JPH07109178A - Defatting of formed ceramics - Google Patents

Defatting of formed ceramics

Info

Publication number
JPH07109178A
JPH07109178A JP5258540A JP25854093A JPH07109178A JP H07109178 A JPH07109178 A JP H07109178A JP 5258540 A JP5258540 A JP 5258540A JP 25854093 A JP25854093 A JP 25854093A JP H07109178 A JPH07109178 A JP H07109178A
Authority
JP
Japan
Prior art keywords
molded body
ceramic
ceramic molded
organic binder
degreasing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5258540A
Other languages
Japanese (ja)
Inventor
Seigo Shiraishi
誠吾 白石
Kazuyuki Okano
和之 岡野
Masakazu Tanahashi
正和 棚橋
Emiko Igaki
恵美子 井垣
Wataru Sakamoto
渉 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5258540A priority Critical patent/JPH07109178A/en
Publication of JPH07109178A publication Critical patent/JPH07109178A/en
Pending legal-status Critical Current

Links

Landscapes

  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

PURPOSE:To enable high-efficiency defatting inexpensively in lowered pollution, as the occurrence of defects is inhibited in the inner structure and the residual carbon can be reduced in the final sintered product, in the defatting process for molded ceramics containing organic binder. CONSTITUTION:In the process for defatting molded ceramics containing organic binder, said binder is removed by the decomposition with heat at a temperature lower than 1000 deg.C in 100vol.% steam atmosphere or in an inert gas atmosphere containing 90 to 99.9vol.% of steam.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、主として積層セラミッ
クコンデンサなどの電極とセラミックの一体焼結タイプ
の電子部品の脱脂方法、すなわちセラミック成形体の脱
脂方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention mainly relates to a degreasing method for an electrode-ceramic integrated sintering type electronic component such as a laminated ceramic capacitor, that is, a method for degreasing a ceramic molded body.

【0002】[0002]

【従来の技術】近年、ラジオ,マイクロカセットレコー
ダ,電子チューナ,ビデオカメラ等の超小型,薄型軽量
電子機器の発展に伴い回路素子として使用される電子部
品の小型,大容量化が強く要求されるようになってき
た。これらの要求を満足する電極とセラミックの一体焼
結タイプのセラミック電子部品として、例えば積層セラ
ミックコンデンサが知られている。積層セラミックコン
デンサの製造方法としては、誘電体粉末,バインダ,可
塑剤および有機溶剤からなるスラリーを用いて、ドクタ
ーブレード法により有機フィルム上に厚さ数十μmのセ
ラミック誘電体を成形してグリーンシートを作製する。
このシートの上に内部電極を印刷したものを複数枚積み
重ねた後、圧着により積層成形体を作製し、しかる後、
チップ状に切断,脱脂,焼成後、外部電極を形成して作
製する(「絶縁誘電体セラミック」CMC社発行、塩崎
忠 監修 p.211〜227 1985年)。
2. Description of the Related Art In recent years, with the development of ultra-small, thin and lightweight electronic devices such as radios, microcassette recorders, electronic tuners, video cameras, etc., there is a strong demand for miniaturization and large capacity of electronic components used as circuit elements. It's starting to happen. A monolithic ceramic capacitor, for example, has been known as a ceramic electronic component of an integrally sintered type in which electrodes and ceramics satisfy these requirements. As a method for manufacturing a monolithic ceramic capacitor, a slurry composed of a dielectric powder, a binder, a plasticizer, and an organic solvent is used to form a ceramic dielectric having a thickness of several tens of μm on an organic film by a doctor blade method to obtain a green sheet. To make.
After stacking multiple sheets with the internal electrodes printed on this sheet, a laminated molded body is produced by pressure bonding, and then,
After cutting, degreasing, and firing into chips, an external electrode is formed (“Insulated Dielectric Ceramic” published by CMC Co., Ltd., edited by Tadashi Shiozaki, p. 211-227, 1985).

【0003】ところで従来の技術において、セラミック
成形体の脱脂方法は、有機バインダの急激な酸化分解の
発熱による製品の内部構造欠陥の抑制、さらにセラミッ
ク成形体が電極とセラミックの一体焼結タイプのセラミ
ック電子部品である場合においては、電極が酸化し体積
膨脹することに起因する最終製品における内部構造欠陥
の抑制のために、非酸化性ガス雰囲気中で有機バインダ
の分解温度以上に加熱することで行われている。さら
に、前述のセラミック成形体の脱脂方法では、前記有機
バインダの除去が不十分であり、最終焼結体に残留カー
ボンとして残り、前記残留カーボンを原因とする製品の
特性の劣化という問題があった。例えば積層セラミック
コンデンサの場合、絶縁抵抗値の早期低下を誘発すると
いう問題を有していた。この問題に対して、本発明者は
セラミック成形体の内部構造欠陥を抑制しつつ、特性の
優れた製品を得ることができるセラミック成形体の脱脂
方法として、水蒸気を5〜90体積%含む非酸化性ガス雰
囲気中、1000℃以下で加熱処理することを特徴とセラミ
ック成形体の脱脂方法を提案し(特許申請中)、検討を行
ってきた。
In the prior art, the method of degreasing a ceramic molded body is to suppress the internal structural defects of the product due to the heat generated by the rapid oxidative decomposition of the organic binder. Further, the ceramic molded body is an integrally sintered type ceramic of the electrode and the ceramic. In the case of electronic parts, in order to suppress internal structural defects in the final product due to electrode oxidation and volume expansion, heating is performed at a temperature above the decomposition temperature of the organic binder in a non-oxidizing gas atmosphere. It is being appreciated. Furthermore, in the above-mentioned method for degreasing a ceramic molded body, the removal of the organic binder is insufficient, and it remains as residual carbon in the final sintered body, and there is a problem that the characteristics of the product deteriorate due to the residual carbon. . For example, a monolithic ceramic capacitor has a problem of inducing an early decrease in insulation resistance value. In order to solve this problem, the present inventor has proposed a method for degreasing a ceramic molded body that can obtain a product having excellent characteristics while suppressing internal structural defects of the ceramic molded body. We have proposed a degreasing method for ceramic moldings (patent pending), which is characterized by heat treatment at 1000 ° C or less in a volatile gas atmosphere, and have conducted studies.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記従
来の方法では内部構造欠陥を抑制しつつ、特性の優れた
製品を得ることができるが、一方で有機バインダの熱分
解で発生する有害なガスを含む非酸化性ガスが多く排出
されるという問題点と、さらに比較的高価な非酸化性ガ
スを用いることで製造コストを引き上げ、しいては製品
の単価を高くするという問題点を有していた。本発明は
上記問題点を解決するため、内部構造欠陥を抑制しつ
つ、特性の優れた製品を有害な排気ガスを多く発生させ
ることなく、かつ安価に製造する方法を提供することを
目的とするものである。
However, although the above-mentioned conventional method can obtain a product having excellent characteristics while suppressing internal structural defects, on the other hand, harmful gas generated by thermal decomposition of the organic binder is removed. It has a problem that a large amount of non-oxidizing gas containing it is discharged, and that a relatively expensive non-oxidizing gas is used to increase the manufacturing cost and eventually increase the unit price of the product. . In order to solve the above problems, it is an object of the present invention to provide a method for producing a product having excellent characteristics while suppressing internal structural defects, at a low cost, without generating a large amount of harmful exhaust gas. It is a thing.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するた
め、本発明は、水蒸気100体積%の雰囲気中、1000℃以
下で加熱処理することにより有機バインダを分解除去す
る。または水蒸気90〜99.9体積%含む非酸化性ガス雰囲
気中、1000℃以下で加熱処理することにより有機バイン
ダを分解除去するものである。なお、上記非酸化性ガス
が窒素ガス,炭酸ガス,不活性ガスもしくは前記ガスの
混合ガスであることを特徴とするセラミック成形体の脱
脂方法である。
In order to achieve the above object, the present invention decomposes and removes the organic binder by heat treatment at 1000 ° C. or lower in an atmosphere of 100% by volume of steam. Alternatively, the organic binder is decomposed and removed by heat treatment at 1000 ° C. or lower in a non-oxidizing gas atmosphere containing 90 to 99.9% by volume of steam. The non-oxidizing gas is nitrogen gas, carbon dioxide gas, inert gas, or a mixed gas of the above gases, which is a degreasing method for a ceramic molded body.

【0006】上記セラミック成形体が、PdあるいはPd
を主要金属とする合金を電極とする電極とセラミックの
一体焼結タイプのセラミック電子部品、またはPdある
いはPdを主要金属とする合金を電極とする積層セラミ
ックコンデンサであること。さらに、上記セラミック成
形体が、NiあるいはNiを主要金属とする合金を電極と
する電極とセラミックの一体焼結タイプのセラミック電
子部品、またはNiあるいはNiを主要金属とする合金を
電極とする積層セラミックコンデンサであることを特徴
とするセラミック成形体の脱脂方法である。
The above-mentioned ceramic molded body is Pd or Pd
Electrodes and ceramics integrally-sintered ceramic electronic parts that use an alloy whose main metal is Pd, or multilayer ceramic capacitors that use Pd or an alloy whose main metal is Pd as an electrode. Further, the ceramic molded body is an integrally sintered type ceramic electronic component of an electrode and a ceramic whose electrode is Ni or an alloy whose main metal is Ni, or a laminated ceramic whose electrode is an alloy whose main metal is Ni or Ni. A degreasing method for a ceramic molded body, which is a capacitor.

【0007】[0007]

【作用】本発明者は、有機バインダの熱分解反応におい
て水蒸気を導入することにより有機バインダの熱分解反
応が促進することを見出した。すなわち、高分子有機化
合物である有機バインダが熱分解する際、水蒸気が前記
有機バインダに作用し発生する分解ガスの低分子化を促
進する。さらに有機バインダの熱分解反応は吸熱反応で
あるため、通常の非酸化性ガス(N2,CO2,Ar,He
等)より顕熱の大きい水蒸気が熱の供給源としても作用
する。
The present inventor has found that the thermal decomposition reaction of the organic binder is promoted by introducing water vapor in the thermal decomposition reaction of the organic binder. That is, when the organic binder, which is a high molecular weight organic compound, is thermally decomposed, water vapor acts on the organic binder to promote the lowering of the molecular weight of the generated decomposition gas. Further, since the thermal decomposition reaction of the organic binder is an endothermic reaction, it is a common non-oxidizing gas (N 2 , CO 2 , Ar, He).
Water vapor, which has a larger sensible heat than that, also acts as a heat source.

【0008】従来の製造方法において行われてきた水蒸
気を含む非酸化性ガス雰囲気中での脱脂では、有機バイ
ンダの急激な酸化分解の発熱による製品の内部構造欠陥
の抑制、さらにセラミック成形体が電極とセラミックの
一体焼結タイプのセラミック電子部品である場合におい
ては、電極が酸化し体積膨脹することに起因する最終製
品における内部構造欠陥の発生を抑制しつつ有機バイン
ダの除去は十分できるが、有機バインダが熱分解するこ
とで発生した有害なガスを含む非酸化性ガスが多く排出
されコストも高い。しかしながら、本発明による脱脂方
法を用いれば、水蒸気100体積%の雰囲気中あるいは水
蒸気を90〜99.9体積%含む非酸化性ガス雰囲気中では、
従来の脱脂方法と同様に有機バインダの急激な酸化分解
による発熱はなく、さらにセラミック成形体が電極とセ
ラミックの一体焼結タイプのセラミック電子部品である
場合においては、電極が酸化し体積膨脹することはない
ので内部構造欠陥の発生は抑制される。また水蒸気を導
入したことによる有機バインダの効率の良い熱分解特性
は維持され、有機バインダの除去は十分行われる。さら
に有機バインダの熱分解により発生した比較的低分子の
分解ガスは、供給した水蒸気に大部分が溶解してしまう
ので有害な排気ガスは著しく減少する。また一般に水蒸
気に比べ高価なN2,CO2,Ar,He等の非酸化性ガス
を用いることがないか、あるいは用いたとしても従来法
に比べ非酸化性ガスの使用量が少なくてすむので製造コ
ストを低減せしめ、しいては製品の単価を引き下げるこ
とが可能となる。
Degreasing in a non-oxidizing gas atmosphere containing water vapor, which has been carried out in the conventional manufacturing method, suppresses internal structural defects of the product due to heat generation due to abrupt oxidative decomposition of the organic binder, and the ceramic molded body is used as an electrode. In the case of a ceramic electronic component of the integral sintering type of ceramics and ceramics, the organic binder can be sufficiently removed while suppressing the occurrence of internal structural defects in the final product due to the oxidation and volume expansion of the electrodes. A large amount of non-oxidizing gas including harmful gas generated by thermal decomposition of the binder is discharged, and the cost is high. However, if the degreasing method according to the present invention is used, in an atmosphere of 100% by volume of steam or in a non-oxidizing gas atmosphere containing 90 to 99.9% by volume of steam,
As in the conventional degreasing method, there is no heat generation due to the rapid oxidative decomposition of the organic binder, and when the ceramic molded body is a ceramic electronic component of the integrally sintered type of electrode and ceramic, the electrode oxidizes and the volume expands. Therefore, the occurrence of internal structural defects is suppressed. Further, the efficient thermal decomposition characteristics of the organic binder due to the introduction of the water vapor are maintained, and the organic binder is sufficiently removed. Further, the decomposed gas of relatively low molecular weight generated by the thermal decomposition of the organic binder is mostly dissolved in the supplied steam, so that harmful exhaust gas is significantly reduced. Further, in general, non-oxidizing gas such as N 2 , CO 2 , Ar and He which is more expensive than steam is not used, or even if it is used, the amount of non-oxidizing gas used is smaller than that in the conventional method. It is possible to reduce the manufacturing cost and eventually the unit price of the product.

【0009】[0009]

【実施例】以下に本発明の第1の実施例の積層セラミッ
クコンデンサの製造方法について説明する。第1の実施
例では、BaTiO3を主成分とする誘電体粉末と有機バ
インダからなる誘電体スラリーを厚さ30μmにドクター
ブレード法により成形した後乾燥させたものの上に、電
極として市販のPd電極ペーストを厚さ3μmにスクリー
ン印刷法により形成したグリーンシートを用意した。前
記グリーンシートを20枚積み重ねた後、圧着により積層
成形体を作製した。前記積層成形体に含まれる有機バイ
ンダ成分は10重量%であった。第1の実施例としては、
前記積層成形体を、昇温速度200℃/min,最高温度600
℃,保持時間2hの温度スケジュールを用いて熱処理す
ることで有機バインダの除去を行った。
EXAMPLE A method of manufacturing a monolithic ceramic capacitor according to a first example of the present invention will be described below. In the first embodiment, a commercially available Pd electrode was used as an electrode on a dielectric slurry composed of a dielectric powder containing BaTiO 3 as a main component and an organic binder and having a thickness of 30 μm formed by a doctor blade method and then dried. A green sheet was prepared by forming the paste to a thickness of 3 μm by a screen printing method. After stacking 20 of the green sheets, a laminated molded body was produced by pressure bonding. The organic binder component contained in the laminated compact was 10% by weight. As a first embodiment,
The laminated molded body is heated at a heating rate of 200 ° C / min and a maximum temperature of 600
The organic binder was removed by heat treatment using a temperature schedule of ° C and a holding time of 2 hours.

【0010】[0010]

【外1】 [Outer 1]

【0011】本発明による実施例における有機バインダ
の除去に伴う排気ガスは従来例に比べ著しく少なかっ
た。
The exhaust gas accompanying the removal of the organic binder in the embodiment of the present invention was significantly smaller than that in the conventional example.

【0012】両有機バインダ除去方法による試料の残留
カーボン量を測定し比較検討を行った。(表1)に有機バ
インダ除去後の残留カーボン量の結果およびそれぞれの
場合の排気ガス量を示す。本発明による第1の実施例は
従来例に比べ同等の有機バインダの除去効果があり、か
つ有害な排気ガスが減少することが確認された。
[0012] The residual carbon amount of the sample was measured by both organic binder removal methods, and a comparative study was conducted. (Table 1) shows the result of the residual carbon amount after removing the organic binder and the exhaust gas amount in each case. It was confirmed that the first example according to the present invention has the same effect of removing the organic binder as that of the conventional example and reduces harmful exhaust gas.

【0013】[0013]

【表1】 [Table 1]

【0014】さらに両試料をN2ガス雰囲気下1320℃,
2h焼成し、積層セラミックコンデンサを得た。前記積
層セラミックコンデンサの内部構造欠陥の発生状況の観
察および絶縁抵抗の寿命試験(試験条件150℃,DC128
V印加)を行い特性を比較した。(表2)にその結果を示
す。(表2)において内部構造欠陥の発生状況はそれぞれ
20個の試料についての発生状況を示し、また寿命試験結
果は、いずれの場合においても初期値が1×109Ω以上
であった20個の試料のうち半数が1×107Ω以下になっ
た時間を示した。
Further, both samples were subjected to a N 2 gas atmosphere at 1320 ° C.
It was fired for 2 hours to obtain a monolithic ceramic capacitor. Observation of the occurrence of internal structural defects in the multilayer ceramic capacitor and insulation resistance life test (test conditions 150 ° C, DC128
V was applied) and the characteristics were compared. The results are shown in (Table 2). In Table 2, the occurrence status of internal structural defects is
The occurrence status is shown for 20 samples, and the life test results show that in all cases, the initial value was 1 × 10 9 Ω or more, and half of the 20 samples were 1 × 10 7 Ω or less. Showed the time.

【0015】[0015]

【表2】 [Table 2]

【0016】(表2)の結果から、第1の実施例による脱
脂方法内部構造欠陥の発生は抑制されていることがわか
る。また、従来例に比べ製品の寿命特性が同等であるこ
とが確認された。また一般に水蒸気に比べ高価なN2
CO2,Ar,He等の非酸化性ガスを用いなかったので
製造コストが低減されたことは言うまでもないことであ
る。
From the results shown in Table 2, it can be seen that the occurrence of internal structural defects in the degreasing method according to the first embodiment is suppressed. It was also confirmed that the life characteristics of the product were comparable to those of the conventional example. In addition, N 2 , which is generally more expensive than steam,
It goes without saying that the manufacturing cost was reduced because no non-oxidizing gas such as CO 2 , Ar or He was used.

【0017】次に第2の実施例として、前記第1の実施
例と同一の積層成形体を、昇温速度200℃/min,最高温
度600℃,保持時間2hの温度スケジュールを用いて熱
処理することで有機バインダの除去を行った。
Next, as a second embodiment, the same laminated compact as in the first embodiment is heat treated using a temperature schedule of a temperature rising rate of 200 ° C./min, a maximum temperature of 600 ° C. and a holding time of 2 hours. Thus, the organic binder was removed.

【0018】[0018]

【外2】 [Outside 2]

【0019】本発明による第2の実施例における有機バ
インダの除去に伴う排気ガスは従来例に比べ著しく少な
かった。
The exhaust gas accompanying the removal of the organic binder in the second embodiment according to the present invention was significantly smaller than that in the conventional example.

【0020】上記それぞれの脱脂方法による試料の残留
カーボン量を測定し比較検討を行った。(表3)に有機バ
インダ除去後の残留カーボン量の結果およびそれぞれの
場合の排気ガス量を示す。本発明による第2の実施例は
従来例に比べ、同等の有機バインダの除去効果があり、
かつ有害な排気ガスが減少することが確認された。
The amount of residual carbon in the sample by each of the above degreasing methods was measured and a comparative study was conducted. Table 3 shows the result of the residual carbon amount after removing the organic binder and the exhaust gas amount in each case. The second embodiment according to the present invention has the same effect of removing the organic binder as compared with the conventional example.
It was also confirmed that harmful exhaust gas was reduced.

【0021】[0021]

【表3】 [Table 3]

【0022】さらに両試料をN2ガス雰囲気下1320℃,
2h焼成し、積層セラミックコンデンサを得た。前記積
層セラミックコンデンサの内部構造欠陥の発生状況の観
察および絶縁抵抗の寿命試験(試験条件150℃,DC128
V印加)を行い特性を比較した。(表4)に結果を示す。
(表4)において内部構造欠陥の発生状況は各実施例によ
るそれぞれ20個の試料についての発生状況を示し、また
寿命試験結果は、いずれの実施例においても初期値が1
×109Ω以上であった20個の試料のうち半数が1×107Ω
以下になった時間を示した。
Further, both samples were subjected to N 2 gas atmosphere at 1320 ° C.
It was fired for 2 hours to obtain a monolithic ceramic capacitor. Observation of the occurrence of internal structural defects in the multilayer ceramic capacitor and insulation resistance life test (test conditions 150 ° C, DC128
V was applied) and the characteristics were compared. The results are shown in (Table 4).
In Table 4, the occurrence of internal structural defects is shown for each of the 20 samples according to each example, and the life test result shows that the initial value is 1 in any of the examples.
Of the 20 samples that were more than × 10 9 Ω, half were 1 × 10 7 Ω
The time when it became below was shown.

【0023】[0023]

【表4】 [Table 4]

【0024】(表4)の結果から、いずれの第2実施例に
よる脱脂方法でも内部構造欠陥の発生は抑制されている
ことがわかる。また従来例に比べ製品の寿命特性が同等
であることが確認された。また一般に水蒸気に比べ高価
なN2,CO2,Ar,He等の非酸化性ガスを多く用いな
かったので製造コストが低減されたことは言うまでもな
いことである。
From the results shown in Table 4, it can be seen that the occurrence of internal structural defects is suppressed by any of the degreasing methods according to the second embodiment. It was also confirmed that the life characteristics of the product were comparable to those of the conventional example. Further, it is needless to say that the manufacturing cost has been reduced because a large amount of non-oxidizing gas such as N 2 , CO 2 , Ar and He, which is generally more expensive than steam, is not used.

【0025】本実施例においてはPdを電極とする積層
セラミックコンデンサを取り上げたが、セラミック成形
体がNiあるいはNiを主要金属とする合金を電極とする
電極とセラミックの一体焼結タイプのセラミック電子部
品である場合においても、本発明による脱脂方法を用い
れば本実施例と同様な効果により、有機バインダの急激
な酸化分解による発熱は起こらず、かつ電極の酸化は発
生しない。したがって、これらのことに起因する内部構
造欠陥の発生を抑制することができる。また水蒸気を用
いたことで、効率良く十分に有機バインダを除去するこ
とができ、最終製品において優れた特性を確保できる。
さらに、一般に水蒸気に比べ高価なN2,CO2,Ar,He
等の非酸化性ガスの使用量少なくできるので製造コスト
が低減でき、排気ガス量も少なくなる。さらに本実施例
では積層セラミックコンデンサを取り上げたが、他の積
層電子部品、例えば積層アクチュエータ,積層バリスタ
に適用しても全く同様の効果を得ることができるのは言
うまでもないことである。
In the present embodiment, the monolithic ceramic capacitor having Pd as the electrode was taken up, but the ceramic molded body is an integrally sintered type ceramic electronic component of the electrode and the electrode having Ni or an alloy whose main metal is Ni. Even in such a case, if the degreasing method according to the present invention is used, due to the same effect as in the present embodiment, heat generation due to rapid oxidative decomposition of the organic binder does not occur, and oxidation of the electrode does not occur. Therefore, it is possible to suppress the occurrence of internal structural defects due to these factors. Also, by using water vapor, the organic binder can be efficiently and sufficiently removed, and excellent properties can be secured in the final product.
Further, N 2 , CO 2 , Ar, and He, which are generally more expensive than water vapor,
Since the amount of non-oxidizing gas such as the above can be reduced, the manufacturing cost can be reduced and the amount of exhaust gas can be reduced. Further, although the monolithic ceramic capacitor is taken up in the present embodiment, it is needless to say that the same effect can be obtained even when applied to other monolithic electronic parts such as a monolithic actuator and a monolithic varistor.

【0026】[0026]

【発明の効果】上記実施例から明らかなように、本発明
によるセラミック成形体の脱脂方法によれば、セラミッ
ク成形体からの有機バインダの除去方法を、水蒸気100
体積%の雰囲気中あるいは水蒸気を90〜99.9体積%含む
非酸化性ガス雰囲気中で、1000℃以下で加熱処理するこ
とで、電極の酸化に起因する内部構造欠陥の発生を抑制
しつつ、かつ最終焼結体の残留カーボンを低減すること
を、有害な排気ガスを多く発生させることなくかつ安価
にすることを可能にした。したがって、この製造方法に
よれば、特性の優れた電極とセラミックの一体焼結タイ
プのセラミック電子部品を低公害でかつ安価にできると
いう効果を有する。
As is apparent from the above examples, according to the method for degreasing a ceramic molded body according to the present invention, the method for removing the organic binder from the ceramic molded body is performed with 100% steam.
In a non-oxidizing gas atmosphere containing 90% to 99.9% by volume of steam or 90% to 99.9% by volume of water vapor, heat treatment at 1000 ° C or less suppresses the occurrence of internal structural defects due to electrode oxidation and It has become possible to reduce the residual carbon in the sintered body at a low cost without generating a lot of harmful exhaust gas. Therefore, according to this manufacturing method, there is an effect that an integrally sintered type ceramic electronic component of an electrode and a ceramic having excellent characteristics can be produced with low pollution and at low cost.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 井垣 恵美子 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 坂本 渉 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Emiko Igaki Emiko 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Wataru Sakamoto 1006 Kadoma, Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd.

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 有機バインダを含有するセラミック成形
体の脱脂方法において、水蒸気100体積%の雰囲気中、1
000℃以下で加熱処理することを特徴とするセラミック
成形体の脱脂方法。
1. A method for degreasing a ceramic molded body containing an organic binder, comprising:
A method for degreasing a ceramic molded body, which comprises performing a heat treatment at 000 ° C or lower.
【請求項2】 有機バインダを含有するセラミック成形
体の脱脂方法において、水蒸気を90〜99.9体積%含む非
酸化性ガス雰囲気中、1000℃以下で加熱処理することを
特徴とするセラミック成形体の脱脂方法。
2. A degreasing method for a ceramic molded body containing an organic binder, wherein the ceramic molded body is degreased by heat treatment at 1000 ° C. or lower in a non-oxidizing gas atmosphere containing 90 to 99.9% by volume of steam. Method.
【請求項3】 非酸化性ガスが窒素ガス,炭酸ガス,不
活性ガスもしくは前記ガスの混合ガスであることを特徴
とする請求項1または2記載のセラミック成形体の脱脂
方法。
3. The degreasing method for a ceramic molded body according to claim 1, wherein the non-oxidizing gas is nitrogen gas, carbon dioxide gas, an inert gas or a mixed gas of the gases.
【請求項4】 セラミック成形体がPdあるいはPdを主
要金属とする合金を電極とする電極とセラミックの一体
焼結タイプのセラミック電子部品であることを特徴とす
る請求項1,2または3記載のセラミック成形体の脱脂
方法。
4. The ceramic molded body is a ceramic electronic component of an integral sintering type of an electrode and a ceramic having Pd or an alloy containing Pd as a main metal as an electrode. Degreasing method for ceramic molded body.
【請求項5】 セラミック成形体がNiあるいはNiを主
要金属とする合金を電極とする電極とセラミックの一体
焼結タイプのセラミック電子部品であることを特徴とす
る請求項1,2または3記載のセラミック成形体の脱脂
方法。
5. The ceramic molded body is a ceramic electronic component of integral sintering type of an electrode and a ceramic having Ni or an alloy containing Ni as a main metal as an electrode. Degreasing method for ceramic molded body.
【請求項6】 セラミック成形体がPdあるいはPdを主
要金属とする合金を電極とする積層セラミックコンデン
サであることを特徴とする請求項1,2または3記載の
セラミック成形体の脱脂方法。
6. The degreasing method for a ceramic molded body according to claim 1, wherein the ceramic molded body is a monolithic ceramic capacitor having electrodes of Pd or an alloy containing Pd as a main metal.
【請求項7】 セラミック成形体がNiあるいはNiを主
要金属とする合金を電極とする積層セラミックコンデン
サであることを特徴とする請求項1,2または3記載の
セラミック成形体の脱脂方法。
7. The degreasing method for a ceramic molded body according to claim 1, wherein the ceramic molded body is a laminated ceramic capacitor having Ni or an alloy containing Ni as a main metal as electrodes.
JP5258540A 1993-10-15 1993-10-15 Defatting of formed ceramics Pending JPH07109178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5258540A JPH07109178A (en) 1993-10-15 1993-10-15 Defatting of formed ceramics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5258540A JPH07109178A (en) 1993-10-15 1993-10-15 Defatting of formed ceramics

Publications (1)

Publication Number Publication Date
JPH07109178A true JPH07109178A (en) 1995-04-25

Family

ID=17321652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5258540A Pending JPH07109178A (en) 1993-10-15 1993-10-15 Defatting of formed ceramics

Country Status (1)

Country Link
JP (1) JPH07109178A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007326765A (en) * 2006-03-29 2007-12-20 Ngk Insulators Ltd Method of firing pre-treating honeycomb formed body and system for firing pre-treating honeycomb formed body
WO2008053647A1 (en) * 2006-10-31 2008-05-08 Ngk Insulators, Ltd. Method of honeycomb molding pretreatment for burning and system for honeycomb molding pretreatment for burning

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007326765A (en) * 2006-03-29 2007-12-20 Ngk Insulators Ltd Method of firing pre-treating honeycomb formed body and system for firing pre-treating honeycomb formed body
WO2008053647A1 (en) * 2006-10-31 2008-05-08 Ngk Insulators, Ltd. Method of honeycomb molding pretreatment for burning and system for honeycomb molding pretreatment for burning

Similar Documents

Publication Publication Date Title
JPH08245270A (en) Method for calcining and sintering of ceramic electronic part
JP4863005B2 (en) Dielectric porcelain composition and electronic component
JP3678761B2 (en) Degreasing method of ceramic molded body
JP3142014B2 (en) Manufacturing method of multilayer ceramic capacitor
JPH07109178A (en) Defatting of formed ceramics
JP3874278B2 (en) DIELECTRIC CERAMIC COMPOSITION, ELECTRONIC COMPONENT AND METHOD FOR PRODUCING THEM
JP2008179493A (en) Dielectric porcelain composition and electronic component
JP2970781B2 (en) Manufacturing method of multilayer capacitor
JP3523399B2 (en) Manufacturing method of ceramic electronic components
JP2003209304A (en) Manufacturing method for laminated piezoelectric ceramic element
JP3239718B2 (en) Manufacturing method of multilayer ceramic electronic component
JP4403733B2 (en) Manufacturing method of multilayer ceramic electronic component
JP2852809B2 (en) Manufacturing method of multilayer ceramic capacitor
JP2000290077A (en) Production of multilayer ceramic electronic component
JP3548818B2 (en) Manufacturing method of multilayer ceramic capacitor and multilayer ceramic capacitor
JP2002373825A (en) Method for manufacturing laminated ceramic electronic component
JP2000049031A (en) Electrode composition of capacitor and electrode paste using it
JP2964688B2 (en) Manufacturing method of multilayer ceramic capacitor
JP5354834B2 (en) Dielectric porcelain composition, porcelain capacitor and method for producing the same
JPS62106612A (en) Manufacture of laminated electronic parts
JP4088594B2 (en) Conductor paste, electronic component and manufacturing method thereof
JPH07169644A (en) Manufacture of ceramic electronic component
JP3215450B2 (en) Manufacturing method of multilayer ceramic capacitor
JP2004134808A (en) Manufacturing method and binder removal method of ceramic electronic component
JPH0337725B2 (en)