JPH0714863Y2 - チャンバ扉開閉機構 - Google Patents

チャンバ扉開閉機構

Info

Publication number
JPH0714863Y2
JPH0714863Y2 JP16815687U JP16815687U JPH0714863Y2 JP H0714863 Y2 JPH0714863 Y2 JP H0714863Y2 JP 16815687 U JP16815687 U JP 16815687U JP 16815687 U JP16815687 U JP 16815687U JP H0714863 Y2 JPH0714863 Y2 JP H0714863Y2
Authority
JP
Japan
Prior art keywords
door
latch
handle
pin
lock pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16815687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0171653U (enrdf_load_stackoverflow
Inventor
舜三 矢埜
美夫 佐々木
Original Assignee
タバイエスペック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by タバイエスペック株式会社 filed Critical タバイエスペック株式会社
Priority to JP16815687U priority Critical patent/JPH0714863Y2/ja
Publication of JPH0171653U publication Critical patent/JPH0171653U/ja
Application granted granted Critical
Publication of JPH0714863Y2 publication Critical patent/JPH0714863Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
JP16815687U 1987-11-02 1987-11-02 チャンバ扉開閉機構 Expired - Lifetime JPH0714863Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16815687U JPH0714863Y2 (ja) 1987-11-02 1987-11-02 チャンバ扉開閉機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16815687U JPH0714863Y2 (ja) 1987-11-02 1987-11-02 チャンバ扉開閉機構

Publications (2)

Publication Number Publication Date
JPH0171653U JPH0171653U (enrdf_load_stackoverflow) 1989-05-12
JPH0714863Y2 true JPH0714863Y2 (ja) 1995-04-10

Family

ID=31457086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16815687U Expired - Lifetime JPH0714863Y2 (ja) 1987-11-02 1987-11-02 チャンバ扉開閉機構

Country Status (1)

Country Link
JP (1) JPH0714863Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0171653U (enrdf_load_stackoverflow) 1989-05-12

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