JPH0714760A - Production managing method for production line - Google Patents

Abstract

PURPOSE:To pick up contaminated product and production unit in a short time by making up first to fourth lists based on the processing history of the production unit and the production history of product stored as a data base. CONSTITUTION:Operation of production units on all lines is stopped at a stage when contamination takes place in a production line and the names of production units on the line, through which a contaminated product has passed before the contamination is detected after start thereof, are read out from the production history of that product thus making up a first list. Names of products, processed before detection of the contamination after start thereof, are also read out based on the processing history of a production unit contaminated at first thus making up a second list. Furthermore, the names of production units on the line, through which each product has passed before the contamination is detected, are read out based on the production history of products on the second list thus making up a third list. A fourth list is also made up by reading out the time when a production unit listed on the first and third lists is contaminated at first.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production control method in a production line for sequentially producing products along a line composed of a plurality of production apparatuses.

[0002]

2. Description of the Related Art A manufacturing factory for manufacturing products such as semiconductor devices is equipped with a manufacturing apparatus for performing a plurality of process steps. A series of production lines are constructed by arranging. Such a manufacturing line is centrally managed by a host computer, and a processing history of each manufacturing apparatus, a manufacturing history of products flowing on the line, and the like are accumulated in a storage device as a database of the host computer online or offline.

[0003] By the way, if some kind of pollution (metal pollution, etc.) occurs during the manufacture of a product flowing on the manufacturing line, if the product as the source of the pollution flows on the manufacturing line as it is without being noticed, another manufacturing device or product is produced. Contamination spreads to the point where it causes so-called secondary pollution, tertiary pollution ... For this reason, once such contamination is found, the processing by all the manufacturing equipment is temporarily stopped, and it is checked whether the product or the manufacturing equipment that is the source of the contamination, the secondary contamination, the tertiary contamination, etc. have occurred. Need to check.

[0004]

However, when such contamination occurs, the processing history of the manufacturing equipment and the manufacturing history of the product in the database created for production control are all output and the output result is output. Based on this, it is necessary to elucidate the route of pollution that spread from the time when the pollution occurred to the time when it was found, manually by the worker. Elucidation of such a contamination route requires a great deal of labor and time, which prolongs the recovery time of the manufacturing apparatus on the manufacturing line and lowers the productivity of the product. Therefore, an object of the present invention is to provide a production control method in a production line in which contamination can be easily dealt with.

[0005]

The present invention is a production control method in a manufacturing line, which is made to solve such a problem. That is, in a production management method in a production line, in which a plurality of products are sequentially manufactured along a line constituted by a plurality of manufacturing devices, and a processing history of the manufacturing devices and a product manufacturing history are recorded, When contamination is found during processing of the product in the equipment and it is discovered, first stop the operation of all manufacturing equipment on the line, and then, between the start time of contamination and the detection time, The device name of the manufacturing device on the passed line is read from the manufacturing history of the product and recorded in the first list.

[0006] Then, based on the processing history of the first contaminated manufacturing apparatus, all the product names of the products processed by this manufacturing apparatus are read out from the start time of contamination to the discovery time, and the processing time and the 2) The device name of the manufacturing device on the line that processed the product after the processing time of the product other than the contamination source among the products indicated by the product name recorded in the 2nd list It is recorded in the third list together with the processing time read from the history.

Further, the manufacturing apparatus indicated by the apparatus name recorded in the first list and the third list obtains the contamination time at which the contaminated product is first processed, and records it in the fourth list together with the apparatus name. Among the products processed by the manufacturing device indicated by the device name recorded in the fourth list from the time of contamination to the time of discovery, there is a product name of a product not recorded in the second list only. The product name is added to the second list, the device name of the manufacturing device on the line through which the product passes from the manufacturing history of the product is added to the third list, and the device name of the manufacturing device is added to the fourth list. If it is not present, the device name is added, then manufacturing of products other than the product indicated by the product name recorded in the second list is restarted, and a device other than the manufacturing device indicated by the device name recorded in the fourth list is restarted. Manufacturing equipment So as to resume the work.

[0008]

[Operation] At the stage where pollution occurs in the manufacturing line, first stop the operation of the manufacturing equipment on all the lines, and then manufacture on the line where the source product of contamination has passed between the start time of contamination and the discovery time. The device name of the device is read from the manufacturing history of the product to create the first list. This allows
It is possible to pick up the device name of the manufacturing device that is primarily contaminated. In addition, by reading the product name processed from the start time of contamination to the discovery time based on the processing history of the first contaminated manufacturing apparatus and creating the second list,
Next you can pick up the contaminated product name.

Furthermore, based on the manufacturing history of the products recorded in the second list, the device names of the manufacturing devices on the line through which each product has passed by the discovery time are read to create the third list. You can pick up the name of the device that is secondarily contaminated. In addition, the first contamination time of the manufacturing apparatus recorded in the first list and the third list is read to create the fourth list, and the products processed by the manufacturing apparatus between the contamination time and the discovery time. If there is any item that is not recorded in the second list, it is added to the second list, and based on the manufacturing history of the product, the third list and the fourth list are added.
By adding a list and repeating this, all contaminated manufacturing apparatuses and products can be picked up. Furthermore, it becomes possible to restart the operation of the product and the manufacturing apparatus not recorded in these lists, that is, the product and the manufacturing apparatus without contamination.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the production control method in the production line of the present invention will be described below with reference to the drawings. FIG. 1 is a flow chart illustrating a production management method in a production line according to the present invention,
FIG. 2 is a block diagram of a production control device for performing the production control method. First, prior to describing the production management method of the present invention, a production management apparatus for carrying out this will be described.

That is, this production control apparatus is mainly
A host computer 1 for centrally managing the entire manufacturing line, a terminal 2 and an in-line terminal 21 connected to the host computer 1 via a communication line 20, and a manufacturing apparatus 10 on a line managed by the host computer 1.
(Although multiple units are provided, only one unit is shown in the figure)
And a line pollution coping unit 3 for coping with line pollution.

The host computer 1 includes each manufacturing apparatus 1
There are provided a storage device 11 in which processing conditions of processes by 0 are stored as a database, and a storage device 12 in which history information such as the processing history of the manufacturing apparatus 10 and the manufacturing history of products is stored as a database. Further, the line pollution coping unit 3 is provided with a storage device 31 in which the time regarding the pollution that has occurred on the line and the line pollution information of the contaminated manufacturing device, product, etc. are stored as a database.

In order to manufacture a product using this production management apparatus, first, an operator inputs various process information 4 from the terminal 2 and sends the process information 4 to the host computer 1 via the communication line 20. . The process information 4 is stored in the storage device 11 as a database of processing conditions and the like. And
An operator inputs a product (for example, lot unit) input instruction from the terminal 2, and sends the product name to be input, process information name, etc. to the host computer 1. Based on this input instruction, the host computer 1 reads the processing conditions and the like corresponding to the product name from the storage device 11, sends them to the in-line terminal 21, and sends the manufacturing device 10 information such as the processing conditions and the like.

As a result, the manufacturing apparatus 10 performs a predetermined process, and when the process is completed, the process completion notification is sent to the host computer 1 online, or the worker completes the process from the in-line terminal 21 offline. The notification is input and sent to the host computer 1. At the same time, the processing history of the manufacturing apparatus 10 and the manufacturing history of the processed products are sent to the host computer 1 and stored in a database of history information in the storage device 12. The host computer 1 comprehensively manages production of products based on the database thus accumulated.

Next, a production control method in the case where some kind of contamination occurs during the production of a product by such a production control apparatus will be described with reference to FIG. That is, step 1a
First, the product name of the contaminated product and the device name of the manufacturing device that processed the product are input from the terminal 2 or the in-line terminal 21 shown in FIG. Then, when this information is received by the host computer 1, as shown in step 1b, the manufacturing apparatuses 1 on all lines are
The respective manufacturing apparatuses 10 are notified to stop the operation of 0.

With the operation of all the manufacturing apparatuses 10 on the line stopped, the first list shown in FIG. 3 is created as the first list created in the next step 1c. That is, when a certain product A is contaminated, the manufacturing history of the product A stores the device name 3a of the manufacturing apparatus 10 on the line through which the product A passes between the time when the contamination starts and the time when the contamination is found. Read from the stored storage device 12, and the manufacturing device 10 indicated by the device name 3a and each device name 3a is the product A.
And the processing time 3b at which the processing is performed are listed to create the first list. This first list includes product A from the source of contamination.
As a result, the device name 3a of the manufacturing device 10 that is primarily contaminated is recorded.

Next, as a second list creation shown in step 1d, a second list as shown in FIG. 4 is created. This second list is based on the processing history of the apparatus name 3a at the time of starting the contamination recorded in the first list shown in FIG. 3, that is, the processing name of the apparatus name (for example, a) of the manufacturing apparatus 10 that was first contaminated.
The product name 3d processed by the manufacturing apparatus 10 indicated by the apparatus name a is picked up from the contamination start time (for example, 9:30:15) to the discovery time (for example, 11:13:30),
The product name 3d (for example, product name A, B, E, F, H) and the processing time 3b are recorded. In the second list, the secondary contaminated product name 3d is recorded.

Next, as the third list creation in step 1e, a third list as shown in FIG. 5 is created. The third list is the product name 3d recorded in the second list shown in FIG.
Products (eg product names B, E, etc.) excluding the product of the contamination source (eg product name A) until the detection of pollution.
The device name 3a of the manufacturing device 10 on the line through which F) has passed is picked up from the manufacturing history stored in the storage device 12 and recorded. That is, FIG. 5A shows the third list of the product name B, and the manufacturing apparatus 1 on the line through which the product indicated by the product name B has passed until the contamination is found.
The device name 3a of 0 (for example, a, b, g, i) and the processing time 3b when each device name 3a processed the product indicated by the product name B are recorded.

Similarly, FIG. 5B shows a third list of the product name E, which is the device name of the manufacturing device 10 on the line through which the product indicated by the product name E has passed before the detection of contamination. Three
a (for example, a and c) and the processing time 3b when each device name 3a processed the product indicated by the product name E are recorded. Further, FIG. 5C shows a third list of the product name F, and the device name 3a (for example, a ) And the processing time 3b at which the device name 3a processed the product indicated by the product name F are recorded. That is,
In the third list, the device name 3a of the manufacturing device 10 that is secondarily contaminated by passing the secondly contaminated product and its processing time 3b are listed.

Next, as the fourth list creation shown in step 1f, the fourth list shown in FIG. 6 is created. This fourth list is based on the first list shown in FIG. 3 and the third list shown in FIG. 5, and is the device name 3 recorded in each list.
The manufacturing apparatus 10 indicated by a records the time (contamination time 3e) when the contaminated product is first processed in association with the apparatus name 3a. That is, the device names 3a of all the contaminated manufacturing devices and the contamination time 3e when the manufacturing devices are contaminated.
And will be recorded. For example, in the case of the device name c, the processing time 3b recorded in the first list is 10: 5.
0:20, the processing time 3b recorded in the third list
Is 10:30:00, the earliest of these is 10: 00: 30: 00 and is recorded in the fourth list as the contamination time 3e of the manufacturing apparatus indicated by the apparatus name c.

The device name a need not be recorded in the fourth list because it is clear that this is the source of contamination. The creation of these first to fourth lists is performed by the processing in the line pollution coping unit 3 shown in FIG. 2, and each list is stored in the storage device 31 as line pollution information. It is read and updated as needed.

Next, as step 1g, each manufacturing apparatus 10 indicated by the apparatus name 3a recorded in the fourth list shown in FIG.
Searches the processing history of the manufacturing apparatus 10 stored in the storage device 12 for the product processed from each contamination time 3e to the detection of the contamination, and in the next step 1h, the product name 3d of the product is shown in FIG. It is determined whether or not it is already recorded in the second list shown. N is judged in this step 1h
If the result is o, the product name 3d recorded in the second list
There is no contaminated product other than the product indicated by, and the cancellation of the discontinuation of products other than the product indicated by the product name 3d on the second list in step 1i and the manufacturing device 10 indicated by the device name 3a on the fourth list. The cancellation of the operation suspension of the manufacturing apparatus 10 is performed. As a result, the uncontaminated product and the manufacturing apparatus 10
Only be able to get up and running.

On the other hand, if the result of the determination in step 1h is Yes, the contaminated product other than the product indicated by the product name 3d recorded in the second list (that is, the third contaminated product)
Exists, and the product name 3 in step 1k
d and the processing time 3b are added to the second list. Further, in step 1m, the manufacturing apparatus 10 on the line that has passed through until the contamination is found is searched based on the manufacturing history of the product, and if the apparatus name 3a of this manufacturing apparatus 10 is not in the fourth list, the step is performed. If the answer is 1n, the device name is 3
a (that is, the third contamination) is added to the fourth list in step 1p, and the process returns to the determination in step 1g.

If the device name 3a is recorded in the fourth list, the answer is No in step 1n, and the fourth
Manufacturing device 10 indicated by device name 3a recorded in the list
Other than that, there is no contaminated manufacturing apparatus 10, and the processing of step 1i described above is performed.

When the process returns from step 1p to step 1g, the device name 3a recorded in the fourth list again.
Each manufacturing apparatus 10 indicated by (including the apparatus name 3a added in step 1p) searches for the product processed from the contamination time 3e to the contamination discovery, and then in step 1h, the product name 3d of the product is searched. It is determined whether or not it is recorded in the second list shown in FIG. Such a series of steps 1g ~
By repeating 1p, the product names 3d of all contaminated products and the device name 3a of the manufacturing apparatus 10 are recorded in the second list and the fourth list, and finally in step 1i, the contamination is performed. It becomes possible to restart the operation of the product and the manufacturing apparatus 10 which have not been performed. Also, after the processing so far,
In step 1j, the second list and the fourth list are output and used as a record for the worker.

As described above, by creating the first to fourth lists based on the database stored in the storage device 11, that is, the processing history of the manufacturing apparatus 10 and the manufacturing history of the product, the contaminated product and the manufacturing apparatus are manufactured. 10 and 10 can be picked up in a short time without human intervention, and the operation of the uncontaminated product and the manufacturing apparatus can be restarted. The device name 3a, the product name 3d, the processing time 3b, and the contamination time 3e used in this embodiment are examples.
It is not limited to this.

[0027]

As described above, the production management method in the production line of the present invention has the following effects. In other words, based on the processing history of manufacturing equipment and the manufacturing history of products accumulated as a database, the route of pollution spread from the time when the pollution occurred to the time when it was found can be clarified reliably and easily. Therefore, the recovery time of the manufacturing apparatus can be significantly shortened. In addition, since the operation of products and manufacturing equipment that are not related to contamination can be immediately restarted, it is possible to improve the productivity of products even when contamination occurs on the production line, since it is possible to stop the operation to the minimum. Becomes

[Brief description of drawings]

FIG. 1 is a flow chart illustrating a production management method of the present invention.

FIG. 2 is a configuration diagram of a production management device.

FIG. 3 is a diagram illustrating a first list.

FIG. 4 is a diagram illustrating a second list.

5A and 5B are diagrams illustrating a third list, in which FIG. 5A is for a product name B, FIG. 5B is for a product name E, and FIG. 5C is for a product name F.

FIG. 6 is a diagram illustrating a fourth list.

[Explanation of symbols]

 1 Host Computer 2 Terminal 3 Line Pollution Counter 4 Process Information 10 Manufacturing Equipment 11 Storage Device (Processing Condition) 12 Storage Device (History Information) 20 Communication Line 31 Storage Device (Line Contamination Information)

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[Procedure amendment]

[Submission date] September 10, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] 0015

[Correction method] Change

[Correction content]

Next, a production control method in the case where some kind of contamination occurs during the production of a product by such a production control apparatus will be described with reference to FIG. First, as step 1a, at the stage when the contamination is found, each manufacturing apparatus 10 is notified to stop the operation of all the manufacturing apparatuses 10 on the line shown in FIG. Then, in the next step 1b, the product name of the contaminated product and the device name of the manufacturing device contaminated by first treating the product are input from the terminal 2 or the in-line terminal 21. It should be noted that, by reversing steps 1a and 1b, when the contamination is found, first enter the product name and the device name of the contaminated product, and then notify the operation stop of all the manufacturing devices on the line. You may

[Procedure Amendment 2]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 1

[Correction method] Change

[Correction content]

[Figure 1]

Claims (1)

[Claims] 1. A production control in a production line in which a plurality of products are sequentially produced along a line constituted by a plurality of production devices, and a processing history of the production device and a production history of the products are recorded. In the method, at the stage when the product is found to be contaminated during the treatment of the product in a manufacturing apparatus and all of the manufacturing apparatuses on the line are stopped, the operation is stopped from the start time of the contamination. Based on the processing history of the first contaminated manufacturing device, the device name of the manufacturing device on the line through which the contamination source product has passed by the discovery time is read from the manufacturing history of the product and recorded in the first list. Read all the product names of the products processed by the manufacturing apparatus from the start time to the discovery time, and record the product names together with the processing time in the second list. 2 Of the products indicated by the product name recorded in the list, the device name of the manufacturing device on the line that processed the product other than the contamination source after the processing time is read from the manufacturing history of the product, and The manufacturing time is recorded in the third list together with the processing time, and the manufacturing apparatus indicated by the apparatus name recorded in the first list and the third list obtains the contamination time at which the contaminated product is first treated, together with the apparatus name. Among the products recorded in the fourth list, the manufacturing apparatus indicated by the apparatus name recorded in the fourth list, having been processed between the contamination time and the discovery time, are recorded in the second list. The product name is added to the second list only when there is a product name of a non-existing product, and the device name of the manufacturing device on the line through which the product has passed from the manufacturing history of the product is added to the third list. Shi Further, if the device name of the manufacturing device is not in the fourth list, the device name is added, and thereafter, manufacturing of products other than the products indicated by the product names recorded in the second list is restarted, and 4. The production control method in a production line, wherein the operation of a production apparatus other than the production apparatus indicated by the apparatus name recorded in the list of No. 4 is restarted.