first step longitudinal processing surface 4 a is 1/800, and the taper of the second step longitudinal processing surface 4 b is 1/500
0, a taper of the width direction tapered portions 7a, 7b is prepared to be 1/600, and the vertical and horizontal dimensions of the processing surface 5 of the flat portion are processed and polished to 40 × 30 mm. 120mm
A rolling roll is prepared. Then, the roll 3 is pressed and rolled while being in contact with the gap regulating edges 6, 6 of the mold 2 in the same manner as in the prior art, and the metal plate 1 is moved by 5 mm in the direction of the arrow every time the rolling is completed. Thick rolled metal sheets were produced. The thickness variation in the length direction of the manufactured metal plate 1 in the length direction is as shown by a curve A in FIG. It can be seen that the thickness in the length direction is uniform on the order of several microns. The manufactured metal plate 1 had a material having an edge drop in the width direction as shown by a curve C in FIG. 8. No edge drop was found, and a better result was obtained than when rolling was performed only by ordinary roll rolling (curve E). In the case of curve D, both ends are slightly thicker,
If the rolled metal plate is further roll-rolled or the taper in the width direction of the mold is moderated, the thickness can be corrected.
【0012】次に異方性改善の実施例として、寸法(厚
さ×幅×長さ)が0.5×60×50000mmのJISパーマロイB
級の磁性材料鋼帯の金属板に加工率20%の圧延を本発明
の装置により施して板厚0.4mmの長尺帯鋼を製造する場
合につき説明すると次の通りである。Next, as an embodiment of improving anisotropy, a JIS permalloy B having dimensions (thickness × width × length) of 0.5 × 60 × 50,000 mm will be described.
A case where a long strip of 0.4 mm in thickness is produced by subjecting a metal plate of a magnetic material steel strip of a grade to rolling at a processing rate of 20% by the apparatus of the present invention will be described below.
【0013】金型として図2に示すように、目的寸法D
を0.4mm、第1段の長さ方向加工面4aのテーパを1/150
0、第2段の加工面4bのテーパを1/3333、幅方向テー
パ部7a、7bのテーパを1/500、平坦部の加工面5の
縦×横の寸法を40×30mmに加工・研磨したものを用意
し、前記実施例と同様に圧延金属板を製造した。製造さ
れた磁性材料金属板の材料方向に対するヤング率と、同
一材料を通常のロール圧延により製造した金属板のヤン
グ率を比較測定した結果を図9に示す。この結果によれ
ば、本発明の装置により製造した金属板のヤング率の曲
線Fは、従来のロール圧延による金属板のヤング率の曲
線Gよりも異方性が緩和されていることが分かる。[0013] As shown in FIG.
Is 0.4 mm, and the taper of the first-stage longitudinal processing surface 4a is 1/150.
0, the taper of the processing surface 4b of the second step is 1/3333, the taper of the width direction taper portions 7a and 7b is 1/500, and the vertical and horizontal dimensions of the processing surface 5 of the flat portion are 40 × 30 mm. A rolled metal sheet was manufactured in the same manner as in the above example. FIG. 9 shows the results of comparative measurement of the Young's modulus of the manufactured magnetic metal plate in the material direction and the Young's modulus of a metal plate manufactured by normal roll rolling of the same material. According to this result, it can be seen that the curve F of the Young's modulus of the metal plate manufactured by the apparatus of the present invention has less anisotropy than the curve G of the Young's modulus of the metal plate by the conventional roll rolling.
【0014】[0014]
【発明の効果】以上のように本発明によるときは、高精
度の板厚の薄い金属板を製造するための金型のテーパ状
の加工面を、該金属板の長さ方向に2段階にせり上がっ
たテーパ状の長さ方向加工面とし、この長さ方向加工面
と平坦部の加工面に幅方向の両端部へ延びる幅方向テー
パ部を形成したので、次第に薄く圧延される過程に於い
て幅方向に金属板の材料を移動させ得てエッジドロップ
が防止され、幅方向、長さ方向に板厚が均一の金属板が
一工程で得られ、圧延された金属板の両端を除去するこ
との無駄がなくなり経済的で迅速に超高精度の圧延材を
製造でき、さらに、力学的異方性を改善した圧延材を製
造できる等の効果がある。As described above, according to the present invention, the tapered working surface of the metal mold for manufacturing a high-precision thin metal plate is formed in two stages in the longitudinal direction of the metal plate. Since the tapered lengthwise processed surface was formed and the widthwise tapered portion extending to both ends in the widthwise direction was formed on the lengthwise processed surface and the flat surface processed surface, during the process of rolling gradually thinner. The material of the metal plate can be moved in the width direction to prevent edge drop, a metal plate having a uniform thickness in the width direction and the length direction can be obtained in one step, and both ends of the rolled metal plate are removed. It is possible to produce a rolled material of ultra-high precision economically and quickly without waste, and to produce a rolled material with improved mechanical anisotropy.
【図1】 従来例の側面図FIG. 1 is a side view of a conventional example.
【図2】 図1の金型の斜視図FIG. 2 is a perspective view of the mold of FIG. 1;
【図3】 従来のエッジドロップを防止する圧延方法の
説明図FIG. 3 is an explanatory view of a conventional rolling method for preventing edge drop.
【図4】 本発明の実施例の斜視図FIG. 4 is a perspective view of an embodiment of the present invention.
【図5】 図4の金型の製作過程の斜視図FIG. 5 is a perspective view of a process of manufacturing the mold of FIG. 4;
【図6】 図4の金型の斜視図6 is a perspective view of the mold of FIG.
【図7】 本発明の装置により圧延された金属板の長さ
方向の板厚変動の測定図FIG. 7 is a view showing a measurement of thickness variation in the length direction of a metal plate rolled by the apparatus of the present invention.
【図8】 本発明の装置により圧延された金属板の幅方
向の板厚変動の測定図FIG. 8 is a diagram showing a measurement of a thickness variation in a width direction of a metal plate rolled by the apparatus of the present invention.
【図9】 本発明の装置により圧延された金属板の方向
性に対するヤング率の測定図FIG. 9 is a diagram showing a measurement of Young's modulus with respect to directionality of a metal plate rolled by the apparatus of the present invention.
1 金属板 2 金型 3
ロール 4、4a、4b テーパ状の長さ方向加工面 5 平坦部の加工面 6、6
間隙規制縁 7a、7b 幅方向テーパ部1 metal plate 2 mold 3
Roll 4, 4 a, 4 b Tapered lengthwise processing surface 5 Flat surface processing surface 6, 6
Gap regulating edge 7a, 7b Width taper
Claims (2)
れに続く平坦部の加工面を有すると共にこれらの加工面
の両側に該平坦部の加工面からの立上がり高さが所望板
厚に等しい段差を有する間隙規制縁を備えた金型と、該
加工面に沿って転動するロールとの間に介在させ、該ロ
ールの前記転動の終了毎に該金属板を長さ方向に間歇的
に移動させて圧延する装置に於いて、該金型のテーパ状
の加工面を、該金属板の長さ方向に2段階にせり上がっ
たテーパ状の長さ方向加工面に形成すると共に、該長さ
方向加工面とこれに続く平坦部の加工面に幅方向の両端
部へ延びる幅方向テーパ部を形成したことを特徴とする
高精度板厚の金属板の製造装置。1. A long metal plate having a tapered processing surface and a flat surface processing surface following the tapered processing surface, and having a rising height from the processing surface of the flat portion on both sides of the processing surface. It is interposed between a mold provided with a gap regulating edge having a step equal to the thickness and a roll rolling along the processing surface, and the metal plate is moved in the longitudinal direction every time the rolling of the roll is completed. In a device for rolling by intermittently moving the metal plate, the tapered working surface of the mold is formed as a tapered longitudinal working surface that is raised in two stages in the longitudinal direction of the metal plate. An apparatus for manufacturing a metal plate having a high precision thickness, wherein a taper portion in the width direction extending to both ends in the width direction is formed on the processing surface of the length direction processing surface and the processing surface of the flat portion subsequent thereto.
段階の加工面及び幅方向加工面の勾配は、長さ方向加工
面の第2段階の加工面の勾配よりも大きいことを特徴と
する請求項1に記載の高精度板厚の金属板の製造装置。2. The method according to claim 1, further comprising the step of:
The manufacturing method of a high-precision metal plate according to claim 1, wherein the gradient of the processing surface in the step and the width of the processing surface in the width direction is greater than the gradient of the processing surface in the second stage of the processing surface in the length direction. apparatus.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03353693A JP3268369B2 (en) | 1993-02-23 | 1993-02-23 | High precision rolled metal sheet manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03353693A JP3268369B2 (en) | 1993-02-23 | 1993-02-23 | High precision rolled metal sheet manufacturing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06238384A JPH06238384A (en) | 1994-08-30 |
JP3268369B2 true JP3268369B2 (en) | 2002-03-25 |
Family
ID=12389291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP03353693A Expired - Lifetime JP3268369B2 (en) | 1993-02-23 | 1993-02-23 | High precision rolled metal sheet manufacturing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3268369B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8035077B2 (en) | 2007-03-20 | 2011-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
US8154096B2 (en) | 2006-04-28 | 2012-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion element and manufacturing method of photoelectric conversion element |
Families Citing this family (5)
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JP5455099B1 (en) | 2013-09-13 | 2014-03-26 | 大日本印刷株式会社 | Metal plate, metal plate manufacturing method, and mask manufacturing method using metal plate |
JP5516816B1 (en) | 2013-10-15 | 2014-06-11 | 大日本印刷株式会社 | Metal plate, method for producing metal plate, and method for producing vapor deposition mask using metal plate |
JP5641462B1 (en) * | 2014-05-13 | 2014-12-17 | 大日本印刷株式会社 | Metal plate, metal plate manufacturing method, and mask manufacturing method using metal plate |
JP6137153B2 (en) * | 2014-12-05 | 2017-05-31 | トヨタ自動車株式会社 | Method for forming pin-shaped fins |
CN110965020B (en) | 2015-02-10 | 2022-05-17 | 大日本印刷株式会社 | Method for screening metal plate and method for manufacturing vapor deposition mask |
-
1993
- 1993-02-23 JP JP03353693A patent/JP3268369B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8154096B2 (en) | 2006-04-28 | 2012-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion element and manufacturing method of photoelectric conversion element |
US8035077B2 (en) | 2007-03-20 | 2011-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPH06238384A (en) | 1994-08-30 |
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