JPH07157080A - Plate glass conveying device - Google Patents

Abstract

PURPOSE:To enable a plate glass to be smoothly conveyed without generating wobbling, damage, etc., caused by deviation of attitude according to the change of the width size in conveyance in the washing process when the width size of the plate glass having low strength, stiffness, thickness is changed. CONSTITUTION:When the rotation of a rotary shaft 22 for rotating a boss part 23 for placing and conveying a plate glass 14 is performed by motors 18 through helical gears 19' and spur gears 30, 30', the boss part 23 is moved by advancing and retreating stands 27' of axial advancing/retreating devices of the rotary shaft 22 by pulse motors 32 through ball screws 33. Thereby, even if the width size of the plate glass is changed, the boss part 23 is advanced and retreated together with the rotary shaft 22, and the plate glass is conveyed, and the glass plate is smoothly conveyed without being affected by attitude change or breaking stress.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The disclosed technology belongs to the technical field of cleaning large and small size plate glass used for glass for liquid crystal panels and the like.

[0002]

As is well known, it goes without saying that the improvement of civic life is based on the prosperity of various industries based on the development of science and technology, and among them, electronic devices that follow the remarkable development of modern science. So-called high-tech technology has been adopted in medical equipment, optical equipment, etc., and has made remarkable progress, and by exerting its precision as designed, it is possible to ensure that functions with complicated intricate structure of each elaborate mechanism function. Has been

In addition, in such various state-of-the-art equipments, devices, plants, etc.
Even during maintenance such as maintenance during use and operation, inspection, maintenance, etc., it is extremely important that the sophistication be maintained as designed, not to mention the interaction of each mechanism part, as well as parts parts. As the fine processing and assembly is done more and more, the attachment of contaminants such as dust and oil becomes a significant obstacle to the functioning of these mechanical devices as designed. When assembling, not only those mechanical parts themselves, but also the mating parts of each mechanical part are strictly required to be cleaned in the sub-micron unit beyond the micron unit. The demand is gradually increasing.

Of these, a single-wafer cleaning treatment is generally used for the glass of the liquid crystal panel, and in removing the oil and fat and fine dust adhered in the previous step, as shown in FIG. Washing 1 with a neutral detergent, then rinsing and washing 2 with city water or pure water, and then hot air drying 3 to clear the liquid wet state of the surface of the object to be treated.
In the meantime, if a higher level of cleaning is required, a design mode in which ultrasonic cleaning is additionally provided is used.

As shown in FIG. 8, the single-wafer cleaning process is performed by a predetermined number of conveying rollers 7 in a housing 6 set on a base 4 via predetermined stands 5, 5. , 7 ... are arranged in a row at a predetermined interval, and the inside of the housing 6 is provided with a twin cleaning step of a disk brush cleaning step 8 and a roller brush cleaning step 9 in a vertical direction in multiple stages (for example, two stages), and A shower rinse step 10 for finish cleaning is provided, and during this, an ultrasonic cleaning step is interposed by design, and then a drying step 11 using an air knife is provided.
Finally, a finish drying process 12 is provided, and the plate glass 14 carried in from the supply unit 13 is washed and carried out from the extension unit 15 to a predetermined next-stage processing process.

[0006] Thus, when the plate glass which requires sub-micron ultra cleanliness is conveyed, the plate glass 14 is placed on a roller in a point-contact manner so that the plate glass 14 is not scratched or the like. Since the generation of particles is small and the generation of scratches in the cleaning process is suppressed, the roller mounting type conveyance has been the mainstream so far and is widely used in that the effect of the brush roller cleaning is not reduced.

In the above-mentioned cleaning process, for example, the brush roller cleaning process 9 will be briefly described with reference to FIG. 9. The nylon brush or sponge brush roller 16 is supplied with a cleaning liquid 17 such as a weak alkali or a neutral detergent, and the driving motor 18 Is rotated by a predetermined amount with respect to the plate glass 14 via the mission 19 so that the brush cleaning is performed.

In the cleaning process, the sheet glass 14 conveyed in a single-wafer manner has a housing frame 2 as shown in FIG.
Rotating shaft 2 pivotally supported by seal bearing 21 on the side of 0
2 made of rubber or the like for the boss portion 23 fixed to the inner tip of
The lower edge of the ring 24 is placed on the ring 24, and the boss 23
In a posture of being held by a guide flange 25 integrally provided with the vehicle, the rotational force from the drive motor 18 'is rotated by the transmission gear mechanism 19' and is conveyed in a forward feed manner.

[0009]

By the way, the plate glass 14 carried in from the preceding step is basically of the same kind when subjected to the same cleaning treatment, but when the size in the width direction changes, the same conveyance mode is obtained. It does not appear, and the mounting posture of the plate glass 14 between the guide flanges 25, 25 changes due to the change in the width size, and as shown by the white arrow in FIG. In some cases, it is not forwarded in a parallel posture in a plan view, and as shown in (b), it is forwarded in a tilted posture in a plan view, or it receives a biasing force to cause distortion as shown in (c). When the pressure state is severe, there is a disadvantage that a biased stress as shown in (d) is applied and the state is destroyed. In the worst case, the damaged portion enters the cleaning liquid and the boss portion 23 Contamination caused by so-called particles There is a disadvantage that could occur,
As a result, there is a drawback in that submicron-level cleanliness, which requires high cleanliness, cannot be obtained.

Such a situation is unexpectedly made, and the plate glass 14
There is also a potential risk that this may occur even when different sizes are mixed in during the import process.

[0011]

It is an object of the invention of the present application to solve the problem of conveyance by changing the size of the plate glass when cleaning the plate glass used for the liquid crystal panel based on the above-mentioned prior art with a brush roller such as a nylon brush or sponge. As a technical problem to be solved, the advantages of placing and transporting plate glass by the transport roller are fully utilized, and
If there is a change in the size such as the width unexpectedly, adjust the facing interval of the rotating shaft with respect to the size,
The width of the plate glass is absorbed by shifting the width of the rotating shaft, causing no rattling, smooth feeding, no damage, etc. It is an object of the present invention to provide an excellent plate glass transporting device which is surely guaranteed to benefit the field of application of cleaning and finishing technology in the precision machine manufacturing industry and the like.

[0012]

In order to solve the above-mentioned problems, the structure of the invention of the present application, which is based on the above-mentioned claims and has the purpose of solving the above-mentioned problems, is a plate glass of a predetermined size used for a liquid crystal panel. When the plate glass is carried in from the preceding step and subjected to a predetermined cleaning process, when the plate glass is conveyed through the roller in a single-wafer manner, if the width size of the plate glass changes, in the plate glass conveying device, the roller is rotated. A plate glass is placed on a boss portion provided at the end of the rotary shaft by being given a rotational force by a drive device for the rotary shaft provided in the axial advance / retreat device of the rotary shaft, and its guide The flanges are sandwiched and connected to each other. At this time, the axial advance / retreat device of the rotary shaft is moved forward / backward in the predetermined width direction of the plate glass by an advancing / retreating drive device to absorb a change in the width size of the plate glass. Moth The product is smoothly forwarded while maintaining the carry-in posture, prevents distortion and lateral displacement, does not cause bias stress, does not cause damage, etc., is washed as designed and is transported to the next process. The technical means of doing so.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of the invention of this application will be described with reference to FIGS.
The explanation is based on the following.

It should be noted that parts that are the same as those in FIG. 7 and thereafter will be described using the same symbols.

The illustrated mode is a mode of carrying the brush cleaning of the plate glass 14 used for the liquid crystal panel. In the embodiment shown in FIGS. 1 to 4, the rotary shafts 22, 22 with respect to the plate glass 14 are moved forward and backward from the left and right sides to be widened. The plate glass 14
26 is a flat glass conveying device which is a feature of the invention of this application, and is supported by seals on both side walls of a bottomed housing 20 along bearings via bearings 21. The rotary shaft 22 has a boss portion 23 fixed to its inner end in the same manner as in the conventional mode.
Similarly to the conventional mode in which the edge portion of the plate glass 14 is placed on the lower side of the rubber O-ring 24 that is penetrated in the lower part, is sandwiched between the guide flanges 25, and is advanced by the rotation of the rotary shaft 22. Has been done.

A bearing 28 is fixed to the upper end of the stand 27 'of the axial advance / retreat device of the rotary shaft 22 provided so as to intersect with the guide bar 27 provided opposite the rotary shaft 22 of the plate glass conveying device. The rotary shaft 22 is gripped in a relatively rotatable side-direction restrained state, a spur gear 30 'is fixedly installed inside the bearing 28, and a stand 27' is advanced and retracted via a bracket 27 ''. Motor 18 as a drive
And the bearing 28 'are also fixed, and the helical gears 19', 19 'operated by the motor 18 are fixed.
Thus, the spur gear 30 is engaged with the spur gear 30 ′ to transmit the rotational force of the motor 18 as a drive device of the rotary shaft 22 to the rotary shaft 22.

In the lower part of the housing 20, the pulse motor 32 is provided on the boss portion, and the output shaft of the pulse motor 32 is provided on the boss portion via the coupling 34.
A ball screw 33 provided over the bearings 2, 32 'is adapted to rotate, and the ball screw 33 is mounted on the bearing 3
The stand 27 'is moved forward and backward through the upper and lower sides of the head 5 via the 5 to form a forward and backward drive device 31.

Then, as shown in FIG. 1, the O-ring rotating shafts 22 and 2 for mounting and connecting the plate glass 14 at both end edges thereof.
2, the axial advance / retreat device 26 of the rotary shaft is provided symmetrically with the advance / retreat drive device 31, and the drive device of the rotary shaft 22 is also provided symmetrically, and the pulse motors 32, 32 are It is electrically connected to a predetermined control device 36 so that it can operate synchronously.

Therefore, the forward / backward drive unit 31 is driven by the synchronous operation of the pulse motors 32, 32 via the control unit 36.
The axial advance / retreat device 26 of the rotary shaft 22 is moved left and right with respect to each other through the bosses 23, 23 so that the boss portions 23, 23 with respect to the plate glass 14 are separated from each other, and the width is adjusted,
During that time, the rotational force is surely applied to the rotary shafts 22 and 22 by the motor 18.

In the above-mentioned structure, the plate glass 14 carried in from the preceding step is the same as the conventional mode, and the left and right rotary shafts 22, 2 are the same.
2 is mounted on the O-ring 24 of each boss portion 23, is held by the guide flange 25 thereof, and the rotational force is transmitted by each motor 18, the helical gear 19 ', and the spur gears 30 and 30'. It is sent and transported.

If a sheet glass 14 of a different size is accidentally mixed in, or if a sheet of a different size is carried in due to a defective molding, the controller 36 detects this and the controller 36 determines a predetermined value. The pulse motor 32 is synchronously operated only for a pulse, and the ball screw 33 of the advancing / retreating drive device 31 is rotated to move the stand 27 ′ to advance / retreat the housing 20 along the guide bar 27 in a predetermined manner. Toothed gear 19 ', spur gears 30, 30'
Also moves forward and backward integrally, and the rotary shaft 22 moves forward and backward in the left-right direction as shown by the arrow while the rotational force by the motor 18 is being applied, and the optimum width for the width pulse of the sheet glass 14 to be conveyed. As shown in FIG. 3, even when the glass plates 14, 14 ′, 14 ″ whose width and size change, as shown by the white arrow in FIG. , Distortion, change, etc., therefore,
It will not be detached, dropped, or damaged, and will be transported to the next process.

During this time, the plate glass 14 (14 ', 14'')
When the size change in the width direction of one side is on one side, the control device 3
6, the pulse motor 32 on one side is rotated by a predetermined pulse in accordance with the detected change in size on one side so that the boss portion 23 on one side is moved back and forth in the width direction.

In this case, the size change of the edge portion of the plate glass 14 can be detected by a person skilled in the art without any technical difficulty such as transmitting a detection signal to the control device 36 by a reflective or transparent photoelectric detection sensor. It can be solved.

In the above embodiment, as shown in FIG. 1, the motor 18 of the drive unit for the rotary shaft 22 and the rotary shaft 2 are used to move the plate glass 14 forwards and backwards such as widthwise adjustment.
Since the two axial advance / retreat devices 26 and the advance / retreat drive device 31 are symmetrically provided, in actual operation, not only the plant is complicated and the initial cost but also the maintenance cost and the running cost are increased. If there is such a risk, that is, if highly accurate and highly efficient management control can be performed, but if the cost becomes high, the axis of the rotary shaft 22 will be the same as in the embodiment shown in FIG. The direction advancing / retreating devices 26, 26 are provided symmetrically, but the advancing / retreating drive device 32 is provided only on one side, and the power transmission device 33 'is transmitted to the other via the mission 37 to simplify the mechanism. In the embodiment shown in FIG. 6, axial advancement / retraction devices 26, 26 of the rotary shaft 22 are provided on the left and right sides, respectively. Withdrawal driving device be deployed controller 3
6, the motor 18 of the advancing / retreating device of the rotating shaft 22 on one side is provided only on the lateral side with respect to the rotating shafts 22 on both sides, and the power transmission device 33 such as a ball screw is provided. '' Through the rotary shaft 22 to the other side
It is a mode to transmit the rotational power of, in any case, the mechanism is simplified, the initial cost is reduced,
Further, it is a mode in which the operation management and maintenance costs can be reduced.

Of course, the embodiment of the invention of this application is not limited to the above-mentioned embodiments. For example, FIG.
As shown in FIG. 7, when a large number of the transport rollers 7, 7 are arranged at a predetermined interval and the transport rollers 7, 7 ... In a predetermined section can be operated at the same rotation speed, the predetermined number of the transport rollers 7, 7. 7 ... Each forward / backward drive device and rotary shaft 2
It is also possible for a person skilled in the art to freely configure the axial advance / retreat device of 2 and the advance / retreat drive device by one unit at a time, and the electrical synchronous control of these is also possible. It can be done easily.

The target plate glass 14 is of various shapes, and in actual use, it may be another metal or plastic, or a ceramic product.

In terms of design change, it goes without saying that various mechanical structures and electrical structures may be adopted as the drive device for the rotary shaft and the advance / retreat drive device for the axial advance / retreat device of the rotary shaft. That is.

[0028]

As described above, according to the invention of this application, in a plate glass conveying apparatus for cleaning a plate glass whose strength and rigidity are not so large, basically the same size is carried in and cleaned. In the process of being used for the process and the drying process, the width size may change slightly due to the molding process in the previous stage, etc. even if they are of the same type, or a pair of rotating shafts in the process where different types of the same size are loaded and transported. While the plate glass is held by the guide flange of the boss part of the boss, it is conveyed in a parallel posture when the width size fluctuates, and it shifts to an inclined posture, or the guide glass is conveyed. It comes off from the flange and falls,
Depending on the case, it is possible to reliably deal with the risk of damage due to strain stress, etc., and by detecting the width size of the conveyed sheet glass, the end boss portion of the rotating shaft that nips and conveys the sheet glass is connected to the rotating shaft. Since it can be moved back and forth in the width direction and the width can be adjusted appropriately, the change can be absorbed according to the size of the sheet glass to be conveyed, and it can be smoothly conveyed without variation, and any sheet glass is always conveyed in a parallel posture. Therefore, the excellent effect that the predetermined treatment for the plate glass in the next stage can be surely performed is exhibited.

Further, since no deformation stress or the like is applied, damage does not occur, the product yield does not decrease, and particle generation is avoided due to the damage, and ultra-precision cleaning in submicron units is designed. The excellent effect that the reliability with respect to the product accuracy is not deteriorated is also obtained from this point.

In particular, since the plate glass having an extremely thin plate has low strength and rigidity, it can be transferred very flexibly and smoothly through the boss mounting method of the rotary shaft by only changing the mechanism slightly. It has an excellent effect that the merit is maximized.

A pulse motor or the like is used as the advancing / retreating driving device of the axial advancing / retreating device of the rotary shaft to move the rotary shaft forward / backward in the width direction by pulse control, and to change the position of the boss portion at the inner end in the width direction. Therefore, there is also an effect that the merit of being able to softly convey a thin plate glass having low strength and rigidity through the boss portion can be fully utilized.

By moving the opposing rotary shafts mechanically or electrically back and forth, the forward / backward movement control is not performed by a complicated mechanism, but can be performed by a relatively simple mechanism, which is cost effective. It also has the advantage that it can be kept at a low price and does not have to rebound to the product cost.

Since a relatively simple mechanism can be used, there is an advantage that maintenance is not required so much and management control is easy.

[Brief description of drawings]

FIG. 1 is an overall schematic partial mechanism diagram of one embodiment of the invention of this application.

FIG. 2 is an enlarged cross-sectional view of a main part at a position.

FIG. 3 is a plan view of a plate glass having a variable width size.

FIG. 4 is a plan view showing a parallel posture conveyance of the plate glass.

FIG. 5 is a schematic cross-sectional view of another embodiment.

FIG. 6 is a schematic cross-sectional view of another embodiment.

FIG. 7 is a flowchart of a general cleaning process for flat glass.

FIG. 8 is a schematic vertical cross-sectional view of a cleaning / drying treatment process of plate glass based on the conventional technique.

FIG. 9 is a schematic cross-sectional view of cleaning plate glass with a blanc roller.

FIG. 10 is a cross-sectional view of a main portion of a general-purpose sheet glass for conveyance.

FIG. 11 is a schematic plan view of sheet glass transportation according to the related art.

[Explanation of symbols]

 18 Drive Device (Motor) 14 Plate Glass 22 Rotating Shaft 23 Boss 25 Guide Flange 26 Axial Advancement / Retraction Device of Rotation Shaft 31 Advance / Retract Drive Device

Claims (6)

[Claims] 1. A plate glass transporting device having a rotary shaft for transporting plate glass, which is linked to a driving device, having a boss portion for mounting an edge of a transported glass plate at a tip and a guide flange at the boss portion. A plate glass conveying apparatus, wherein the shaft is linked to an axial advance / retreat device of a rotary shaft equipped with a drive device for the rotary shaft, and the axial advance / retreat device of the rotary shaft is linked to the advance / retreat drive device. 2. A plate glass conveying apparatus according to claim 1, wherein the axially advancing / retreating device for the rotary shaft is arranged at both ends of the rotary shaft. 3. The advancing / retreating drive device is arranged on an axial advancing / retreating device of the rotating shaft on one side of the rotating shaft, and is linked to the axial advancing / retreating device of the rotating shaft on the other side via a mechanical transmission mechanism. The plate glass transporting device according to claim 2, wherein 4. The plate glass conveying apparatus according to claim 1, wherein the axial advance / retreat device for the rotary shaft is provided for a plurality of stages of rotary shafts. 5. The drive device for the rotary shaft is arranged in the axial advance / retreat device of the rotary shaft on one side of the rotary shaft, and the axial advance / retreat device of the rotary shaft on the other side is provided through a mechanical transmission mechanism. The plate glass conveying device according to claim 2, wherein the plate glass conveying device is linked with each other. 6. The advancing / retreating drive device is arranged on the axial advancing / retreating device of each rotary shaft, and is linked to a control device so as to operate synchronously.
The plate glass conveying device according to the item.