JPH0711032B2 - Method for producing Fe-Ni based alloy excellent in streak unevenness suppressing effect during etching - Google Patents

Method for producing Fe-Ni based alloy excellent in streak unevenness suppressing effect during etching

Info

Publication number
JPH0711032B2
JPH0711032B2 JP25188088A JP25188088A JPH0711032B2 JP H0711032 B2 JPH0711032 B2 JP H0711032B2 JP 25188088 A JP25188088 A JP 25188088A JP 25188088 A JP25188088 A JP 25188088A JP H0711032 B2 JPH0711032 B2 JP H0711032B2
Authority
JP
Japan
Prior art keywords
based alloy
streak unevenness
etching
during etching
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP25188088A
Other languages
Japanese (ja)
Other versions
JPH02101115A (en
Inventor
正臣 津田
俊彦 谷内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Yakin Kogyo Co Ltd
Original Assignee
Nippon Yakin Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Yakin Kogyo Co Ltd filed Critical Nippon Yakin Kogyo Co Ltd
Priority to JP25188088A priority Critical patent/JPH0711032B2/en
Priority to CA000613799A priority patent/CA1331127C/en
Priority to US07/414,539 priority patent/US5002619A/en
Priority to DE3933297A priority patent/DE3933297C2/en
Priority to FR898913114A priority patent/FR2637614B1/en
Priority to KR1019890014369A priority patent/KR920004707B1/en
Publication of JPH02101115A publication Critical patent/JPH02101115A/en
Publication of JPH0711032B2 publication Critical patent/JPH0711032B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147Alloys characterised by their composition
    • H01F1/14708Fe-Ni based alloys
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D8/00Modifying the physical properties by deformation combined with, or followed by, heat treatment
    • C21D8/005Modifying the physical properties by deformation combined with, or followed by, heat treatment of ferrous alloys
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/10Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of nickel or cobalt or alloys based thereon

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、エッチング時のスジむら抑制効果に優れるFe
−Ni系合金の製造方法に関し、特にカラーテレビブラウ
ン管のシャドウマスクや蛍光表示管等の電子機器用材料
として好適に用いられるFe−Ni系合金に関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention provides Fe, which has an excellent effect of suppressing streak unevenness during etching.
The present invention relates to a method for producing a Ni-based alloy, and more particularly to a Fe-Ni-based alloy that is preferably used as a material for electronic devices such as shadow masks for color television Braun tubes and fluorescent display tubes.

なお、本発明のかかるFe−Ni系合金は、シャドウマスク
用36Niアンバー合金、リードフレーム用42Ni合金、低熱
膨張特性や磁気的特性に着目して使用される電子,電磁
用Fe−Ni系合金、および電磁用材料として用いられるパ
ーマロイ合金などを対象としている。
Incidentally, the Fe-Ni-based alloy of the present invention, 36Ni amber alloy for shadow mask, 42Ni alloy for lead frame, electronic used for the low thermal expansion characteristics and magnetic characteristics, Fe-Ni-based alloy for electromagnetic, It also targets permalloy alloys used as electromagnetic materials.

〔従来の技術〕[Conventional technology]

カラーテレビブラウン管のシャドウマスク素材用鉄−ニ
ッケル合金鋼(Fe−Ni系合金)は、これをフォトエッチ
ング穿孔してシャドウマスクを製造する際に、白すじ模
様すなわち“スジむら”が発生する欠点のあることが指
摘されていた。
Iron-nickel alloy steel (Fe-Ni alloy) for shadow mask material of color TV cathode-ray tubes has a drawback that white streak pattern or "streak unevenness" occurs when manufacturing a shadow mask by photo-etching perforation of this steel. It was pointed out that there is.

従来、このエッチング時のスジむらの発生を抑制するた
めのいくつかの技術が提案されており、例えば特開昭60
−128253号公報に開示の技術では、普通造塊インゴット
を850℃以上に加熱後、各ヒートでのトータル断面減少
率40%以上の鍛造を施すことにより、ニッケルの成分偏
析部を軽減することを通じ、該スジむらの発生を抑制し
ている。
Heretofore, several techniques have been proposed for suppressing the occurrence of streak unevenness during etching.
According to the technology disclosed in Japanese Unexamined Patent Publication No. 128253, after heating an ordinary ingot to 850 ° C. or higher, forging with a total cross-sectional reduction rate of 40% or more in each heat is performed to reduce the nickel segregation portion. The occurrence of the streak unevenness is suppressed.

また、特開昭61−223188号公報に開示の技術は、インゴ
ット製造時の偏析防止あるいは条材製造工程中での熱処
理によるニッケルの拡散処理を施すことにより、ニッケ
ルの偏析率,偏析帯を管理して、エッチングのスジむら
を抑制している。
Further, the technology disclosed in Japanese Patent Laid-Open No. 61-223188 controls the segregation rate and segregation zone of nickel by preventing segregation during ingot production or by performing nickel diffusion treatment by heat treatment during the strip manufacturing process. Thus, uneven etching streaks are suppressed.

〔発明が解決しようとする課題〕[Problems to be Solved by the Invention]

しかしながら、特開昭60−128253号公報に開示された上
記従来技術は、トータル断面減少率が40%を超えるよう
な鍛造をすることが特徴であるが、一般にこの程度の作
業は普通に行われる負荷であり、かような方法では各種
元素の偏析がなかなか消滅せず、したがって、エッチン
グ時のスジむらの発生を防止するのには不十分であっ
た。
However, the above-mentioned conventional technique disclosed in JP-A-60-128253 is characterized in that forging is performed so that the total cross-section reduction rate exceeds 40%, but generally this degree of work is normally performed. This is a load, and segregation of various elements is not easily eliminated by such a method, and thus it was insufficient to prevent the occurrence of streak unevenness during etching.

一方、特開昭61−223188号公報に開示された上記従来技
術は、高温熱処理によるNiの拡散を通じてその成分偏析
を軽減することを特徴としているが、スラブ段階での加
熱に比べ板厚が薄いため酸化ロスが相対的に大きくな
り、歩留り低下が著しくなる点で問題点があった。
On the other hand, the above-mentioned conventional technique disclosed in Japanese Patent Laid-Open No. 61-223188 is characterized by reducing the segregation of its components through the diffusion of Ni by high temperature heat treatment, but the plate thickness is thinner than the heating at the slab stage. Therefore, there is a problem in that the oxidation loss is relatively large and the yield is significantly reduced.

特に高精度のものが要求される各種ディスプレイ用シャ
ドウマスクにおいては、穿孔される孔は民生用テレビシ
ャドウマスク孔の1/2程度の径でかつその数も2倍以上
であり、素材の良否がそのままエッチング時の孔の均一
性を左右するため、スジむらの発生を完全に回避するの
は難しく、したがってエッチング時のスジむらを完全に
抑制できないのが実情であった。
Especially in the shadow masks for various displays that require high precision, the holes to be punched are about 1/2 the diameter of the holes in consumer television shadow masks, and the number is twice or more. Since the uniformity of the holes at the time of etching is directly affected, it is difficult to completely avoid the generation of streak unevenness. Therefore, the actual situation is that streak unevenness at the time of etching cannot be completely suppressed.

本発明の目的は、かかる斯界の実情に鑑み、エッチング
時にスジむらが発生することのない合金材料、すなわち
Niを30〜80%含有するFe−Ni系合金を有利に製造する方
法を提案するところにある。
An object of the present invention is, in view of the circumstances of the art, an alloy material that does not cause streaking during etching, that is,
A method for advantageously producing a Fe-Ni alloy containing 30 to 80% Ni is being proposed.

〔課題を解決するための手段〕[Means for Solving the Problems]

そこで、本発明者らは、上述の目的を実現すべく、Fe−
Ni系合金のスジむらについて種々研究を行った。その結
果、探り得たスジむらの原因として、CやSi,Mn,Crな
どの不純物元素の成分偏析、結晶組織の相違、が主た
るものであることを突きとめた。
Therefore, the present inventors have made Fe-
Various studies were conducted on the streak unevenness of Ni-based alloys. As a result, it was found that the main causes of the uneven streaks found were component segregation of impurity elements such as C, Si, Mn, and Cr, and a difference in crystal structure.

たとえば、CやSi,Mn,Crなどの不純物元素の成分偏析部
分は、他の部分に比べると、エッチングの速度が変わる
ため、フォトエッチング穿孔時に孔形状の差異を発生し
てスジむらの原因となるのである。
For example, in the component segregated portion of the impurity element such as C, Si, Mn, and Cr, the etching speed changes as compared with the other portions, so that the difference in the hole shape is caused during the photoetching perforation, which causes streak unevenness. It will be.

一方、結晶組織の相違については、たとえば、(100)
面が多く配向している個所は、他の部分に比べると、エ
ッチングの速度が速くなって、フォトエッチング穿孔時
に孔形状の差異を生じる。これは、鋳造時の凝固組織,
すなわち特定方位を有する柱状組織の存在に起因してお
り、この柱状組織は以後の加工,熱処理段階でも消滅す
ることなく、形を変えながら圧延方向に伸ばされ、最終
的にスジむらの原因をつくることになるのである。
On the other hand, regarding the difference in crystal structure, for example, (100)
A portion where a large number of planes are oriented has a higher etching rate than other portions, resulting in a difference in hole shape during photoetching perforation. This is the solidification structure during casting,
In other words, it is caused by the existence of a columnar structure having a specific orientation. This columnar structure is elongated in the rolling direction while changing its shape without disappearing in the subsequent processing and heat treatment steps, and finally causes the streak unevenness. It will be.

このことから、本発明では、成分偏析の抑制のみならず
結晶組織の調整をも狙って、上述の課題の克服を試み
た。
From this, in the present invention, an attempt was made to overcome the above-mentioned problems, aiming at not only suppression of component segregation but also adjustment of the crystal structure.

すなわち、その課題克服の手段として本発明は、Niを30
〜80wt%含み、残部が主としてFeであるFe−Ni系合金の
インゴットを、900℃以上の温度に加熱した後、鍛練成
形比1/1.5U以上のスエ込鍛練を施し、ついでトータル断
面減少率50%以上の熱間鍛練を施すことを特徴とするエ
ッチング時のスジむらの抑制効果に優れるFe−Ni系合金
の製造方法、を提案する。
That is, as a means for overcoming the problem, the present invention provides Ni
After heating an ingot of Fe-Ni alloy containing ~ 80 wt% and the balance being mainly Fe to a temperature of 900 ° C or higher, it is subjected to swaging by a staking ratio of 1 / 1.5U or more, and then the total cross-section reduction rate. We propose a method for producing a Fe-Ni-based alloy that is excellent in the effect of suppressing streak unevenness during etching, which is characterized by performing hot forging at 50% or more.

〔作 用〕[Work]

さて、本発明において、素材についてのNi含有量の下限
を30wt%(以下は単に「%」で略記する)としたのは、
Fe−Ni系合金を上記機能材として使用する場合にこのNi
含有量が30%未満では十分な電磁気特性が発揮されず実
用に耐えないためであり、逆にNiが80%を超える場合、
電子,電磁用材料としての品質が劣化するためである。
In the present invention, the lower limit of the Ni content of the material is set to 30 wt% (hereinafter simply abbreviated as “%”)
When using a Fe-Ni alloy as the above functional material,
This is because if the content is less than 30%, sufficient electromagnetic characteristics are not exhibited and it cannot withstand practical use. Conversely, if Ni exceeds 80%,
This is because the quality of electronic and electromagnetic materials deteriorates.

次に、鍛造に先立つインゴットの加熱温度を900℃以上
とした理由は、加熱温度が900℃未満では鍛造性が劣化
し、また成分偏析を軽減することができないためであ
る。なお、加熱温度の上限は融点を超えない温度にする
ことは勿論である。
Next, the reason why the heating temperature of the ingot prior to forging is set to 900 ° C. or higher is that if the heating temperature is lower than 900 ° C., the forgeability deteriorates and the component segregation cannot be reduced. The upper limit of the heating temperature is, of course, a temperature that does not exceed the melting point.

またスエ込鍛練における鍛練成形比(以下スエ込鍛練比
という)を1/1.5U以上とした理由は、スエ込鍛練比が1/
1.5U未満では結晶の均一化を十分にはかることができず
にスジむらが発生するためである。以下に、このことを
さらに詳しく述べる。
In addition, the reason for setting the squeeze forming ratio (hereinafter referred to as the sue mixing ratio) in the swell mixing ratio to be 1 / 1.5U or more is that the sizing ratio is 1 /
This is because if it is less than 1.5 U, the crystals cannot be sufficiently homogenized and streaks occur. This will be described in more detail below.

すなわち、かかるスジむらは、鋳造時の特定方位をもつ
巨大結晶粒が、その後の加工,熱処理で消滅することな
く、形を変化させながら圧延加工により圧延方向に伸ば
されたものが起因していることが判った。しかも、本発
明者らの研究によれば、最終板厚にまで加工された際に
特定方位をもつ、結晶粒の長さの短いものは、その幅,
長さも相対的に小さくなり、エッチング穿孔時に発生す
る部分的なエッチング速度の差は見られず、したがっ
て、連続したスジむらとしては観察されなかった。とこ
ろが、この結晶粒の長さが長いものは、加工を経てもそ
の幅および長さに相当するものがそのまま,すなわち大
きいまま残存し、これがエッチング時のスジむらとなっ
たのである。
That is, such streak unevenness is caused by the fact that the giant crystal grains having a specific orientation during casting are stretched in the rolling direction by rolling while changing their shapes without disappearing in the subsequent processing and heat treatment. I knew that. Moreover, according to the research conducted by the present inventors, when the crystal grains having a specific orientation when processed to the final plate thickness have short crystal grains,
The length was also relatively small, and no partial difference in etching rate occurred during etching perforation was observed, and therefore, no continuous streak unevenness was observed. However, in the case where the crystal grains have a long length, the ones corresponding to the width and the length of the crystal grains remain as they are even after the processing, that is, they remain large, which causes stripe unevenness during etching.

このスジむらが出るか否かの限界となる結晶粒の長さ
は、スエ込鍛練によって決定し、すなわち、スエ込鍛練
比が1/1.5U未満では結晶粒の長さが長くなってスジむら
の発生を招いてしまう。
The length of the crystal grain, which is the limit of whether or not the streak unevenness appears, is determined by swaging, that is, if the swaging ratio is less than 1 / 1.5U, the length of the crystal grain becomes long and the streaking unevenness occurs. Will occur.

次に、上記スエ込鍛練に続く鍛練(実体鍛練や展伸鍛練
を含めて言う)におけるトータル断面減少率を50%以上
としたのは、50%未満では鍛造による成分偏析の軽減が
十分に達成されないためである。
Next, the total cross-section reduction rate in the exercises following the above-mentioned suede exercise (including actual exercise and wrought exercise) was set to 50% or more because if it is less than 50%, the segregation of components due to forging is sufficiently reduced. This is because it is not done.

以上のようにFe−Ni系合金のインゴットを特定の鍛造条
件で鍛練することにより、結晶粒の均質化および成分偏
析の軽減をはかってエッチング時のスジむらが抑制で
き、したがって、極めて優れたエッチング性を確保する
ことが可能である。
As described above, by forging the ingot of the Fe-Ni alloy under specific forging conditions, it is possible to suppress the streaking unevenness during the etching by homogenizing the crystal grains and reducing the segregation of the components, and therefore, an extremely excellent etching. It is possible to secure the sex.

〔実施例〕〔Example〕

第1表に、この実施例で用いたFe−Ni系合金の化学組成
および実施の条件と得られた製品の評価を示す。
Table 1 shows the chemical composition of the Fe-Ni-based alloy used in this example, the conditions of implementation, and the evaluation of the obtained product.

この第1表に示した特に本発明の対象とする合金は、電
気炉で溶解した溶融金属を、引き続いてAOD法またはVOD
法により精錬した後インゴットに造塊し、次いで、第1
表に示す条件に従って熱間鍛練を施してスラブとした
後、熱間圧延を施して5.5mm厚の熱延板としてからコイ
ルとした。その熱間圧延以降は常法に従い冷間圧延と熱
処理を適宜組合わせた常法に従う処理を行って最終製品
を得た。
The alloys shown in Table 1 and specifically targeted by the present invention are obtained by melting molten metal in an electric furnace, followed by AOD method or VOD.
After refining by the method, ingots are ingot, then the first
After hot forging according to the conditions shown in the table to make a slab, hot rolling was carried out to make a 5.5 mm thick hot rolled plate, and then a coil. After the hot rolling, the final product was obtained by performing a treatment according to a conventional method in which cold rolling and heat treatment were appropriately combined according to a conventional method.

このようにして製造した供試材料を、塩化第二鉄溶液
(比重1.45,50℃)で実際のフォトエッチング開孔を行
い、スジむら発生の有無を調査した。その結果は第1表
に示すとおりであった。
The test material produced in this manner was subjected to actual photoetching opening with a ferric chloride solution (specific gravity: 1.45, 50 ° C.) to investigate whether streaks occurred. The results are shown in Table 1.

この第1表に示すところから判るように、本発明法に従
って製造したFe−Ni系合金は、同一組成の従来法によっ
て製造したFe−Ni系合金(比較例)に比べると、エッチ
ング時のスジむらの発生はほとんど見られず、エッチン
グ用素材として優れた合金であることが明らかとなっ
た。
As can be seen from Table 1, the Fe-Ni-based alloy produced according to the method of the present invention has more streaks during etching than the Fe-Ni-based alloy (comparative example) produced by the conventional method having the same composition. Almost no unevenness was observed, which revealed that the alloy was an excellent material for etching.

〔発明の効果〕〔The invention's effect〕

以上説明したように、本発明方法によって製造したFe−
Ni系合金は、フォトエッチング穿孔後のスジむらが全く
無いため、電子,電磁材料として望ましい性質を有する
Fe−Ni系合金を提供することができる。
As described above, Fe- produced by the method of the present invention
Ni-based alloys have no streaks after photo-etching and therefore have desirable properties as electronic and electromagnetic materials.
An Fe-Ni based alloy can be provided.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】Niを30〜80wt%含み、残部が主としてFeで
あるFe−Ni系合金のインゴットを、900℃以上の温度に
加熱した後、鍛練成形比1/1.5U以上のスエ込鍛練を施
し、ついでトータル断面減少率50%以上の熱間鍛練を施
すことを特徴とするエッチング時のスジむら抑制効果に
優れるFe−Ni系合金の製造方法。
1. An ingot of a Fe-Ni alloy containing 30 to 80 wt% of Ni and the balance being mainly Fe is heated to a temperature of 900 ° C. or higher, and then swaging is carried out at a wrought forming ratio of 1 / 1.5 U or more. And a hot forging with a total cross-sectional reduction rate of 50% or more.
JP25188088A 1988-10-07 1988-10-07 Method for producing Fe-Ni based alloy excellent in streak unevenness suppressing effect during etching Expired - Lifetime JPH0711032B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP25188088A JPH0711032B2 (en) 1988-10-07 1988-10-07 Method for producing Fe-Ni based alloy excellent in streak unevenness suppressing effect during etching
CA000613799A CA1331127C (en) 1988-10-07 1989-09-27 Method of producing fe-ni series alloys having improved effect for restraining streaks during etching
US07/414,539 US5002619A (en) 1988-10-07 1989-09-29 Method of producing Fe-Ni series alloys having improved effect for restraining streaks during etching
DE3933297A DE3933297C2 (en) 1988-10-07 1989-10-05 Process for producing Fe-Ni alloy plates suitable for shadow masks of cathode ray tubes with improved resistance to the occurrence of etching strips
FR898913114A FR2637614B1 (en) 1988-10-07 1989-10-06 PROCESS FOR PRODUCING FE-NI SERIES ALLOYS HAVING IMPROVED EFFECT TO LIMIT SCRATCHES DURING ENGRAVING
KR1019890014369A KR920004707B1 (en) 1988-10-07 1989-10-06 METHOD OF PRODUCING Fe-Ni SERIES ALLOYS HAVING IMPROVED EFFECT FOR RESTRAINING STREAKS DURING ETCHING

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25188088A JPH0711032B2 (en) 1988-10-07 1988-10-07 Method for producing Fe-Ni based alloy excellent in streak unevenness suppressing effect during etching

Publications (2)

Publication Number Publication Date
JPH02101115A JPH02101115A (en) 1990-04-12
JPH0711032B2 true JPH0711032B2 (en) 1995-02-08

Family

ID=17229314

Family Applications (1)

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JP25188088A Expired - Lifetime JPH0711032B2 (en) 1988-10-07 1988-10-07 Method for producing Fe-Ni based alloy excellent in streak unevenness suppressing effect during etching

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JPH02101115A (en) 1990-04-12

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