JPH07110575A - Photosensitive laminated material and its production - Google Patents

Abstract

PURPOSE:To produce a photosensitive laminated material with the surface cover sheet being easily released without damaging the photosensitive layer when exposure is conducted for patterning, etc., and to provide a method therefor. CONSTITUTION:A reactangular substrate 11, a photosensitive material layer 12 and a flexible plastic sheet 13 are laminated in this order to constitute the photosensitive laminated material. A part of the photosensitive material layer 12 and plastic sheet 13 is protruded from the end at least on one side of the substrate 11, the photosensitive material layer 12 is cut and separated at a position inside the end of the substrate, plastic films 15a and 15b are furnished between the lower surfaces of the photosensitive material layers 12a and 12b outside the cutting positions 14a and 14b and the surface of the end of the substrate to produce the photosensitive laminated material.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photosensitive laminated material in which a photosensitive layer is laminated on a substrate and a method for producing the same.

[0002]

2. Description of the Related Art A photosensitive laminated material obtained by laminating a photosensitive layer such as a photosensitive resin layer on a substrate such as a glass substrate or a hard resin substrate is used as a photosensitive material used for manufacturing a printed wiring board or a color filter. There is. As a method for producing such a photosensitive laminated material, a long laminated sheet obtained by laminating a photosensitive material layer and a plastic film for protecting the photosensitive material layer on a long flexible plastic sheet (support). After the rectangular laminated substrate is sequentially bonded to the surface of the photosensitive material layer of the elongated laminated sheet along the length direction, the elongated laminated sheet is cut between the substrates, and There has been proposed a method of separating each substrate on which a sheet and a photosensitive layer are laminated. When using the photosensitive laminated material produced in this way, first peel off the uppermost plastic sheet, then pattern-expose the photosensitive layer, then develop the photosensitive layer, and form a cured resin pattern on the substrate. A forming method is used.

[0003]

In a general photosensitive laminated material, the photosensitive layer (photosensitive material layer) is often formed of a photosensitive resin which is soft and does not have self-supporting property. Therefore, in the case of use by the above method, the uppermost plastic sheet (which functions as a support in the state of a long laminated sheet and a protective cover in a photosensitive laminated material) is used as a photosensitive layer. There is a problem that skill is required for the operation of stripping without damaging.

[0004]

The present invention is a rectangular substrate,
A photosensitive laminated material in which a photosensitive material layer and a flexible plastic sheet are laminated in this order, wherein a part of the photosensitive material layer and the flexible plastic sheet are projected from both ends of the substrate and The material layer is cut and separated at a position inside the substrate end, and a plastic film is disposed between the lower surface of the photosensitive material layer outside the cutting position and the substrate end surface. And a photosensitive laminated material (hereinafter, referred to as photosensitive laminated material A). The above-mentioned photosensitive laminated material A is formed on the substrate-to-be-bonded region of the photosensitive material layer while running a flexible plastic sheet, a photosensitive material layer, and an elongated laminated sheet in which a plastic film is laminated in this order. It consists of cutting out the plastic film of the part, then bonding the surface of the photosensitive material layer in the region where the plastic film is cut off to the substrate, and then cutting the laminated sheet at the position covered with the plastic film. It can be easily manufactured by the method.

The present invention also includes a rectangular substrate, a photosensitive material layer,
A flexible plastic sheet is a photosensitive laminated material laminated in this order, and the photosensitive material layer and a part of the flexible plastic sheet are protruded from one end of the substrate and the photosensitive material layer is formed. Is cut and separated at a position inside the edge of the substrate, and a plastic film is disposed between the lower surface of the photosensitive material layer outside the cutting position and the surface of the edge of the substrate. There is also a photosensitive laminated material (hereinafter, referred to as photosensitive laminated material B) characterized by. The photosensitive laminated material B is a flexible plastic sheet,
While running the long laminated sheet in which the photosensitive material layer and the plastic film are laminated in this order, cut out the plastic film in the portion above the area where the photosensitive material layer is to be joined to the substrate, and then cut the plastic film. The laminated sheet can be easily manufactured by using a method of bonding the surface of the light-sensitive material layer in the defined region to the substrate and then cutting the laminated sheet at the end of the position covered with the plastic film.

The basic structure of the photosensitive laminated material A is shown in FIG. The photosensitive laminated material A has a basic structure in which a rectangular substrate 11 (including a rectangle and a square), a photosensitive material layer 12, and a flexible plastic sheet 13 are laminated in this order. Part of each of the plastic sheets 13 (12a, 12b, 13a, 13b)
Are projected from both ends of the substrate, and the photosensitive material layer 12 is cut and separated at positions 14a and 14b inside the end of the substrate, and the photosensitive material layer on the outer side of the cut position. The plastic films 15a and 15b are disposed between the lower surface of the substrate and the surface of the end portion of the substrate.

The basic structure of the photosensitive laminated material B is shown in FIG. The photosensitive laminated material B has a basic structure in which a rectangular substrate 21 (including a rectangle and a square), a photosensitive material layer 22, and a flexible plastic sheet 23 are laminated in this order. A part (22a, 23a) of each of the flexible plastic sheets 23 is projected from an end portion on one side of the substrate, and the photosensitive material layer 22 is
Cut and separated at a position 24a inside the edge of the substrate, and a plastic film 25a is provided between the lower surface of the photosensitive material layer outside the cutting position and the surface of the edge of the substrate. Is characterized by.

Next, an example of a method for producing the photosensitive laminated material A will be described with reference to the drawings. FIG. 3 is a schematic view of an example of an apparatus (photosensitive layer laminating apparatus) that can be used for manufacturing the photosensitive laminated material A. The photosensitive layer laminating device is composed of a sheet substrate inside out part, a sheet substrate heating part, a protective film / photosensitive layer cutting part, a protective film removing part, a photosensitive layer thermocompression bonding part, a strip-shaped support cutting part, and a sheet substrate turning part. There is.

At the sheet substrate upside-down portion, the sheet substrate 32 sent by the carrying roller 33 from left to right in FIG.
Is held by the upside-down arm 35 from the lower side, lifted, the arm is rotated and turned upside down and placed on the transport roller 33, so that the thermocompression bonding surface of the sheet substrate 32 faces downward. The substrate of the inside-out arm 35 is held by using vacuum suction, a mechanical hand or the like, but the back side or the end face of the sheet substrate is always held and the surface is not in contact. Instead of the transport roller 33, roller transport, belt transport, carrier transport, robot transport or the like may be used. Backside contact conveyance may be performed until the sheet substrate 32 is turned upside down, but after turning over, the conveyance roller 33 is provided on the lower surface.
Are conveyed by the edge contact of the sheet substrate 32 so that they do not come into contact with each other.

In the sheet substrate heating section, the heater 34 heats the sheet substrate 32 to a temperature of about 50 to 110.degree. As the heater 34, a far infrared heater, a nichrome wire heater,
A hot air heater or the like can be used. The heater 34 is the seat substrate 3
It may be provided above or below 2, or both. Examples of the sheet substrate 32 include a copper clad glass epoxy resin substrate for a printed circuit board and a glass substrate.

Further, a belt-shaped support (long laminated sheet) 31 with a photosensitive layer (photosensitive material layer) with a protective film attached is unwound from a roll 43 provided separately, and while the roll-shaped support 31 is running, the protective film is provided. -In the photosensitive layer cutting portion, the protective film and the photosensitive layer are cut together at the boundary between the laminated area (area to be joined to the substrate) and the non-laminated area (area not to be joined to the substrate) (the support is not cut) Then, the protective film is removed by the protective film removing section in the laminated area (area to be joined to the substrate).

The protective film / photosensitive material layer cutting section is provided with a fixing base 39 which is movable in the conveying direction of the belt-shaped support with the photosensitive layer while holding the belt-shaped support 31 with the photosensitive layer, and the belt-shaped support 31 with the photosensitive layer. And a slide base 40 to which a cutter blade 41 is fixed.

Fixed base 3 for fixing the belt-shaped support with the photosensitive layer
Reference numeral 9 designates a belt-shaped support 31 with a photosensitive layer while fixing and holding the belt-shaped support with a photosensitive layer when the protective film and the photosensitive layer are cut.
When the protective film / photosensitive layer cutting is completed, the belt-shaped support 31 with the photosensitive layer is released,
Then return to the starting position.

On the slide base 40, a cutter blade 41 oriented at a right angle to the moving direction of the belt-shaped support 31 with a photosensitive layer.
Are arranged according to the width of the area where the protective film is left, and the protective film surface on the belt-shaped support 31 with the photosensitive layer is brought into contact with the photosensitive layer-attached belt-like support 31 with an adjustable constant blade pressure using, for example, a cylinder or a spring. Fix it as you do.

The cutting of the protective film / photosensitive layer is carried out as follows. First, the fixed base 39 holds the belt-shaped support 31 with the photosensitive layer, and the cutter blade 41 of the slide base 40 moves the belt-shaped support 31 on the fixed base 39 while moving at the same speed as the traveling speed of the belt-shaped support 31. It is pressed against the surface of the protective film of and moves in the cutting direction. The cutter blade 41 acts so as to cut only the protective film on the belt-shaped support 31 with the photosensitive layer and the photosensitive layer. Then, when the cutter blade 41 of the slide base 40 moves to at least the end of the belt-shaped support 31 with the photosensitive layer, the cutter blade 41 retracts.

In the above-mentioned protective film / photosensitive layer cutting step, since the fixing base 39 moves in synchronization with the movement of the belt-shaped support 31 with the photosensitive layer, the protective film and the photosensitive layer are cut with the photosensitive layer. Even when the belt-shaped support is running and moving, the operation is performed at right angles to the width direction of the belt-shaped support 31 with the photosensitive layer.

At the time of cutting the protective film / photosensitive layer, it is preferable to take a clean measure such as sucking dust particles with a vacuum or pushing down dust particles with a down-flow clean air to the downstream side where there is no problem of contamination. Further, in order to improve the sharpness of the cutter blade 41 and reduce the generation of chips of the photosensitive layer, the cutter blade 41 and the fixing base 39, and / or the belt-shaped support 31 with the photosensitive layer are heated to about 50 to 100 ° C. You may.

Next, the protective film removing section is located after the protective film / photosensitive layer cutting section in the transport system of the belt-shaped support with the photosensitive layer, and the adhesive tape unwinding roller 44b.
The protective film removing unit including the collecting roller 44a and the pressing roller 44c for pressing the protective film is a mechanism that moves in a direction substantially perpendicular to the plane of the belt-shaped support with the photosensitive layer.

When the cutting line of the leading part of the protective film of the belt-shaped support 31 with the photosensitive layer (the tip of the laminating area on the substrate) is conveyed to the protective film removing portion, the adhesive tape of the protective film removing unit is pressed. The roller 44c is pressed against the protective film, and the protective film and the adhesive tape come into close contact with each other. The unwinding roller 44b, the collecting roller 44a, and the pressing roller 44c of the adhesive tape rotate at the same speed as the belt-shaped support 31 with the photosensitive layer, and the protective film is stripped from the photosensitive layer and removed so as to be wound around the collecting roller 44a. To go. Then, when it comes to the front of the cut portion which is the boundary with the next non-laminated region, the protective film removing unit separates from the surface of the belt-shaped support 31 with the photosensitive layer. Therefore, only the protective film in the laminated region (region to be joined) is removed, and the protective film in the non-laminated region remains on the photosensitive layer without being wound up on the adhesive roll.

As a method for removing the protective film from the photosensitive layer of the belt-shaped support 31, electrostatic type, vacuum type, welding type, etc. can be used. The removing mechanism can be a roller, a bar, or the like. A non-contact type in which a pickup, air or the like is blown can be used. Examples of the method of removing the protective film by using a vacuum include a method of using a vacuum drum having a high vacuum chamber and a low vacuum chamber. That is,
In this method, only the part of the protective film to be removed (that is, the laminating region) under running is brought into contact with the surface of the rotating vacuum drum that is connected to the high vacuum chamber, and this is attracted and peeled off from the photosensitive layer. Since the protective film in the non-laminated region that appears subsequently runs while being in contact with the surface of the vacuum drum that is connected to the low vacuum chamber, the protective film moves to the laminating device for laminating onto the substrate sheet while being held on the photosensitive layer.

Next, in the thermocompression-bonding roller section, a pair of thermocompression-bonding rollers are provided at positions where an upper thermocompression-bonding roller 38 and a lower thermocompression-bonding roller 37 face each other above the sheet substrate, respectively. The pressure is applied to both ends of the pressure roller 38 downward by a cylinder or the like. The upper and lower thermocompression-bonding rollers 37, 38 cooperate with each other to perform thermocompression bonding of the photosensitive layer of the belt-shaped support 31 with a photosensitive layer on the sheet substrate 32 and to support and convey the sheet substrate 32. The upper and lower thermocompression-bonding rollers 37 and 38 are attached to the sheet substrate 32.
When they are not sandwiched, they face each other in a non-contact state with a gap smaller than the thickness of the sheet substrate. Thermocompression bonding rollers 37, 3
Reference numeral 8 is preferably a roller made of stainless steel or the like whose surface is covered with an elastic material such as silicone rubber. An induction heating element, a sheath heater or the like installed inside the roller 8 has a thickness of about 100.
~ Heated to about 150 ° C.

The belt-shaped support 31 with the photosensitive layer is first wound around the lower thermocompression-bonding roller 37, and its tip end is held by the suction belt 45 on the exit side of the thermocompression-bonding rollers 37 and 38. The belt 45 with suction moves at the same moving speed as that of the belt-shaped support 31 with the photosensitive layer, and the vacuum chamber 46 installed under the transport belt with holes makes the vicinity of the tip of the belt-shaped support 31 with the photosensitive layer move. It is held by suction. When the sheet substrate 32 is not continuous, the thermocompression bonding rollers 37, 38 and the belt 45 with suction are rotating in synchronization with the moving speed of the belt-shaped support 31 with the photosensitive layer while holding the belt-shaped support 31 with the photosensitive layer.

Next, the process of bonding (thermocompression bonding) the photosensitive layer to the sheet substrate will be described. When the sheet substrate 32 that has been preheated and turned inside out is sent from the left, the sheet substrate pushing-out mechanism section temporarily stops and stands by. This sheet substrate extrusion mechanism part is a protective film removal part of the belt-shaped support 31 with a photosensitive layer (a region where no protective film exists).
With a photosensitive layer that is conveyed at a constant speed so that the edge of the protective film removal portion comes to a predetermined position of the sheet substrate 32 by sensing the edge of the sheet with a sensor using a change in reflectance or transmittance. The sheet substrate 32 is pushed out between the thermocompression-bonding rollers 37 and 38 in good timing by the pushing mechanism 36 in synchronization with the belt-shaped support 1. At the same time when the sheet substrate 32 enters the gap, pressure is applied from above by the thermocompression bonding roller 38, and the belt-shaped support 31 with the photosensitive layer and the sheet substrate 32 are thermocompression bonded. Then, the sheet substrate 32
When the belt-shaped support 31 with the photosensitive layer is thermocompression-bonded to the rear end position, the pressure of the thermocompression-bonding roller 38 is released, and the pressure is slightly separated from the surface of the sheet substrate 32.

On the other hand, in the meantime, the next sheet substrate is preheated and then turned inside out, and stands by in the sheet substrate pushing mechanism section. When the above steps are completed and the sheet substrate pushing mechanism detects the leading edge of the next protective film removed portion of the belt-shaped support 31 with the photosensitive layer, similarly, the leading edge of the protective film removed portion is placed at a predetermined position on the sheet substrate. So that the sheet substrate comes in contact with the belt-like support 31 with a photosensitive layer that travels at a constant speed, and the sheet substrate is bonded to the thermocompression-bonding roller 3 in good timing.
Push it into the gap of 7, 38. As described above, the belt-shaped support 31 with the photosensitive layer and the sheet substrate are successively thermocompression-bonded successively without stopping the traveling of the belt-shaped support 31 with the photosensitive layer.

The holding of the front end of the belt-shaped support 31 with the photosensitive layer by the belt 45 with suction is a temporary holding when the sheet substrate 32 is not continuously fed to the thermocompression bonding rollers 37 and 38, and When 32 is thrown in and lamination is continuously performed, the vacuum chamber of the belt 45 with suction is inactive. Then, the sheet substrate 32 attached to the belt-shaped support 31 with the photosensitive layer is conveyed to the right side in FIG.

At the cutting portion of the belt-like support, the fixed blade 4 is provided on the lower side.
8 and the rotary blade 47 is installed on the upper side, and the belt-shaped support 31 with the photosensitive layer joined to the sheet substrate 32 moves, the protective film and the photosensitive film in the region between the sheet substrate and the next sheet substrate are moved. The portion where the layer and the layer remain together is cut, and the sheet substrate is sequentially cut off.

The belt-shaped support 31 with the photosensitive layer is thermocompression-bonded,
The separated sheet substrate 32 is conveyed to the sheet substrate return portion with the belt-like support protruding from both ends of the substrate, and the thermocompression bonded body is attached from above to the substrate return arm 4.
9, while holding the back surface, the substrate turn-up arm 49 is rotated, and the thermo-compression bonded body is turned upside down and placed on the conveying roller, so that the thermo-compression bonded surface of the sheet substrate 32 is directed upward. It is transported to the next step (not shown) or is collected in a sheet substrate cassette (not shown).

FIG. 4 shows the belt-shaped support 31 with the above-mentioned photosensitive layer.
It is sectional drawing of an example. That is, a photosensitive layer (photosensitive material layer) 51 is provided on one surface of the belt-shaped support 50, and a protective film 52 for protecting the photosensitive layer 51 is further provided on the surface of the photosensitive layer 51. As the belt-shaped support 50, a film made of polyethylene terephthalate, polypropylene or other polymer (generally 1
(Having a thickness of 0 to 200 μm) can be used. The photosensitive layer 51 is usually formed of a photopolymerizable resist, and generally has a layer thickness of 1 to 3 μm. The photopolymerizable resist is not particularly limited, and any material may be used. Further, in order to improve thermocompression bonding property, an intermediate layer may be inserted between the belt-shaped support 50 and the photosensitive layer 51. This intermediate layer can be formed of a resin such as polyvinyl alcohol, and is generally 10
It has a layer thickness of ˜50 μm.

FIG. 5 is a diagram schematically showing changes in the laminated structure in the laminating operation shown in FIG. 3 and patterning using the photosensitive laminated material of the present invention. (I)
Shows a cross section of a belt-shaped support with a photosensitive layer, which is composed of the support 50, the photosensitive layer 51, and the protective film 52, with the protective film in the laminated region (bonding region) removed. The state where the photosensitive layer surface of the belt-shaped support with the photosensitive layer and the sheet substrate 53 are thermocompression-bonded and the belt-shaped support with the photosensitive layer is cut at both ends of the substrate sheet is shown in (b). ing. The photosensitive laminated body of (B) corresponds to the photosensitive laminated material A of the present invention. Patterning using the photosensitive laminated material of (b) (after imagewise exposure, development processing,
When performing the step of obtaining a replica in which the photosensitive resin layer has been cured, grasp one (or both) of its ends,
As shown in (c), when pulled up, the support is easily peeled off from the substrate sheet to which the photosensitive layer is joined.
Therefore, in this operation, the number of accidents in which the photosensitive layer is damaged is significantly reduced. Next, as shown in (d), the photosensitive layer 51 is exposed to ultraviolet rays through the pattern mask 54 to print a pattern on the photosensitive layer 51. Then
By developing by a known method, the unexposed portion of the photosensitive layer 51 is dissolved in the developing solution, and only the exposed portion remains on the substrate sheet, and as shown in (e), patterning is performed on the sheet substrate. The formed photosensitive layer is formed. Depending on the material of the photosensitive layer, the exposed part may be developed and dissolved and the unexposed part may be left. Further, the patterned photosensitive layer may be used to form a functional image, or the remaining portion of the photosensitive layer may be used as a resist to etch the substrate.

Next, an example of an apparatus used for manufacturing the photosensitive laminated material B of the present invention, that is, an auto-cut laminator for thermocompression-bonding a belt-like support with a photosensitive layer into a sheet shape while thermocompression-bonding it Will be described with reference to FIG.

First, the structure of the automatic cut laminator will be described. As shown in FIG. 6A, in this apparatus, the sheet substrate 62 is conveyed from the left to the right by a conveyance mechanism mainly including a conveyance roller 63. A heater 64 for heating the sheet substrate is provided above and below the transport roller 63.
Is installed.

The belt-shaped support 61 with the photosensitive layer having the protective film 82 is unwound from a roll 73, and the protective film / photosensitive layer cutter 71, the protective film peeling unit 74, the rotary blade 77, and the vacuum plate 84 are provided.
And it runs between the support body holding member 86 and the fixed blade 78.

The protective film / photosensitive layer cutter 71 is movable so as to traverse the belt-like support 61 with the photosensitive layer, and is pressed against the surface of the protective film 82 with an appropriate pressure, as in the case of the apparatus shown in FIG. The protective film 82 and the photosensitive layer 81 are cut together without cutting and separating the belt-shaped support 80.

The protective film peeling unit 74 comprises an adhesive tape roll 74b, an adhesive tape pressing roller 74c and a protective film recovery roll 74a. The pressure-sensitive adhesive tape 72 unwound from the pressure-sensitive adhesive tape roll 74b is wound around the pressure-sensitive adhesive tape pressing roller 74c with the pressure-sensitive adhesive layer facing outward, and then wound up by the protective film recovery roll 74a. The adhesive tape pressing roller 74c is pressed against the surface of the protective film 82 with an appropriate pressure by the action of an air cylinder or the like. Then, the protective film recovery roll 74a rotates so as to wind up the protective film 82 according to the traveling speed of the belt-shaped support 61 with the photosensitive layer.

The rotary cutter has a rotary blade 77.
By rotating the shaft attached in the twisted state,
The rotary blade 77 and the fixed blade 78 mesh with each other, and cut so as to cross the photosensitive layer-provided belt-shaped support body 61 with the protective film located therebetween.

The vacuum plate 84 is a belt-shaped support 8
It has a function of vacuum-adsorbing 0 and can move up and down with an air cylinder.
Is attached.

The support holding member 86 holds the belt-shaped support 80 by vacuum suction during the operation of the rotary blade, and is movable left and right together with the fixed blade 78.

The thermocompression-bonding roller is composed of an upper thermocompression-bonding roller 68 and a lower thermocompression-bonding roller 67, and is opened and closed by the lever principle by the operation of the air cylinder 88.
The pressure at the time of thermocompression bonding adjusts the air pressure of the air cylinder 88. Further, the thermocompression bonding roller mechanism is movable left and right in the conveying direction. When the sheet substrate 62 is thermocompression bonded by the thermocompression bonding rollers 67 and 68, it moves to the left thermocompression operation position 90 to sandwich the sheet substrate 62, Otherwise, it is located at the right thermocompression-roller retracted position 91.

Next, the operation of the auto cut laminator will be described. First, as shown in FIG. 6A, as a preparation for laminating the belt-shaped support 61 with the photosensitive layer on the sheet substrate 62, the belt-shaped support 61 with the photosensitive layer having the protective film 82 unrolled from the upper roll 73 is prepared. The vacuum plate 84 and the support body holding member 86 suck and hold them. Then, the rotary blade 77 and the fixed blade 78 cut off the leading end portion in the moving direction of the belt-like support 61 with the photosensitive layer with the protective film, and peel off the protective film 82 from the tip of the belt-like support 61 with the photosensitive layer. At that time, the tip of the protective film is brought into close contact with the adhesive tape pressing roller 74c of the protective film peeling unit 74 and the adhesive tape 72 wound around the protective film recovery roll 74a so that no wrinkles occur. Now you are ready for the laminating (joining) operation,
The conveyance rollers 63 wait for the sheet substrate 62 to be conveyed.

As shown in FIG. 6B, at the beginning of a series of stacking operations, the transport roller 63 transports the sheet substrate 62 preheated to a predetermined temperature by a heater.
Then, based on the detection signal that the tip position 92 of the photosensitive layer stacking region approaches the thermocompression bonding operation position 90, the tip position 92 of the photosensitive layer stacking region is stopped at the thermocompression bonding position 90.

Next, the support holding member 86 and the fixed blade 78.
To a retracted position on the right side to separate the tip end of the belt-like support 61 with the photosensitive layer from the support holding member 86, and this time, the tip end (temporary heater portion) 85 of the vacuum plate 84 is provided with the belt-like support with the photosensitive layer. Adsorbing and holding the support 61,
Next, the tip of the belt-shaped support 61 with the photosensitive layer is heated by the temporary heater 85.

Next, as shown in FIG. 6C, the tip of the belt-shaped support with the photosensitive layer is pressed against the tip position 92 of the photosensitive layer stacking region of the sheet substrate 62 by a temporary heater 85 under an appropriate pressure. Then, the front end of the photosensitive laminated area of the sheet substrate and the front end of the belt-shaped support with the photosensitive layer are temporarily attached. Note that the auxiliary base 87 having the same shape as the vacuum plate 84 rises to support the sheet substrate 62 from below so that the sheet substrate 62 is not bent by the pressing pressure at this time.

On the other hand, at the time of the temporary attachment, the cutter 71 located at the rear end position 94 of the photosensitive layer laminating region of the belt-shaped support 61 with the photosensitive layer is operated to cut the protective film 82 and the photosensitive layer 81.

Next, as shown in FIG. 6 (D), the suction-holding of the belt-shaped support 61 with the photosensitive layer is released, and the vacuum plate 84 and its tip are removed from the position where the photosensitive layer is temporarily attached. At the time when the detaching operation of the vacuum plate 84 is completed, the fixed blade 78 and the support body holding member 86 move to the belt-shaped support body 80.
Approach.

The thermocompression bonding rollers 67 and 68 move from the thermocompression bonding roller retracted position to the thermocompression bonding operating position, and come into contact with the leading end position of the photosensitive layer stacking region of the sheet substrate 62 with an appropriate pressing force. The sheet substrate 62 is conveyed by the rotational force of the thermocompression bonding rollers 67 and 68 and the rotation of the conveying roller 63 is restarted, and the sheet substrate 62 is automatically supplied by the rotation of the thermocompression bonding rollers 67 and 68 while supplying the belt-shaped support 61 with a photosensitive layer. The belt-shaped support 61 with a photosensitive layer is thermocompression bonded to the photosensitive layer bonding surface of the sheet substrate 62 by a predetermined distance from the front end position to the rear end position of the photosensitive layer stacking region.

While the sheet substrate 62 and the belt-shaped support 61 with the photosensitive layer are being conveyed by the thermocompression bonding rollers 67 and 68, the protective film 82 is also peeled off and the protective film 8 is removed.
2 and the belt-shaped support 61 with a photosensitive layer obtained by cutting the photosensitive layer 81
Of the protective film 82 at the rear end position 94 of the photosensitive layer laminating area of
Is completed.

By carrying the belt-like support 61 with a photosensitive layer,
When the rear end position 95 of the region of the belt-shaped support with the photosensitive layer where the protective film 82 is left reaches the position of the cutter 71, the cutter 71 is operated to cut the protective film 82 and the photosensitive layer 81.

At the rear end position of the region where the protective film 82 of the belt-shaped support 61 with a photosensitive layer is left, the photosensitive layer 81 is not in contact with the non-laminated region of the sheet substrate 62, and the photosensitive layer of the sheet substrate to be laminated next is laminated. The position is appropriately set between the rear end of the sheet substrate 62 and the position where the rotary cutter cuts so that the protective film 82 does not remain at the front end of the area.

Next, as shown in FIG. 6E, when the cutting line at the rear end position 95 where the protective film 82 is left reaches the position of the adhesive tape pressing roller 74c, the adhesive tape pressing roller 74c is pressed again. Protective film 8
Start stripping 2.

Finally, as shown in FIG. 6 (F),
When the rear end position 93 of the photosensitive layer stacking region of the sheet substrate 62 reaches the thermocompression bonding position, the photosensitive layer-equipped belt-shaped support 61 is cut by the rotary cutter blade 77 and the fixed blade 78.

Next, the thermocompression bonding rollers 67 and 68 are opened,
Each of them returns to the thermocompression-bonding roller retreat position, and the thermocompression-bonded sheet substrate 62 is conveyed to the right by the conveyance mechanism and is sent to the next step from the apparatus. In the state of FIG. Wait until it is delivered.

FIG. 7A is an explanatory view of a sheet substrate 62 in which belt-like supports with a photosensitive layer obtained by the auto-cut laminator of FIG. 6 are laminated. The leading end of the belt-shaped support 61 with the photosensitive layer is located at the leading end position 92 in the photosensitive layer stacking region of the sheet substrate 62. Further, the rear end position of the photosensitive layer laminated region of the belt-shaped support 61 with a photosensitive layer obtained by cutting the protective film 82 and the photosensitive layer 81 is located at the rear end position 93 of the photosensitive layer laminated region of the sheet substrate 62. Sheet substrate 62
In the region from the front end position 92 to the rear end position 93 of the photosensitive layer stacking region, the photosensitive layer 81 is stacked and adheres to the sheet substrate 62.

The rear end portion of the support cut is the sheet substrate 6
2 is located outside the rear end. That is, at least from the rear end of the sheet substrate 62 to the rear end position 93 of the photosensitive layer stacking region.
The area of the sheet substrate 62 has the protective film 82.
Is not in close contact with. Further, the photosensitive layer 81 at the rear end position 93 of the photosensitive layer stacking region is cut. The photosensitive laminated body of FIG. 7A corresponds to the photosensitive laminated material B of the present invention.

Next, the method of peeling the support from the photosensitive layer of the photosensitive laminated material having the structure of FIG.
An explanation will be given with reference to (b). By holding the protruding portion of the support 61 with the photosensitive layer of the photosensitive laminated material having the configuration of FIG. 7A and pulling it upward and to the right, the position from the rear end of the sheet substrate 62 to the rear end position of the photosensitive layer laminated region Since the protective film 82 is not in close contact with the sheet substrate 62, the region (3) is easily peeled off at the interface. From the rear end position of the photosensitive layer stacking region where the photosensitive layer 81 is cut, the support 80 and the photosensitive layer 8 are formed by the adhesive force between the sheet substrate 62 and the photosensitive layer 81.
Since the adhesive force of 1 is smaller, the photosensitive layer 81 and the support 80
It is easily peeled off at the interface.

With reference to FIGS. 8 and 9, another method for peeling off the protective film of the auto-cut laminator which can be used for producing the photosensitive laminated material B of the present invention will be described. With the rotary cutter (rotary blade 117 and fixed blade 118), the protective film 122
The belt-shaped support 101 with the photosensitive layer is cut in the state of being attached. Next, in order to prepare for temporary attachment, a belt-shaped support 101 with a photosensitive layer is provided.
When the front end of the adhesive tape 112 is wound around the end of the vacuum plate 124, the adhesive tape pressing roller 114c wound with the adhesive tape 112 moves to the end of the vacuum plate 124 while unrolling the adhesive tape 112, and Adhesive tape 112 is pressed onto the tip. The adhesive tape 112 adheres to the protective film 122,
While the adhesive tape pressing roller 114c moves to a fixed position, the protective film collecting roll 114a moves to the adhesive tape 1
The protective film 122 in close contact with 12 is rolled up, and the protective film up to the rear end position of the photosensitive layer laminating region cut by the protective film / photosensitive layer cutter is peeled and collected from the belt-shaped support with the photosensitive layer.

That is, the rotary cutter (rotary blade 117 and fixed blade 118) is a belt-shaped support 10 with a photosensitive layer.
The rear end portion of the area where the first protective film 122 is left and the front end portion of the belt-shaped support 101 with a photosensitive layer to be laminated on the next sheet substrate are simultaneously cut. Also, a protective film
The photosensitive layer cutter only cuts the rear end position of the photosensitive layer laminating region of the belt-shaped support 101 with the photosensitive layer.

In the above method, since the belt-like support 101 with the photosensitive layer has the protective film 122 attached when it is cut by the rotary cutter (the rotary blade 117 and the fixed blade 118), the photosensitive layer 121 such as chips is cut off. There is an advantage that adhesion can be prevented and defects can be reduced.

By using the photosensitive laminated material of the present invention, when performing an exposure operation for patterning or the like,
Since the surface cover sheet can be easily peeled off without damaging the photosensitive layer, the patterning operation is facilitated and the process reliability is improved. Further, in the process of manufacturing the photosensitive laminated material A, it is not necessary to cut the photosensitive material layer with its surface exposed, so that a soft photosensitive material such as a photosensitive resist is scattered during the cutting work. It does not adhere to the surface of the photosensitive layer used for image formation, patterning, etc. and cause deterioration of product quality. Even in the step of manufacturing the photosensitive laminated material B, since the work of cutting the photosensitive material layer with the surface thereof exposed is reduced, a soft photosensitive material such as a photosensitive resist is scattered during the cutting work, The number of cases in which the product adheres to the surface of a photosensitive layer used for image formation, patterning, etc. and causes deterioration of product quality is reduced.

[Brief description of drawings]

FIG. 1 is a schematic view showing an example of the constitution of a photosensitive laminated material of the present invention.

FIG. 2 is a schematic view showing another example of the constitution of the photosensitive laminated material of the present invention.

FIG. 3 is a schematic view of an example of a photosensitive layer laminating apparatus used for producing the photosensitive laminated material of the present invention.

FIG. 4 is a cross-sectional view of an example of a belt-like support with a photosensitive layer (long laminated sheet) used in the present invention.

FIG. 5 is an explanatory view showing an example of a substrate patterning process using the photosensitive laminated material of the present invention.

FIG. 6 is an explanatory view of an auto-cut laminator which is an example of an apparatus used for producing a photosensitive laminated material in the present invention.

FIG. 7 is an explanatory view showing the constitution of a photosensitive laminated material obtained by the auto-cut laminator of FIG. 6 and its usage.

FIG. 8 is an explanatory view of another example of an auto-cut laminator which is an example of an apparatus used for producing a photosensitive laminated material in the present invention.

9 is an explanatory diagram illustrating an operation of the auto cut laminator of FIG. 8. FIG.

[Explanation of symbols]

 11 substrate 12 photosensitive material layer 13 flexible plastic sheet 14a cutting separation position 14b cutting separation position 15a plastic film 15b plastic film 21 substrate 22 photosensitive material layer 23 flexible plastic sheet 24a cutting separation position 25a plastic film 31 strip with photosensitive layer Support 32 Sheet Substrate 33 Conveying Roller 34 Heater 35 Substrate Turning Arm 36 Substrate Pushing Out Mechanism 37 Lower Thermocompression Roller 38 Thermocompression Roller 39 Above Fixing Base for Belt-shaped Support with Photosensitive Layer 40 Slide Stand 41 Cutter Blade 42 Adhesive Tape 43 Roll of belt-like support with photosensitive layer 44a Protective film collecting roller 44b Adhesive tape unwinding roller 44c Adhesive tape pressing roller 45 Belt with suction 46 Vacuum chamber 47 Rotary blade 4 Fixed blade 49 Substrate turning arm 50 Strip support 51 Photosensitive layer 52 Protective film 53 Sheet substrate 54 Pattern mask 61 Strip support with photosensitive layer 62 Sheet substrate 63 Conveying roller 64 Heating heater 67 Thermocompression bonding roller 68 Lower thermocompression bonding Roller 71 Protective film / photosensitive layer cutter 72 Adhesive tape 73 Roll of belt-shaped support with photosensitive layer 74 Protective film peeling unit 77 Rotary blade 78 Fixed blade 80 Belt-shaped support 84 Vacuum plate 85 Temporary heater 86 Support holding member 101 Photosensitive layer Attached belt-like support 112 Adhesive tape 117 Rotary blade 118 Fixed blade 122 Protective film

Claims (4)

[Claims] 1. A photosensitive laminated material in which a rectangular substrate, a photosensitive material layer and a flexible plastic sheet are laminated in this order, wherein the photosensitive material layer and a part of the flexible plastic sheet are on both sides of the substrate. Between the lower surface of the photosensitive material layer and the surface of the substrate end portion outside the cutting position, and the photosensitive material layer is cut and separated at a position inside the substrate end portion. A photosensitive laminated material, characterized in that a plastic film is provided on the. 2. A flexible plastic sheet, a photosensitive material layer, and a plastic film in a portion above a substrate-bonding-scheduled region of the photosensitive material layer while running a long laminated sheet in which the plastic film is laminated in this order. The film is cut out, and then the surface of the photosensitive material layer in the region where the plastic film is cut out is bonded to a substrate, and then the laminated sheet is cut at a position covered with the plastic film. A method for producing the described photosensitive laminated material. 3. A photosensitive laminated material comprising a rectangular substrate, a photosensitive material layer, and a flexible plastic sheet laminated in this order, wherein the photosensitive material layer and a part of the flexible plastic sheet are one of the substrates. Of the photosensitive material layer, and the photosensitive material layer is cut and separated at a position inside the substrate end portion, and the lower surface of the photosensitive material layer outside the cutting position and the substrate end surface. A photosensitive laminated material characterized in that a plastic film is disposed between the two. 4. A flexible plastic sheet, a photosensitive material layer, and a plastic film in a portion above a region to be joined to a substrate of the photosensitive material layer while running a long laminated sheet in which the plastic film is laminated in this order. A method comprising the steps of cutting a film, then bonding the surface of the photosensitive material layer in the region where the plastic film is cut off to a substrate, and then cutting the laminated sheet at the end of the position covered with the plastic film. 4. The method for producing the photosensitive laminated material as described in 3.