JPH07106404A - Positioning unit - Google Patents

Abstract

PURPOSE:To enhance the throughput of an exposing unit by providing means for detecting the positional shift of a substrate held on a holding board and a driving means for shifting a moving tables based on the output therefrom thereby shortening the waiting time significantly. CONSTITUTION:The positioning unit comprises moving tables 3b, 3d reciprocative in a predetermined axial direction along a guide means 3f, and a holding board 3a supported thereby. The positioning unit further comprises means 3i for detecting the positional shift of a substrate W1 held on the holding board 3a, and driving means 3e, 3g for shifting the moving tables 3b, 3d based on the output therefrom. The detecting means 3i is supported by the moving tables 3b, 3d. This structure detects positional shift of the substrate W1 while shifting the moving tables 3b, 3d toward the guide means 3f and eliminates at least a part of the positional shift thus shortening the waiting time of a positioning unit significantly.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning device for pre-aligning a substrate such as a wafer to be exposed in an exposure device which uses charged particle storage ring radiation as exposure light.

[0002]

2. Description of the Related Art Generally, an exposure apparatus for manufacturing semiconductors includes a positioning stage for performing final positioning of a substrate such as a wafer (hereinafter referred to as "substrate") with respect to exposure light.
A positioning device (pre-alignment device) that performs preliminary positioning (pre-alignment) of the substrate in the process of supplying the substrate to the positioning stage is provided. In recent years,
The development of an exposure apparatus that uses charged particle storage ring radiated light as the exposure light is progressing. In such an exposure apparatus, the positioning stage and the pre-alignment apparatus that perform the final positioning of the substrate are inside a decompression chamber controlled to a decompression atmosphere. The substrate is loaded and unloaded through a sub-chamber provided on the back side of the positioning stage.

FIG. 5 shows a conventional example of an exposure apparatus which uses charged particle storage ring radiation as exposure light. It has a beam duct 101a on one side wall of a decompression chamber 101 controlled to a decompressed atmosphere of helium gas. In addition to providing an extraction window 101b for the charged particle storage ring radiated light L ₀ that is introduced via the above, an opening 101c for loading and unloading a substrate is provided on a side wall opposite to the side wall. The opening 101c is a slide door 101d. Have. In the decompression chamber 101, a positioning stage 102 for final positioning of the substrate with respect to the charged particle storage ring radiation L _0, a pre-alignment device 103 arranged beside it, a positioning stage 102 and a pre-alignment device 103. And a first transfer device 104 for transferring the substrate W ₀ between the sub chamber 10 and the opening 101c of the decompression chamber 101.
5 and the pre-alignment device 103, a second transfer device 106 for transferring the substrate is provided, and the sub-chamber 10
5 is provided outside the opening 101c of the decompression chamber 101, and one side wall of the sub-chamber 105 is provided with an opening 105a for loading and unloading a substrate carrier C ₀ containing a substrate. The opening 105a is a slide door. 105b.

As shown in FIG. 6, the pre-alignment apparatus 103 includes a holding plate 103a for sucking the substrate W ₀ , an X stage 103b for rotatably supporting the holding plate 103a around its central axis, and a holding plate 103a. The motor 103c for rotating the X-stage 103b and the holding plate 103a
One of the two axes parallel to the surface of the surface (hereinafter referred to as "X axis")
Y stage 103d that supports reciprocally in the direction of
And an X drive device 103e that moves the X stage 103b in the X axis direction, and a Y axis 103d along the fixed guide 103f that is fixed to the floor surface.
It is called "Y-axis". ) Y drive device 10 for moving in the direction of
3g and an orientation flat detection device 103i supported by a support body 103h fixed to the floor of the decompression chamber 101. The X drive device 103e and the Y drive device 103g are nuts that are integrated with the X stage 103b and the Y stage 103d, respectively. It is a known ball screw driving device that includes a ball screw that is screwed into a motor and a motor that rotates the ball screw. The orientation flat detection device 103i includes a CCD unit 103j and a light emitting device 103k that generates a parallel beam toward the CCD unit 103j. The CCD unit 103j rotates a holding plate 103a holding a substrate W ₀ by a motor 103c. by measuring the change in light amount of the collimated beam is blocked by the outer peripheral portion of the substrate W _0, it is configured to detect the orientation flat surface a ₀ eccentricity and the substrate W ₀ of the substrate W ₀ with respect to a predetermined reference position (See Japanese Unexamined Patent Publication No. 4-146647). In the pre-alignment of the substrate W ₀ , the X drive device 103 e and the Y drive device 103 g are each driven by a necessary amount based on the output of the CCD unit 103 j to move the substrate W ₀ to the reference position and the orientation flat surface A _0. Is moved to a predetermined rotation position, the motor 103
This is done by stopping the rotation of c.

[0005]

However, according to the above-mentioned conventional technique, the pre-alignment apparatus can be put on standby while the substrate is taken out from the substrate carrier carried into the sub-chamber and conveyed to the pre-alignment apparatus. This is necessary, and if the transport path for transporting the substrate is long, the standby time becomes long, which is a major obstacle to improving the throughput of the exposure apparatus.

The present invention has been made in view of the above problems of the prior art, and an object of the present invention is to provide a positioning apparatus capable of significantly reducing the waiting time and improving the throughput of the exposure apparatus. To do.

[0007]

In order to achieve the above-mentioned object, a positioning device of the present invention comprises a movable base which is reciprocally movable in a predetermined axial direction along a guide means, and a holding plate supported by the movable base. Characterized in that it comprises a detecting means for detecting a positional deviation of the substrate held on the holding board and a driving means for moving the moving base based on the output thereof, and the detecting means is supported by the moving base. And

Further, it is preferable that the drive means is configured to move the movable table by a predetermined distance toward the guide means and then move the movable table based on the output of the detection means.

[0009]

According to the above apparatus, since the detecting means is supported by the movable table, the displacement of the substrate can be detected while moving the movable table toward the guide means, and at least a part thereof can be eliminated. As a result, the waiting time of the positioning device can be greatly reduced.

[0010]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a plan view showing a vertical exposure apparatus using the first embodiment. The exposure apparatus has a decompression chamber 1 controlled to a decompressed atmosphere of helium gas. Has a window 1b for taking out the charged particle storage ring radiation L ₁ introduced through the beam duct 1a on _one side wall, and an opening 1c for carrying in / out a substrate on the side wall opposite to the side wall. A slide door 1d is provided in the opening 1c. In the decompression chamber 1, a positioning stage 2 for final positioning of the substrate with respect to the charged particle storage ring radiation L ₁ , a pre-alignment device 3 which is the positioning device of this embodiment, a positioning stage 2 and a pre-alignment device 3 A known transfer device 4 for transferring the substrate W ₁ between the substrate W and the substrate carrier C ₁ carried in the sub-chamber 5 adjacent to the slide door 1d of the decompression chamber 1 and taking out the substrate to the pre-alignment device 3. A delivery hand 6 for performing work is provided.

The positioning stage 2 is arranged in the vertical direction (hereinafter,
It is called "Z-axis direction". ) Has a suction plate 2a having a suction surface extending to the suction surface, and the suction plate 2a sucks the substrate on the suction surface,
By a known 6-axis drive table mechanism, two axial positions (hereinafter, respectively referred to as “X-axis” and “Y-axis”) and Z-axis, which are orthogonal to each other in a horizontal plane, and respective axial positions of the Z-axis and each of these three axes. Position the rotational position around. In addition, between the positioning stage 2 and the extraction window 1b,
The mask 2b is held by a holder (not shown), and the charged particle storage ring radiation L ₁ introduced into the decompression chamber 1 through the extraction window 1b exposes the substrate on the adsorption plate 2a through the mask 2b. The exposed substrate is transferred to the standby table 2c by the transfer device 4.

As shown in FIG. 2, the pre-alignment apparatus 3 is a holding plate 3a for sucking the substrate W ₁ and a second moving table X for supporting the holding plate 3a rotatably around its central axis. The stage 3b, a motor 3c that is a rotating unit that rotates the holding plate 3a, and a Y stage 3d that is a moving table that supports the X stage 3b so as to be reciprocally movable in the X axis direction.
And an X drive device 3e which is a second drive means for moving the X stage 3b in the X axis direction, and a Y stage 3d which is a fixed guide 3f which is a long guide means fixed to the floor surface of the decompression chamber 1. A Y driving device 3g, which is a driving unit that moves along the Y axis direction, and an orientation flat detection device 3i, which is a detecting unit supported by the Y stage 3d, and the X driving device 3e and the Y driving device 3g each have an X-direction. Stage 3b,
Ball screws B ₁ and B ₂ screwed to a nut (not shown) that is integral with the Y stage 3d, and a motor M that rotates the ball screws B ₁ and B _{2.
This is} a known ball screw driving device composed of ₁ and M ₂ .

The orientation flat detection device 3i is a known C
It has a CD unit 3j and a light emitting device 3k for generating a parallel beam toward the CD unit 3j. The Y driving device 3g transfers the substrate of the Y stage 3d, that is, the entire pre-alignment device 3 from the first pre-alignment transfer position P _{1 where the} substrate of the transfer hand 6 is received by the holding plate 3a to the transfer device 4. 2 Pre-alignment delivery position P
_The holding plate 3a for holding the substrate W ₁ is rotated by the motor 3c during this time, and the change in the light quantity of the parallel beam blocked by the outer peripheral portion of the substrate W ₁ is changed by the CCD as in the conventional example. Measured by the unit 3j, the eccentricity of the substrate W ₁ with respect to a predetermined reference position and the substrate W ₁
Detecting the orientation flat surface A ₁ of _1. While the Y stage 3d continues to move in the Y-axis direction, the X drive device 3e is driven based on the output of the CCD unit 3j, and the X stage 3b is moved in the X-axis direction by a predetermined amount Δx, and the eccentricity amount is increased. Is eliminated in the X-axis direction, and the rotation amount of the motor 3c is controlled by a controller (not shown) which is a control means, and the motor 3c stops when the orientation flat surface A ₁ of the substrate W ₁ rotates to a predetermined angle.

The Y driving device 3g includes a second Y stage 3d.
Of toward the pre-alignment transfer position P ₂ to control the amount of movement of the Y stage 3d on the basis of the output of the CCD unit 3j after having moved a predetermined distance, the Y stage 3d from the second pre-alignment transfer position P ₂ By stopping at a position displaced by a predetermined amount Δy in the Y-axis direction, the component of the eccentric amount in the Y-axis direction is eliminated. That is, the holding plate 3
a receives the substrate from the delivery hand 6 and then the transport device 4
The amount of movement of the Y stage 3d in the Y-axis direction until the substrate is delivered to the first stage is determined by the delivery hand 6 delivering the substrate to the holding plate 3a.
C from the pre-alignment transfer position P ₁ and the conveying device 4 of the hand 4a is retaining disc 3a in the distance y of the second pre-alignment transfer position P ₂ Y-axis direction to receive the substrate W ₁
Movement amount Δ of the Y stage 3d for correcting the amount of eccentricity of the substrate W _{1 in} the Y axis direction measured by the CD unit 3j.
Equal to y added.

The X stage 3 by the X driving device 3e
The movement of b can also be performed after the movement of the Y stage 3d by the Y driving device 3g is completed.

Next, the sub-chamber 5 to the decompression chamber 1
The substrate is carried into the inside, supplied to the positioning stage 2 via the pre-alignment device 3, and exposed by the charged particle storage ring radiation L ₁ in the positioning stage 2, and the exposed substrate is again passed through the pre-alignment device 3 to the sub-alignment stage. All steps of taking out to the chamber 5 will be described.

After the substrate carrier C ₁ containing the substrate 5 is carried into the subchamber 5, the opening 5a of the subchamber 5 is opened.
Close the slide door 5b provided in the sub chamber 5
The pressure inside is reduced to the same vacuum pressure as the pressure reducing chamber 1.
Then, the slide door 1d of the decompression chamber 1 is opened, the substrate (shown by the broken line) is taken out from the substrate carrier C ₁ by the delivery hand 6, moved to the _first pre-alignment delivery position P _1, and the pre-alignment waiting at this position is performed. It is adsorbed to the holding plate 3a of the device 3. Then, the Y driving device 3g is driven to move the Y stage 3d, that is, the entire pre-alignment device 3 toward the _second pre-alignment delivery position P ₂ along the fixed guide 3f, during which,
As described above, the eccentricity amount of the substrate W ₁ is measured by the orientation flat detection device 3i, the orientation flat surface A ₁ is detected, the X stage 3b is moved based on the output of the orientation flat detection device 3i, and the motor 3c is stopped. The Y stage 3d moves Y from the second pre-alignment transfer position P ₂ by Δy.
Pre-alignment of the substrate W ₁ is completed by stopping at a position shifted in the axial direction. Then, the transfer device 4 transfers the substrate from the first transfer device transfer position P ₃ for transferring the substrate to and from the suction surface 2 a of the positioning stage 2 to the pre-alignment device 3 for transfer. Of the substrate W which has been moved to the transfer position P ₄ of the transfer device of FIG.
₁ is sucked onto the hand 4a, and the substrate is rotated 90 degrees while moving to P ₃ to the first transfer device delivery position. First hand 4a of the conveyor 4 that returned to the conveyance device transfer position P ₃
The suction plate 2a which has received the substrate from the above performs the final positioning of the substrate by the above-mentioned 6-axis drive table mechanism. During this time,
The pre-alignment device 3 moves to the first pre-alignment delivery position P _1, receives the substrate of the substrate carrier newly loaded into the sub-chamber 5 and performs the above-mentioned pre-alignment, and then the second pre-alignment delivery position P ₂
Move to.

During this time, the substrate held on the positioning stage 2 is exposed by the charged particle storage ring radiation L ₁ , and the substrate which has been exposed is transported to the standby table 2c by the transport device 4.
Moved to.

Subsequently, the transport device 4 moves to the second transport device delivery position P ₄ , receives a new substrate from the pre-alignment device 3 which has reached the second pre-alignment delivery position P _2, and receives it at 90 degrees. The substrate is moved to the first transfer device delivery position P ₃ while being rotated, and a new substrate is adsorbed on the adsorption surface 2a of the positioning stage 2, and then the exposed substrate waiting on the standby table 2c is adsorbed on the second stage. Go to the conveying device delivery position P ₄ of, to transfer to the pre-alignment apparatus 3 to wait for the substrate to a second pre-alignment transfer position P _2. The exposed substrate is transported to the _first pre-alignment delivery position P ₁ by the pre-alignment device 3, transferred to the sub chamber 5 by the delivery hand 6, and then the slide door 5b of the sub chamber 5 is opened and taken out. During this time, a new substrate held on the positioning stage 2 is exposed.

In this embodiment, the pre-alignment device for pre-aligning the substrate also serves as a part of the transfer means for transferring the substrate to the positioning stage, so that the number of parts of the exposure apparatus as a whole is significantly reduced and the substrate is significantly reduced. The number of times of delivery of the substrate is reduced, and the time required for the substrate supplied to the decompression chamber to reach the positioning stage is significantly shortened. As a result, it is easy to improve the throughput of the exposure apparatus and reduce the manufacturing cost.

3 and 4 show a vertical type exposure apparatus using the second embodiment. The pre-alignment apparatus 23, which is the positioning apparatus of this embodiment, is the same as the Y stage 3d of the first embodiment. Similar Y stage 23d to X stage 23b
Is fixed and the X stage 23b is moved by Δx in order to eliminate the component of the eccentricity amount of the substrate W ₁ detected by the orientation flat detection device 3i in the X-axis direction, instead of moving to the second transfer device delivery position P ₄ . The transport device 24 is configured to be moved by Δx. Decompression chamber 1,
The positioning stage 2, the holding plate 3a, the motor 3c, the fixed guide 3f, the Y drive device 3g, the orientation flat detection device 3j, the sub-chamber 5, the delivery hand 6 and the like are the same as those in the first embodiment, and therefore the same reference numerals are used and the description is omitted. Omit it.

The present embodiment does not require an X driving device, so that the entire structure of the pre-alignment device 23 is extremely simplified and its weight can be easily reduced, and it is extremely superior in terms of labor saving and noise prevention. .

[0024]

Since the present invention is configured as described above, it has the following effects.

The waiting time of the positioning device (pre-alignment device) can be greatly shortened, and the throughput of the exposure device can be improved.

[Brief description of drawings]

FIG. 1 is a schematic plan view showing a main part of an exposure apparatus using a first embodiment.

2A and 2B show details of the first embodiment, in which FIG. 2A is a schematic plan view thereof, and FIG. 2B is a schematic elevational view thereof.

FIG. 3 is a schematic plan view showing a main part of an exposure apparatus using a second embodiment.

4A and 4B show details of the second embodiment, in which FIG. 4A is a schematic plan view thereof, and FIG. 4B is a schematic elevational view thereof.

FIG. 5 is a schematic plan view showing a main part of an exposure apparatus using a conventional example.

6A and 6B show details of the conventional example of FIG. 5, in which FIG. 6A is a schematic plan view thereof, and FIG. 6B is a schematic elevational view thereof.

[Explanation of symbols]

 1 Decompression chamber 2 Positioning stage 2a Suction surface 3,23 Pre-alignment device 3a Holding plate 3b, 23b X stage 3d, 23d Y stage 3e X drive device 3f Fixed guide 3g Y drive device 3i Orifla detector 4,24 Transfer device 5 sub Chamber 6 Delivery hand

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical display location G03F 9/00 H 9122-2H G21K 5/00 R H01L 21/027 7352-4M H01L 21/30 531 J

Claims (3)

[Claims] 1. A moving table which is reciprocally movable in a predetermined axial direction along a guide means, a holding plate supported by the moving table, and a detecting means for detecting a positional deviation of a substrate held by the holding plate. A positioning device comprising drive means for moving the movable table based on its output, and the detection means being supported by the movable table. 2. The drive means is configured to move the movable table by a predetermined distance toward the guide means, and then move the movable table based on the output of the detection means. The positioning device according to item 1. 3. A holding plate is rotatably supported by a second movable table which is reciprocally movable along a movable table in a second axial direction, and the second movable table is rotatably supported by the second movable table based on an output of a detecting means. A second drive means for moving the moving base, a rotation means for rotating the holding plate, and a control means for controlling the rotation means based on the output of the detection means are provided. The positioning device according to 1 or 2.