JPH07109590A - Vacuum degreasing and cleaning device - Google Patents

Abstract

PURPOSE:To provide a vacuum degreasing and cleaning device, by which a material is cleaned without leaving any dirt on its surface. CONSTITUTION:This vacuum degreasing and cleaning device is provided with an airtight cleaning chamber 1 in which a material 2 to be cleaned is placed, a device 3 for supplying a cleaning soln. 4 to the chamber 1 and an evacuating device 9 for vacuum-drying the material 2 which has been dipped in the soln. 4, and a device 13 is further provided to shower the dipped material 2 with a fresh cleaning soln. Consequently, the dirt particle mixed in the soln. is completely removed, the cleaned material is dried, and the cleanliness of the material is improved by this simple structure.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for degreasing and cleaning an industrial product such as a semiconductor device or a precision machine by bathing it in a cleaning liquid.

[0002]

2. Description of the Related Art Conventionally, as a device for degreasing and cleaning an industrial product of this kind in a liquid bath, a cleaning liquid supply device for supplying a cleaning liquid to an airtight cleaning chamber b containing an object to be cleaned a as shown in FIG. There is known a vacuum degreasing / drying device in which a drying chamber d connected to a cleaning chamber b and connected to a true exhaust device f equipped with an oil trap i and a vacuum pump j is connected via a sluice valve e above the cleaning chamber b. The object a to be cleaned a is carried in and out through the door g on the side of the drying chamber d, and the lifting / lowering device h provided inside the drying chamber d bathes the cleaning liquid k in the cleaning chamber b. The sluice valve e is pulled up to the drying chamber d, the sluice valve e is closed, and the vacuum exhaust device f is operated to take out the vacuum-dried object a to be cleaned outside by opening the door g. Prior to this removal, nitrogen gas from a nitrogen gas source 1 connected to the drying chamber d is also introduced into the drying chamber d until the atmospheric pressure is reached. Further, as shown in FIG. 2, a vacuum degreasing / drying apparatus in which a cleaning liquid supplying / discharging device m capable of supplying / discharging a cleaning liquid to / from a cleaning chamber b accommodating an object to be cleaned a is connected and a vacuum exhaust device f is connected is also known. Has been
In this case, the object to be cleaned a is housed in the cleaning chamber b, the cleaning liquid is poured from the cleaning liquid supply / discharge device m, and after a lapse of a predetermined time, the cleaning liquid is removed and the object to be cleaned a is vacuum dried, and the nitrogen gas source 1 After introducing nitrogen gas from the above to atmospheric pressure, the cleaning chamber b
And the object to be cleaned a is taken out.

[0003]

In the conventional vacuum degreasing / drying apparatus described above, the dirt attached to the object to be cleaned is released into the cleaning liquid, and the particles of the released dirt are re-attached to the object to be cleaned and dried. However, there is a problem that the object to be cleaned remains on the surface.

It is an object of the present invention to provide a vacuum degreasing / cleaning device capable of preventing dirt from remaining on the surface of an object to be cleaned.

[0005]

According to the present invention, an airtight cleaning chamber in which an object to be cleaned is accommodated, a cleaning liquid supply device for supplying a cleaning liquid to the cleaning chamber, and an object to be cleaned which has finished a liquid bath of the cleaning liquid In a vacuum degreasing cleaning device equipped with a vacuum exhaust device for vacuum drying, a shower device for bathing a fresh cleaning liquid on the object to be cleaned after the liquid bath is provided to achieve the above object. did.

[0006]

In the cleaning chamber, the object to be cleaned is bathed in the cleaning liquid to remove dirt adhering to the cleaning liquid, and then the wet object to be cleaned is vacuum-dried. If you apply the liquid to a wet item to be washed,
The dirt particles in the cleaning liquid remaining on the surface are washed off,
The cleaning degree of the object to be cleaned is improved.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the attached drawing. In FIG. 3, reference numeral 1 is an airtight cleaning chamber in which an object to be cleaned 2 is housed, and 3 is cleaning liquid 4 distilled and purified in the cleaning chamber 1. 1 shows a cleaning liquid supply device for supplying a cleaning liquid, and a drying chamber 6 is provided above the cleaning chamber 1 via a gate valve 5. In the drying chamber 6,
A vacuum evacuation device 9 equipped with an oil trap 7 and a vacuum pump 8 and a nitrogen gas source 10 are connected to each other, and a side door 11 is opened to elevate an object to be cleaned 2 carried in and into a cleaning chamber 1 below. 12 is provided, and further, a shower device 13 for showering a fresh cleaning liquid free of contaminants to the object to be cleaned 2 in the drying position is provided. The shower device 13 is composed of, for example, a pipe equipped with a large number of nozzles, and the cleaning liquid supply device 3 is directly supplied with a cleaning liquid which is purified by distillation and is free from contaminants.

When the article 2 to be cleaned is loaded from the outside onto the elevating device 12 in the drying chamber 6, the elevating device 12 lowers the article 2 to be washed into the cleaning liquid 4 in the lower cleaning chamber 1 to wash the object to be cleaned. After the dirt adhering to the object 2 is washed off with a liquid bath, it is pulled up to the drying chamber 6 and a fresh cleaning liquid is poured from the shower device 13 onto the object 2 to be cleaned. As a result, even if dirt particles floating in the cleaning liquid 4 in the cleaning chamber 1 are reattached to the surface of the object to be cleaned 2, they are washed away by the shower. After that, the sluice valve 5 is closed, the cleaning liquid is wet-dried by vacuum drying by the vacuum exhaust device 9, nitrogen gas is introduced from the nitrogen gas source 10 to return to atmospheric pressure, and then the object to be cleaned 2 is dried from the drying chamber 6 to the outside. Take out. When vacuum drying is performed as it is after the conventional liquid bath, the degreasing rate is 9 due to redeposition of dirt particles in the cleaning liquid.
Although it was about 8%, the degreasing rate was improved to almost 100% by showering with the shower device 13.

As shown in FIG. 4, a cleaning liquid supplying / discharging device 14 capable of supplying / discharging purified cleaning liquid is connected to the cleaning chamber 1, and a lid 15 above the cleaning chamber 1 is opened / closed to eject the object 2 to be cleaned. It is also possible to adopt a configuration in which the shower device 13 and the exhaust port of the vacuum exhaust device 9 are provided above the cleaning liquid surface. In this case, the cleaning liquid is supplied and discharged in the cleaning chamber 1 with the object 2 to be cleaned, and then the shower device 13 is bathed with fresh cleaning liquid, dried by the vacuum evacuation device 13, and introduced with nitrogen gas. After returning to atmospheric pressure, the object to be cleaned 2 is taken out.

The cleaning liquid supply device 3 and the cleaning liquid supply / discharge device 1
A heater for heating the cleaning liquid was provided in the cleaning liquid storage portion of No. 4, and the heated cleaning liquid was supplied to the cleaning chamber so that the cleaning liquid could be quickly cleaned with the heated cleaning liquid. The shower device 13 is arranged from above or from the side so that a fresh cleaning liquid in which the dirt particles are not mixed is poured onto the entire object 2 to be cleaned.

[0011]

As described above, according to the present invention, the cleaning bath supply device for supplying the cleaning liquid to the cleaning chamber and the vacuum degreasing cleaning device equipped with the vacuum exhaust device for drying the object to be cleaned are provided with the liquid bath. Since the shower device for pouring fresh cleaning liquid on the cleaned object is installed, it is possible to eliminate the inconvenience that dirt particles mixed in the cleaning solution adhere to the surface of the cleaned object and dry as it is. It has the effect of improving the cleaning degree.

[Brief description of drawings]

FIG. 1 is a cutaway side view of a conventional example.

FIG. 2 is a cutaway side view of another conventional example.

FIG. 3 is a cutaway side view of an embodiment of the present invention.

FIG. 4 is a cutaway side view of another embodiment of the present invention.

[Explanation of symbols]

1 Cleaning room 2 Cleaning object 3
Cleaning liquid supply device 4 Cleaning liquid 5 Gate valve 6
Drying room 9 Vacuum exhaust device 13 Shower device 14
Cleaning liquid supply / discharge device

Claims (3)

[Claims] 1. An airtight cleaning chamber for accommodating an object to be cleaned,
In a vacuum degreasing cleaning device equipped with a cleaning liquid supply device for supplying a cleaning liquid to the cleaning chamber and a vacuum exhaust device for vacuum-drying an object to be cleaned, which has completed the liquid bath of the cleaning liquid, the liquid bath is completed. A vacuum degreasing cleaning device, which is provided with a shower device for pouring a fresh cleaning liquid onto an object to be cleaned. 2. An airtight cleaning chamber containing an object to be cleaned,
A cleaning liquid supply device for supplying a cleaning liquid to this is connected, and a drying chamber connected to the cleaning chamber is connected through a sluice valve to the cleaning chamber, and an object to be cleaned which has completed the liquid bath of the cleaning liquid in the drying chamber. The vacuum degreasing cleaning device according to claim 1, further comprising a shower device for showering a fresh cleaning liquid. 3. An airtight cleaning chamber containing an object to be cleaned,
A cleaning liquid supplying / discharging device for supplying / discharging the cleaning liquid into / from the cleaning chamber and a vacuum exhaust device for vacuum-drying an object to be cleaned which has completed the liquid bath of the cleaning liquid in the cleaning chamber are connected to each other, and the cleaning liquid bath in the cleaning chamber is connected. The vacuum degreasing / cleaning device according to claim 1, further comprising a shower device for showering a fresh cleaning liquid on the cleaned object.