JPH0697651A - Production of wiring board - Google Patents

Production of wiring board

Info

Publication number
JPH0697651A
JPH0697651A JP24197392A JP24197392A JPH0697651A JP H0697651 A JPH0697651 A JP H0697651A JP 24197392 A JP24197392 A JP 24197392A JP 24197392 A JP24197392 A JP 24197392A JP H0697651 A JPH0697651 A JP H0697651A
Authority
JP
Japan
Prior art keywords
hole
copper
preliminary
resin
laminated board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24197392A
Other languages
Japanese (ja)
Inventor
Akinari Kida
明成 木田
Akishi Nakaso
昭士 中祖
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP24197392A priority Critical patent/JPH0697651A/en
Publication of JPH0697651A publication Critical patent/JPH0697651A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve the formability of fine wiring and its dimensional accuracy by making a through-hole in an insulation substrate, forming resin sheets and copper foils successively on both sides thereof after the preliminary through-hole is filled with a resin, and making a through-hole of smaller diameter than that of the preliminary through-hole in the preliminary through-hole part of the copper laminated board which is formed through heating and pressing. CONSTITUTION:A preliminary through-hole 2 of 1.2mm in diameter is made in a glass fabric/epoxy resin laminated board 1 by a mechanical drill, and after the hole is filled with a hole-filling resin sheet 3, the board 1 is provided with an adhesive resin 4 and copper foil 5 on both sides thereof and they are heated/pressed to form a copper laminated board. Then, after a through-hole 6 of 1.0mm in diameter is made in the preliminary through-hole part of the copper laminated board, a plating catalyst is adhered on the surface of the copper laminated board and the inner wall of the hole 6 to form a plating copper 7. Since the part for making a through-hole is provided with no glass fabric, a through-hole having a smooth inner wall can be formed. Therefore the wiring can be easily refined because of small thickness of panel copper plating.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、微細配線形成性及び寸
法精度に優れた配線板の製造法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a wiring board having excellent fine wiring formability and dimensional accuracy.

【0002】[0002]

【従来の技術】QFPなどの表面実装用ICパッケージ
の多端子化、狭ピッチ化、リード面積の縮小化に伴い、
これを実装する配線板には配線の微細化やICリードと
の位置合わせ精度の向上が強く求められている。従来の
配線板の代表的製造法は、ガラス布/エポキシ樹脂より
なる銅張積層板あるいはガラス不織布/エポキシ樹脂よ
りなる銅張積層板にメカニカルドリルで貫通孔を設け、
パネル銅めっきを行った後に回路となる部分にエッチン
グレジスト像を形成し、不要部分の銅をエッチングする
方法であった。銅のエッチングは厚さ方向と同時に横方
向にも進行するため、銅が厚いほど断線しやすくなって
いた。このため、配線を微細化するには銅張積層板の銅
箔やパネルめっき銅の厚さを薄くする必要があった。
2. Description of the Related Art As surface mounting IC packages such as QFPs have a large number of terminals, a narrower pitch, and a smaller lead area,
There is a strong demand for the wiring board on which the wiring is mounted, to have finer wiring and to improve the alignment accuracy with the IC leads. A typical method for manufacturing a conventional wiring board is to provide a through hole with a mechanical drill in a copper-clad laminate made of glass cloth / epoxy resin or a copper-clad laminate made of glass nonwoven fabric / epoxy resin,
This is a method of forming an etching resist image on a portion to be a circuit after performing panel copper plating, and etching copper in an unnecessary portion. Since the etching of copper progresses not only in the thickness direction but also in the lateral direction, the thicker the copper, the easier the disconnection. Therefore, in order to miniaturize the wiring, it was necessary to reduce the thickness of the copper foil of the copper clad laminate or the panel-plated copper.

【0003】[0003]

【発明が解決しようとする課題】しかし、ガラス布を用
いた銅箔積層板の貫通孔内壁には、ガラス布がドリル刃
で堀り起こされて欠落するため、深さ50μm程度の凹
部が生じていた。この凹部をめっき銅で被覆するには厚
さ30μm以上のめっきが必要であった。このため、銅
張積層板に現在最も薄い5μm銅箔を使用した場合で
も、形成できる配線幅/配線間隔は80/80μmが限
界であった。一方、ガラス不織布はガラス布に比べガラ
ス繊維の長さが短いため、ドリル刃による堀り起こしは
浅く、ガラス不織布による銅張積層板の貫通孔内壁の凹
部深さは20μm程度である。このため、パネルめっき
厚さは20μm程度で良く、前述したガラス布による銅
張積層板を使用する場合より配線を微細化しやすかっ
た。しかし、ガラス不織布は連続体でなく、エポキシ樹
脂の動きを拘束する力がガラス布に比べ小さい。このた
め、ガラス不織布による銅張積層板を用いて作製した配
線板は、ICを実装する際のリフローソルダリング時に
寸法変化が大きく、配線板のパッドとICリードとの位
置ずれが生じるという問題があった。本発明の目的は微
細配線形成性に優れ、且つ寸法精度の高い配線板を製造
することにある。
However, the inner wall of the through-hole of the copper foil laminated plate using the glass cloth has a recess of about 50 μm in depth because the glass cloth is cut off by being excavated by a drill blade. Was there. In order to cover this concave portion with plated copper, plating with a thickness of 30 μm or more was required. Therefore, even when the thinnest 5 μm copper foil is used for the copper clad laminate, the limit of the wiring width / wiring interval that can be formed is 80/80 μm. On the other hand, since the glass non-woven fabric has shorter glass fibers than the glass non-woven fabric, it is less likely to be dug up by a drill blade, and the depth of the recess of the through hole inner wall of the copper-clad laminate made of the glass non-woven fabric is about 20 μm. Therefore, the panel plating thickness may be about 20 μm, and it is easier to miniaturize the wiring than the case where the copper clad laminate made of glass cloth described above is used. However, the glass non-woven fabric is not a continuous body, and the force for restraining the movement of the epoxy resin is smaller than that of the glass cloth. Therefore, a wiring board manufactured by using a copper clad laminate made of a glass non-woven fabric has a large dimensional change during reflow soldering when mounting an IC, which causes a problem that a pad of the wiring board and an IC lead are misaligned. there were. An object of the present invention is to manufacture a wiring board which has excellent fine wiring formability and high dimensional accuracy.

【0004】[0004]

【課題を解決するための手段】本発明は絶縁基板に貫通
孔(以下、予備貫通孔と記す)を設け、その予備貫通孔
を樹脂(以下、穴うめ樹脂と記す)で充填した後、絶縁
基板の両側に樹脂シート(以下、接着樹脂シートと記
す)、銅箔を順次配置し、それらを加熱加圧して得られ
た銅張積層板の予備貫通孔部に予備貫通孔より小さい径
の貫通孔を設けることを特徴とする配線板の製造法を提
供するものである。
According to the present invention, a through hole (hereinafter referred to as a preliminary through hole) is provided in an insulating substrate, the preliminary through hole is filled with a resin (hereinafter referred to as a hole filling resin), and then the insulating substrate is insulated. A resin sheet (hereinafter referred to as an adhesive resin sheet) and a copper foil are sequentially arranged on both sides of the substrate, and they are heated and pressed to pierce the preliminary through-hole portion of the copper-clad laminate with a diameter smaller than the preliminary through-hole. The present invention provides a method for manufacturing a wiring board, which is characterized by providing holes.

【0005】本発明に適用できる絶縁基板は、ガラス布
/エポキシ樹脂積層板、ガラス布/ポリイミド樹脂積層
板、ガラス布/ビスマレイミドトリアジン樹脂積層板、
ガラス布/ふっ素樹脂積層板、ガラス布/ポリエチレン
樹脂積層板、ガラス布/フェノール樹脂積層板、ガラス
布/ポリエステル樹脂積層板等である。これら積層板の
ガラス布の替わりにアラミド布を用いた積層板でも良
い。また、Al23,AlN,SiC,SiO2等のセ
ラミックス基板でも良い。
The insulating substrate applicable to the present invention is a glass cloth / epoxy resin laminated board, a glass cloth / polyimide resin laminated board, a glass cloth / bismaleimide triazine resin laminated board,
Examples thereof include glass cloth / fluorine resin laminated plate, glass cloth / polyethylene resin laminated plate, glass cloth / phenolic resin laminated plate, glass cloth / polyester resin laminated plate and the like. A laminated board using an aramid cloth may be used instead of the glass cloth of these laminated boards. Further, a ceramic substrate such as Al 2 O 3 , AlN, SiC, SiO 2 may be used.

【0006】本発明において、前記積層体よりなる絶縁
基板に予備貫通孔を設ける方法には、メカニカルドリ
ル、パンチング、レーザ等がある。
In the present invention, mechanical drilling, punching, laser and the like are available as a method of providing a preliminary through hole in the insulating substrate made of the above laminated body.

【0007】また、本発明において、前記セラミックス
よりなる絶縁基板に予備貫通孔を設ける方法には、焼成
前のグリーンシートにパンチング、メカニカルドリル、
レーザ等で予備貫通孔を設けた後、グリーンシートを焼
成する方法、あるいは焼成後にレーザを用いる方法があ
る。
In the present invention, the method of forming the preliminary through holes in the insulating substrate made of ceramics includes punching, mechanical drilling, and the like on the green sheet before firing.
There is a method of firing the green sheet after forming the preliminary through holes with a laser or the like, or a method of using the laser after firing.

【0008】本発明に適用できる穴うめ樹脂はエポキシ
樹脂、フェノール樹脂、ポリイミド樹脂、ビスマレイミ
ドトリアジン樹脂、ふっ素樹脂、ポリエチレン樹脂、ポ
リエステル樹脂等である。またこれら樹脂に無機フィラ
ーやゴムを添加しても良い。この無機フィラーには、ガ
ラス短繊維、酸化ケイ素、酸化ジルコニウム、ジルコニ
ウムシリケイト、アルミナ、マイカ、炭酸カルシウム等
がある。また上記ゴムにはアクリロニトリル/ブタジエ
ンゴム、アクリロニトリル/ブタジエン/スチレンゴ
ム、ブタジエンゴム、イソプレンゴム、クロロプレンゴ
ム、ポリエチレンゴム等がある。
The hole filling resin applicable to the present invention is epoxy resin, phenol resin, polyimide resin, bismaleimide triazine resin, fluorine resin, polyethylene resin, polyester resin and the like. Further, an inorganic filler or rubber may be added to these resins. The inorganic filler includes short glass fiber, silicon oxide, zirconium oxide, zirconium silicate, alumina, mica, calcium carbonate and the like. Examples of the rubber include acrylonitrile / butadiene rubber, acrylonitrile / butadiene / styrene rubber, butadiene rubber, isoprene rubber, chloroprene rubber and polyethylene rubber.

【0009】本発明において、穴うめ樹脂を予備貫通孔
に充填する方法には、流動可能状態にした穴うめ樹脂を
印刷する方法、あるいは流動可能状態にしたシート状の
穴うめ樹脂(以下、穴うめ樹脂シートと記す)を平行平
板プレスまたはホットロールラミネータで孔内に充填す
る方法がある。本発明が適用できる接着樹脂シートに
は、エポキシ樹脂シート、ポリイミド樹脂シート、ポリ
エーテルアミド樹脂シート、ポリエーテルイミド樹脂シ
ート、アクリル樹脂シート、エポキシ−アクリロニトリ
ル/ブタジエンゴムシート等がある。
In the present invention, the method of filling the prefilling holes with the hole filling resin includes a method of printing the flowable hole filling resin, or a flowable sheet-like hole filling resin (hereinafter referred to as hole filling resin). There is a method of filling the hole with a parallel plate press or a hot roll laminator. Examples of the adhesive resin sheet to which the present invention can be applied include an epoxy resin sheet, a polyimide resin sheet, a polyetheramide resin sheet, a polyetherimide resin sheet, an acrylic resin sheet, and an epoxy-acrylonitrile / butadiene rubber sheet.

【0010】本発明が適用できる銅箔は、銅単独からな
る箔、あるいはアルミニウム、ニッケル、リン、鉄等と
銅からなる多層構造銅箔である。本発明における銅張積
層板の製造法は、予備貫通孔を充填した絶縁基板の両側
に接着樹脂シートを配置し、更にその両外側に銅箔を配
置して、平行平板プレスあるいはオートクレーブ式プレ
スあるいはホットロールラミネータ等で全体を加熱加圧
する方法である。
The copper foil to which the present invention can be applied is a foil made of copper alone or a multi-layered copper foil made of copper such as aluminum, nickel, phosphorus and iron. The method for producing a copper-clad laminate according to the present invention includes arranging adhesive resin sheets on both sides of an insulating substrate filled with preliminary through holes, further disposing copper foils on both outer sides thereof, and a parallel plate press or an autoclave press or This is a method of heating and pressing the whole with a hot roll laminator or the like.

【0011】本発明における貫通孔形成法は、前記銅張
積層板の予備貫通孔内部に予備貫通孔よりも小さい径の
貫通孔をメカニカルドリル、パンチング、レーザ等によ
り形成する方法である。貫通孔の径は、予備貫通孔の径
より0.05〜1.0mm小さいことが望ましい。
The through-hole forming method in the present invention is a method of forming a through-hole having a diameter smaller than that of the preliminary through-hole inside the preliminary through-hole of the copper clad laminate by mechanical drilling, punching, laser or the like. The diameter of the through hole is preferably 0.05 to 1.0 mm smaller than the diameter of the preliminary through hole.

【0012】本発明における配線形成法には、前記銅箔
積層板に貫通孔を形成後、パネル銅めっきを行った後、
回路となる部分にエッチングレジスト像を形成し、不要
部分の銅をエッチングする方法、あるいは貫通孔形成後
にパネル銅めっきを行い、回路とならない部分にめっき
レジスト像を形成し、回路となる部分にパターン銅めっ
き及びパターンはんだめっきを施し、めっきレジストを
剥離した後に不要部分の銅をエッチングする方法等があ
る。前記はんだは必要となれば、不要部分の銅をエッチ
ングした後に除去しても良い。
In the wiring forming method of the present invention, after the through holes are formed in the copper foil laminate, panel copper plating is performed,
A method of forming an etching resist image on the part that will be the circuit and etching the copper of unnecessary parts, or plating the panel copper after forming the through holes, forming a plating resist image on the part that will not be the circuit, and patterning on the part that will be the circuit There is a method in which copper plating and pattern solder plating are performed, the plating resist is removed, and then copper in an unnecessary portion is etched. If necessary, the solder may be removed after etching unnecessary portions of copper.

【0013】[0013]

【作用】本発明による銅張積層板の貫通孔予定部にはガ
ラス布がないため、メカニカルドリルで貫通孔を形成し
ても貫通孔内壁は平滑であり、パネルめっき厚さを従来
技術より薄くできるため、従来技術より配線の微細化が
可能となる。また、本発明による銅張積層板内には、寸
法変化が小さいガラス布あるいはアラミド布あるいはセ
ラミックス基板があるため、リフローソルダリング時に
配線板内にある樹脂の動きを拘束できる。このため、配
線板のパッドとICリードとの位置ずれが生じることは
ない。
Since the copper clad laminate according to the present invention does not have a glass cloth at the planned through hole, the inner wall of the through hole is smooth even if the through hole is formed by a mechanical drill, and the panel plating thickness is thinner than that of the conventional technique. Therefore, the wiring can be made finer than in the conventional technique. In addition, since the copper clad laminate according to the present invention has a glass cloth, an aramid cloth, or a ceramics substrate with a small dimensional change, the movement of the resin in the wiring board can be restricted during the reflow soldering. Therefore, there is no displacement between the pad of the wiring board and the IC lead.

【0014】[0014]

【実施例】以下、本発明による両面配線板の実施例を図
面に基づき説明する。まず、厚さ1.0mmのガラス布/
エポキシ樹脂積層板1に通常のメカニカルドリルで径
1.2mmの予備貫通孔2を形成した。次に、積層板用ブ
ロム化エポキシ樹脂50重量部、ジシアンジアミド2.
5重量部、AGP−01/BZ(ガラス短繊維、旭シェ
ーベル社製商品名)35重量部、N−1032(アクリ
ロニトリル/ブタジエンゴム、日本ゼオン社製商品名)
8重量部を含むワニスをポリプロピレンフィルム上に塗
布乾燥して得た穴うめ樹脂シート3を図1に示す様にガ
ラス布/エポキシ樹脂積層板1の片側に配置した。そし
て、通常の平行平板プレスを用いて圧力40kgf/cm2
温度130℃で20分間加熱加圧して、穴うめ樹脂シー
ト3を予備貫通孔2に充填した。その後、ガラス布/エ
ポキシ樹脂積層板1の両側に、接着樹脂シート4(AS
−210I,ポリイミド接着シート、日立化成工業製商
品名)及び厚さ18μmの銅箔5を配置して、平行平板
プレスにより圧力40kgf/cm2 、温度200℃で60分
間加熱加圧して、図2に示す銅張積層板を作製した。そ
の後、上記銅張積層板の予備貫通孔部に径1.0mmの貫
通孔6を通常のメカニカルドリルで形成した後、塩化パ
ラジウムを含む処理液に浸漬して銅張積層板表面及び貫
通孔6の内壁にめっき触媒を付着させた後、Cust2
01(無電解銅めっき液、日立化成工業製商品名)に1
5分間浸漬し、引き続きピロリン酸銅電気めっきで厚さ
20μmのめっき銅7を形成し、図3に示す構造体を得
た。その後、めっき銅7の表面にPHT−887AF−
50(ドライフィルムフォトレジスト,日立化成工業製
商品名)をラミネートし、露光・現像して回路となる部
分にエッチングレジスト像を形成した。そして、不要部
分の銅箔5及びめっき銅7を塩化第二銅溶液によりエッ
チングした後、エッチングレジスト像を剥離することに
より、図4に示す両面配線板を得た。
Embodiments of the double-sided wiring board according to the present invention will be described below with reference to the drawings. First, a glass cloth with a thickness of 1.0 mm
A preliminary through hole 2 having a diameter of 1.2 mm was formed in the epoxy resin laminated plate 1 by a normal mechanical drill. Next, 50 parts by weight of a brominated epoxy resin for laminated plate, dicyandiamide 2.
5 parts by weight, AGP-01 / BZ (short glass fiber, product name manufactured by Asahi Shobel) 35 parts by weight, N-1032 (acrylonitrile / butadiene rubber, product name manufactured by Nippon Zeon Co., Ltd.)
A hole filling resin sheet 3 obtained by applying a varnish containing 8 parts by weight onto a polypropylene film and drying it was placed on one side of a glass cloth / epoxy resin laminate 1 as shown in FIG. Then, using a normal parallel plate press, a pressure of 40 kgf / cm 2 ,
The hole filling resin sheet 3 was filled in the preliminary through holes 2 by heating and pressing at a temperature of 130 ° C. for 20 minutes. Then, on both sides of the glass cloth / epoxy resin laminate 1, the adhesive resin sheet 4 (AS
-210I, a polyimide adhesive sheet, a product name of Hitachi Chemical Co., Ltd.) and a copper foil 5 having a thickness of 18 μm are arranged, and heated and pressurized by a parallel plate press at a pressure of 40 kgf / cm 2 and a temperature of 200 ° C. for 60 minutes. The copper clad laminate shown in was produced. After that, a through hole 6 having a diameter of 1.0 mm is formed in the preliminary through hole portion of the copper clad laminate with a normal mechanical drill, and then immersed in a treatment solution containing palladium chloride to form the surface of the copper clad laminate and the through hole 6. After attaching the plating catalyst to the inner wall of the
1 for 01 (electroless copper plating solution, trade name of Hitachi Chemical Co., Ltd.)
It was immersed for 5 minutes, and subsequently, copper pyrophosphate electroplating was performed to form plated copper 7 having a thickness of 20 μm to obtain a structure shown in FIG. After that, PHT-887AF- is formed on the surface of the plated copper 7.
50 (dry film photoresist, a product name of Hitachi Chemical Co., Ltd.) was laminated, exposed and developed to form an etching resist image on a portion to be a circuit. Then, the unnecessary portions of the copper foil 5 and the plated copper 7 were etched with a cupric chloride solution, and the etching resist image was peeled off to obtain the double-sided wiring board shown in FIG.

【0015】[0015]

【発明の効果】本発明により下記の効果が期待できる。 (1)貫通孔予定部にガラス布がないため、平滑な内壁
を有する貫通孔を形成できる。このため、パネル銅めっ
き厚さが薄くて良く、配線の微細化が容易となる。 (2)配線板内に樹脂の動きを拘束する構造体があるた
め、高い寸法精度が確保できる。
According to the present invention, the following effects can be expected. (1) Since there is no glass cloth in the through hole planned portion, the through hole having a smooth inner wall can be formed. Therefore, the thickness of the panel copper plating may be thin, which facilitates miniaturization of wiring. (2) Since there is a structure that restrains the movement of the resin inside the wiring board, high dimensional accuracy can be secured.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)は本発明の一実施例に用いた予備貫通孔
形成済みガラス布/エポキシ樹脂積層板及び穴うめ樹脂
シートの断面図、(b)は本発明の一実施例の工程の一
部であって、(a)に示した積層板の予備貫通孔を穴う
め樹脂シートで充填し、接着樹脂シートや銅箔を配置し
て両面銅張積層板を形成する工程を示す断面図、(c)
は本発明の一実施例の工程の一部であって、(b)に示
した両面銅張積層板に貫通孔を設け、めっき銅を形成す
る工程を示す断面図、(d)は本発明の一実施例の工程
の一部であって、(c)に示しためっき銅の不要部分を
除去し、両面配線板を形成する工程を示す断面図であ
る。
FIG. 1A is a sectional view of a glass cloth / epoxy resin laminate having pre-through holes formed therein and a hole filling resin sheet used in one embodiment of the present invention, and FIG. 1B is a process of one embodiment of the present invention. A cross section showing a step of forming a double-sided copper-clad laminate by filling the preliminary through holes of the laminate shown in (a) with a hole filling resin sheet and arranging an adhesive resin sheet or copper foil Figure, (c)
Is a cross-sectional view showing a step of forming plated copper by forming a through hole in the double-sided copper clad laminate shown in (b), which is a part of the step of one embodiment of the present invention, and (d) shows the present invention. FIG. 6 is a cross-sectional view showing a step of forming a double-sided wiring board by removing an unnecessary portion of the plated copper shown in (c), which is a part of the step of the example.

【符号の説明】[Explanation of symbols]

1.ガラス布/エポキシ樹脂積層板 2.予備貫通孔 3.穴うめ樹脂シート 4.接着樹脂シー
ト 5.銅箔 6.貫通孔 7.めっき銅
1. Glass cloth / epoxy resin laminate 2. Pre-through hole 3. Hole filling resin sheet 4. Adhesive resin sheet 5. Copper foil 6. Through hole 7. Plated copper

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】絶縁基板に貫通孔を設け、その貫通孔を樹
脂で充填した後、絶縁基板の両側に樹脂シート、銅箔を
順次配置し、それらを加熱加圧して得られた銅張積層板
の前記貫通孔部に前記貫通孔より小さい径の貫通孔を設
けることを特徴とする配線板の製造法。
1. A copper clad laminate obtained by providing a through hole in an insulating substrate, filling the through hole with resin, and then sequentially arranging a resin sheet and a copper foil on both sides of the insulating substrate and heating and pressing them. A method of manufacturing a wiring board, wherein a through hole having a diameter smaller than that of the through hole is provided in the through hole portion of the board.
JP24197392A 1992-09-10 1992-09-10 Production of wiring board Pending JPH0697651A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24197392A JPH0697651A (en) 1992-09-10 1992-09-10 Production of wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24197392A JPH0697651A (en) 1992-09-10 1992-09-10 Production of wiring board

Publications (1)

Publication Number Publication Date
JPH0697651A true JPH0697651A (en) 1994-04-08

Family

ID=17082347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24197392A Pending JPH0697651A (en) 1992-09-10 1992-09-10 Production of wiring board

Country Status (1)

Country Link
JP (1) JPH0697651A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006287085A (en) * 2005-04-04 2006-10-19 Sony Corp Method for manufacturing wiring substrate
CN102576836A (en) * 2009-10-19 2012-07-11 日东电工株式会社 Thermally conductive member, and battery device using same
JP2013054369A (en) * 2012-10-23 2013-03-21 Ngk Spark Plug Co Ltd Wiring board with optical waveguide
CN113423195A (en) * 2021-05-28 2021-09-21 安捷利(番禺)电子实业有限公司 Preparation method of PCB and prepared PCB
CN114501800A (en) * 2020-10-27 2022-05-13 鹏鼎控股(深圳)股份有限公司 Circuit board manufacturing method and circuit board

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006287085A (en) * 2005-04-04 2006-10-19 Sony Corp Method for manufacturing wiring substrate
CN102576836A (en) * 2009-10-19 2012-07-11 日东电工株式会社 Thermally conductive member, and battery device using same
EP2492991A1 (en) * 2009-10-19 2012-08-29 Nitto Denko Corporation Thermally conductive member, and battery device using same
EP2492991A4 (en) * 2009-10-19 2014-04-16 Nitto Denko Corp Thermally conductive member, and battery device using same
US8865334B2 (en) 2009-10-19 2014-10-21 Nitto Denko Corporation Thermally conductive member, and battery device using the same
JP2013054369A (en) * 2012-10-23 2013-03-21 Ngk Spark Plug Co Ltd Wiring board with optical waveguide
CN114501800A (en) * 2020-10-27 2022-05-13 鹏鼎控股(深圳)股份有限公司 Circuit board manufacturing method and circuit board
CN113423195A (en) * 2021-05-28 2021-09-21 安捷利(番禺)电子实业有限公司 Preparation method of PCB and prepared PCB

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