JPH0716173U - YIG filter inspection device - Google Patents

Abstract

(57) [Summary] [Object] An object of the present invention is to shorten the inspection time by configuring the inspection device so as to measure a plurality of DUTs at one time in the characteristic inspection of the YIG filter. As a result, the number of times the worker performs replacement work and the witness monitoring time are reduced, and unmanned operation for a long time is enabled, thus realizing labor saving. [Structure] A coaxial switch 12 for distributing a sweep signal from a signal generator 11 to a plurality is provided. And multiple DUTs
A current source 17 for applying an exciting current is provided corresponding to the above. And an analyzer 1 having input terminals for a plurality of channels
5 is used. Then, a constant temperature bath 14 for accommodating a plurality of DUTs and having a predetermined environmental temperature to be inspected is provided. Then, the inspection apparatus configured by the control unit 16 that automatically measures and inspects the plurality of DUTs and controls a series of executions.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an apparatus for simultaneously measuring and inspecting a plurality of elements when acquiring and inspecting temperature test data of YIG filter elements and the like.

[0002]

[Prior art]

 2 shows an example of a block diagram of a conventional inspection apparatus, FIG. 3 shows an example of a frequency characteristic diagram of output data obtained by sweeping with a signal generator, and FIG. 4 shows an oscillation frequency linearity characteristic diagram with respect to an exciting current. The example will be described.

This inspection apparatus puts the DUT 13 as the device to be measured in the constant temperature bath 14 to measure and inspect various frequency characteristic data at three environmental temperatures (low temperature, room temperature, high temperature). The exciting current applied to the exciting coil is automatically measured at multiple points. It is a device that determines good products and defective products after acquiring various bandpass characteristic data (center frequency, bandwidth, ripple, attenuation amount) at each excitation current point.

First, the DUT 13 to be inspected is put in a constant temperature bath, and an input / output signal cable is connected. Connect the high-frequency input cable from the signal generator 11 to the input connector terminal of the DUT, connect the output connector of the DUT to the output cable to the analyzer 15 (scalar network analyzer), and connect the power source from the current source 17 to it. Connect to the exciting coil terminal of the DUT. Next, the constant temperature bath 13 is started to bring it to a low temperature (for example, -5 ° C). Then, after the predetermined set temperature ± 0.1 ° C is reached, the measurement is started after waiting for a certain period of time.

Here, the YIG filter that is the measurement target of the DUT 13 is a bandpass filter element having an exciting coil, and the center frequency of the filter can be changed by changing the exciting current applied to the exciting coil. It is a possible element. In this inspection, the center frequency of the filter, which is proportional to the exciting current (hereinafter referred to as linearity), is also the subject of inspection.

The measurement range and the like vary depending on the DUT element used. For example, in the case of an element having a frequency of 500 MHz to 26 GHz used as a bandpass filter, the frequency characteristic is measured at a frequency position of about 50 points as the number of sampling points. For example, in a DUT in which the applied excitation current is 0 to 200 mA full scale, the filter characteristic is measured for each point at the current increase position of 200/50 = 4 mA. The purpose of this is because it is an important inspection item to inspect whether the linearity of the exciting current applied to the DUT has the linearity within the allowable range, and the bandwidth and the ripple are within the predetermined range. Is.

This will be described with reference to FIGS. 2, 3, and 4. As the exciting current applied to the DUT 13, the output current of the current source 17 is set in advance and the exciting current to be measured is passed. The signal generator 11 performs sweep control so as to sweep frequencies around the center frequency of the DUT. Then, the output signal from the DUT is input to the analyzer 15, the sweep measurement is performed, and the obtained frequency characteristic data 31 is transferred to the control unit 16.

An example of the data of the frequency characteristics obtained by this is the data 31 of FIG. Based on this data, the control unit 16 performs arithmetic extraction to obtain determination data for the attenuation amount 33, the ripple 34, the bandwidth 35, and the center frequency 36.

In the same manner, the above measurement is carried out for all excitation current measurement points, and the same calculation is performed to obtain the judgment data. The measurement curve 42 of FIG. 4 is a diagram in which the linearity characteristic of the center frequency with respect to the exciting current is plotted based on this determination data. From this figure, a non-defective product is determined depending on whether or not it is within the allowable range 43 of the inspection standard. For other inspection items, the band width, ripple, and attenuation amount are checked to see if they are within the criteria.

Because of the above, the measurement time for one point needs to be 1 minute or more. It takes about 1 hour because the same value is measured by changing the exciting current value by 50 points. Furthermore, since the temperature of the constant temperature bath is changed and the measurement is similarly performed at three points (low temperature, room temperature, high temperature), it takes about 3 hours in total and a lot of time is required for one inspection.

[0011]

[Problems to be solved by the device]

 As described above, it takes a lot of time to inspect one DUT, the inspection efficiency is not good, and the number of inspections per day is limited. For this reason, it is inconvenient because the inspector must be present at some times when inspecting the equipment for 24 hours. However, it is an expensive measuring instrument and not easy to implement with multiple inspection devices.

Therefore, the problem to be solved by the present invention is to reduce the inspection time by measuring a plurality of DUTs at one time. In addition, the aim is to reduce labor for inspecting witnesses and inspections by inspection workers and lengthening automatic operation time to save labor.

[0013]

[Means for solving the problem]

 In order to solve the above problem, the configuration of the present invention is provided with the coaxial switch 12 that distributes the sweep signal from the signal generator 11 into a plurality of signals. Then, a current source 17 for applying an exciting current is provided corresponding to the plurality of DUTs. Then, the analyzer 15 having the input terminals of a plurality of channels is used. Then, a constant temperature bath 14 for accommodating a plurality of DUTs and having a predetermined environmental temperature to be inspected is provided. The plurality of DUTs are automatically measured and inspected, and the control unit 16 controls a series of executions.

As the connection, the sweep frequency output signal of the signal generator 11 is connected to the input terminal of the coaxial switch 12, the output terminal of the coaxial switch is connected to the input terminal of each DUT 13a to 13d, and The output terminal of the DUT is connected to the input terminal of the analyzer 15, and each constant current source supply signal of the current source 17 is connected to the input terminal of the corresponding DUT. The measurement control signal from the control unit 16 is connected between the signal generator 11, the coaxial switch 12, the constant temperature bath 14, the current source 17, and the analyzer 15.

[0015]

[Action]

 By providing the coaxial switch 12, the single signal generator 11 can switch the sweep frequency output signal and apply it to the DUT. Further, the analyzer 15 having a plurality of channel input terminals can connect output signals from a plurality of DUTs without providing a DUT output signal changeover switch.

In addition, by putting a plurality of DUTs in a constant temperature bath at one time for measurement, the number of temperature changes in the constant temperature bath is reduced to 1/4, and the number of heat-ups is reduced, which has the function of shortening the measurement waiting time. . Further, even if there is a DUT with a defective inspection during the measurement, other DUTs can be continuously measured, so that it also has a role of eliminating downtime loss time as in the past.

[0017]

【Example】

 Regarding the embodiment of the present invention, an embodiment of a block diagram of the configuration of the inspection device of the present invention in FIG. 1, an example of a frequency characteristic diagram of output data obtained by sweeping with the signal generator in FIG. 3, and FIG. A description will be given with reference to an example of a linearity characteristic data diagram of the oscillation frequency with respect to the excitation current.

First, the configuration will be described. The output of the signal generator 11 is provided with a high-frequency coaxial switch 12 to switch distribution and supply the output to each DUT. Switching of the coaxial switch is performed by a command from the control unit 16. The output signal of the coaxial switch is cable-connected to the input connector of each DUT 13a, 13b, 13c, 13d. Further, the current source 17 is provided with a constant current source circuit for four channels and is connected to the exciting coil of each DUT. The constant current value is set by a command from the control unit 16.

The constant temperature bath 14 is a constant temperature bath having a capacity for accommodating a plurality of DUTs, relay terminals and connectors corresponding to the plurality of DUTs are provided, and the temperature is set by a command from the control unit 16. Then, if necessary, the temperature of the constant temperature bath is PID-controlled to control the execution so that the DUT reaches a predetermined temperature in the shortest time. In addition, a temperature signal from the constant temperature bath is input to determine whether the temperature has reached the predetermined temperature.

The scalar network analyzer, which is the analyzer 15, has an input terminal of 4CH. A detector is attached to this input, and a cable from each DUT 13a, 13b, 13c, 13d output is connected to the input connector of the detector. Then, switching of the measurement channel of the analyzer is performed by a command from the control unit 16, measurement is performed for each channel in the same procedure as in the past, and the obtained frequency characteristic data is transferred to the control unit 16 for analysis. To serve.

The control unit 16 analyzes the obtained data at any time to inspect and judge, and when it is out of the allowable range 43 as in the data example of 44 of FIG. 4, or when each standard (bandwidth) of FIG. 35, ripple 34, attenuation 33) outside the allowable range, DUT is judged as non-standard product. At this point, the continuation of the measurement for the defective DUT is stopped. This eliminates wasted inspection time. In the past, a notification alarm sounded at this time, and there was a waiting time for the operator to switch to the next DUT or to heat up the constant temperature bath, which required a lot of dead time.

As described above, by measuring a plurality of DUTs at one time, for example, even when one of them is determined to be defective in the middle, the remaining three can be continuously measured as they are. it can. Therefore, the inspection will not be interrupted during the process, and the inspection can be performed without downtime.

Further, the measurement parameter can be changed for each DUT. For example, this is the case when measuring and inspecting mixed types of different operating frequency ranges or DUTs with different exciting current value span current values. As a result, it is possible to eliminate the empty DUT and use the inspection device efficiently. As described above, the control unit 16 controls the respective devices and transfers the measurement data to realize the inspection system capable of improving the throughput and operating for a long time.

[0024]

[Effect of device]

 Since the present invention is configured as described above, it has the following effects. By being able to measure and inspect a plurality of DUTs at one time, the number of temperature changes of the constant temperature bath becomes 1/4, and the time can be reduced accordingly. In other words, the number of heat ups is reduced and the measurement waiting time can be shortened. Further, even if there is a DUT with a defective inspection on the way, other DUTs can be continuously measured, so that downtime loss time is eliminated. In addition, workers are not required to be overseen at all times, which saves labor in inspection work.

Further, since four measurement inspections can be performed at one time, unmanned operation for a long time can be realized. For example, it is possible to obtain the inspection result the next morning after setting the device at night and driving at midnight for measurement inspection. As a result, effective use of the inspection device is facilitated.

[Brief description of drawings]

FIG. 1 is an embodiment of a block diagram of a configuration of an inspection apparatus of the present invention.

FIG. 2 is an example of a configuration block diagram of a conventional inspection apparatus.

FIG. 3 is an example of a frequency characteristic diagram of output data obtained by sweeping with a signal generator.

FIG. 4 is an example of a linearity characteristic data diagram of an oscillation frequency with respect to an exciting current.

[Explanation of symbols]

 11 signal generator 12 coaxial switch 13a, 13b, 13c, 13d DUT 14 thermostat 15 analyzer 16 controller 17 current source

Claims (1)

[Scope of utility model registration request] 1. In a test of characteristic data of a frequency filter, a coaxial switch (12) for distributing a sweep signal from a signal generator (11) to a plurality of current switches, and a current source for applying an exciting current corresponding to a plurality of DUTs. (1
7) and an analyzer with input terminals for multiple channels (15)
A constant temperature bath (14) capable of accommodating a plurality of DUTs and having an environmental temperature to be inspected, a control unit (16) performing a series of control for automatically measuring and inspecting a plurality of DUTs, and the above. A YIG filter inspection device characterized by the above.