JPH0713212Y2 - 半導体工業での有機溶剤蒸気の検出装置 - Google Patents

半導体工業での有機溶剤蒸気の検出装置

Info

Publication number
JPH0713212Y2
JPH0713212Y2 JP1987032578U JP3257887U JPH0713212Y2 JP H0713212 Y2 JPH0713212 Y2 JP H0713212Y2 JP 1987032578 U JP1987032578 U JP 1987032578U JP 3257887 U JP3257887 U JP 3257887U JP H0713212 Y2 JPH0713212 Y2 JP H0713212Y2
Authority
JP
Japan
Prior art keywords
organic solvent
atmosphere
concentration
sensor
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987032578U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63140630U (enExample
Inventor
利浩 宇高
克之 田中
進 安永
秀夫 松崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Original Assignee
Tokuyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Priority to JP1987032578U priority Critical patent/JPH0713212Y2/ja
Publication of JPS63140630U publication Critical patent/JPS63140630U/ja
Application granted granted Critical
Publication of JPH0713212Y2 publication Critical patent/JPH0713212Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1987032578U 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置 Expired - Lifetime JPH0713212Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987032578U JPH0713212Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987032578U JPH0713212Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Publications (2)

Publication Number Publication Date
JPS63140630U JPS63140630U (enExample) 1988-09-16
JPH0713212Y2 true JPH0713212Y2 (ja) 1995-03-29

Family

ID=30839390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987032578U Expired - Lifetime JPH0713212Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Country Status (1)

Country Link
JP (1) JPH0713212Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752978A (en) * 1980-09-16 1982-03-29 Tamura Electric Works Ltd Card for recording information
JPS59230138A (ja) * 1983-06-11 1984-12-24 Horiba Ltd 有害ガス警報器

Also Published As

Publication number Publication date
JPS63140630U (enExample) 1988-09-16

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