JPH07130263A - Capacitor type sensor - Google Patents

Capacitor type sensor

Info

Publication number
JPH07130263A
JPH07130263A JP5271701A JP27170193A JPH07130263A JP H07130263 A JPH07130263 A JP H07130263A JP 5271701 A JP5271701 A JP 5271701A JP 27170193 A JP27170193 A JP 27170193A JP H07130263 A JPH07130263 A JP H07130263A
Authority
JP
Japan
Prior art keywords
strain
electrode
shaped
annular
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5271701A
Other languages
Japanese (ja)
Other versions
JP3574870B2 (en
Inventor
Hideo Morimoto
森本  英夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitta Corp
Original Assignee
Nitta Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitta Corp filed Critical Nitta Corp
Priority to JP27170193A priority Critical patent/JP3574870B2/en
Publication of JPH07130263A publication Critical patent/JPH07130263A/en
Application granted granted Critical
Publication of JP3574870B2 publication Critical patent/JP3574870B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To provide a sensor low in height with no overload in a strain motive part by constituting a force receiving part of a central shaft part in the strain distortion part and an overhung part protruded to the outward from this shaft part. CONSTITUTION:A force receiving part 3 is constituted of a dish-shaped unit 35 comprising a short shaft part 32 integrally formed with a strain distortion part 10 and a plate-shaped part 34 integrally formed with a cylinder part 33. A shaft part 30 is constituted of the short shaft part 32 and the cylinder part 33, and also constituting an overhung part 31 of the plate-shaped part 34. A erected peripheral part of the plate-shaped part 34 is placed adjacent to an annular part 11, and a press-in amount of the plate-shaped part 34 is restricted by contact with the annular part 11. An electrode part C is provided by plating in a total surface opposed to a cover unit 2 of the strain motive part 10, and four-divided electrode parts Cx+, Cx-, Cy+, Cy- are formed by etching parallelly to the electrode part C. Thus by decreasing height also with no overload acting in the strain distortion part 10, damaging a strain distortion unit 1 can be prevented.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、静電容量式センサー
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitance type sensor.

【0002】[0002]

【従来の技術】この種のセンサーとしては、例えば、図
7に示すようなものがあり、このものは同図に示すよう
に、剛性の高い環状部11内を起歪部10とすると共に
前記起歪部10の中央部に軸状の受力部3を設けて成る
起歪体1と、これを被蓋すべく設けられた蓋体2とを有
しており、前記起歪部10内面に受力部3の軸線上を中
心とした円形状の電極部Cを設けると共に、蓋体2の内
面に円形を四分割してなる電極部Cx +, Cx −, Cy
+, Cy −を設けている。また、このセンサーには、前
記電極部Cと各電極部Cx +, 電極部Cx −, 電極部C
y +, 電極部Cy−相互間の各静電容量をそれぞれ電圧
Vx +, 電極部Vx −, 電極部Vy +, 電極部Vy −に
変換できる電子装置を設けてある。
2. Description of the Related Art As a sensor of this type, for example, there is one shown in FIG. 7, which uses a highly rigid annular portion 11 as a strain generating portion 10 as well as the strain generating portion 10 described above. The strain-flexing portion 10 has a strain-generating body 1 provided with a shaft-shaped force receiving portion 3 in the center thereof, and a lid body 2 provided to cover the strain-generating portion 1. Is provided with a circular electrode portion C centered on the axis of the force receiving portion 3, and electrode portions Cx +, Cx −, Cy formed by dividing the circle into four on the inner surface of the lid body 2.
+ And Cy- are provided. In addition, this sensor includes the electrode portion C and each electrode portion Cx +, electrode portion Cx −, electrode portion C
An electronic device is provided which can convert the respective electrostatic capacities between y + and the electrode portion Cy-to the voltage Vx +, the electrode portion Vx −, the electrode portion Vy +, and the electrode portion Vy −, respectively.

【0003】したがって、このセンサーでは受力部3に
外力が作用して、電極部Cと各電極部Cx +, Cx −,
Cy +, Cy −相互間距離がそれぞれ変化して電極部C
と各電極部Cx +, 電極部Cx −, 電極部Cy +, 電極
部Cy −相互間の各静電容量が変化すると、この変化量
はそれぞれ電圧Vx +, 電極部Vx −, 電極部Vy +,
電極部Vy −に変換される。
Therefore, in this sensor, an external force acts on the force receiving portion 3 to cause the electrode portion C and each electrode portion Cx +, Cx −,
The distance between Cy + and Cy − changes and the electrode portion C changes.
When the respective electrostatic capacitances between the electrode portion Cx +, the electrode portion Cx −, the electrode portion Cy +, and the electrode portion Cy − are changed, the change amounts are the voltage Vx +, the electrode portion Vx −, the electrode portion Vy +, respectively. ,
It is converted into the electrode part Vy −.

【0004】しかしながら、このセンサーでは、ある程
度の大きさで起歪部10を変形させる必要があることか
ら受力部3を比較的長くしなければならず、このため背
丈が高くなるという問題があった。また、受力部3に必
要以上に大きな外力が作用した場合には起歪部10に過
負荷が作用することとなり、起歪体1の損傷を招くとい
う問題もあった。
However, in this sensor, since the strain-flexing portion 10 needs to be deformed to some extent, the force-receiving portion 3 must be relatively long, which causes a problem that the height becomes high. It was In addition, when an unnecessarily large external force acts on the force receiving portion 3, an overload acts on the strain generating portion 10, which causes a problem that the strain generating body 1 is damaged.

【0005】[0005]

【発明が解決しようとする課題】そこで、この発明で
は、背丈が低く且つ、起歪部に過負荷が作用することの
ない静電容量式センサーを提供することを課題とする。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a capacitance type sensor which is short in height and in which an overload does not act on a strain generating portion.

【0006】[0006]

【課題を解決するための手段】この発明は、剛性の高い
環状部11内を起歪部10とすると共に前記起歪部10
の中央部に受力部3を設けて成る起歪体1と、前記起歪
部10に対向配設された蓋体2と、前記起歪体1と蓋体
2の対向面のうち一方に具備させた電極部Cと、前記起
歪体1と蓋体2の対向面のうち他方に具備させた電極部
Cx +, Cx −, Cy +, Cy −とを有する形式の静電
容量式センサーにおいて、受力部3が、起歪部10の中
央に立設された短い軸部30とこれから外方に張出した
張出部31とから構成すると共に前記張出部31の一部
を上記環状部11に近接させ、張出部31の押し込み量
を環状部11との当接により規制している。
According to the present invention, the strain generating portion 10 is provided in the annular portion 11 having a high rigidity, and the strain generating portion 10 is provided.
On a strain-generating body 1 having a force-receiving portion 3 provided in the central portion thereof, a lid 2 arranged to face the strain-generating portion 10, and one of the facing surfaces of the strain-generating body 1 and the lid 2. A capacitance type sensor having an electrode portion C provided and electrode portions Cx +, Cx −, Cy +, Cy − provided on the other of the facing surfaces of the strain body 1 and the lid 2. In the above, the force receiving portion 3 is composed of a short shaft portion 30 standing upright in the center of the strain-flexing portion 10 and a protruding portion 31 protruding outward from the shaft portion 30, and a part of the protruding portion 31 is formed into the annular shape. The push-out amount of the overhanging portion 31 is regulated by abutting on the annular portion 11 in the vicinity of the portion 11.

【0007】[0007]

【作用】この発明は次のように作用する。この静電容量
式センサーでは、受力部3を、起歪部10の中央に立設
された短い軸部30とこれから外方に張出した張出部3
1とから構成しているから、従来の技術の欄に記載した
ものと比較して背丈は低くなる。
The present invention operates as follows. In this capacitance type sensor, the force receiving portion 3 includes a short shaft portion 30 standing upright in the center of the strain-flexing portion 10 and an overhang portion 3 extending outward from the short shaft portion 30.
Since it is composed of 1 and 1, the height is shorter than that described in the section of the prior art.

【0008】また、前記張出部31の一部を上記環状部
11に近接させ、張出部31の押し込み量を環状部11
との当接により規制しているから、起歪部10に過負荷
が作用することはなくなり、起歪体1の損傷を招くよう
なことはない。尚、このセンサーでは、張出部31の外
側部分を押し込むと、張出部31には(押込み力)×
(軸部30から押し込み位置までの距離)のモーメント
が作用し、前記張出部31を支える軸部30には前記モ
ーメントと対応する力が働く。したがって、起歪部10
が変形せしめられることとなり、これに伴い電極部Cと
各電極部Cx +, 電極部Cx −, 電極部Cy +, 電極部
Cy −相互間の各静電容量が変化するから、従来の技術
の欄に記載したセンサーと同様に前記各静電容量の変化
量をそれぞれ電圧Vx +, 電極部Vx −, 電極部Vy
+, 電極部Vy −に変換し得る。
Further, a part of the protruding portion 31 is brought close to the annular portion 11, and the pushing amount of the protruding portion 31 is set to the annular portion 11.
Since it is regulated by abutting with, the overload does not act on the strain-flexing part 10 and the strain-generating body 1 is not damaged. In this sensor, when the outer portion of the overhanging portion 31 is pushed in, the overhanging portion 31 has a (pushing force) ×
A moment (distance from the shaft portion 30 to the pushing position) acts, and a force corresponding to the moment acts on the shaft portion 30 supporting the overhang portion 31. Therefore, the strain generating unit 10
Will be deformed, and the capacitance between the electrode portion C and each electrode portion Cx +, electrode portion Cx −, electrode portion Cy +, and electrode portion Cy − will change accordingly. Similar to the sensor described in the column, the change amount of each capacitance is calculated as follows: voltage Vx +, electrode portion Vx −, electrode portion Vy
+, The electrode portion Vy − can be converted.

【0009】[0009]

【実施例】以下、この発明の構成を実施例として示した
図面に従って説明する。この実施例は、この発明の静電
容量式センサーをOA機器のコントロール用表示画面の
カーソル操作部として使用したものであって、図1や図
2に示すように、パネル面Pに設けた押込みボタンBの
押込みによりセンサーの受力部3に突起Tを介して押込
み力が作用するようにしてある。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure of the present invention will be described below with reference to the drawings shown as embodiments. In this embodiment, the capacitance type sensor of the present invention is used as a cursor operating portion of a control display screen of an office automation equipment, and as shown in FIG. 1 and FIG. The pushing force of the button B acts on the force receiving portion 3 of the sensor through the protrusion T.

【0010】この実施例の静電容量式センサーSは、図
3や図4に示すように、全体形状が円柱状に形成されて
おり、起歪体1と、蓋体2と、受力部3と、座4と、電
子装置(図示せず)により構成されている。起歪体1
は、図3や図4に示すように、剛性の高い平面視円形状
の環状部11内に、これの厚み方向中程に薄板状の起歪
部10を形成したもので、前記起歪部10にこれを変形
させる手段となる受力部3を具備させてある。
As shown in FIG. 3 and FIG. 4, the capacitance type sensor S of this embodiment is formed in a columnar shape as a whole, and has a flexure element 1, a lid body 2, and a force receiving portion. 3, a seat 4, and an electronic device (not shown). Strain body 1
As shown in FIG. 3 and FIG. 4, a thin plate-shaped strain generating portion 10 is formed in the annular portion 11 having a high rigidity in a plan view circular shape in the middle in the thickness direction thereof. 10 is provided with a force receiving portion 3 which is a means for deforming it.

【0011】この実施例では、前記受力部3は同図に示
すように、起歪部10と一体の短軸部32と、この短軸
部32に外嵌された筒部33とこれと一体の皿状部34
から成る皿状体35とから構成してあり、前記短軸部3
2と筒部33により手段の欄の軸部30を構成させると
共に皿状部34により手段の欄の張出部31を構成させ
ている。そして、皿状部34の外周立上がり部を環状部
11に近接(1〜3mm程度のギャップG)させ、皿状部
34の押し込み量を環状部11との当接により規制して
いる。
In this embodiment, the force receiving portion 3 is, as shown in the figure, a short shaft portion 32 integral with the strain-flexing portion 10, a cylindrical portion 33 fitted on the short shaft portion 32, and this. Integrated dish-shaped portion 34
And a dish-shaped body 35 composed of
2 and the cylindrical portion 33 constitute the shaft portion 30 of the means column, and the dish-shaped portion 34 constitutes the projecting portion 31 of the means column. Then, the outer peripheral rising portion of the dish-shaped portion 34 is brought close to the annular portion 11 (gap G of about 1 to 3 mm), and the pressing amount of the dish-shaped portion 34 is regulated by contact with the annular portion 11.

【0012】また、上記起歪部10の蓋体2との対向面
全面には、図5に示すように、円形状の電極部Cを設け
てあり、この電極部Cはメッキにより形成してある。蓋
体2は、図3や図4に示すように、上記環状部11と同
一直径の円形板により形成されており、起歪部10との
対向面には図6に示すように電極部Cと平行に円形板を
四分割して成る電極部Cx +, Cx −, Cy +, Cy −
をプリント基板の製造に用いられるエッチング技術によ
り形成してある。
As shown in FIG. 5, a circular electrode portion C is provided on the entire surface of the strain-flexing portion 10 facing the lid body 2. The electrode portion C is formed by plating. is there. As shown in FIGS. 3 and 4, the lid body 2 is formed of a circular plate having the same diameter as that of the annular portion 11, and the surface facing the strain-flexing portion 10 has an electrode portion C as shown in FIG. Electrode parts Cx +, Cx-, Cy +, Cy-
Are formed by an etching technique used for manufacturing a printed circuit board.

【0013】また、座4は、図3や図4に示すように、
蓋体2と同一直径の環状板により形成してある。 〔電子装置の働き〕電子装置は、電極部Cと電極部C
x +相互間,電極部Cと電極部Cx −相互間, 電極
部Cと電極部Cy +相互間, 電極部Cと電極部Cy −
相互間における静電容量の変化をそれぞれ電圧Vx +,
Vx −, Vy +, Vy −に変換されるようにしてあり、
X−X方向の押込みボタンBへの押込み力が〔(Vx
+)−(Vx −)〕に、Y−Y方向の押込みボタンBへ
の押込み力が〔(Vy +)−(Vy −)〕に、それぞれ
変換されると共にこれらの電圧の絶対値の大きさにより
カーソルの移動速度が決定されるようにしてある。
The seat 4 is, as shown in FIGS. 3 and 4,
It is formed of an annular plate having the same diameter as the lid 2. [Function of Electronic Device] The electronic device includes an electrode portion C and an electrode portion C.
x + mutual, electrode C and electrode Cx − mutual, electrode C and electrode Cy + mutual, electrode C and electrode Cy −
The change in the capacitance between them is measured by the voltage Vx +,
It is designed to be converted into Vx −, Vy +, Vy −,
The pushing force to push button B in the XX direction is [(Vx
+)-(Vx-)], and the pushing force to the pushing button B in the Y-Y direction is converted into [(Vy +)-(Vy-)], respectively, and the magnitudes of the absolute values of these voltages are converted. Is used to determine the moving speed of the cursor.

【0014】この実施例の静電容量式センサーを採用し
たOA機器では、センサー収納空間を低くでき、また、
起歪体1の損傷による機器としての故障が起きにくいも
のとなる。さらに、右と下の押込みボタンBを同時に押
し込んだ場合、カーソルは右斜め下に向かって移動する
のもとなる。また、押込みボタンB,突起T,パネル面
Pを省略し、直接、受力部3の周辺部を上から押すよう
にすれば、押込みボタンBを複数同時に押すことなく、
任意の一箇所を押すことによりその位置と強さに応じて
カーソルの方向と移動速度を調節することができる。
In the OA equipment adopting the capacitance type sensor of this embodiment, the sensor storage space can be lowered, and
The failure of the device due to the damage of the flexure element 1 is less likely to occur. Further, when the right and lower push-in buttons B are pushed at the same time, the cursor moves diagonally downward right. Further, by omitting the push-in button B, the protrusion T, and the panel surface P and directly pushing the peripheral portion of the force receiving portion 3 from above, a plurality of push-in buttons B cannot be pushed simultaneously.
By pressing an arbitrary position, the direction and the moving speed of the cursor can be adjusted according to the position and strength.

【0015】尚、上記実施例における皿状体35を合成
樹脂で構成させた場合、これに必要以上に強い押込み力
が加わっても、ある程度撓むことから前記押込み力の全
てが起歪部10の変形力として作用しないこととなり、
起歪部10の損傷が防止できる。また、上記実施例にお
いて、起歪体1側に電極部Cx +, Cx −, Cy +, C
y −を、蓋体2側に電極部Cを設けるようにしてもよ
く、他方、起歪体1を導電性を有する金属により構成せ
た場合、起歪体1の起歪部10自体が電極部Cとして機
能し、電極部Cのメッキは不要となる。
When the dish-like body 35 in the above embodiment is made of synthetic resin, even if an excessively strong pushing force is applied thereto, the dish-like body 35 bends to some extent, so that all of the pushing force is generated in the strain generating portion 10. Will not act as the deforming force of
Damage to the strain-flexing part 10 can be prevented. Further, in the above-mentioned embodiment, the electrode portions Cx +, Cx −, Cy +, C are provided on the side of the flexure element 1.
The y − may be provided with the electrode portion C on the lid body 2 side. On the other hand, when the strain body 1 is made of a conductive metal, the strain body portion 10 of the strain body 1 itself is an electrode. It functions as the portion C, and plating of the electrode portion C is unnecessary.

【0016】更に、上記実施例において、電極部Cと電
極部Cx +, Cx −, Cy +, Cy−との間に弾性を有
する非導電性部材Cを介在させるようにしてもよい。そ
して、上記実施例の電極部の形成方法ではなく、金属板
をインサートモールディングして電極部を形成してもよ
く、また、スクリーン印刷により電極部を形成するよう
にしてもよい。
Further, in the above embodiment, a non-conductive member C having elasticity may be interposed between the electrode portion C and the electrode portions Cx +, Cx −, Cy +, Cy −. Then, instead of the method of forming the electrode portion of the above-mentioned embodiment, the electrode portion may be formed by insert molding a metal plate, or the electrode portion may be formed by screen printing.

【0017】[0017]

【発明の効果】この発明は上記のような構成であるか
ら、次の効果を有する。作用に記載した内容から、背丈
が低く且つ起歪部に過負荷が作用することのない静電容
量式センサーを提供できた。
The present invention having the above-mentioned structure has the following effects. From the contents described in the action, it is possible to provide a capacitance type sensor having a short height and without causing an overload on the strain-flexing portion.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の実施例の静電容量式センサーをOA
機器のコントロール用表示画面のカーソル操作部として
使用したときの断面図。
FIG. 1 is a perspective view showing an electrostatic capacitance sensor according to an embodiment of the present invention as an OA.
Sectional drawing when using it as a cursor operation part of the display screen for control of a device.

【図2】前記OA機器のパネル面に設けた押込みボタン
の平面図。
FIG. 2 is a plan view of a push button provided on a panel surface of the OA device.

【図3】前記静電容量式センサーを部分断面した斜視
図。
FIG. 3 is a perspective view showing a partial cross section of the capacitance type sensor.

【図4】前記静電容量式センサーの断面図。FIG. 4 is a sectional view of the capacitance type sensor.

【図5】前記静電容量式センサーにおける起歪体側の電
極部の平面図。
FIG. 5 is a plan view of an electrode portion on the strain generating body side in the capacitance type sensor.

【図6】前記静電容量式センサーにおける蓋体側の電極
部の平面図。
FIG. 6 is a plan view of an electrode portion on the lid side in the capacitance type sensor.

【図7】先行技術の静電容量式センサーの断面図。FIG. 7 is a cross-sectional view of a prior art capacitive sensor.

【符号の説明】[Explanation of symbols]

1 起歪体 2 蓋体 3 受力部 10 起歪部 11 環状部 30 軸部 31 張出部 1 Strain element 2 Lid body 3 Force receiving part 10 Strain element 11 Annular part 30 Shaft part 31 Overhanging part

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 剛性の高い環状部(11)内を起歪部
(10)とすると共に前記起歪部(10)の中央部に受
力部(3)を設けて成る起歪体(1)と、前記起歪部
(10)に対向配設された蓋体(2)と、前記起歪体
(1)と蓋体(2)の対向面のうち一方に具備させた電
極部(C)と、前記起歪体(1)と蓋体(2)の対向面
のうち他方に具備させた電極部(Cx +)(Cx −)
(Cy +)(Cy −)とを有する形式の静電容量式セン
サーにおいて、受力部(3)が、起歪部(10)の中央
に立設された短い軸部(30)とこれから外方に張出し
た張出部(31)とから構成すると共に前記張出部(3
1)の一部を上記環状部(11)に近接させ、張出部
(31)の押し込み量を環状部(11)との当接により
規制したことを特徴とする静電容量式センサー。
1. A strain-generating body (1) comprising a strain-generating portion (10) in a highly rigid annular portion (11) and a force-receiving portion (3) provided at a central portion of the strain-generating portion (10). ), A lid (2) disposed opposite to the strain-flexing part (10), and an electrode part (C) provided on one of the facing surfaces of the strain-defining body (1) and the lid (2). ) And an electrode part (Cx +) (Cx −) provided on the other of the facing surfaces of the strain body (1) and the lid body (2).
In a capacitive sensor of the type having (Cy +) and (Cy −), the force receiving portion (3) has a short shaft portion (30) erected at the center of the strain-flexing portion (10) and an outer portion from this. And an overhanging portion (31) that overhangs toward one side.
A capacitance type sensor characterized in that a part of 1) is brought close to the annular portion (11) and the pushing amount of the overhanging portion (31) is regulated by contact with the annular portion (11).
JP27170193A 1993-10-29 1993-10-29 Capacitive sensor Expired - Fee Related JP3574870B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7360456B2 (en) * 2003-06-17 2008-04-22 Nitta Corporation Six-axis sensor
US7398587B2 (en) 2002-05-29 2008-07-15 Nitta Corporation Method for manufacturing a capacitance type sensor with a movable electrode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7398587B2 (en) 2002-05-29 2008-07-15 Nitta Corporation Method for manufacturing a capacitance type sensor with a movable electrode
US7360456B2 (en) * 2003-06-17 2008-04-22 Nitta Corporation Six-axis sensor

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